DE3237536C2 - Verfahren zur Herstellung eines p-leitenden (II/VI)-Verbindungshalbleiterkristalls - Google Patents

Verfahren zur Herstellung eines p-leitenden (II/VI)-Verbindungshalbleiterkristalls

Info

Publication number
DE3237536C2
DE3237536C2 DE3237536A DE3237536A DE3237536C2 DE 3237536 C2 DE3237536 C2 DE 3237536C2 DE 3237536 A DE3237536 A DE 3237536A DE 3237536 A DE3237536 A DE 3237536A DE 3237536 C2 DE3237536 C2 DE 3237536C2
Authority
DE
Germany
Prior art keywords
crystal
vapor pressure
melt
zone
znse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3237536A
Other languages
German (de)
English (en)
Other versions
DE3237536A1 (de
Inventor
Jun-Ichi Sendai Miyagi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zaidan Hojin Handotai Kenkyu Shinkokai
Original Assignee
Zaidan Hojin Handotai Kenkyu Shinkokai
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zaidan Hojin Handotai Kenkyu Shinkokai filed Critical Zaidan Hojin Handotai Kenkyu Shinkokai
Publication of DE3237536A1 publication Critical patent/DE3237536A1/de
Application granted granted Critical
Publication of DE3237536C2 publication Critical patent/DE3237536C2/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/823—Materials of the light-emitting regions comprising only Group II-VI materials, e.g. ZnO
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
    • C30B19/04—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux the solvent being a component of the crystal composition
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
    • C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/024—Group 12/16 materials
    • H01L21/02409—Selenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02551—Group 12/16 materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02551—Group 12/16 materials
    • H01L21/0256—Selenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02579—P-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02581—Transition metal or rare earth elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02625—Liquid deposition using melted materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/012—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group II-IV materials
    • H10P14/263—
    • H10P14/265—
    • H10P14/2916—
    • H10P14/3424—
    • H10P14/3431—
    • H10P14/3444—
    • H10P14/3446—

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Led Devices (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE3237536A 1981-10-09 1982-10-09 Verfahren zur Herstellung eines p-leitenden (II/VI)-Verbindungshalbleiterkristalls Expired DE3237536C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56161837A JPS5863183A (ja) 1981-10-09 1981-10-09 ２−６族間化合物の結晶成長法

Publications (2)

Publication Number Publication Date
DE3237536A1 DE3237536A1 (de) 1983-04-28
DE3237536C2 true DE3237536C2 (de) 1986-11-20

Family

ID=15742870

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3237536A Expired DE3237536C2 (de) 1981-10-09 1982-10-09 Verfahren zur Herstellung eines p-leitenden (II/VI)-Verbindungshalbleiterkristalls

Country Status (5)

Country Link
US (1) US4783426A (show.php)
JP (1) JPS5863183A (show.php)
DE (1) DE3237536C2 (show.php)
FR (1) FR2514563A1 (show.php)
GB (1) GB2107518B (show.php)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575325A (en) * 1980-06-12 1982-01-12 Junichi Nishizawa Semicondoctor p-n junction device and manufacture thereof
JPS598383A (ja) * 1982-07-06 1984-01-17 Semiconductor Res Found ＺｎＳｅ緑色発光ダイオ−ド
JPS6050759B2 (ja) * 1982-07-14 1985-11-09 財団法人 半導体研究振興会 ＺｎＳｅのエピタキシヤル成長法及び成長装置
JP2723227B2 (ja) * 1986-09-26 1998-03-09 株式会社東芝 半導体発光素子の製造方法
EP0316161B1 (en) * 1987-11-10 1994-01-19 Kabushiki Kaisha Toshiba Method of heat treatment of a groups II-VI compound semiconductor
US5169799A (en) * 1988-03-16 1992-12-08 Sumitomo Electric Industries, Ltd. Method for forming a doped ZnSe single crystal
US4904618A (en) * 1988-08-22 1990-02-27 Neumark Gertrude F Process for doping crystals of wide band gap semiconductors
US5252499A (en) * 1988-08-15 1993-10-12 Rothschild G F Neumark Wide band-gap semiconductors having low bipolar resistivity and method of formation
US5213998A (en) * 1991-05-15 1993-05-25 Minnesota Mining And Manufacturing Company Method for making an ohmic contact for p-type group II-VI compound semiconductors
AU654726B2 (en) * 1991-05-15 1994-11-17 Minnesota Mining And Manufacturing Company Blue-green laser diode
US5488234A (en) * 1993-03-18 1996-01-30 Matsushita Electric Industrial Co., Ltd. Semiconductor element having bivalent and VI group element and an insulating layer
CN102677176A (zh) * 2008-09-01 2012-09-19 西北工业大学 一种用于硒化锌单晶体生长的安瓿
US20110094557A1 (en) * 2009-10-27 2011-04-28 International Business Machines Corporation Method of forming semiconductor film and photovoltaic device including the film

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE536985A (show.php) * 1954-04-01
US3224912A (en) * 1962-07-13 1965-12-21 Monsanto Co Use of hydrogen halide and hydrogen in separate streams as carrier gases in vapor deposition of ii-vi compounds
US3447234A (en) * 1964-10-12 1969-06-03 Singer General Precision Photoconductive thin film cell responding to a broad spectral range of light input
US3483028A (en) * 1965-05-17 1969-12-09 Bell & Howell Co Preparation of light sensitive device of enhanced photoconductive sensitivity
US3732471A (en) * 1969-11-10 1973-05-08 Corning Glass Works Method of obtaining type conversion in zinc telluride and resultant p-n junction devices
US3743553A (en) * 1971-06-18 1973-07-03 Honeywell Inc Pn junctions in mercury cadmium telluride
US4105478A (en) * 1977-01-06 1978-08-08 Honeywell, Inc. Doping hgcdte with li
US4143235A (en) * 1977-12-30 1979-03-06 Chevron Research Company Cadmium sulfide photovoltaic cell and method of fabrication
JPS575325A (en) * 1980-06-12 1982-01-12 Junichi Nishizawa Semicondoctor p-n junction device and manufacture thereof
JPS6037076B2 (ja) * 1980-06-11 1985-08-23 潤一 西澤 ３−６族化合物半導体の温度液相成長法
CA1165851A (en) * 1980-06-16 1984-04-17 Subhash Mahajan Epitaxial devices having reduced dislocation count
JPS577131A (en) * 1980-06-16 1982-01-14 Junichi Nishizawa Manufacture of p-n junction
US4422888A (en) * 1981-02-27 1983-12-27 Xerox Corporation Method for successfully depositing doped II-VI epitaxial layers by organometallic chemical vapor deposition
JPS58156598A (ja) * 1982-03-09 1983-09-17 Semiconductor Res Found 結晶成長法
JPS598383A (ja) * 1982-07-06 1984-01-17 Semiconductor Res Found ＺｎＳｅ緑色発光ダイオ−ド
JPS6050759B2 (ja) * 1982-07-14 1985-11-09 財団法人 半導体研究振興会 ＺｎＳｅのエピタキシヤル成長法及び成長装置

Also Published As

Publication number Publication date
US4783426A (en) 1988-11-08
JPS5863183A (ja) 1983-04-14
FR2514563A1 (fr) 1983-04-15
FR2514563B1 (show.php) 1985-01-04
GB2107518B (en) 1985-09-18
GB2107518A (en) 1983-04-27
JPS6230693B2 (show.php) 1987-07-03
DE3237536A1 (de) 1983-04-28

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Legal Events

Date Code Title Description
8101 Request for examination as to novelty
8105 Search report available
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: C30B 9/06

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee