DE2747186C2 - Modulare Getter-Pumpe - Google Patents
Modulare Getter-PumpeInfo
- Publication number
- DE2747186C2 DE2747186C2 DE2747186A DE2747186A DE2747186C2 DE 2747186 C2 DE2747186 C2 DE 2747186C2 DE 2747186 A DE2747186 A DE 2747186A DE 2747186 A DE2747186 A DE 2747186A DE 2747186 C2 DE2747186 C2 DE 2747186C2
- Authority
- DE
- Germany
- Prior art keywords
- modular
- getter pump
- getter
- pump according
- sections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 22
- 239000007789 gas Substances 0.000 claims description 8
- 238000010521 absorption reaction Methods 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 229910000986 non-evaporable getter Inorganic materials 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910001006 Constantan Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 238000001179 sorption measurement Methods 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 239000012876 carrier material Substances 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 230000004927 fusion Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229940090046 jet injector Drugs 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2900476A IT1083971B (it) | 1976-11-03 | 1976-11-03 | Pompa getter di tipo modulare |
| IT2107577A IT1115267B (it) | 1977-03-09 | 1977-03-09 | Pompa getter perfezionata di tipo modulare |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2747186A1 DE2747186A1 (de) | 1978-05-18 |
| DE2747186C2 true DE2747186C2 (de) | 1986-09-11 |
Family
ID=26327768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2747186A Expired DE2747186C2 (de) | 1976-11-03 | 1977-10-20 | Modulare Getter-Pumpe |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4137012A (enExample) |
| JP (1) | JPS5920875B2 (enExample) |
| DE (1) | DE2747186C2 (enExample) |
| FR (1) | FR2370357A1 (enExample) |
| GB (1) | GB1586676A (enExample) |
| NL (1) | NL182521C (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3332608A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-pumpe fuer hochvakuum- und gasentladungsanlagen |
| DE3332606A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen |
| USH984H (en) | 1983-12-21 | 1991-11-05 | The United States Of America As Represented By The United States Department Of Energy | Self-pumping impurity control |
| JPH02226700A (ja) * | 1989-02-27 | 1990-09-10 | Ishikawajima Harima Heavy Ind Co Ltd | 真空容器におけるｎｅｇストリップの取付構造 |
| JP2694665B2 (ja) * | 1989-03-23 | 1997-12-24 | 株式会社日立製作所 | 粒子加速器のビームダクト組込みポンプ |
| GB9007327D0 (en) * | 1990-03-31 | 1990-05-30 | Smiths Industries Plc | Gas discharge electrodes |
| US5161955A (en) * | 1991-08-20 | 1992-11-10 | Danielson Associates, Inc. | High vacuum pump using bulk getter material |
| US5154582A (en) * | 1991-08-20 | 1992-10-13 | Danielson Associates, Inc. | Rough vacuum pump using bulk getter material |
| IT1255438B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| IT1255439B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| US6361618B1 (en) | 1994-07-20 | 2002-03-26 | Applied Materials, Inc. | Methods and apparatus for forming and maintaining high vacuum environments |
| US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
| US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
| US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
| US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
| US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
| US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
| IT1274478B (it) * | 1995-05-11 | 1997-07-17 | Getters Spa | Insieme di riscaldamento per pompe getter e purificatori di gas |
| IT237018Y1 (it) * | 1995-07-10 | 2000-08-31 | Getters Spa | Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile |
| US5935395A (en) * | 1995-11-08 | 1999-08-10 | Mitel Corporation | Substrate processing apparatus with non-evaporable getter pump |
| IT1290548B1 (it) * | 1997-02-24 | 1998-12-10 | Getters Spa | Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli |
| KR20010006278A (ko) * | 1997-04-18 | 2001-01-26 | 사이스 푸어 가스 인코포레이티드 | 인시튜 게터펌프시스템 및 방법 |
| IT1292175B1 (it) * | 1997-06-17 | 1999-01-25 | Getters Spa | Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare |
| IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
| IT1297013B1 (it) * | 1997-12-23 | 1999-08-03 | Getters Spa | Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore |
| US6077404A (en) | 1998-02-17 | 2000-06-20 | Applied Material, Inc. | Reflow chamber and process |
| AU2001283301A1 (en) * | 2000-08-10 | 2002-02-25 | Indigo Energy, Inc. | Long-life vacuum system for energy storage flywheels |
| GB0319171D0 (en) * | 2003-08-15 | 2003-09-17 | Boc Group Plc | Purifier/getter for vacuum and uhp gas applications |
| US9734926B2 (en) | 2008-05-02 | 2017-08-15 | Shine Medical Technologies, Inc. | Device and method for producing medical isotopes |
| US10978214B2 (en) | 2010-01-28 | 2021-04-13 | SHINE Medical Technologies, LLC | Segmented reaction chamber for radioisotope production |
| US10734126B2 (en) | 2011-04-28 | 2020-08-04 | SHINE Medical Technologies, LLC | Methods of separating medical isotopes from uranium solutions |
| US9057362B2 (en) | 2011-09-28 | 2015-06-16 | The Boeing Company | Sublimation pump and method |
| CA2869559C (en) | 2012-04-05 | 2022-03-29 | Shine Medical Technologies, Inc. | Aqueous assembly and control method |
| ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
| TWI660125B (zh) * | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1293781A (fr) * | 1961-02-04 | 1962-05-18 | E S S P A Sa | Produit dégazeur à base d'alliage de zirconium et d'aluminium |
| FR1413662A (fr) * | 1963-11-08 | 1965-10-08 | Philips Nv | Pompe ionique |
| NL163054C (nl) * | 1968-08-10 | 1980-07-15 | Getters Spa | Niet-verdampende getterinrichting. |
| DE1947413A1 (de) * | 1968-10-28 | 1970-04-30 | Getters Spa | Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen Gefaessen |
| GB1274909A (en) * | 1968-11-20 | 1972-05-17 | Getters Spa | Improvements in or relating to getter pumps |
| DE2034633C3 (de) * | 1969-07-24 | 1979-10-25 | S.A.E.S. Getters S.P.A., Mailand (Italien) | Kartusche für eine Getterpumpe |
| US3620645A (en) * | 1970-05-01 | 1971-11-16 | Getters Spa | Getter device |
| US3652317A (en) * | 1970-05-01 | 1972-03-28 | Getters Spa | Method of producing substrate having a particulate metallic coating |
| IT998681B (it) * | 1973-10-01 | 1976-02-20 | Getters Spa | Pompa getter |
| US4050914A (en) * | 1976-07-26 | 1977-09-27 | S.A.E.S. Getters S.P.A. | Accelerator for charged particles |
-
1977
- 1977-10-07 US US05/840,243 patent/US4137012A/en not_active Expired - Lifetime
- 1977-10-20 DE DE2747186A patent/DE2747186C2/de not_active Expired
- 1977-10-28 FR FR7732692A patent/FR2370357A1/fr active Granted
- 1977-11-01 NL NLAANVRAGE7712025,A patent/NL182521C/xx not_active IP Right Cessation
- 1977-11-02 GB GB45566/77A patent/GB1586676A/en not_active Expired
- 1977-11-02 JP JP52130956A patent/JPS5920875B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5357516A (en) | 1978-05-24 |
| NL182521C (nl) | 1988-03-16 |
| FR2370357A1 (fr) | 1978-06-02 |
| DE2747186A1 (de) | 1978-05-18 |
| FR2370357B1 (enExample) | 1983-02-18 |
| GB1586676A (en) | 1981-03-25 |
| NL182521B (nl) | 1987-10-16 |
| JPS5920875B2 (ja) | 1984-05-16 |
| NL7712025A (nl) | 1978-05-08 |
| US4137012A (en) | 1979-01-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |