DE3439853A1 - Verfahren zum niederschlagen von metallsilizidschichten auf ein substrat - Google Patents

Verfahren zum niederschlagen von metallsilizidschichten auf ein substrat

Info

Publication number
DE3439853A1
DE3439853A1 DE19843439853 DE3439853A DE3439853A1 DE 3439853 A1 DE3439853 A1 DE 3439853A1 DE 19843439853 DE19843439853 DE 19843439853 DE 3439853 A DE3439853 A DE 3439853A DE 3439853 A1 DE3439853 A1 DE 3439853A1
Authority
DE
Germany
Prior art keywords
titanium
silicon
species
gaseous
titanium silicide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19843439853
Other languages
German (de)
English (en)
Inventor
George M. Scottsdale Ariz. Engle
Richard S. Paradise Valley Ariz. Rosler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Semiconductor Materials America Inc
Original Assignee
Advanced Semiconductor Materials America Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Semiconductor Materials America Inc filed Critical Advanced Semiconductor Materials America Inc
Publication of DE3439853A1 publication Critical patent/DE3439853A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/42—Silicides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H10D64/0111—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors
    • H10D64/0112—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors using conductive layers comprising silicides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01304—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H10D64/01306—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon
    • H10D64/01308—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon the conductor further comprising a non-elemental silicon additional conductive layer, e.g. a metal silicide layer formed by the reaction of silicon with an implanted metal
    • H10D64/01312—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon the conductor further comprising a non-elemental silicon additional conductive layer, e.g. a metal silicide layer formed by the reaction of silicon with an implanted metal the additional layer comprising a metal or metal silicide formed by deposition, i.e. without a silicidation reaction, e.g. sputter deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Chemical Vapour Deposition (AREA)
DE19843439853 1983-10-31 1984-10-31 Verfahren zum niederschlagen von metallsilizidschichten auf ein substrat Withdrawn DE3439853A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/547,050 US4557943A (en) 1983-10-31 1983-10-31 Metal-silicide deposition using plasma-enhanced chemical vapor deposition

Publications (1)

Publication Number Publication Date
DE3439853A1 true DE3439853A1 (de) 1985-05-09

Family

ID=24183136

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843439853 Withdrawn DE3439853A1 (de) 1983-10-31 1984-10-31 Verfahren zum niederschlagen von metallsilizidschichten auf ein substrat

Country Status (6)

Country Link
US (1) US4557943A (enExample)
JP (1) JPS6096763A (enExample)
DE (1) DE3439853A1 (enExample)
FR (1) FR2554132B1 (enExample)
GB (1) GB2148946B (enExample)
NL (1) NL8403011A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4871691A (en) * 1987-11-09 1989-10-03 Etat Francais Centre National de la Recherche Scientifique Selective deposition process of a refractory metal silicide onto silicon areas

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2505736B2 (ja) * 1985-06-18 1996-06-12 キヤノン株式会社 半導体装置の製造方法
US4668530A (en) * 1985-07-23 1987-05-26 Massachusetts Institute Of Technology Low pressure chemical vapor deposition of refractory metal silicides
US4796562A (en) * 1985-12-03 1989-01-10 Varian Associates, Inc. Rapid thermal cvd apparatus
US4709655A (en) * 1985-12-03 1987-12-01 Varian Associates, Inc. Chemical vapor deposition apparatus
US4732801A (en) * 1986-04-30 1988-03-22 International Business Machines Corporation Graded oxide/nitride via structure and method of fabrication therefor
US4766006A (en) * 1986-05-15 1988-08-23 Varian Associates, Inc. Low pressure chemical vapor deposition of metal silicide
US4800105A (en) * 1986-07-22 1989-01-24 Nihon Shinku Gijutsu Kabushiki Kaisha Method of forming a thin film by chemical vapor deposition
NL8700820A (nl) * 1987-04-08 1988-11-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting.
KR930003957B1 (ko) * 1987-05-09 1993-05-17 후다바 덴시 고오교오 가부시끼가이샤 형광표시관
FR2622052B1 (fr) * 1987-10-19 1990-02-16 Air Liquide Procede de depot de siliciure de metal refractaire pour la fabrication de circuits integres
US5167986A (en) * 1988-04-15 1992-12-01 Gordon Roy G Titanium silicide-coated glass windows
US5057375A (en) * 1988-04-15 1991-10-15 Gordon Roy G Titanium silicide-coated glass windows
US4957777A (en) * 1988-07-28 1990-09-18 Massachusetts Institute Of Technology Very low pressure chemical vapor deposition process for deposition of titanium silicide films
US5104694A (en) * 1989-04-21 1992-04-14 Nippon Telephone & Telegraph Corporation Selective chemical vapor deposition of a metallic film on the silicon surface
KR930011413B1 (ko) * 1990-09-25 1993-12-06 가부시키가이샤 한도오따이 에네루기 겐큐쇼 펄스형 전자파를 사용한 플라즈마 cvd 법
JPH06101462B2 (ja) * 1991-04-30 1994-12-12 インターナショナル・ビジネス・マシーンズ・コーポレイション 過フッ化炭化水素ポリマ膜を基板に接着する方法および 基板
KR970009274B1 (ko) * 1991-11-11 1997-06-09 미쓰비시덴키 가부시키가이샤 반도체장치의 도전층접속구조 및 그 제조방법
US5320880A (en) * 1992-10-20 1994-06-14 Micron Technology, Inc. Method of providing a silicon film having a roughened outer surface
US5814599A (en) * 1995-08-04 1998-09-29 Massachusetts Insitiute Of Technology Transdermal delivery of encapsulated drugs
US5426003A (en) * 1994-02-14 1995-06-20 Westinghouse Electric Corporation Method of forming a plasma sprayed interconnection layer on an electrode of an electrochemical cell
AU1745695A (en) * 1994-06-03 1996-01-04 Materials Research Corporation A method of nitridization of titanium thin films
US5975912A (en) * 1994-06-03 1999-11-02 Materials Research Corporation Low temperature plasma-enhanced formation of integrated circuits
US5665640A (en) * 1994-06-03 1997-09-09 Sony Corporation Method for producing titanium-containing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
US5628829A (en) * 1994-06-03 1997-05-13 Materials Research Corporation Method and apparatus for low temperature deposition of CVD and PECVD films
US5972790A (en) * 1995-06-09 1999-10-26 Tokyo Electron Limited Method for forming salicides
US5780050A (en) 1995-07-20 1998-07-14 Theratech, Inc. Drug delivery compositions for improved stability of steroids
US6041253A (en) * 1995-12-18 2000-03-21 Massachusetts Institute Of Technology Effect of electric field and ultrasound for transdermal drug delivery
US5947921A (en) * 1995-12-18 1999-09-07 Massachusetts Institute Of Technology Chemical and physical enhancers and ultrasound for transdermal drug delivery
US6002961A (en) * 1995-07-25 1999-12-14 Massachusetts Institute Of Technology Transdermal protein delivery using low-frequency sonophoresis
EP1563788B8 (en) 1995-08-29 2015-04-08 Nitto Denko Corporation Microporation of human skin for drug delivery and monitoring applications
JPH09111460A (ja) * 1995-10-11 1997-04-28 Anelva Corp チタン系導電性薄膜の作製方法
JP2002515786A (ja) 1996-06-28 2002-05-28 ソントラ メディカル，エル．ピー． 経皮輸送の超音波増強
US5908659A (en) * 1997-01-03 1999-06-01 Mosel Vitelic Inc. Method for reducing the reflectivity of a silicide layer
US6432479B2 (en) 1997-12-02 2002-08-13 Applied Materials, Inc. Method for in-situ, post deposition surface passivation of a chemical vapor deposited film
AU740999B2 (en) 1998-01-08 2001-11-22 Sontra Medical, Inc. Sonophoretic enhanced transdermal transport
US8287483B2 (en) * 1998-01-08 2012-10-16 Echo Therapeutics, Inc. Method and apparatus for enhancement of transdermal transport
US7066884B2 (en) 1998-01-08 2006-06-27 Sontra Medical, Inc. System, method, and device for non-invasive body fluid sampling and analysis
US6046098A (en) * 1998-02-23 2000-04-04 Micron Technology, Inc. Process of forming metal silicide interconnects
US20040171980A1 (en) * 1998-12-18 2004-09-02 Sontra Medical, Inc. Method and apparatus for enhancement of transdermal transport
US6821571B2 (en) 1999-06-18 2004-11-23 Applied Materials Inc. Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
US20030078499A1 (en) 1999-08-12 2003-04-24 Eppstein Jonathan A. Microporation of tissue for delivery of bioactive agents
US6541369B2 (en) 1999-12-07 2003-04-01 Applied Materials, Inc. Method and apparatus for reducing fixed charges in a semiconductor device
US6795727B2 (en) 2001-10-17 2004-09-21 Pedro Giammarusti Devices and methods for promoting transcutaneous movement of substances
US9918665B2 (en) 2002-03-11 2018-03-20 Nitto Denko Corporation Transdermal porator and patch system and method for using same
EP1483019A4 (en) 2002-03-11 2007-07-04 Altea Therapeutics Corp TRANSDERMALES MEDICAMENT PAVING SYSTEM, METHOD FOR THE PRODUCTION THEREOF AND METHOD FOR THE APPLICATION THEREOF
US8116860B2 (en) 2002-03-11 2012-02-14 Altea Therapeutics Corporation Transdermal porator and patch system and method for using same
US8016811B2 (en) 2003-10-24 2011-09-13 Altea Therapeutics Corporation Method for transdermal delivery of permeant substances
US8224414B2 (en) 2004-10-28 2012-07-17 Echo Therapeutics, Inc. System and method for analyte sampling and analysis with hydrogel
JP5577021B2 (ja) 2005-02-17 2014-08-20 アボット・ラボラトリーズ 動物における障害を治療および予防するための薬剤組成物の経粘膜投与
US7432069B2 (en) 2005-12-05 2008-10-07 Sontra Medical Corporation Biocompatible chemically crosslinked hydrogels for glucose sensing
WO2008109739A1 (en) 2007-03-07 2008-09-12 Echo Therapeutics, Inc. Transdermal analyte monitoring systems and methods for analyte detection
CA2685423C (en) 2007-04-27 2014-02-18 Echo Therapeutics, Inc. Skin permeation device for analyte sensing or transdermal drug delivery
US9033898B2 (en) 2010-06-23 2015-05-19 Seventh Sense Biosystems, Inc. Sampling devices and methods involving relatively little pain
EP2408369A1 (en) 2009-03-02 2012-01-25 Seventh Sense Biosystems, Inc. Devices and methods for the analysis of an extractable medium
US20120277629A1 (en) 2011-04-29 2012-11-01 Seventh Sense Biosystems, Inc. Systems and methods for collection and/or manipulation of blood spots or other bodily fluids
WO2010101625A2 (en) 2009-03-02 2010-09-10 Seventh Sense Biosystems, Inc. Oxygen sensor
US9041541B2 (en) 2010-01-28 2015-05-26 Seventh Sense Biosystems, Inc. Monitoring or feedback systems and methods
CN103068308B (zh) 2010-07-16 2016-03-16 第七感生物系统有限公司 用于流体传输装置的低压环境
US20130158482A1 (en) 2010-07-26 2013-06-20 Seventh Sense Biosystems, Inc. Rapid delivery and/or receiving of fluids
US20120039809A1 (en) 2010-08-13 2012-02-16 Seventh Sense Biosystems, Inc. Systems and techniques for monitoring subjects
EP2637562B1 (en) 2010-11-09 2016-01-27 Seventh Sense Biosystems, Inc. Systems and interfaces for blood sampling
US20130158468A1 (en) 2011-12-19 2013-06-20 Seventh Sense Biosystems, Inc. Delivering and/or receiving material with respect to a subject surface
CN103874460B (zh) 2011-04-29 2016-06-22 第七感生物系统有限公司 一种用于从受验者的皮肤接收血液或其它物质的装置
EP3106092A3 (en) 2011-04-29 2017-03-08 Seventh Sense Biosystems, Inc. Systems and methods for collecting fluid from a subject
US20140066837A1 (en) 2012-07-26 2014-03-06 Ronald L. Moy Skin care compositions and methods
US10204764B2 (en) * 2014-10-28 2019-02-12 Applied Materials, Inc. Methods for forming a metal silicide interconnection nanowire structure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218291A (en) * 1978-02-28 1980-08-19 Vlsi Technology Research Association Process for forming metal and metal silicide films
DE3211752A1 (de) * 1982-03-30 1983-10-13 Siemens AG, 1000 Berlin und 8000 München Verfahren zum selektiven abscheiden von aus siliziden hochschmelzender metalle bestehenden schichtstrukturen auf im wesentlichen aus silizium bestehenden substraten und deren verwendung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3540920A (en) * 1967-08-24 1970-11-17 Texas Instruments Inc Process of simultaneously vapor depositing silicides of chromium and titanium
US3658577A (en) * 1969-10-01 1972-04-25 Gene F Wakefield Vapor phase deposition of silicide refractory coatings
US4180596A (en) * 1977-06-30 1979-12-25 International Business Machines Corporation Method for providing a metal silicide layer on a substrate
US4239819A (en) * 1978-12-11 1980-12-16 Chemetal Corporation Deposition method and products
JPS5644765A (en) * 1979-09-20 1981-04-24 Daijietsuto Kogyo Kk Covered hard metal tool
JPS584975A (ja) * 1981-06-30 1983-01-12 Fujitsu Ltd 半導体装置の製造方法
US4359490A (en) * 1981-07-13 1982-11-16 Fairchild Camera & Instrument Corp. Method for LPCVD co-deposition of metal and silicon to form metal silicide
JPS57147431A (en) * 1981-10-06 1982-09-11 Semiconductor Energy Lab Co Ltd Plasma gas phase method
JPS5956574A (ja) * 1982-09-24 1984-04-02 Fujitsu Ltd チタン・シリサイド膜の形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218291A (en) * 1978-02-28 1980-08-19 Vlsi Technology Research Association Process for forming metal and metal silicide films
DE3211752A1 (de) * 1982-03-30 1983-10-13 Siemens AG, 1000 Berlin und 8000 München Verfahren zum selektiven abscheiden von aus siliziden hochschmelzender metalle bestehenden schichtstrukturen auf im wesentlichen aus silizium bestehenden substraten und deren verwendung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4871691A (en) * 1987-11-09 1989-10-03 Etat Francais Centre National de la Recherche Scientifique Selective deposition process of a refractory metal silicide onto silicon areas

Also Published As

Publication number Publication date
FR2554132B1 (fr) 1988-09-23
NL8403011A (nl) 1985-05-17
US4557943A (en) 1985-12-10
JPS643949B2 (enExample) 1989-01-24
JPS6096763A (ja) 1985-05-30
GB8426071D0 (en) 1984-11-21
FR2554132A1 (fr) 1985-05-03
GB2148946B (en) 1986-02-26
GB2148946A (en) 1985-06-05

Similar Documents

Publication Publication Date Title
DE3439853A1 (de) Verfahren zum niederschlagen von metallsilizidschichten auf ein substrat
DE69030541T2 (de) Verfahren zum Anbringen einer Wolframschicht auf einem Halbleiterplättchen
DE69118031T2 (de) Verfahren zum Herstellen einer Halbleiteranordnung mit einer Ausrichtungsmarke
DE69430405T2 (de) Verbesserte elektrische Verbindungen zu dielektrischen Materialien
DE3231987C2 (de) Verfahren zur Herstellung einer Cobaltsilicidschicht in einem Halbleiterbauelement
DE69215926T2 (de) Verfahren zum Herstellen einer Halbleiteranordnung, wobei ein selbstregistrierendes Kobalt- oder Nickelsilizid gebildet wird
DE69205241T2 (de) Plasmaunterstützte Gasphasenabscheidung von Silizium mit gepulster Gas-Einspeisung.
DE69227050T2 (de) Halbleitersensor mit elektrostatischer Kapazität
DE3632209C2 (enExample)
DE69026783T2 (de) Herstellen von einer selektiv niedergeschlagenen Schicht mit Anwendung von Alkylaluminiumhydrid
DE69120446T2 (de) Verfahren zum Herstellen von abgeschiedener Metallschicht, die Aluminium als Hauptkomponente enthält, mit Anwendung von Alkylaluminiumhydrid
DE3889762T2 (de) Elektrische Schaltung mit supraleitender Mehrschichtstruktur und Herstellungsverfahren dafür.
DE60114304T2 (de) Hexagonal- Bornitrid-Film mit niedriger dielektrischer Konstante ,Film mit dielektrischer Beschichtung und Verfahren zu seiner Herstellung und Plasma-CVD-Apparat
DE1931412A1 (de) Duennschichtwiderstaende und Verfahren zu ihrer Herstellung
EP0280089A1 (de) Verfahren zum Herstellen einer als Kontakt- und Barriereschicht wirkenden Titan/Titannitrid-Doppelschicht in höchstintegrierten Schaltungen
DE4326211A1 (de) Chemisches Bedampfungsverfahren zum Beschichten von Halbleiterwafer mit Titansilicid
DE69222347T2 (de) Verfahren zum selektiven Abscheiden einer TiNx-Schicht durch MOCVD auf einem Halbleiterbauelement
EP0094528A2 (de) Verfahren zum Herstellen von Strukturen von aus Metallsilizid und Polysilizium bestehenden Doppelschichten auf integrierte Halbleiterschaltungen enthaltenden Substraten durch reaktives Ionenätzen
EP0132720A1 (de) Integrierte Halbleiterschaltung mit einer aus Aluminium oder aus einer Aluminiumlegierung bestehenden äusseren Kontaktleiterbahnebene
DE2601656A1 (de) Hochohmige metallkeramikschicht und verfahren zu deren herstellung
EP0002703A1 (de) Verfahren zum Herstellen von dünnen metallisch leitenden Streifen auf Halbleitersubstraten und damit hergestellte metallisch leitende Streifen
DE1950126A1 (de) Verfahren zur Aufringung isolierender Filme und elektronische Bauelemente
DE2300813B2 (de) Verfahren zum herstellen eines verbesserten duennschicht-kondensators
DE4313042C2 (de) Diamantschichten mit hitzebeständigen Ohmschen Elektroden und Herstellungsverfahren dafür
DE4244115C2 (de) Halbleitervorrichtung und Verfahren zum Herstellen der Halbleitervorrichtung

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8130 Withdrawal