FR2354617A1 - Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues - Google Patents

Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues

Info

Publication number
FR2354617A1
FR2354617A1 FR7617269A FR7617269A FR2354617A1 FR 2354617 A1 FR2354617 A1 FR 2354617A1 FR 7617269 A FR7617269 A FR 7617269A FR 7617269 A FR7617269 A FR 7617269A FR 2354617 A1 FR2354617 A1 FR 2354617A1
Authority
FR
France
Prior art keywords
mask
sheet
films
manufacture
electrical resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7617269A
Other languages
English (en)
Other versions
FR2354617B1 (fr
Inventor
Paul Simon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Resistance
Original Assignee
Electro Resistance
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Resistance filed Critical Electro Resistance
Priority to FR7617269A priority Critical patent/FR2354617A1/fr
Priority to US05/730,690 priority patent/US4075452A/en
Priority to BE178024A priority patent/BE855171A/fr
Priority to GB22833/77A priority patent/GB1578830A/en
Priority to SE7706399A priority patent/SE414557B/xx
Priority to NO771916A priority patent/NO146586C/no
Priority to AT386477A priority patent/AT353893B/de
Priority to DE2724679A priority patent/DE2724679B2/de
Priority to IT49714/77A priority patent/IT1078455B/it
Priority to IL52246A priority patent/IL52246A0/xx
Priority to DK250577A priority patent/DK144348C/da
Priority to CA279,987A priority patent/CA1085062A/fr
Priority to CH701677A priority patent/CH620545A5/fr
Priority to ES459573A priority patent/ES459573A1/es
Priority to DD77199348A priority patent/DD134469A5/xx
Priority to NL7706265A priority patent/NL168075C/xx
Priority to JP6633977A priority patent/JPS5314400A/ja
Publication of FR2354617A1 publication Critical patent/FR2354617A1/fr
Application granted granted Critical
Publication of FR2354617B1 publication Critical patent/FR2354617B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
    • H01C3/10—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration
    • H01C3/12—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration lying in one plane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/07—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by resistor foil bonding, e.g. cladding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/2404—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by charged particle impact, e.g. by electron or ion beam milling, sputtering, plasma etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

Dans le procédé pour la fabrication de résistances électriques, on utilise une feuille métallique 1 fixée sur un support isolant, et on applique sur ladite feuille 1 un masque 4 comportant des sillons 5 dont les bords 6 correspondent au contour du circuit résultant électrique à graver sur ladite feuille 1. On grave ledit circuit en plaçant l'ensemble constitué par le masque 4, la feuille 1 et le support dans un faisceau d'ions présentant une énergie cinétique supérieure à l'énergie de liaison des atomes constituant le masque 4 et la feuille 1. Application à la production de résistances électriques à fortes valeurs ohmiques par unité de surface
FR7617269A 1976-06-08 1976-06-08 Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues Granted FR2354617A1 (fr)

Priority Applications (17)

Application Number Priority Date Filing Date Title
FR7617269A FR2354617A1 (fr) 1976-06-08 1976-06-08 Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues
US05/730,690 US4075452A (en) 1976-06-08 1976-10-07 Electroresistor and method of making same
BE178024A BE855171A (fr) 1976-06-08 1977-05-27 Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues
GB22833/77A GB1578830A (en) 1976-06-08 1977-05-30 Method of manufacturing electric resistors from metal sheets or films and the resistors obtained thereby
NO771916A NO146586C (no) 1976-06-08 1977-06-01 Fremgangsmaate ved fremstilling av elektriske motstander
AT386477A AT353893B (de) 1976-06-08 1977-06-01 Verfahren zur herstellung eines elektrischen schichtwiderstandes
DE2724679A DE2724679B2 (de) 1976-06-08 1977-06-01 Verfahren zur Herstellung von elektrischen Widerstandselementen, beispielsweise für Wärmesonden und Dehnungsmeßstreifen
SE7706399A SE414557B (sv) 1976-06-08 1977-06-01 Sett for tillverkning av elektriska motstand av en tunn folie av metallegering
IT49714/77A IT1078455B (it) 1976-06-08 1977-06-03 Procedimento per la fabbricazione di resistenze elettriche da fogli o pellicole metalliche e prodotto ottenuto
IL52246A IL52246A0 (en) 1976-06-08 1977-06-03 Process of manufacture of electrical resistors from sheet material
DK250577A DK144348C (da) 1976-06-08 1977-06-07 Fremgangsmaade til fremstilling af elektriske modstande ud fraen folie af metallegering
CA279,987A CA1085062A (fr) 1976-06-08 1977-06-07 Methode de fabrication de resistances electriques a partir de feuilles de metal, et les resistances ainsi fabriquees
CH701677A CH620545A5 (en) 1976-06-08 1977-06-07 Method of manufacturing electrical resistors from a metal foil or film, application to obtaining thermoelectrical probes or strain gauges
ES459573A ES459573A1 (es) 1976-06-08 1977-06-07 Procedimiento para la fabricacion de resistencias electri- cas.
DD77199348A DD134469A5 (de) 1976-06-08 1977-06-07 Verfahren zur herstellung von elektrischen widerstaenden
NL7706265A NL168075C (nl) 1976-06-08 1977-06-07 Werkwijze voor het vervaardigen van elektrische weerstanden, uitgaande van bladen of films van metaal of metaallegering.
JP6633977A JPS5314400A (en) 1976-06-08 1977-06-07 Method of manufacturing electric resistor from metaliiccor alloyythinnplate or film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7617269A FR2354617A1 (fr) 1976-06-08 1976-06-08 Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues

Publications (2)

Publication Number Publication Date
FR2354617A1 true FR2354617A1 (fr) 1978-01-06
FR2354617B1 FR2354617B1 (fr) 1980-09-19

Family

ID=9174106

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7617269A Granted FR2354617A1 (fr) 1976-06-08 1976-06-08 Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues

Country Status (2)

Country Link
US (1) US4075452A (fr)
FR (1) FR2354617A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0070809A2 (fr) * 1981-07-20 1983-01-26 SELENIA INDUSTRIE ELETTRONICHE ASSOCIATE S.p.A. Ajustage de résistances en couche mince par pulvérisation à l'aide d'un faisceau d'ions
EP0112254A1 (fr) * 1982-12-15 1984-06-27 ETAT-FRANCAIS représenté par le Délégué Général pour l' Armement Amorce électrique à élément résistif
EP0230761A2 (fr) * 1985-12-19 1987-08-05 Marconi Electronic Devices Limited Agencement de circuit résistif
FR2622042A1 (fr) * 1987-10-16 1989-04-21 Micro Ingenierie 4 Procede pour la fabrication de resistances electriques a partir d'au moins une feuille metallique fixee sur un support isolant

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4176445A (en) * 1977-06-03 1979-12-04 Angstrohm Precision, Inc. Metal foil resistor
US4498071A (en) * 1982-09-30 1985-02-05 Dale Electronics, Inc. High resistance film resistor
FR2538207B1 (fr) * 1982-12-15 1985-08-16 Electro Resistance Procede pour la fabrication d'un circuit electrique destine a la mise a feu d'un dispositif pyrotechnique et circuit ainsi obtenu
US4529958A (en) * 1983-05-02 1985-07-16 Dale Electronics, Inc. Electrical resistor
US4467311A (en) * 1983-05-02 1984-08-21 Dale Electronics, Inc. Electrical resistor
US4698129A (en) * 1986-05-01 1987-10-06 Oregon Graduate Center Focused ion beam micromachining of optical surfaces in materials
US5466484A (en) * 1993-09-29 1995-11-14 Motorola, Inc. Resistor structure and method of setting a resistance value
KR20040005977A (ko) * 2001-05-22 2004-01-16 인피네온 테크놀로지스 아게 미리 규정된 층 두께 프로파일을 가진 층의 제조 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3431640A (en) * 1966-03-04 1969-03-11 Burroughs Corp Method for adjusting thin film resistors
US3663224A (en) * 1966-11-03 1972-05-16 Teeg Research Inc Electrical components, electrical circuits, and the like, and methods for making the same by means of radiation sensitive elements
US3851382A (en) * 1968-12-02 1974-12-03 Telefunken Patent Method of producing a semiconductor or thick film device
US3805210A (en) * 1969-12-04 1974-04-16 M Croset Integrated circuit resistor and a method for the manufacture thereof
US3860783A (en) * 1970-10-19 1975-01-14 Bell Telephone Labor Inc Ion etching through a pattern mask
US3758745A (en) * 1971-09-07 1973-09-11 Microsystems Int Ltd Substrate positioned determination structure and method
JPS5144871B2 (fr) * 1971-09-25 1976-12-01
US3988564A (en) * 1972-07-17 1976-10-26 Hughes Aircraft Company Ion beam micromachining method
US3851293A (en) * 1972-08-15 1974-11-26 Waters Mfg Inc Electrical resistance element and method of manufacture
US3916142A (en) 1973-03-29 1975-10-28 Gte Automatic Electric Lab Inc Method of static trimming of film deposited resistors

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0070809A2 (fr) * 1981-07-20 1983-01-26 SELENIA INDUSTRIE ELETTRONICHE ASSOCIATE S.p.A. Ajustage de résistances en couche mince par pulvérisation à l'aide d'un faisceau d'ions
EP0070809A3 (fr) * 1981-07-20 1983-07-13 SELENIA INDUSTRIE ELETTRONICHE ASSOCIATE S.p.A. Ajustage de résistances en couche mince par pulvérisation à l'aide d'un faisceau d'ions
EP0112254A1 (fr) * 1982-12-15 1984-06-27 ETAT-FRANCAIS représenté par le Délégué Général pour l' Armement Amorce électrique à élément résistif
EP0230761A2 (fr) * 1985-12-19 1987-08-05 Marconi Electronic Devices Limited Agencement de circuit résistif
EP0230761A3 (fr) * 1985-12-19 1988-09-07 Marconi Electronic Devices Limited Agencement de circuit résistif
FR2622042A1 (fr) * 1987-10-16 1989-04-21 Micro Ingenierie 4 Procede pour la fabrication de resistances electriques a partir d'au moins une feuille metallique fixee sur un support isolant

Also Published As

Publication number Publication date
FR2354617B1 (fr) 1980-09-19
US4075452A (en) 1978-02-21

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ST Notification of lapse