DE2703160C3 - Verfahren zum Herstellen eines Masters für ein Phasengitter in einem mit Beugung arbeitenden subtraktiven Farbfiltersystem - Google Patents

Verfahren zum Herstellen eines Masters für ein Phasengitter in einem mit Beugung arbeitenden subtraktiven Farbfiltersystem

Info

Publication number
DE2703160C3
DE2703160C3 DE2703160A DE2703160A DE2703160C3 DE 2703160 C3 DE2703160 C3 DE 2703160C3 DE 2703160 A DE2703160 A DE 2703160A DE 2703160 A DE2703160 A DE 2703160A DE 2703160 C3 DE2703160 C3 DE 2703160C3
Authority
DE
Germany
Prior art keywords
photoresist layer
grating
diffraction
diffraction grating
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2703160A
Other languages
German (de)
English (en)
Other versions
DE2703160B2 (de
DE2703160A1 (de
Inventor
Karl Zuerich Knop (Schweiz)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of DE2703160A1 publication Critical patent/DE2703160A1/de
Publication of DE2703160B2 publication Critical patent/DE2703160B2/de
Application granted granted Critical
Publication of DE2703160C3 publication Critical patent/DE2703160C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/153—Multiple image producing on single receiver

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Filters (AREA)
DE2703160A 1976-01-27 1977-01-26 Verfahren zum Herstellen eines Masters für ein Phasengitter in einem mit Beugung arbeitenden subtraktiven Farbfiltersystem Expired DE2703160C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3085/76A GB1537703A (en) 1976-01-27 1976-01-27 Fabrication of rectangular relief profiles in photoresist

Publications (3)

Publication Number Publication Date
DE2703160A1 DE2703160A1 (de) 1977-07-28
DE2703160B2 DE2703160B2 (de) 1979-10-04
DE2703160C3 true DE2703160C3 (de) 1980-06-26

Family

ID=9751685

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2703160A Expired DE2703160C3 (de) 1976-01-27 1977-01-26 Verfahren zum Herstellen eines Masters für ein Phasengitter in einem mit Beugung arbeitenden subtraktiven Farbfiltersystem

Country Status (7)

Country Link
US (1) US4082453A (enExample)
JP (1) JPS5293357A (enExample)
BE (1) BE850780A (enExample)
CA (1) CA1080009A (enExample)
DE (1) DE2703160C3 (enExample)
FR (1) FR2339883A1 (enExample)
GB (1) GB1537703A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4281049A (en) 1978-06-16 1981-07-28 Hoechst Aktiengesellschaft Color separation transparency and process for the preparation thereof
US4294913A (en) 1976-12-17 1981-10-13 Hoechst Aktiengesellschaft Information carriers, method of forming and copying said carriers

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1589766A (en) * 1976-10-26 1981-05-20 Rca Corp Fineline diffractive subtractive colour filters
DE2734580C2 (de) * 1977-08-01 1979-02-15 Hoechst Ag, 6000 Frankfurt Verfahren zum Herstellen eines Originals eines Informationsträgers
DE2734581C2 (de) * 1977-08-01 1979-02-15 Hoechst Ag, 6000 Frankfurt Original eines Informationsträgers und Verfahren zum Herstellen des Originals
US4372649A (en) * 1978-05-22 1983-02-08 Minnesota Mining And Manufacturing Company Extended area diffractive subtractive color filters
US4239790A (en) * 1979-09-12 1980-12-16 Rca Corporation Method of defining a photoresist layer
US4308337A (en) * 1980-03-10 1981-12-29 Rca Corporation Uniform light exposure of positive photoresist for replicating spiral groove in plastic substrate
JPS5855752U (ja) * 1981-10-09 1983-04-15 松下電器産業株式会社 電気掃除機のキヤスタ−取付装置
CA1270934A (en) * 1985-03-20 1990-06-26 Masataka Shirasaki Spatial phase modulating masks and production processes thereof, and processes for the formation of phase-shifted diffraction gratings
JPS6242102A (ja) * 1985-08-20 1987-02-24 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
GB8528698D0 (en) * 1985-11-21 1985-12-24 Plasmon Data Systems Nv Photolithography
US4828356A (en) * 1987-12-22 1989-05-09 Hughes Aircraft Company Method for fabrication of low efficiency diffraction gratings and product obtained thereby
US6030851A (en) * 1995-06-07 2000-02-29 Grandmont; Paul E. Method for overpressure protected pressure sensor
JP3407477B2 (ja) * 1995-06-08 2003-05-19 松下電器産業株式会社 位相格子とその作製方法並びに光学式エンコーダ
JP3437517B2 (ja) * 1999-02-16 2003-08-18 キヤノン株式会社 二次元位相型光学素子の作製方法
US6972853B1 (en) * 2002-09-27 2005-12-06 Advanced Micro Devices, Inc. Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same
US7648641B2 (en) * 2005-06-17 2010-01-19 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for creating a topographically patterned substrate
US20080264553A1 (en) * 2007-04-27 2008-10-30 Hewlett-Packard Development Company Lp Embossing
US20100003605A1 (en) 2008-07-07 2010-01-07 International Business Machines Corporation system and method for projection lithography with immersed image-aligned diffractive element
WO2010111799A1 (en) * 2009-03-30 2010-10-07 Boegli-Gravures S.A. Method and device for structuring a solid body surface with a hard coating with a laser using mask and diaphragm
ES2534982T5 (es) 2009-03-30 2019-12-12 Boegli Gravures Sa Procedimiento y dispositivo para estructurar una superficie de cuerpo sólido con un revestimiento duro con un primer láser con pulsos en el campo de nanosegundos y un segundo láser con pulsos en el campo de pico- o femtosegundos; lámina de embalaje
JP5330205B2 (ja) * 2009-11-26 2013-10-30 株式会社東芝 露光方法
US11085754B2 (en) * 2017-12-12 2021-08-10 Kla Corporation Enhancing metrology target information content
TWI831898B (zh) * 2019-01-15 2024-02-11 德商卡爾蔡司Ｓｍｔ有限公司 藉由破壞性干涉抑制至少一目標波長的光學繞射元件
KR20220056235A (ko) * 2019-09-06 2022-05-04 배 시스템즈 피엘시 도파로 및 도파로 마스터 격자 툴 제조 방법

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB941809A (en) * 1961-07-06 1963-11-13 Russel John Searle Elevatable roof for a vehicle
GB1108432A (en) * 1963-11-22 1968-04-03 Auto Sleepers Ltd Improvements in or relating to roofs for vans or the like
GB1108433A (en) * 1963-11-29 1968-04-03 Auto Sleepers Ltd Improvements in or relating to roof structures
US3212813A (en) * 1964-07-27 1965-10-19 Freeway Travelers Inc Vehicle with extensible top
GB1206401A (en) * 1966-12-05 1970-09-23 Pavelle Ltd Improvements in or relating to colour correction filters in or for photographic colour printing or enlarging apparatus
DE1623803B2 (de) * 1967-02-11 1971-11-11 Rudolph, Dietbert, Dipl.-Phys., 3401 Menger shausen; Schmahl, Günter, Dipl.-Phys. Dr., 3400 Göttingen Verfahren zur herstellung von reflexions und transmissions gittern
BE723202A (enExample) * 1967-12-07 1969-04-01
US3669673A (en) * 1970-10-23 1972-06-13 Rca Corp Recording of a continuous tone focused image on a diffraction grating
US3697178A (en) * 1971-11-01 1972-10-10 Rca Corp Method of projection printing photoresist masking layers, including elimination of spurious diffraction-associated patterns from the print
JPS5425380B2 (enExample) * 1972-02-15 1979-08-28
US3891300A (en) * 1972-09-09 1975-06-24 Hitachi Ltd Apparatus for making hologram
GB1385118A (en) * 1972-10-17 1975-02-26 Ci Autohomes Ltd Elevating roof
US3936301A (en) * 1974-04-01 1976-02-03 Bell Telephone Laboratories, Incorporated Process for contact photolithography utilizing a photomask having indented channels
US3945825A (en) * 1974-05-22 1976-03-23 Rca Corporation Method for producing width-modulated surface relief patterns
JPS5742849B2 (enExample) * 1974-06-05 1982-09-10
US3957354A (en) * 1975-02-03 1976-05-18 Rca Corporation Diffractive subtractive color filtering technique

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4294913A (en) 1976-12-17 1981-10-13 Hoechst Aktiengesellschaft Information carriers, method of forming and copying said carriers
US4400057A (en) 1976-12-17 1983-08-23 Hoechst Aktiengesellschaft Information carriers, method of forming and copying said carriers
US4281049A (en) 1978-06-16 1981-07-28 Hoechst Aktiengesellschaft Color separation transparency and process for the preparation thereof

Also Published As

Publication number Publication date
DE2703160B2 (de) 1979-10-04
JPS5293357A (en) 1977-08-05
CA1080009A (en) 1980-06-24
GB1537703A (en) 1979-01-04
BE850780A (fr) 1977-07-26
US4082453A (en) 1978-04-04
JPS5530608B2 (enExample) 1980-08-12
DE2703160A1 (de) 1977-07-28
FR2339883B1 (enExample) 1982-02-26
FR2339883A1 (fr) 1977-08-26

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee