EP1065385B1 - Method of operating a multi-chamber vacuum system - Google Patents

Method of operating a multi-chamber vacuum system Download PDF

Info

Publication number
EP1065385B1
EP1065385B1 EP00112484A EP00112484A EP1065385B1 EP 1065385 B1 EP1065385 B1 EP 1065385B1 EP 00112484 A EP00112484 A EP 00112484A EP 00112484 A EP00112484 A EP 00112484A EP 1065385 B1 EP1065385 B1 EP 1065385B1
Authority
EP
European Patent Office
Prior art keywords
vacuum
pump
valve
chamber
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00112484A
Other languages
German (de)
French (fr)
Other versions
EP1065385A3 (en
EP1065385A2 (en
Inventor
Karl Abbel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1065385A2 publication Critical patent/EP1065385A2/en
Publication of EP1065385A3 publication Critical patent/EP1065385A3/en
Application granted granted Critical
Publication of EP1065385B1 publication Critical patent/EP1065385B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86131—Plural

Abstract

The method involves generating a pre-vacuum with a vacuum pump (4), which is separated from the atmosphere by a first valve (5), for a high vacuum pump (3) connected to a first vacuum chamber. The vacuum pump also generates the vacuum in a second vacuum chamber (2). During the full operation of the high vacuum pump, the first valve is closed and a second valve to evacuate the second vacuum chamber is opened.

Description

Die Erfindung betrifft ein Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a method for operating a multi-chamber vacuum system according to the preamble of the first claim.

Ein großer Teil aller chemischen und physikalischen Prozesse sowohl in Forschung und Entwicklung als auch in der Fertigungstechnik können nur in Vakuum oder in einer speziellen atmosphärischen Umgebung durchgeführt werden. Durch die große Zahl unterschiedlicher atmosphärischer Bedingungen, wie zum Beispiel Druck und Gaszusammensetzung, werden jeweils spezielle Anforderungen an die Eigenschaften der Vakuumpumpen gestellt. Vielfach können auch innerhalb einer Prozeßanlage die Erfordernisse an das Vakuumsystem differieren. So können beispielsweise die Verhältnisse derart sein, daß in einer Vakuumkammer ein Prozeß abläuft, der ein ölfreies Hochvakuum verlangt und in einer anderen Vakuumkammer geringere Anforderungen gestellt werden, so daß die Bereitstellung von Grobvakuum ausreicht.A large part of all chemical and physical processes both in research and development as well as in manufacturing technology can only in vacuum or in in a special atmospheric environment. By the big one Number of different atmospheric conditions, such as pressure and Gas composition, each have special properties of the vacuum pumps. Often you can also use it within a process plant the requirements for the vacuum system differ. For example, the Conditions should be such that a process takes place in a vacuum chamber oil-free high vacuum and lower requirements in another vacuum chamber be provided so that the provision of rough vacuum is sufficient.

Seither wurden in solchen Fällen zum Beispiel für den Hochvakuumbetrieb eine Turbomolekularpumpe, welche mit einer gegen Atmosphäre ausstoßenden Vakuumpumpe betrieben wird, und für das Grobvakuum eine zweite gegen Atmosphäre ausstoßende Vakuumpumpe verwendet (vgl. z. B. US-4-5 228 838).Since then, in such cases, a turbomolecular pump for high-vacuum operation, which with a vacuum pump emitting against atmosphere is operated, and for the rough vacuum a second against the atmosphere Vacuum pump used (see e.g. US-4-5 228 838).

Zwei getrennt voneinander arbeitende, gegen Atmosphäre ausstoßende Pumpen waren notwendig, da die von ihnen erzeugten Vakua unterschiedlichen Zwecken dienen und so keine Verbindung zueinander haben dürfen. Dazu kommt, daß der effektive Betrieb der Turbomolekularpumpe nur aufrecht erhalten werden konnte, solange die zugehörige Vorpumpe ununterbrochen mit ihr verbunden ist und das nötige Vorvakuum erzeugt.Two separately working, atmosphere-emitting pumps were necessary because the vacuums they created served different purposes serve and so must not have any connection to each other. In addition, the effective operation of the turbomolecular pump could only be maintained, as long as the associated backing pump is continuously connected to it and the necessary Forevacuum generated.

Die Erfindung hat sich zum Ziel gesetzt, den Aufwand für eine solche Mehrkammer-Vakuumanlage zu verringern, um Herstellungskosten, Betriebskosten und Raumbedarf zu reduzieren.The invention has set itself the goal of the effort for such a multi-chamber vacuum system reduce to manufacturing costs, operating costs and space requirements to reduce.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 bis 4 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characterizing features of the first claim solved. Claims 2 to 4 represent further embodiments of the invention represents.

Seit einiger Zeit sind Turbomolekularpumpen auf dem Markt, welche durch zusätzliche Pumpstufen, zum Beispiel Molekularpumpstufen nach der Bauart von Holweck, auf der Vorvakuumseite gegen höheren Vorvakuumdruck ausstoßen können. Wenn eine solche Pumpe für einige Zeit von der Vorpumpe abgetrennt wird, erzeugt sie dennoch soviel Druckverhältnis und Saugvermögen, daß der auf der Hochvakuumseite ablaufende Prozeß nicht gestört wird. Dadurch wird die Möglichkeit eröffnet, die gegen Atmosphäre ausstoßende Vakuumpumpe, welche das Vorvakuum für die Turbomolekularpumpe erzeugt, in Abständen zur Evakuierung einer weiteren Vakuumkammer zu verwenden. Turbomolecular pumps have been on the market for some time, which are characterized by additional Pump stages, for example molecular pump stages of the Holweck type, eject against higher backing pressure on the backing side. If such a pump is disconnected from the backing pump for some time, it produces yet so much pressure ratio and pumping speed that that on the high vacuum side ongoing process is not disturbed. This opens up the possibility that atmospheric vacuum pump, which is the backing vacuum for the Turbomolecular pump generated at intervals to evacuate another vacuum chamber to use.

Wenn diese Pumpe erfindungsgemäß über Ventile abwechselnd mit der Turbomolekularpumpe und der zweiten Vakuumkammer verbunden wird und die beiden auszupumpenden Räume durch entsprechendes Öffnen und Schließen der Ventile ständig voneinander getrennt sind, kann so eine zweite Vakuumpumpe eingespart werden. Dies reduziert die Anschaffungskosten und die Betriebskosten einer Vakuumanlage und mindert den Platzbedarf.If this pump according to the invention alternates with valves with the turbomolecular pump and the second vacuum chamber is connected and the two to be pumped out Spaces by opening and closing the valves constantly are separated from each other, a second vacuum pump can be saved. This reduces the acquisition costs and the operating costs of a vacuum system and reduces the space required.

Zur Erzeugung des Hochvakuums können Pumpen verwendet werden, welche eine hohe Vorvakuumbeständigkeit haben, so daß eine zwischenzeitliche Abtrennung der Vorpumpe keinen Einfluß auf die Hochvakuumseite hat. Hier haben sich Turbomolekularpumpen mit zusätzlichen Molekularpumpstufen auf der dem Vorvakuum zugewandten Seite hervorragend bewährt.Pumps can be used to generate the high vacuum have high pre-vacuum resistance, so that an interim separation of the The backing pump has no influence on the high vacuum side. Here are turbomolecular pumps with additional molecular pump stages on the one facing the fore vacuum Tried and tested page.

Die Erfindung kann besonders effektiv dort eingesetzt werden, wo eine zweite Vakuumkammer als Schleusenkammer zum Be- und Entladen der ersten Vakuumkammer ausgebildet ist.The invention can be used particularly effectively where a second vacuum chamber as a lock chamber for loading and unloading the first vacuum chamber is trained.

Anhand der einzigen Abbildung soll die Erfindung näher erläutert werden:The invention is to be explained in more detail on the basis of the single figure:

In der Abbildung ist mit 1 eine erste Vakuumkammer bezeichnet, welche mit einer Hochvakuumpumpe 3 verbunden ist. Deren Vorvakuum wird durch eine über ein Ventil 5 gegen Atmosphäre ausstoßende Vakuumpumpe 4 erzeugt. Eine zweite Vakuumkammer 2 ist über ein Ventil 6 mit der gegen Atmosphäre ausstoßenden Pumpe 4 verbunden. Die zweite Vakuumkammer 2 kann zum Beispiel für den Fall, daß sie als Schleusenkammer verwendet wird, über ein Ventil 7 mit der ersten Vakuumkammer verbunden werden.In the figure, 1 denotes a first vacuum chamber, which with a High vacuum pump 3 is connected. Their pre-vacuum is determined by an over Valve 5 against atmosphere ejecting vacuum pump 4 generated. A second vacuum chamber 2 is via a valve 6 with the atmosphere-emitting pump 4 connected. The second vacuum chamber 2 can, for example, in the event that it is used as a lock chamber, via a valve 7 with the first vacuum chamber get connected.

Die gegen Atmosphäre ausstoßende Pumpe 4 kann sowohl zur Erzeugung des Vorvakuums für die Hochvakuumpumpe 3 als auch zur Erzeugung eines Vakuums in der zweiten Vakuumkammer 2 verwendet werden. Das Verfahren zur Evakuierung kann in folgenden Schritten ablaufen:The atmosphere-discharging pump 4 can be used both to generate the forevacuum for the high vacuum pump 3 and for generating a vacuum in the second vacuum chamber 2 can be used. The evacuation procedure can proceed in the following steps:

Zunächst wird bei geöffnetem ersten Ventil 5 die erste Vakuumkammer 1 über die Hochvakuumpumpe 3 und die Vakuumpumpe 4 evakuiert, wobei die zweite Vakuumkammer 2 durch ein zweites Ventil 6 von der Vakuumpumpe 4 und von der Hochvakuumpumpe 3 getrennt ist. Dann wird das erste Ventil 5 geschlossen und anschließend das zweite Ventil 6 geöffnet und somit die zweite Vakuumkammer 2 durch die Vakuumpumpe 4 evakuiert. Danach wird das Ventil 6 wieder geschlossen und anschließend das Ventil 5 zur weiteren Evakuierung der Vakuumkammer 1 über die Hochvakuumpumpe 3 geöffnet.First, when the first valve 5 is open, the first vacuum chamber 1 is opened High vacuum pump 3 and the vacuum pump 4 evacuated, the second vacuum chamber 2 through a second valve 6 from the vacuum pump 4 and from the high vacuum pump 3 is separated. Then the first valve 5 is closed and then the second valve 6 is opened and thus the second vacuum chamber 2 evacuated by the vacuum pump 4. Then valve 6 is closed again and then the valve 5 for further evacuation of the vacuum chamber 1 the high vacuum pump 3 opened.

Im Rahmen der Erfindung kann natürlich der Auspumpzyklus auch damit begonnen werden, daß zuerst bei geschlossenem ersten Ventil 5 und geöffnetem zweiten Ventil 6 die zweite Vakuumkammer 2 evakuiert wird, oder daß anfänglich beide Vakuumkammern gleichzeitig ausgepumpt werden.Within the scope of the invention, the pumping cycle can of course also be started be that first with the first valve 5 closed and the second valve open 6 the second vacuum chamber 2 is evacuated, or that initially both vacuum chambers be pumped out at the same time.

Claims (4)

  1. Method of operating a multi-chamber vacuum system, consisting of a first vacuum chamber (1), which is connected to a high-vacuum pump (3) whose forevacuum is produced by a vacuum pump (4), which is connected by means of a first valve (5) and expels against atmosphere, and at least one second vacuum chamber (2), characterised in that the vacuum pump (4) expelling against atmosphere serves both to produce the forevacuum for the high-vacuum pump (3) and to produce the vacuum in the second vacuum chamber (2) such that the first valve (5) is closed and the second valve (6) is opened to evacuate the second vacuum chamber (2) during full operation of the high-vacuum pump (3).
  2. Method according to Claim 1, characterised in that following the evacuation of the second vacuum chamber (2) the second valve (6) is closed and the first valve (5) is re-opened for further evacuation of the vacuum chamber (1) by means of the high-vacuum pump (3).
  3. Method according to Claim 1 or 2, characterised in that the high-vacuum pump (3) is formed as a turbomolecular pump.
  4. Method according to any one of the preceding Claims, characterised in that the second vacuum chamber (2) serves as a lock chamber for charging and discharging the first vacuum chamber (1).
EP00112484A 1999-06-28 2000-06-13 Method of operating a multi-chamber vacuum system Expired - Lifetime EP1065385B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19929519 1999-06-28
DE19929519A DE19929519A1 (en) 1999-06-28 1999-06-28 Method for operating a multi-chamber vacuum system

