EP1065385B1 - Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage - Google Patents
Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage Download PDFInfo
- Publication number
- EP1065385B1 EP1065385B1 EP00112484A EP00112484A EP1065385B1 EP 1065385 B1 EP1065385 B1 EP 1065385B1 EP 00112484 A EP00112484 A EP 00112484A EP 00112484 A EP00112484 A EP 00112484A EP 1065385 B1 EP1065385 B1 EP 1065385B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum
- pump
- valve
- chamber
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86083—Vacuum pump
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86131—Plural
Definitions
- the invention relates to a method for operating a multi-chamber vacuum system according to the preamble of the first claim.
- the invention has set itself the goal of the effort for such a multi-chamber vacuum system reduce to manufacturing costs, operating costs and space requirements to reduce.
- Turbomolecular pumps have been on the market for some time, which are characterized by additional Pump stages, for example molecular pump stages of the Holweck type, eject against higher backing pressure on the backing side. If such a pump is disconnected from the backing pump for some time, it produces yet so much pressure ratio and pumping speed that that on the high vacuum side ongoing process is not disturbed. This opens up the possibility that atmospheric vacuum pump, which is the backing vacuum for the Turbomolecular pump generated at intervals to evacuate another vacuum chamber to use.
- this pump according to the invention alternates with valves with the turbomolecular pump and the second vacuum chamber is connected and the two to be pumped out Spaces by opening and closing the valves constantly are separated from each other, a second vacuum pump can be saved. This reduces the acquisition costs and the operating costs of a vacuum system and reduces the space required.
- the invention can be used particularly effectively where a second vacuum chamber as a lock chamber for loading and unloading the first vacuum chamber is trained.
- 1 denotes a first vacuum chamber, which with a High vacuum pump 3 is connected. Their pre-vacuum is determined by an over Valve 5 against atmosphere ejecting vacuum pump 4 generated.
- a second vacuum chamber 2 is via a valve 6 with the atmosphere-emitting pump 4 connected.
- the second vacuum chamber 2 can, for example, in the event that it is used as a lock chamber, via a valve 7 with the first vacuum chamber get connected.
- the atmosphere-discharging pump 4 can be used both to generate the forevacuum for the high vacuum pump 3 and for generating a vacuum in the second vacuum chamber 2 can be used.
- the evacuation procedure can proceed in the following steps:
- the first vacuum chamber 1 is opened High vacuum pump 3 and the vacuum pump 4 evacuated
- the second vacuum chamber 2 through a second valve 6 from the vacuum pump 4 and from the high vacuum pump 3 is separated. Then the first valve 5 is closed and then the second valve 6 is opened and thus the second vacuum chamber 2 evacuated by the vacuum pump 4. Then valve 6 is closed again and then the valve 5 for further evacuation of the vacuum chamber 1 the high vacuum pump 3 opened.
- the pumping cycle can of course also be started be that first with the first valve 5 closed and the second valve open 6 the second vacuum chamber 2 is evacuated, or that initially both vacuum chambers be pumped out at the same time.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Vacuum Packaging (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
Claims (4)
- Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage, bestehend aus einer ersten Vakuumkammer (1), welche mit einer Hochvakuumpumpe (3) verbunden ist, deren Vorvakuum durch eine über ein erstes Ventil (5) angeschlossene, gegen Atmosphäre ausstoßende Vakuumpumpe (4) erzeugt wird, und mindestens einer zweiten Vakuumkammer (2), dadurch gekennzeichnet, daß die gegen Atmosphäre ausstoßende Vakuumpumpe (4) sowohl zur Erzeugung des Vorvakuums für die Hochvakuumpumpe (3) als auch zur Erzeugung des Vakuums in der zweiten Vakuumkammer (2) dient, derart, daß während des vollen Betriebs der Hochvakuumpumpe (3) das erste Ventil (5) geschlossen und das zweite Ventil (6) zum Evakuieren der zweiten Vakuumkammer (2) geöffnet wird.
- Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß nach dem Evakuieren der zweiten Vakuumkammer (2) das zweite Ventil (6) geschlossen und das erste Ventil (5) zur weiteren Evakuierung der Vakuumkammer (1) über die Hochvakuumpumpe (3) wieder geöffnet wird.
- Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Hochvakuumpumpe (3) als Turbomolekularpumpe ausgebildet ist.
- Verfahren nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß die zweite Vakuumkammer (2) als Schleusenkammer zum Be- und Entladen der ersten Vakuumkammer (1) dient.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19929519A DE19929519A1 (de) | 1999-06-28 | 1999-06-28 | Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage |
DE19929519 | 1999-06-28 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1065385A2 EP1065385A2 (de) | 2001-01-03 |
EP1065385A3 EP1065385A3 (de) | 2001-04-11 |
EP1065385B1 true EP1065385B1 (de) | 2003-07-30 |
Family
ID=7912784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00112484A Expired - Lifetime EP1065385B1 (de) | 1999-06-28 | 2000-06-13 | Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage |
Country Status (5)
Country | Link |
---|---|
US (1) | US6446651B1 (de) |
EP (1) | EP1065385B1 (de) |
JP (1) | JP2001020860A (de) |
AT (1) | ATE246317T1 (de) |
DE (2) | DE19929519A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE247723T1 (de) * | 1999-04-16 | 2003-09-15 | Unaxis Balzers Ag | Verfahren zum vakuumbehandeln von werkstücken und vakuumbehandlungsanlage |
DE10048210B4 (de) * | 2000-09-28 | 2007-02-15 | Singulus Technologies Ag | Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung |
JP4335469B2 (ja) * | 2001-03-22 | 2009-09-30 | 株式会社荏原製作所 | 真空排気装置のガス循環量調整方法及び装置 |
DE10150015A1 (de) | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür |
GB0212757D0 (en) * | 2002-05-31 | 2002-07-10 | Boc Group Plc | A vacuum pumping system and method of controlling the same |
GB0214273D0 (en) * | 2002-06-20 | 2002-07-31 | Boc Group Plc | Apparatus for controlling the pressure in a process chamber and method of operating same |
GB0229353D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
GB0229356D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
JP4633370B2 (ja) * | 2004-02-17 | 2011-02-16 | 財団法人国際科学振興財団 | 真空装置 |
GB0418771D0 (en) * | 2004-08-20 | 2004-09-22 | Boc Group Plc | Evacuation of a load lock enclosure |
US20070272310A1 (en) * | 2006-05-11 | 2007-11-29 | Buchko Raymond G | System And Method For Evacuating A Vacuum Chamber |
US20090242046A1 (en) * | 2008-03-31 | 2009-10-01 | Benjamin Riordon | Valve module |
FR2947309A1 (fr) * | 2009-06-26 | 2010-12-31 | Alcatel Lucent | Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe |
ES2731202T3 (es) * | 2009-12-24 | 2019-11-14 | Sumitomo Seika Chemicals | Aparato de doble bomba de vacío, sistema de purificación de gas dotado de aparato con doble bomba de vacío y dispositivo de supresión de vibraciones del gas de escape en un aparato con doble bomba de vacío |
GB201007814D0 (en) * | 2010-05-11 | 2010-06-23 | Edwards Ltd | Vacuum pumping system |
US9506478B2 (en) * | 2012-01-13 | 2016-11-29 | Edwards Limited | Vacuum system |
DE202012002684U1 (de) * | 2012-03-15 | 2013-06-17 | Oerlikon Leybold Vacuum Gmbh | Untersuchungseinrichtung |
DE102013108090A1 (de) * | 2013-07-29 | 2015-01-29 | Hella Kgaa Hueck & Co. | Pumpenanordnung |
DE102013219464A1 (de) * | 2013-09-26 | 2015-03-26 | Inficon Gmbh | Evakuierung einer Folienkammer |
WO2018010767A1 (en) * | 2016-07-12 | 2018-01-18 | Dr.-Ing. K. Busch Gmbh | Evacuation system |
DE202016007609U1 (de) | 2016-12-15 | 2018-03-26 | Leybold Gmbh | Vakuumpumpsystem |
DE102017004066A1 (de) | 2017-04-23 | 2018-10-25 | Alfred-Wegener-lnstitut, Helmholtz-Zentrum für Polar- und Meeresforschung | Vakuumsystem zur Erzeugung von zumindest einem Hochvakuum in einem Rezipienten |
GB201715151D0 (en) * | 2017-09-20 | 2017-11-01 | Edwards Ltd | A drag pump and a set of vacuum pumps including a drag pump |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3537474A (en) * | 1968-02-19 | 1970-11-03 | Varian Associates | Push button vacuum control valve and vacuum system using same |
US3986521A (en) * | 1974-03-21 | 1976-10-19 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Evacuation device |
DE58901145D1 (de) * | 1988-06-24 | 1992-05-21 | Siemens Ag | Mehrstufiges vakuumpumpenaggregat. |
JPH04326943A (ja) * | 1991-04-25 | 1992-11-16 | Hitachi Ltd | 真空排気システム及び排気方法 |
DE4213763B4 (de) * | 1992-04-27 | 2004-11-25 | Unaxis Deutschland Holding Gmbh | Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung |
US5433238A (en) * | 1992-12-18 | 1995-07-18 | Vlsi Technology, Inc. | Pumping system for evacuating reactor chambers |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
JP3361162B2 (ja) * | 1993-10-27 | 2003-01-07 | 清原 まさ子 | タンク室付ブロックバルブ |
JP3847357B2 (ja) * | 1994-06-28 | 2006-11-22 | 株式会社荏原製作所 | 真空系の排気装置 |
JPH08321448A (ja) * | 1995-05-25 | 1996-12-03 | Tadahiro Omi | 真空排気装置、半導体製造装置及び真空処理方法 |
DE19524609A1 (de) * | 1995-07-06 | 1997-01-09 | Leybold Ag | Vorrichtung zum raschen Evakuieren einer Vakuumkammer |
DE19645104B4 (de) * | 1996-10-31 | 2007-12-20 | Pfeiffer Vacuum Gmbh | Verfahren zur Durchführung eines Prozesses in einem mit Unterdruck beaufschlagten Prozessraum |
KR100252213B1 (ko) * | 1997-04-22 | 2000-05-01 | 윤종용 | 반도체소자제조장치및그제조방법 |
JP2942239B2 (ja) * | 1997-05-23 | 1999-08-30 | キヤノン株式会社 | 排気方法及び排気装置、それを用いたプラズマ処理方法及びプラズマ処理装置 |
US6113698A (en) * | 1997-07-10 | 2000-09-05 | Applied Materials, Inc. | Degassing method and apparatus |
US6161576A (en) * | 1999-06-23 | 2000-12-19 | Mks Instruments, Inc. | Integrated turbo pump and control valve system |
-
1999
- 1999-06-28 DE DE19929519A patent/DE19929519A1/de not_active Withdrawn
-
2000
- 2000-06-13 DE DE50003072T patent/DE50003072D1/de not_active Expired - Lifetime
- 2000-06-13 EP EP00112484A patent/EP1065385B1/de not_active Expired - Lifetime
- 2000-06-13 AT AT00112484T patent/ATE246317T1/de not_active IP Right Cessation
- 2000-06-26 JP JP2000190815A patent/JP2001020860A/ja active Pending
- 2000-06-27 US US09/604,452 patent/US6446651B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2001020860A (ja) | 2001-01-23 |
EP1065385A3 (de) | 2001-04-11 |
EP1065385A2 (de) | 2001-01-03 |
US6446651B1 (en) | 2002-09-10 |
ATE246317T1 (de) | 2003-08-15 |
DE50003072D1 (de) | 2003-09-04 |
DE19929519A1 (de) | 2001-01-04 |
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