NL182521C - Modulaire getterpomp. - Google Patents
Modulaire getterpomp.Info
- Publication number
- NL182521C NL182521C NLAANVRAGE7712025,A NL7712025A NL182521C NL 182521 C NL182521 C NL 182521C NL 7712025 A NL7712025 A NL 7712025A NL 182521 C NL182521 C NL 182521C
- Authority
- NL
- Netherlands
- Prior art keywords
- modular
- getter pump
- getter
- pump
- modular getter
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2900476A IT1083971B (it) | 1976-11-03 | 1976-11-03 | Pompa getter di tipo modulare |
IT2107577A IT1115267B (it) | 1977-03-09 | 1977-03-09 | Pompa getter perfezionata di tipo modulare |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7712025A NL7712025A (nl) | 1978-05-08 |
NL182521B NL182521B (nl) | 1987-10-16 |
NL182521C true NL182521C (nl) | 1988-03-16 |
Family
ID=26327768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NLAANVRAGE7712025,A NL182521C (nl) | 1976-11-03 | 1977-11-01 | Modulaire getterpomp. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4137012A (nl) |
JP (1) | JPS5920875B2 (nl) |
DE (1) | DE2747186C2 (nl) |
FR (1) | FR2370357A1 (nl) |
GB (1) | GB1586676A (nl) |
NL (1) | NL182521C (nl) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3332608A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-pumpe fuer hochvakuum- und gasentladungsanlagen |
DE3332606A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen |
USH984H (en) | 1983-12-21 | 1991-11-05 | The United States Of America As Represented By The United States Department Of Energy | Self-pumping impurity control |
JPH02226700A (ja) * | 1989-02-27 | 1990-09-10 | Ishikawajima Harima Heavy Ind Co Ltd | 真空容器におけるnegストリップの取付構造 |
JP2694665B2 (ja) * | 1989-03-23 | 1997-12-24 | 株式会社日立製作所 | 粒子加速器のビームダクト組込みポンプ |
GB9007327D0 (en) * | 1990-03-31 | 1990-05-30 | Smiths Industries Plc | Gas discharge electrodes |
US5154582A (en) * | 1991-08-20 | 1992-10-13 | Danielson Associates, Inc. | Rough vacuum pump using bulk getter material |
US5161955A (en) * | 1991-08-20 | 1992-11-10 | Danielson Associates, Inc. | High vacuum pump using bulk getter material |
IT1255438B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
IT1255439B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
US6361618B1 (en) | 1994-07-20 | 2002-03-26 | Applied Materials, Inc. | Methods and apparatus for forming and maintaining high vacuum environments |
US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
IT1274478B (it) * | 1995-05-11 | 1997-07-17 | Getters Spa | Insieme di riscaldamento per pompe getter e purificatori di gas |
IT237018Y1 (it) * | 1995-07-10 | 2000-08-31 | Getters Spa | Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile |
US5935395A (en) * | 1995-11-08 | 1999-08-10 | Mitel Corporation | Substrate processing apparatus with non-evaporable getter pump |
IT1290548B1 (it) | 1997-02-24 | 1998-12-10 | Getters Spa | Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli |
WO1998048168A2 (en) * | 1997-04-18 | 1998-10-29 | Saes Pure Gas, Inc. | In situ getter pump system and method |
IT1292175B1 (it) * | 1997-06-17 | 1999-01-25 | Getters Spa | Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare |
IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
IT1297013B1 (it) * | 1997-12-23 | 1999-08-03 | Getters Spa | Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore |
US6077404A (en) | 1998-02-17 | 2000-06-20 | Applied Material, Inc. | Reflow chamber and process |
AU2001283301A1 (en) * | 2000-08-10 | 2002-02-25 | Indigo Energy, Inc. | Long-life vacuum system for energy storage flywheels |
GB0319171D0 (en) * | 2003-08-15 | 2003-09-17 | Boc Group Plc | Purifier/getter for vacuum and uhp gas applications |
RU2494484C2 (ru) | 2008-05-02 | 2013-09-27 | Шайн Медикал Текнолоджис, Инк. | Устройство и способ производства медицинских изотопов |
WO2012003009A2 (en) | 2010-01-28 | 2012-01-05 | Shine Medical Technologies, Inc. | Segmented reaction chamber for radioisotope production |
US10734126B2 (en) | 2011-04-28 | 2020-08-04 | SHINE Medical Technologies, LLC | Methods of separating medical isotopes from uranium solutions |
US9057362B2 (en) | 2011-09-28 | 2015-06-16 | The Boeing Company | Sublimation pump and method |
WO2013187974A2 (en) | 2012-04-05 | 2013-12-19 | Shine Medical Technologies, Inc. | Aqueous assembly and control method |
ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
TWI660125B (zh) * | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1293781A (fr) * | 1961-02-04 | 1962-05-18 | E S S P A Sa | Produit dégazeur à base d'alliage de zirconium et d'aluminium |
FR1413662A (fr) * | 1963-11-08 | 1965-10-08 | Philips Nv | Pompe ionique |
NL163054C (nl) * | 1968-08-10 | 1980-07-15 | Getters Spa | Niet-verdampende getterinrichting. |
DE1947413A1 (de) * | 1968-10-28 | 1970-04-30 | Getters Spa | Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen Gefaessen |
GB1274909A (en) * | 1968-11-20 | 1972-05-17 | Getters Spa | Improvements in or relating to getter pumps |
DE2034633C3 (de) * | 1969-07-24 | 1979-10-25 | S.A.E.S. Getters S.P.A., Mailand (Italien) | Kartusche für eine Getterpumpe |
US3620645A (en) * | 1970-05-01 | 1971-11-16 | Getters Spa | Getter device |
US3652317A (en) * | 1970-05-01 | 1972-03-28 | Getters Spa | Method of producing substrate having a particulate metallic coating |
IT998681B (it) * | 1973-10-01 | 1976-02-20 | Getters Spa | Pompa getter |
US4050914A (en) * | 1976-07-26 | 1977-09-27 | S.A.E.S. Getters S.P.A. | Accelerator for charged particles |
-
1977
- 1977-10-07 US US05/840,243 patent/US4137012A/en not_active Expired - Lifetime
- 1977-10-20 DE DE2747186A patent/DE2747186C2/de not_active Expired
- 1977-10-28 FR FR7732692A patent/FR2370357A1/fr active Granted
- 1977-11-01 NL NLAANVRAGE7712025,A patent/NL182521C/nl not_active IP Right Cessation
- 1977-11-02 JP JP52130956A patent/JPS5920875B2/ja not_active Expired
- 1977-11-02 GB GB45566/77A patent/GB1586676A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2747186A1 (de) | 1978-05-18 |
DE2747186C2 (de) | 1986-09-11 |
FR2370357B1 (nl) | 1983-02-18 |
JPS5357516A (en) | 1978-05-24 |
JPS5920875B2 (ja) | 1984-05-16 |
NL7712025A (nl) | 1978-05-08 |
GB1586676A (en) | 1981-03-25 |
NL182521B (nl) | 1987-10-16 |
US4137012A (en) | 1979-01-30 |
FR2370357A1 (fr) | 1978-06-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BA | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
A85 | Still pending on 85-01-01 | ||
V4 | Discontinued because of reaching the maximum lifetime of a patent |
Free format text: 971101 |