Publications (3)

Publication Number Publication Date
EP1065385A2 EP1065385A2 (en) 2001-01-03
EP1065385A3 EP1065385A3 (en) 2001-04-11
EP1065385B1 true EP1065385B1 (en) 2003-07-30

Family

ID=7912784

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112484A Expired - Lifetime EP1065385B1 (en) 1999-06-28 2000-06-13 Method of operating a multi-chamber vacuum system

Country Status (5)

Country Link
US (1) US6446651B1 (en)
EP (1) EP1065385B1 (en)
JP (1) JP2001020860A (en)
AT (1) ATE246317T1 (en)
DE (2) DE19929519A1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542396A (en) * 1999-04-16 2002-12-10 ユナキス・バルツェルス・アクチェンゲゼルシャフト Vacuum processing method and vacuum processing device
DE10048210B4 (en) * 2000-09-28 2007-02-15 Singulus Technologies Ag Device and method for introducing a workpiece via a Vorvakuumkammer in a high vacuum chamber and their use
JP4335469B2 (en) * 2001-03-22 2009-09-30 株式会社荏原製作所 Method and apparatus for adjusting gas circulation rate of vacuum exhaust device
DE10150015A1 (en) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers
GB0212757D0 (en) * 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4633370B2 (en) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 Vacuum equipment
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
WO2007149652A2 (en) * 2006-05-11 2007-12-27 Cp Packaging, Inc. System and method for evacuating a vacuum chamber
US20090242046A1 (en) * 2008-03-31 2009-10-01 Benjamin Riordon Valve module
FR2947309A1 (en) * 2009-06-26 2010-12-31 Alcatel Lucent METHOD FOR PREDICTING A ROTOR ROTATION FAILURE OF A VACUUM PUMP AND ASSOCIATED PUMPING DEVICE
KR101506026B1 (en) * 2009-12-24 2015-03-25 스미토모 세이카 가부시키가이샤 Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US9506478B2 (en) * 2012-01-13 2016-11-29 Edwards Limited Vacuum system
DE202012002684U1 (en) * 2012-03-15 2013-06-17 Oerlikon Leybold Vacuum Gmbh examination means
DE102013108090A1 (en) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. pump assembly
DE102013219464A1 (en) * 2013-09-26 2015-03-26 Inficon Gmbh Evacuation of a foil chamber
WO2018010767A1 (en) * 2016-07-12 2018-01-18 Dr.-Ing. K. Busch Gmbh Evacuation system
DE202016007609U1 (en) * 2016-12-15 2018-03-26 Leybold Gmbh Vacuum pumping system
DE102017004066A1 (en) 2017-04-23 2018-10-25 Alfred-Wegener-lnstitut, Helmholtz-Zentrum für Polar- und Meeresforschung Vacuum system for generating at least one high vacuum in a recipient
GB201715151D0 (en) 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537474A (en) * 1968-02-19 1970-11-03 Varian Associates Push button vacuum control valve and vacuum system using same
US3986521A (en) * 1974-03-21 1976-10-19 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Evacuation device
JPH0545827Y2 (en) * 1988-06-24 1993-11-26
JPH04326943A (en) * 1991-04-25 1992-11-16 Hitachi Ltd Vacuum exhaust system and exhaust method
DE4213763B4 (en) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Process for evacuating a vacuum chamber and a high vacuum chamber, and high vacuum system for carrying it out
US5433238A (en) * 1992-12-18 1995-07-18 Vlsi Technology, Inc. Pumping system for evacuating reactor chambers
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JP3361162B2 (en) * 1993-10-27 2003-01-07 清原 まさ子 Block valve with tank chamber
JP3847357B2 (en) * 1994-06-28 2006-11-22 株式会社荏原製作所 Vacuum exhaust system
JPH08321448A (en) * 1995-05-25 1996-12-03 Tadahiro Omi Vacuum pumping equipment, semiconductor manufacturing equipment, and vacuum processing method
DE19524609A1 (en) * 1995-07-06 1997-01-09 Leybold Ag Device for the rapid evacuation of a vacuum chamber
DE19645104B4 (en) * 1996-10-31 2007-12-20 Pfeiffer Vacuum Gmbh Method for carrying out a process in a process space subjected to negative pressure
KR100252213B1 (en) * 1997-04-22 2000-05-01 윤종용 Apparatus for manufacturing semiconductor device and method of manufacturing semiconductor device using the same
JP2942239B2 (en) * 1997-05-23 1999-08-30 キヤノン株式会社 Exhaust method and exhaust apparatus, plasma processing method and plasma processing apparatus using the same
US6113698A (en) * 1997-07-10 2000-09-05 Applied Materials, Inc. Degassing method and apparatus
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system

Also Published As

Publication number Publication date
DE19929519A1 (en) 2001-01-04
ATE246317T1 (en) 2003-08-15
DE50003072D1 (en) 2003-09-04
EP1065385A3 (en) 2001-04-11
US6446651B1 (en) 2002-09-10
JP2001020860A (en) 2001-01-23
EP1065385A2 (en) 2001-01-03

Similar Documents

Publication Publication Date Title
EP1065385B1 (en) Method of operating a multi-chamber vacuum system
DE10032607B4 (en) Particle beam device with a particle source to be operated in ultra-high vacuum and a cascade-shaped pump arrangement for such a particle beam device
EP1582607B1 (en) Loadlock arrangement for a vacuum treatment apparatus and method of operating it
EP1833622B2 (en) Method for cleaning a vacuum screw-type pump
EP1434896A2 (en) Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor
DE102004008598B4 (en) Method for operating an in-line coating system
DE4213763A1 (en) Process for evacuating a vacuum chamber and a high vacuum chamber, and high vacuum system for carrying it out
DE10308420A1 (en) Test gas leak detector
DE102016107830A1 (en) Vacuum chamber assembly and method of operating a vacuum chamber assembly
DE112009001885T5 (en) Vacuum processing apparatus and vacuum processing method
DE3705912C2 (en)
EP0972938B1 (en) Gas ballast device for a multistage positive displacement pump
DE10048210A1 (en) Evacuating device comprises a high vacuum pump for evacuating a second chamber, and a one-stage fore-vacuum pump for evacuating a first chamber and for producing a fore-vacuum for the high vacuum pump
EP1128069A2 (en) Drag vacuum pump
DE102011015464B4 (en) Vacuum pumping device and method for dusty gases
DE4001668A1 (en) MULTI-STAGE VACUUM PUMP
EP1345800B1 (en) Method for operating an electronically controllable brake actuation system, and an electronically controllable brake actuation system
DE4401718C1 (en) Method and appts. for treatment of workpieces in a vacuum atmosphere
DE102016109510B4 (en) Vacuum processing plant and method for the batch introduction and removal of substrates
EP3441617A1 (en) Method for heating a rotor of a vacuum pump
DE112020003410T5 (en) pump unit
WO2016128581A1 (en) Method for operating an inline coating system and inline coating system
EP0373229A1 (en) Mechanical vacuum pump with a spring loaded return valve
DD236967A1 (en) METHOD FOR THE CYCLIC EVACUATION OF A VACUUM CHAMBER
DD201461A1 (en) METHOD FOR GENERATING A CONSISTENTLY WORKING GAS PRESSURE

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20010629

AKX Designation fees paid

Free format text: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20030730

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20030730

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20030730

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: GERMAN

REF Corresponds to:

Ref document number: 50003072

Country of ref document: DE

Date of ref document: 20030904

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20031030

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20031030

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20031030

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20031110

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20031107

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20031230

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040613

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040613

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040630

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040630

26N No opposition filed

Effective date: 20040504

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: PFEIFFER VACUUM (SCHWEIZ) AG

BERE Be: lapsed

Owner name: *PFEIFFER VACUUM G.M.B.H.

Effective date: 20040630

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20080626

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20080610

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20080409

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20080410

Year of fee payment: 9

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20090613

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 20100101

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20100226

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090613

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090613

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20160713

Year of fee payment: 17

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 50003072

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180103

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20191223

Year of fee payment: 20

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL