DE3239204C2 - - Google Patents
Info
- Publication number
- DE3239204C2 DE3239204C2 DE3239204A DE3239204A DE3239204C2 DE 3239204 C2 DE3239204 C2 DE 3239204C2 DE 3239204 A DE3239204 A DE 3239204A DE 3239204 A DE3239204 A DE 3239204A DE 3239204 C2 DE3239204 C2 DE 3239204C2
- Authority
- DE
- Germany
- Prior art keywords
- source
- gate
- region
- layer
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/66—Vertical DMOS [VDMOS] FETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
- H10D62/126—Top-view geometrical layouts of the regions or the junctions
- H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/393—Body regions of DMOS transistors or IGBTs
Landscapes
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31480081A | 1981-10-26 | 1981-10-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3239204A1 DE3239204A1 (de) | 1983-05-19 |
| DE3239204C2 true DE3239204C2 (enrdf_load_stackoverflow) | 1987-07-23 |
Family
ID=23221492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19823239204 Granted DE3239204A1 (de) | 1981-10-26 | 1982-10-22 | Feldeffekt-transistorstruktur |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5882574A (enrdf_load_stackoverflow) |
| DE (1) | DE3239204A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2515429B1 (enrdf_load_stackoverflow) |
| GB (1) | GB2108758B (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4833513A (en) * | 1985-01-20 | 1989-05-23 | Tdk Corporation | MOS FET semiconductor device having a cell pattern arrangement for optimizing channel width |
| US5317184A (en) * | 1992-11-09 | 1994-05-31 | Harris Corporation | Device and method for improving current carrying capability in a semiconductor device |
| EP0823735A1 (en) * | 1996-08-05 | 1998-02-11 | Sgs-Thomson Microelectronics S.A. | MOS-technology power device |
| JP2006339516A (ja) | 2005-06-03 | 2006-12-14 | Rohm Co Ltd | 半導体装置およびその製造方法 |
| CN110676317B (zh) * | 2019-09-30 | 2022-10-11 | 福建省福联集成电路有限公司 | 一种晶体管管芯结构及制作方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4055884A (en) * | 1976-12-13 | 1977-11-01 | International Business Machines Corporation | Fabrication of power field effect transistors and the resulting structures |
| FR2460542A1 (fr) * | 1979-06-29 | 1981-01-23 | Thomson Csf | Transistor a effet de champ vertical de puissance pour hautes frequences et procede de realisation d'un tel transistor |
| FR2461360A1 (fr) * | 1979-07-10 | 1981-01-30 | Thomson Csf | Procede de fabrication d'un transistor a effet de champ du type dmos a fonctionnement vertical et transistor obtenu par ce procede |
| US4364073A (en) * | 1980-03-25 | 1982-12-14 | Rca Corporation | Power MOSFET with an anode region |
-
1982
- 1982-10-05 GB GB08228337A patent/GB2108758B/en not_active Expired
- 1982-10-22 DE DE19823239204 patent/DE3239204A1/de active Granted
- 1982-10-25 FR FR8217784A patent/FR2515429B1/fr not_active Expired
- 1982-10-25 JP JP57187341A patent/JPS5882574A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2515429B1 (fr) | 1986-09-26 |
| DE3239204A1 (de) | 1983-05-19 |
| GB2108758B (en) | 1985-08-21 |
| FR2515429A1 (fr) | 1983-04-29 |
| GB2108758A (en) | 1983-05-18 |
| JPS5882574A (ja) | 1983-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8328 | Change in the person/name/address of the agent |
Free format text: DERZEIT KEIN VERTRETER BESTELLT |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: SCHUELER, H., DIPL.-CHEM. DR.RER.NAT., PAT.-ANW., 6000 FRANKFURT |
|
| 8339 | Ceased/non-payment of the annual fee |