DE3334922C2 - Schichtwiderstand - Google Patents
SchichtwiderstandInfo
- Publication number
- DE3334922C2 DE3334922C2 DE3334922A DE3334922A DE3334922C2 DE 3334922 C2 DE3334922 C2 DE 3334922C2 DE 3334922 A DE3334922 A DE 3334922A DE 3334922 A DE3334922 A DE 3334922A DE 3334922 C2 DE3334922 C2 DE 3334922C2
- Authority
- DE
- Germany
- Prior art keywords
- metal film
- insulating layer
- resistor
- film
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 23
- 239000000919 ceramic Substances 0.000 claims abstract description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 4
- 229920001296 polysiloxane Polymers 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 abstract 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 22
- 210000003298 dental enamel Anatomy 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241000779819 Syncarpia glomulifera Species 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- DAMJCWMGELCIMI-UHFFFAOYSA-N benzyl n-(2-oxopyrrolidin-3-yl)carbamate Chemical compound C=1C=CC=CC=1COC(=O)NC1CCNC1=O DAMJCWMGELCIMI-UHFFFAOYSA-N 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000001739 pinus spp. Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 229940036248 turpentine Drugs 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49099—Coating resistive material on a base
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/431,274 US4498071A (en) | 1982-09-30 | 1982-09-30 | High resistance film resistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3334922A1 DE3334922A1 (de) | 1984-04-05 |
| DE3334922C2 true DE3334922C2 (de) | 1987-05-14 |
Family
ID=23711220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3334922A Expired DE3334922C2 (de) | 1982-09-30 | 1983-09-27 | Schichtwiderstand |
Country Status (7)
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61188901A (ja) * | 1985-02-16 | 1986-08-22 | 株式会社日本自動車部品総合研究所 | 流量センサ用膜式抵抗 |
| US4908185A (en) * | 1987-05-08 | 1990-03-13 | Dale Electronics, Inc. | Nichrome resistive element and method of making same |
| US4837550A (en) * | 1987-05-08 | 1989-06-06 | Dale Electronics, Inc. | Nichrome resistive element and method of making same |
| US4900417A (en) * | 1987-05-08 | 1990-02-13 | Dale Electronics, Inc. | Nichrome resistive element and method of making same |
| AU622856B2 (en) * | 1987-10-23 | 1992-04-30 | Nicrobell Pty Limited | Thermocouples of enhanced stability |
| US4912286A (en) * | 1988-08-16 | 1990-03-27 | Ebonex Technologies Inc. | Electrical conductors formed of sub-oxides of titanium |
| US5370458A (en) * | 1990-10-09 | 1994-12-06 | Lockheed Sanders, Inc. | Monolithic microwave power sensor |
| JPH065401A (ja) * | 1992-06-23 | 1994-01-14 | Mitsubishi Electric Corp | チップ型抵抗素子及び半導体装置 |
| US5585776A (en) * | 1993-11-09 | 1996-12-17 | Research Foundation Of The State University Of Ny | Thin film resistors comprising ruthenium oxide |
| AU7291398A (en) | 1997-05-06 | 1998-11-27 | Thermoceramix, L.L.C. | Deposited resistive coatings |
| DE69929841T2 (de) * | 1998-08-25 | 2006-10-26 | Hughes Electronics Corp., El Segundo | Herstellungsverfahren für einen Dünnschichtwiderstand auf ein Keramik-Polymersubstrat |
| US6222166B1 (en) * | 1999-08-09 | 2001-04-24 | Watlow Electric Manufacturing Co. | Aluminum substrate thick film heater |
| AU2002246534A1 (en) | 2000-11-29 | 2002-08-06 | Thermoceramix, Lcc | Resistive heaters and uses thereof |
| US6501906B2 (en) * | 2000-12-18 | 2002-12-31 | C.T.R. Consultoria Tecnica E Representacoes Lda | Evaporation device for volatile substances |
| US6880234B2 (en) * | 2001-03-16 | 2005-04-19 | Vishay Intertechnology, Inc. | Method for thin film NTC thermistor |
| ATE349889T1 (de) | 2001-04-05 | 2007-01-15 | C T R Consultoria Tecnica E Re | Vorrichtung zum verdampfen von flüchtigen substanzen, insbesondere von insektiziden und/oder duftstoffen |
| US6991003B2 (en) * | 2003-07-28 | 2006-01-31 | M.Braun, Inc. | System and method for automatically purifying solvents |
| GB0418218D0 (en) * | 2004-08-16 | 2004-09-15 | Tyco Electronics Ltd Uk | Electrical device having a heat generating electrically resistive element and heat dissipating means therefor |
| FR2927218B1 (fr) | 2008-02-06 | 2010-03-05 | Hydromecanique & Frottement | Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu |
| JP5944123B2 (ja) * | 2011-07-25 | 2016-07-05 | 株式会社立山科学デバイステクノロジー | 電圧非直線性抵抗素子の製造方法 |
| JP6037426B2 (ja) * | 2012-03-23 | 2016-12-07 | 株式会社テクノ菱和 | イオナイザー電極 |
| JP6457172B2 (ja) * | 2013-10-22 | 2019-01-23 | Koa株式会社 | 抵抗素子の製造方法 |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE937178C (de) * | 1950-08-08 | 1955-12-29 | Elektrowerk G M B H | Widerstand mit negativem Temperaturkoeffizienten |
| DE967799C (de) * | 1951-11-09 | 1957-12-12 | Siemens Ag | Verfahren zur Herstellung von elektrischen Widerstaenden |
| DE1100772B (de) * | 1957-02-05 | 1961-03-02 | Kanthal Ab | Flammgespritzter elektrischer Widerstand |
| DE1186539B (de) * | 1960-09-07 | 1965-02-04 | Erie Resistor Ltd | Elektrischer Widerstand mit einer Widerstandsschicht aus Metalloxyd oder Metall und Verfahren zu seiner Herstellung |
| US3174920A (en) * | 1961-06-09 | 1965-03-23 | Post Daniel | Method for producing electrical resistance strain gages by electropolishing |
| NL291334A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1962-04-27 | |||
| GB1083575A (en) * | 1963-07-10 | 1967-09-13 | Marconi Co Ltd | Improvements in or relating to circuit modules |
| GB1078820A (en) * | 1963-09-06 | 1967-08-09 | Matsushita Electric Ind Co Ltd | Method of manufacturing film resistors |
| US3434206A (en) * | 1964-05-12 | 1969-03-25 | Z Elektroizmeritelnykh Priboro | Method of manufacturing a laminated foil resistor |
| AT273301B (de) * | 1964-08-17 | 1969-08-11 | Amphenol Corp | Metallschichtwiderstand |
| US3517436A (en) * | 1965-05-04 | 1970-06-30 | Vishay Intertechnology Inc | Precision resistor of great stability |
| US3525680A (en) * | 1965-12-20 | 1970-08-25 | Ibm | Method and apparatus for the radio frequency sputtering of dielectric materials |
| US3591479A (en) * | 1969-05-08 | 1971-07-06 | Ibm | Sputtering process for preparing stable thin film resistors |
| US3742120A (en) * | 1970-10-28 | 1973-06-26 | Us Navy | Single layer self-destruct circuit produced by co-deposition of tungstic oxide and aluminum |
| US3718883A (en) * | 1971-10-15 | 1973-02-27 | Vishay Intertechnology Inc | Electrical components with flexible terminal means |
| US3791863A (en) * | 1972-05-25 | 1974-02-12 | Stackpole Carbon Co | Method of making electrical resistance devices and articles made thereby |
| US3876912A (en) * | 1972-07-21 | 1975-04-08 | Harris Intertype Corp | Thin film resistor crossovers for integrated circuits |
| JPS5626996B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-11-29 | 1981-06-22 | ||
| US3895219A (en) * | 1973-11-23 | 1975-07-15 | Norton Co | Composite ceramic heating element |
| US4016525A (en) * | 1974-11-29 | 1977-04-05 | Sprague Electric Company | Glass containing resistor having a sub-micron metal film termination |
| US4007352A (en) * | 1975-07-31 | 1976-02-08 | Hewlett-Packard Company | Thin film thermal print head |
| US4064477A (en) * | 1975-08-25 | 1977-12-20 | American Components Inc. | Metal foil resistor |
| US4129848A (en) * | 1975-09-03 | 1978-12-12 | Raytheon Company | Platinum film resistor device |
| US3978316A (en) * | 1975-09-19 | 1976-08-31 | Corning Glass Works | Electrical heating unit |
| US4057707A (en) * | 1975-10-17 | 1977-11-08 | Corning Glass Works | Electric heating unit |
| FR2344940A1 (fr) * | 1976-03-18 | 1977-10-14 | Electro Resistance | Procede pour la fabrication de resistances electriques a partir d'une feuille metallique fixee sur un support isolant et dispositif s'y rapportant |
| FR2351478A1 (fr) * | 1976-05-14 | 1977-12-09 | Thomson Csf | Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede |
| BE855171A (fr) * | 1976-06-08 | 1977-11-28 | Electro Resistance | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
| FR2354617A1 (fr) * | 1976-06-08 | 1978-01-06 | Electro Resistance | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
| GB2050705A (en) * | 1977-06-03 | 1981-01-07 | Angstrohm Precision Inc | Metal foil resistor |
| US4306217A (en) * | 1977-06-03 | 1981-12-15 | Angstrohm Precision, Inc. | Flat electrical components |
| US4172249A (en) * | 1977-07-11 | 1979-10-23 | Vishay Intertechnology, Inc. | Resistive electrical components |
| GB1586857A (en) * | 1977-08-30 | 1981-03-25 | Emi Ltd | Resistive films |
| GB2018036B (en) * | 1978-03-31 | 1982-08-25 | Vishay Intertechnology Inc | Precision resistors subassemblies therefor and their manufacture |
| US4174513A (en) * | 1978-04-05 | 1979-11-13 | American Components Inc. | Foil type resistor with firmly fixed lead wires |
| US4318072A (en) * | 1979-09-04 | 1982-03-02 | Vishay Intertechnology, Inc. | Precision resistor with improved temperature characteristics |
| GB2084247B (en) * | 1980-08-23 | 1984-03-07 | Kyoto Ceramic | Glow plugs for use in diesel engines |
-
1982
- 1982-09-30 US US06/431,274 patent/US4498071A/en not_active Expired - Lifetime
-
1983
- 1983-09-15 GB GB08324705A patent/GB2128813B/en not_active Expired
- 1983-09-15 CA CA000436745A patent/CA1214230A/en not_active Expired
- 1983-09-27 DE DE3334922A patent/DE3334922C2/de not_active Expired
- 1983-09-28 IT IT49053/83A patent/IT1197722B/it active
- 1983-09-30 FR FR8315647A patent/FR2537329B1/fr not_active Expired
- 1983-09-30 JP JP58182914A patent/JPS59132102A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| IT8349053A0 (it) | 1983-09-28 |
| GB2128813B (en) | 1986-04-03 |
| CA1214230A (en) | 1986-11-18 |
| DE3334922A1 (de) | 1984-04-05 |
| US4498071A (en) | 1985-02-05 |
| GB2128813A (en) | 1984-05-02 |
| FR2537329A1 (fr) | 1984-06-08 |
| JPH0152881B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-11-10 |
| GB8324705D0 (en) | 1983-10-19 |
| JPS59132102A (ja) | 1984-07-30 |
| FR2537329B1 (fr) | 1987-09-18 |
| IT1197722B (it) | 1988-12-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |