EP1065385A3 - Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage - Google Patents

Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage Download PDF

Info

Publication number
EP1065385A3
EP1065385A3 EP00112484A EP00112484A EP1065385A3 EP 1065385 A3 EP1065385 A3 EP 1065385A3 EP 00112484 A EP00112484 A EP 00112484A EP 00112484 A EP00112484 A EP 00112484A EP 1065385 A3 EP1065385 A3 EP 1065385A3
Authority
EP
European Patent Office
Prior art keywords
vacuum
vacuum system
operating
chamber vacuum
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112484A
Other languages
English (en)
French (fr)
Other versions
EP1065385A2 (de
EP1065385B1 (de
Inventor
Karl Abbel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1065385A2 publication Critical patent/EP1065385A2/de
Publication of EP1065385A3 publication Critical patent/EP1065385A3/de
Application granted granted Critical
Publication of EP1065385B1 publication Critical patent/EP1065385B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86131—Plural

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Vacuum Packaging (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

Ein Verfahren zur Evakuierung einer Mehrkammer-Vakuumanlage zeichnet sich dadurch aus, daß eine gegen Atmosphäre ausstoßende Vakuumpumpe (4) gleichzeitig als Vorpumpe für eine Hochvakuumpumpe (3) und zum Evakuieren einer zweiten Vakuumkammer (2) dient. Durch abwechselndes Öffnen und Schließen von Ventilen (5) und (6) kann das Verfahren so durchgeführt werden, daß der auf der Hochvakuumseite ablaufende Prozeß nicht beeinträchtigt wird.
EP00112484A 1999-06-28 2000-06-13 Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage Expired - Lifetime EP1065385B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19929519A DE19929519A1 (de) 1999-06-28 1999-06-28 Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE19929519 1999-06-28

Publications (3)

Publication Number Publication Date
EP1065385A2 EP1065385A2 (de) 2001-01-03
EP1065385A3 true EP1065385A3 (de) 2001-04-11
EP1065385B1 EP1065385B1 (de) 2003-07-30

Family

ID=7912784

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112484A Expired - Lifetime EP1065385B1 (de) 1999-06-28 2000-06-13 Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage

Country Status (5)

Country Link
US (1) US6446651B1 (de)
EP (1) EP1065385B1 (de)
JP (1) JP2001020860A (de)
AT (1) ATE246317T1 (de)
DE (2) DE19929519A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000063460A1 (de) * 1999-04-16 2000-10-26 Balzers Aktiengesellschaft Verfahren zum vakuumbehandeln von werkstücken und vakuumbehandlungsanlage
DE10048210B4 (de) * 2000-09-28 2007-02-15 Singulus Technologies Ag Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0212757D0 (en) * 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
WO2007149652A2 (en) * 2006-05-11 2007-12-27 Cp Packaging, Inc. System and method for evacuating a vacuum chamber
US20090242046A1 (en) * 2008-03-31 2009-10-01 Benjamin Riordon Valve module
FR2947309A1 (fr) * 2009-06-26 2010-12-31 Alcatel Lucent Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe
BR112012018803B1 (pt) * 2009-12-24 2021-09-28 Sumitomo Seika Chemicals Co., Ltd. Aparelho de bomba de vácuo dupla e sistema de purificação de gás
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US9506478B2 (en) * 2012-01-13 2016-11-29 Edwards Limited Vacuum system
DE202012002684U1 (de) * 2012-03-15 2013-06-17 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
WO2018010767A1 (en) * 2016-07-12 2018-01-18 Dr.-Ing. K. Busch Gmbh Evacuation system
DE202016007609U1 (de) 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
DE102017004066A1 (de) 2017-04-23 2018-10-25 Alfred-Wegener-lnstitut, Helmholtz-Zentrum für Polar- und Meeresforschung Vakuumsystem zur Erzeugung von zumindest einem Hochvakuum in einem Rezipienten
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
JP7650633B2 (ja) 2020-10-06 2025-03-25 エドワーズ株式会社 真空排気システム

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0510656A2 (de) * 1991-04-25 1992-10-28 Hitachi, Ltd. Evakuierungssystem und -verfahren
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
US5244352A (en) * 1988-06-24 1993-09-14 Siemens Aktiengesellschaft Multi-stage vacuum pump installation
EP0690235A2 (de) * 1994-06-28 1996-01-03 Ebara Corporation Verfahren und Gerät zum Evakuieren eines Vakuumsystems
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE19645104A1 (de) * 1996-10-31 1998-05-07 Hedwig Lismont Vakuumerzeugungs-Anlage
US6004109A (en) * 1995-07-06 1999-12-21 Balzers Und Leybold Deutschland Holding Ag Apparatus for the rapid evacuation of a vacuum chamber

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537474A (en) * 1968-02-19 1970-11-03 Varian Associates Push button vacuum control valve and vacuum system using same
US3986521A (en) * 1974-03-21 1976-10-19 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Evacuation device
US5433238A (en) * 1992-12-18 1995-07-18 Vlsi Technology, Inc. Pumping system for evacuating reactor chambers
JP3361162B2 (ja) * 1993-10-27 2003-01-07 清原 まさ子 タンク室付ブロックバルブ
JPH08321448A (ja) * 1995-05-25 1996-12-03 Tadahiro Omi 真空排気装置、半導体製造装置及び真空処理方法
JPH10132711A (ja) * 1996-10-25 1998-05-22 Shinku Kagaku Kenkyusho 試料表面分析用真空排気装置
KR100252213B1 (ko) * 1997-04-22 2000-05-01 윤종용 반도체소자제조장치및그제조방법
JP2942239B2 (ja) * 1997-05-23 1999-08-30 キヤノン株式会社 排気方法及び排気装置、それを用いたプラズマ処理方法及びプラズマ処理装置
US6113698A (en) * 1997-07-10 2000-09-05 Applied Materials, Inc. Degassing method and apparatus
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5244352A (en) * 1988-06-24 1993-09-14 Siemens Aktiengesellschaft Multi-stage vacuum pump installation
EP0510656A2 (de) * 1991-04-25 1992-10-28 Hitachi, Ltd. Evakuierungssystem und -verfahren
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0690235A2 (de) * 1994-06-28 1996-01-03 Ebara Corporation Verfahren und Gerät zum Evakuieren eines Vakuumsystems
US6004109A (en) * 1995-07-06 1999-12-21 Balzers Und Leybold Deutschland Holding Ag Apparatus for the rapid evacuation of a vacuum chamber
DE19645104A1 (de) * 1996-10-31 1998-05-07 Hedwig Lismont Vakuumerzeugungs-Anlage

Also Published As

Publication number Publication date
EP1065385A2 (de) 2001-01-03
US6446651B1 (en) 2002-09-10
DE19929519A1 (de) 2001-01-04
JP2001020860A (ja) 2001-01-23
EP1065385B1 (de) 2003-07-30
DE50003072D1 (de) 2003-09-04
ATE246317T1 (de) 2003-08-15

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