FR2370357A1 - Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels - Google Patents

Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels

Info

Publication number
FR2370357A1
FR2370357A1 FR7732692A FR7732692A FR2370357A1 FR 2370357 A1 FR2370357 A1 FR 2370357A1 FR 7732692 A FR7732692 A FR 7732692A FR 7732692 A FR7732692 A FR 7732692A FR 2370357 A1 FR2370357 A1 FR 2370357A1
Authority
FR
France
Prior art keywords
getter
residual gas
folded strip
absorption device
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7732692A
Other languages
English (en)
French (fr)
Other versions
FR2370357B1 (enExample
Inventor
Paolo Della Porta
Bruno Ferrario
Livio Rosai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT2900476A external-priority patent/IT1083971B/it
Priority claimed from IT2107577A external-priority patent/IT1115267B/it
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of FR2370357A1 publication Critical patent/FR2370357A1/fr
Application granted granted Critical
Publication of FR2370357B1 publication Critical patent/FR2370357B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
FR7732692A 1976-11-03 1977-10-28 Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels Granted FR2370357A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT2900476A IT1083971B (it) 1976-11-03 1976-11-03 Pompa getter di tipo modulare
IT2107577A IT1115267B (it) 1977-03-09 1977-03-09 Pompa getter perfezionata di tipo modulare

Publications (2)

Publication Number Publication Date
FR2370357A1 true FR2370357A1 (fr) 1978-06-02
FR2370357B1 FR2370357B1 (enExample) 1983-02-18

Family

ID=26327768

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7732692A Granted FR2370357A1 (fr) 1976-11-03 1977-10-28 Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels

Country Status (6)

Country Link
US (1) US4137012A (enExample)
JP (1) JPS5920875B2 (enExample)
DE (1) DE2747186C2 (enExample)
FR (1) FR2370357A1 (enExample)
GB (1) GB1586676A (enExample)
NL (1) NL182521C (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994002957A1 (en) * 1992-07-17 1994-02-03 Saes Getters S.P.A. High capacity getter pump
WO1996017171A3 (en) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3332608A1 (de) * 1983-09-09 1985-03-28 Siemens AG, 1000 Berlin und 8000 München Getter-pumpe fuer hochvakuum- und gasentladungsanlagen
DE3332606A1 (de) * 1983-09-09 1985-03-28 Siemens AG, 1000 Berlin und 8000 München Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen
USH984H (en) 1983-12-21 1991-11-05 The United States Of America As Represented By The United States Department Of Energy Self-pumping impurity control
JPH02226700A (ja) * 1989-02-27 1990-09-10 Ishikawajima Harima Heavy Ind Co Ltd 真空容器におけるｎｅｇストリップの取付構造
JP2694665B2 (ja) * 1989-03-23 1997-12-24 株式会社日立製作所 粒子加速器のビームダクト組込みポンプ
GB9007327D0 (en) * 1990-03-31 1990-05-30 Smiths Industries Plc Gas discharge electrodes
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
IT1274478B (it) * 1995-05-11 1997-07-17 Getters Spa Insieme di riscaldamento per pompe getter e purificatori di gas
IT237018Y1 (it) * 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
US5935395A (en) * 1995-11-08 1999-08-10 Mitel Corporation Substrate processing apparatus with non-evaporable getter pump
IT1290548B1 (it) 1997-02-24 1998-12-10 Getters Spa Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli
CN1252844A (zh) * 1997-04-18 2000-05-10 赛斯纯净气体公司 现场吸气泵系统和方法
IT1292175B1 (it) * 1997-06-17 1999-01-25 Getters Spa Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
IT1297013B1 (it) * 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
US6077404A (en) 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process
AU2001283301A1 (en) * 2000-08-10 2002-02-25 Indigo Energy, Inc. Long-life vacuum system for energy storage flywheels
GB0319171D0 (en) * 2003-08-15 2003-09-17 Boc Group Plc Purifier/getter for vacuum and uhp gas applications
KR101673954B1 (ko) 2008-05-02 2016-11-08 샤인 메디컬 테크놀로지스, 인크. 의료용 동위원소를 생산하는 디바이스 및 방법
WO2012003009A2 (en) 2010-01-28 2012-01-05 Shine Medical Technologies, Inc. Segmented reaction chamber for radioisotope production
US10734126B2 (en) 2011-04-28 2020-08-04 SHINE Medical Technologies, LLC Methods of separating medical isotopes from uranium solutions
US9057362B2 (en) 2011-09-28 2015-06-16 The Boeing Company Sublimation pump and method
KR102172861B1 (ko) 2012-04-05 2020-11-02 샤인 메디컬 테크놀로지스, 인크. 수성 집합체 및 제어 방법
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
TWI660125B (zh) * 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1293781A (fr) * 1961-02-04 1962-05-18 E S S P A Sa Produit dégazeur à base d'alliage de zirconium et d'aluminium
FR1413662A (fr) * 1963-11-08 1965-10-08 Philips Nv Pompe ionique
FR2016916A1 (enExample) * 1968-08-10 1970-05-15 Getters Spa
FR2021693A1 (enExample) * 1968-10-28 1970-07-24 Getters Spa
FR2023966A1 (enExample) * 1968-11-20 1970-08-21 Getters Saes Spa
FR2055487A5 (enExample) * 1969-07-24 1971-05-07 Getters Spa
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3620645A (en) * 1970-05-01 1971-11-16 Getters Spa Getter device
US3652317A (en) * 1970-05-01 1972-03-28 Getters Spa Method of producing substrate having a particulate metallic coating
IT998681B (it) * 1973-10-01 1976-02-20 Getters Spa Pompa getter

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1293781A (fr) * 1961-02-04 1962-05-18 E S S P A Sa Produit dégazeur à base d'alliage de zirconium et d'aluminium
FR1413662A (fr) * 1963-11-08 1965-10-08 Philips Nv Pompe ionique
FR2016916A1 (enExample) * 1968-08-10 1970-05-15 Getters Spa
FR2021693A1 (enExample) * 1968-10-28 1970-07-24 Getters Spa
US3609062A (en) * 1968-10-28 1971-09-28 Getters Spa Getter pump
FR2023966A1 (enExample) * 1968-11-20 1970-08-21 Getters Saes Spa
US3609064A (en) * 1968-11-20 1971-09-28 Getters Spa Getter pump with direct resistance heating of getter strip
FR2055487A5 (enExample) * 1969-07-24 1971-05-07 Getters Spa
US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994002957A1 (en) * 1992-07-17 1994-02-03 Saes Getters S.P.A. High capacity getter pump
US5980213A (en) * 1994-10-31 1999-11-09 Saes Getters S.P.A. Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5879134A (en) * 1994-10-31 1999-03-09 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5993165A (en) * 1994-10-31 1999-11-30 Saes Pure Gas, Inc. In Situ getter pump system and method
US5997255A (en) * 1994-10-31 1999-12-07 Saes Getters S.P.A. Method for pumping a chamber using an in situ getter pump
US6043137A (en) * 1994-10-31 2000-03-28 Saes Getters S.P.A. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US6165328A (en) * 1994-10-31 2000-12-26 Saes Getters S.P.A. Method for processing wafers with in situ gettering
WO1996017171A3 (en) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Getter pump module and system

Also Published As

Publication number Publication date
NL182521C (nl) 1988-03-16
JPS5357516A (en) 1978-05-24
US4137012A (en) 1979-01-30
GB1586676A (en) 1981-03-25
NL182521B (nl) 1987-10-16
JPS5920875B2 (ja) 1984-05-16
NL7712025A (nl) 1978-05-08
FR2370357B1 (enExample) 1983-02-18
DE2747186A1 (de) 1978-05-18
DE2747186C2 (de) 1986-09-11

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