FR2351478A1 - Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede - Google Patents

Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede

Info

Publication number
FR2351478A1
FR2351478A1 FR7614718A FR7614718A FR2351478A1 FR 2351478 A1 FR2351478 A1 FR 2351478A1 FR 7614718 A FR7614718 A FR 7614718A FR 7614718 A FR7614718 A FR 7614718A FR 2351478 A1 FR2351478 A1 FR 2351478A1
Authority
FR
France
Prior art keywords
pref
passivation
dielectric
thin film
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7614718A
Other languages
English (en)
Other versions
FR2351478B1 (fr
Inventor
Raphael Perez De La Sota
Gonzalo Velasco
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7614718A priority Critical patent/FR2351478A1/fr
Priority to DE19772721703 priority patent/DE2721703A1/de
Publication of FR2351478A1 publication Critical patent/FR2351478A1/fr
Application granted granted Critical
Publication of FR2351478B1 publication Critical patent/FR2351478B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/02—Housing; Enclosing; Embedding; Filling the housing or enclosure
    • H01C1/034—Housing; Enclosing; Embedding; Filling the housing or enclosure the housing or enclosure being formed as coating or mould without outer sheath
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Formation Of Insulating Films (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
FR7614718A 1976-05-14 1976-05-14 Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede Granted FR2351478A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR7614718A FR2351478A1 (fr) 1976-05-14 1976-05-14 Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede
DE19772721703 DE2721703A1 (de) 1976-05-14 1977-05-13 Verfahren zur herstellung passivierter duennschichtwiderstaende

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7614718A FR2351478A1 (fr) 1976-05-14 1976-05-14 Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede

Publications (2)

Publication Number Publication Date
FR2351478A1 true FR2351478A1 (fr) 1977-12-09
FR2351478B1 FR2351478B1 (fr) 1981-11-06

Family

ID=9173191

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7614718A Granted FR2351478A1 (fr) 1976-05-14 1976-05-14 Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede

Country Status (2)

Country Link
DE (1) DE2721703A1 (fr)
FR (1) FR2351478A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0082183A1 (fr) * 1981-06-30 1983-06-29 Motorola Inc Materiau de resistance a film mince et procede.
EP0101632A1 (fr) * 1982-08-24 1984-02-29 Koninklijke Philips Electronics N.V. Résistance
FR2537329A1 (fr) * 1982-09-30 1984-06-08 Dale Electronics Resistance a couche de haute resistivite et son procede de fabrication
US4510178A (en) * 1981-06-30 1985-04-09 Motorola, Inc. Thin film resistor material and method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3301665A1 (de) * 1983-01-20 1984-07-26 Brown, Boveri & Cie Ag, 6800 Mannheim Verfahren zur herstellung eines duennfilmwiderstandes
US4612433A (en) * 1983-12-28 1986-09-16 Pentel Kabushiki Kaisha Thermal head and manufacturing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0082183A1 (fr) * 1981-06-30 1983-06-29 Motorola Inc Materiau de resistance a film mince et procede.
EP0082183A4 (fr) * 1981-06-30 1983-11-09 Motorola Inc Materiau de resistance a film mince et procede.
US4510178A (en) * 1981-06-30 1985-04-09 Motorola, Inc. Thin film resistor material and method
EP0101632A1 (fr) * 1982-08-24 1984-02-29 Koninklijke Philips Electronics N.V. Résistance
FR2537329A1 (fr) * 1982-09-30 1984-06-08 Dale Electronics Resistance a couche de haute resistivite et son procede de fabrication

Also Published As

Publication number Publication date
FR2351478B1 (fr) 1981-11-06
DE2721703A1 (de) 1977-11-24

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Legal Events

Date Code Title Description
ST Notification of lapse