FR2370357B1 - - Google Patents

Info

Publication number
FR2370357B1
FR2370357B1 FR7732692A FR7732692A FR2370357B1 FR 2370357 B1 FR2370357 B1 FR 2370357B1 FR 7732692 A FR7732692 A FR 7732692A FR 7732692 A FR7732692 A FR 7732692A FR 2370357 B1 FR2370357 B1 FR 2370357B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7732692A
Other languages
French (fr)
Other versions
FR2370357A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT2900476A external-priority patent/IT1083971B/it
Priority claimed from IT2107577A external-priority patent/IT1115267B/it
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of FR2370357A1 publication Critical patent/FR2370357A1/fr
Application granted granted Critical
Publication of FR2370357B1 publication Critical patent/FR2370357B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
FR7732692A 1976-11-03 1977-10-28 Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels Granted FR2370357A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT2900476A IT1083971B (it) 1976-11-03 1976-11-03 Pompa getter di tipo modulare
IT2107577A IT1115267B (it) 1977-03-09 1977-03-09 Pompa getter perfezionata di tipo modulare

Publications (2)

Publication Number Publication Date
FR2370357A1 FR2370357A1 (fr) 1978-06-02
FR2370357B1 true FR2370357B1 (enExample) 1983-02-18

Family

ID=26327768

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7732692A Granted FR2370357A1 (fr) 1976-11-03 1977-10-28 Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels

Country Status (6)

Country Link
US (1) US4137012A (enExample)
JP (1) JPS5920875B2 (enExample)
DE (1) DE2747186C2 (enExample)
FR (1) FR2370357A1 (enExample)
GB (1) GB1586676A (enExample)
NL (1) NL182521C (enExample)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3332608A1 (de) * 1983-09-09 1985-03-28 Siemens AG, 1000 Berlin und 8000 München Getter-pumpe fuer hochvakuum- und gasentladungsanlagen
DE3332606A1 (de) * 1983-09-09 1985-03-28 Siemens AG, 1000 Berlin und 8000 München Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen
USH984H (en) 1983-12-21 1991-11-05 The United States Of America As Represented By The United States Department Of Energy Self-pumping impurity control
JPH02226700A (ja) * 1989-02-27 1990-09-10 Ishikawajima Harima Heavy Ind Co Ltd 真空容器におけるｎｅｇストリップの取付構造
JP2694665B2 (ja) * 1989-03-23 1997-12-24 株式会社日立製作所 粒子加速器のビームダクト組込みポンプ
GB9007327D0 (en) * 1990-03-31 1990-05-30 Smiths Industries Plc Gas discharge electrodes
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
IT1255439B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
IT1274478B (it) * 1995-05-11 1997-07-17 Getters Spa Insieme di riscaldamento per pompe getter e purificatori di gas
IT237018Y1 (it) * 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
US5935395A (en) * 1995-11-08 1999-08-10 Mitel Corporation Substrate processing apparatus with non-evaporable getter pump
IT1290548B1 (it) * 1997-02-24 1998-12-10 Getters Spa Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli
KR20010006278A (ko) * 1997-04-18 2001-01-26 사이스 푸어 가스 인코포레이티드 인시튜 게터펌프시스템 및 방법
IT1292175B1 (it) * 1997-06-17 1999-01-25 Getters Spa Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
IT1297013B1 (it) * 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
US6077404A (en) 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process
AU2001283301A1 (en) * 2000-08-10 2002-02-25 Indigo Energy, Inc. Long-life vacuum system for energy storage flywheels
GB0319171D0 (en) * 2003-08-15 2003-09-17 Boc Group Plc Purifier/getter for vacuum and uhp gas applications
US9734926B2 (en) 2008-05-02 2017-08-15 Shine Medical Technologies, Inc. Device and method for producing medical isotopes
US10978214B2 (en) 2010-01-28 2021-04-13 SHINE Medical Technologies, LLC Segmented reaction chamber for radioisotope production
US10734126B2 (en) 2011-04-28 2020-08-04 SHINE Medical Technologies, LLC Methods of separating medical isotopes from uranium solutions
US9057362B2 (en) 2011-09-28 2015-06-16 The Boeing Company Sublimation pump and method
CA2869559C (en) 2012-04-05 2022-03-29 Shine Medical Technologies, Inc. Aqueous assembly and control method
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
TWI660125B (zh) * 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1293781A (fr) * 1961-02-04 1962-05-18 E S S P A Sa Produit dégazeur à base d'alliage de zirconium et d'aluminium
FR1413662A (fr) * 1963-11-08 1965-10-08 Philips Nv Pompe ionique
NL163054C (nl) * 1968-08-10 1980-07-15 Getters Spa Niet-verdampende getterinrichting.
DE1947413A1 (de) * 1968-10-28 1970-04-30 Getters Spa Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen Gefaessen
GB1274909A (en) * 1968-11-20 1972-05-17 Getters Spa Improvements in or relating to getter pumps
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
US3620645A (en) * 1970-05-01 1971-11-16 Getters Spa Getter device
US3652317A (en) * 1970-05-01 1972-03-28 Getters Spa Method of producing substrate having a particulate metallic coating
IT998681B (it) * 1973-10-01 1976-02-20 Getters Spa Pompa getter
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles

Also Published As

Publication number Publication date
JPS5357516A (en) 1978-05-24
DE2747186C2 (de) 1986-09-11
NL182521C (nl) 1988-03-16
FR2370357A1 (fr) 1978-06-02
DE2747186A1 (de) 1978-05-18
GB1586676A (en) 1981-03-25
NL182521B (nl) 1987-10-16
JPS5920875B2 (ja) 1984-05-16
NL7712025A (nl) 1978-05-08
US4137012A (en) 1979-01-30

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