GB0418218D0 - Electrical device having a heat generating electrically resistive element and heat dissipating means therefor - Google Patents
Electrical device having a heat generating electrically resistive element and heat dissipating means thereforInfo
- Publication number
- GB0418218D0 GB0418218D0 GBGB0418218.4A GB0418218A GB0418218D0 GB 0418218 D0 GB0418218 D0 GB 0418218D0 GB 0418218 A GB0418218 A GB 0418218A GB 0418218 D0 GB0418218 D0 GB 0418218D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- resistive element
- electrical device
- electrically resistive
- means therefor
- dissipating means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/08—Cooling, heating or ventilating arrangements
- H01C1/084—Cooling, heating or ventilating arrangements using self-cooling, e.g. fins, heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
- H01C3/10—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration
- H01C3/12—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration lying in one plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
- H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Physical Vapour Deposition (AREA)
- Thermistors And Varistors (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Resistance Heating (AREA)
- Electronic Switches (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
This invention provides an electrical device (10) having improved heat transfer properties. The electrical device comprises an electrically conductive resistive element (18) provided on a heat transfer medium for transferring heat from the resistive element. The resistive element comprises an 80/20 nickel chromium material sputtered onto a surface of an aluminum nitride substrate. The 80/20 nickel chromium material is deposited on the surface of the substrate in thickness ranging from 0.5 to 25 microns. The resistance of the resistive element is controlled by altering the chemical composition of the sputtered film by introducing a reactive gas in the sputtering process.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0418218.4A GB0418218D0 (en) | 2004-08-16 | 2004-08-16 | Electrical device having a heat generating electrically resistive element and heat dissipating means therefor |
DE602005025294T DE602005025294D1 (en) | 2004-08-16 | 2005-08-05 | An electric device comprising a heat generating electrical resistance element and heat dissipation means therefor |
EP05254890A EP1628331B1 (en) | 2004-08-16 | 2005-08-05 | Electrical device having a heat generating electrically resistive element and heat dissipating means therefor |
AT05254890T ATE492027T1 (en) | 2004-08-16 | 2005-08-05 | ELECTRICAL DEVICE COMPRISING A HEAT GENERATING ELECTRICAL RESISTANCE ELEMENT AND HEAT DISSIPATION MEANS THEREOF |
JP2005235395A JP2006114881A (en) | 2004-08-16 | 2005-08-15 | Electrical apparatus with heating electrically resistive element and means of heat dissipation for it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0418218.4A GB0418218D0 (en) | 2004-08-16 | 2004-08-16 | Electrical device having a heat generating electrically resistive element and heat dissipating means therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0418218D0 true GB0418218D0 (en) | 2004-09-15 |
Family
ID=33017558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB0418218.4A Ceased GB0418218D0 (en) | 2004-08-16 | 2004-08-16 | Electrical device having a heat generating electrically resistive element and heat dissipating means therefor |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1628331B1 (en) |
JP (1) | JP2006114881A (en) |
AT (1) | ATE492027T1 (en) |
DE (1) | DE602005025294D1 (en) |
GB (1) | GB0418218D0 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009041974A1 (en) * | 2007-09-27 | 2009-04-02 | Vishay Dale Electronics, Inc. | Power resistor |
CN103093908B (en) * | 2007-09-27 | 2017-04-26 | 韦沙戴尔电子公司 | Power resistor |
US7843309B2 (en) | 2007-09-27 | 2010-11-30 | Vishay Dale Electronics, Inc. | Power resistor |
WO2012081369A1 (en) * | 2010-12-17 | 2012-06-21 | 新日鐵化学株式会社 | Electromagnetic noise suppressing body, use of same, and electronic device |
JP2014241451A (en) * | 2014-09-18 | 2014-12-25 | 住友金属鉱山株式会社 | Resistance thin film element with copper conductor layer |
CN206059059U (en) * | 2016-09-07 | 2017-03-29 | 南京南瑞继保电气有限公司 | A kind of shell mechanism of Planar capacitor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4498071A (en) * | 1982-09-30 | 1985-02-05 | Dale Electronics, Inc. | High resistance film resistor |
US5355281A (en) | 1993-06-29 | 1994-10-11 | E.B.G. Elektronische Bauelemente Gesellschaft M.B.H. | Electrical device having a bonded ceramic-copper heat transfer medium |
CA2252113A1 (en) * | 1997-10-29 | 1999-04-29 | Yoshihiko Numata | Substrate and process for producing the same |
GB2360530A (en) | 2000-03-25 | 2001-09-26 | Plasma Quest Ltd | High target utilisation sputtering system with remote plasma source |
US7106167B2 (en) * | 2002-06-28 | 2006-09-12 | Heetronix | Stable high temperature sensor system with tungsten on AlN |
-
2004
- 2004-08-16 GB GBGB0418218.4A patent/GB0418218D0/en not_active Ceased
-
2005
- 2005-08-05 DE DE602005025294T patent/DE602005025294D1/en active Active
- 2005-08-05 AT AT05254890T patent/ATE492027T1/en active
- 2005-08-05 EP EP05254890A patent/EP1628331B1/en active Active
- 2005-08-15 JP JP2005235395A patent/JP2006114881A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1628331B1 (en) | 2010-12-15 |
ATE492027T1 (en) | 2011-01-15 |
EP1628331A1 (en) | 2006-02-22 |
DE602005025294D1 (en) | 2011-01-27 |
JP2006114881A (en) | 2006-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |