EP1065385A3 - Method of operating a multi-chamber vacuum system - Google Patents

Method of operating a multi-chamber vacuum system Download PDF

Info

Publication number
EP1065385A3
EP1065385A3 EP00112484A EP00112484A EP1065385A3 EP 1065385 A3 EP1065385 A3 EP 1065385A3 EP 00112484 A EP00112484 A EP 00112484A EP 00112484 A EP00112484 A EP 00112484A EP 1065385 A3 EP1065385 A3 EP 1065385A3
Authority
EP
European Patent Office
Prior art keywords
vacuum
operating
vacuum system
chamber vacuum
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112484A
Other languages
German (de)
French (fr)
Other versions
EP1065385B1 (en
EP1065385A2 (en
Inventor
Karl Abbel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1065385A2 publication Critical patent/EP1065385A2/en
Publication of EP1065385A3 publication Critical patent/EP1065385A3/en
Application granted granted Critical
Publication of EP1065385B1 publication Critical patent/EP1065385B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86131—Plural

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Vacuum Packaging (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

The method involves generating a pre-vacuum with a vacuum pump (4), which is separated from the atmosphere by a first valve (5), for a high vacuum pump (3) connected to a first vacuum chamber. The vacuum pump also generates the vacuum in a second vacuum chamber (2). During the full operation of the high vacuum pump, the first valve is closed and a second valve to evacuate the second vacuum chamber is opened.
EP00112484A 1999-06-28 2000-06-13 Method of operating a multi-chamber vacuum system Expired - Lifetime EP1065385B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19929519A DE19929519A1 (en) 1999-06-28 1999-06-28 Method for operating a multi-chamber vacuum system
DE19929519 1999-06-28

Publications (3)

Publication Number Publication Date
EP1065385A2 EP1065385A2 (en) 2001-01-03
EP1065385A3 true EP1065385A3 (en) 2001-04-11
EP1065385B1 EP1065385B1 (en) 2003-07-30

Family

ID=7912784

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112484A Expired - Lifetime EP1065385B1 (en) 1999-06-28 2000-06-13 Method of operating a multi-chamber vacuum system

Country Status (5)

Country Link
US (1) US6446651B1 (en)
EP (1) EP1065385B1 (en)
JP (1) JP2001020860A (en)
AT (1) ATE246317T1 (en)
DE (2) DE19929519A1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE247723T1 (en) * 1999-04-16 2003-09-15 Unaxis Balzers Ag METHOD FOR VACUUM TREATING WORKPIECES AND VACUUM TREATMENT SYSTEM
DE10048210B4 (en) * 2000-09-28 2007-02-15 Singulus Technologies Ag Device and method for introducing a workpiece via a Vorvakuumkammer in a high vacuum chamber and their use
JP4335469B2 (en) * 2001-03-22 2009-09-30 株式会社荏原製作所 Method and apparatus for adjusting gas circulation rate of vacuum exhaust device
DE10150015A1 (en) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers
GB0212757D0 (en) * 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4633370B2 (en) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 Vacuum equipment
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
US20070272310A1 (en) * 2006-05-11 2007-11-29 Buchko Raymond G System And Method For Evacuating A Vacuum Chamber
US20090242046A1 (en) * 2008-03-31 2009-10-01 Benjamin Riordon Valve module
FR2947309A1 (en) * 2009-06-26 2010-12-31 Alcatel Lucent METHOD FOR PREDICTING A ROTOR ROTATION FAILURE OF A VACUUM PUMP AND ASSOCIATED PUMPING DEVICE
EP3502472B1 (en) * 2009-12-24 2020-09-09 Sumitomo Seika Chemicals Co., Ltd. Exhaust gas vibration suppressing device in double vacuum pump apparatus
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US9506478B2 (en) * 2012-01-13 2016-11-29 Edwards Limited Vacuum system
DE202012002684U1 (en) * 2012-03-15 2013-06-17 Oerlikon Leybold Vacuum Gmbh examination means
DE102013108090A1 (en) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. pump assembly
DE102013219464A1 (en) * 2013-09-26 2015-03-26 Inficon Gmbh Evacuation of a foil chamber
WO2018010767A1 (en) * 2016-07-12 2018-01-18 Dr.-Ing. K. Busch Gmbh Evacuation system
DE202016007609U1 (en) 2016-12-15 2018-03-26 Leybold Gmbh Vacuum pumping system
DE102017004066A1 (en) 2017-04-23 2018-10-25 Alfred-Wegener-lnstitut, Helmholtz-Zentrum für Polar- und Meeresforschung Vacuum system for generating at least one high vacuum in a recipient
GB201715151D0 (en) 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0510656A2 (en) * 1991-04-25 1992-10-28 Hitachi, Ltd. Evacuation system and method therefor
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
US5244352A (en) * 1988-06-24 1993-09-14 Siemens Aktiengesellschaft Multi-stage vacuum pump installation
EP0690235A2 (en) * 1994-06-28 1996-01-03 Ebara Corporation Method and apparatus for evacuating vacuum system
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE19645104A1 (en) * 1996-10-31 1998-05-07 Hedwig Lismont Intermittent evacuation of process chamber using vacuum pump with buffer chamber
US6004109A (en) * 1995-07-06 1999-12-21 Balzers Und Leybold Deutschland Holding Ag Apparatus for the rapid evacuation of a vacuum chamber

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537474A (en) * 1968-02-19 1970-11-03 Varian Associates Push button vacuum control valve and vacuum system using same
US3986521A (en) * 1974-03-21 1976-10-19 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Evacuation device
US5433238A (en) * 1992-12-18 1995-07-18 Vlsi Technology, Inc. Pumping system for evacuating reactor chambers
JP3361162B2 (en) * 1993-10-27 2003-01-07 清原 まさ子 Block valve with tank chamber
JPH08321448A (en) * 1995-05-25 1996-12-03 Tadahiro Omi Vacuum pumping equipment, semiconductor manufacturing equipment, and vacuum processing method
KR100252213B1 (en) * 1997-04-22 2000-05-01 윤종용 Apparatus for manufacturing semiconductor device and method of manufacturing semiconductor device using the same
JP2942239B2 (en) * 1997-05-23 1999-08-30 キヤノン株式会社 Exhaust method and exhaust apparatus, plasma processing method and plasma processing apparatus using the same
US6113698A (en) * 1997-07-10 2000-09-05 Applied Materials, Inc. Degassing method and apparatus
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5244352A (en) * 1988-06-24 1993-09-14 Siemens Aktiengesellschaft Multi-stage vacuum pump installation
EP0510656A2 (en) * 1991-04-25 1992-10-28 Hitachi, Ltd. Evacuation system and method therefor
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0690235A2 (en) * 1994-06-28 1996-01-03 Ebara Corporation Method and apparatus for evacuating vacuum system
US6004109A (en) * 1995-07-06 1999-12-21 Balzers Und Leybold Deutschland Holding Ag Apparatus for the rapid evacuation of a vacuum chamber
DE19645104A1 (en) * 1996-10-31 1998-05-07 Hedwig Lismont Intermittent evacuation of process chamber using vacuum pump with buffer chamber

Also Published As

Publication number Publication date
US6446651B1 (en) 2002-09-10
DE50003072D1 (en) 2003-09-04
EP1065385B1 (en) 2003-07-30
DE19929519A1 (en) 2001-01-04
ATE246317T1 (en) 2003-08-15
JP2001020860A (en) 2001-01-23
EP1065385A2 (en) 2001-01-03

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