FR2339883A1 - Fabrication de nervures a section rectangulaire dans un vernis photosensible - Google Patents
Fabrication de nervures a section rectangulaire dans un vernis photosensibleInfo
- Publication number
- FR2339883A1 FR2339883A1 FR7702336A FR7702336A FR2339883A1 FR 2339883 A1 FR2339883 A1 FR 2339883A1 FR 7702336 A FR7702336 A FR 7702336A FR 7702336 A FR7702336 A FR 7702336A FR 2339883 A1 FR2339883 A1 FR 2339883A1
- Authority
- FR
- France
- Prior art keywords
- ribs
- manufacture
- rectangular section
- photosensitive varnish
- varnish
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/001—Phase modulating patterns, e.g. refractive index patterns
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/153—Multiple image producing on single receiver
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3085/76A GB1537703A (en) | 1976-01-27 | 1976-01-27 | Fabrication of rectangular relief profiles in photoresist |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2339883A1 true FR2339883A1 (fr) | 1977-08-26 |
FR2339883B1 FR2339883B1 (fr) | 1982-02-26 |
Family
ID=9751685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7702336A Granted FR2339883A1 (fr) | 1976-01-27 | 1977-01-27 | Fabrication de nervures a section rectangulaire dans un vernis photosensible |
Country Status (7)
Country | Link |
---|---|
US (1) | US4082453A (fr) |
JP (1) | JPS5293357A (fr) |
BE (1) | BE850780A (fr) |
CA (1) | CA1080009A (fr) |
DE (1) | DE2703160C3 (fr) |
FR (1) | FR2339883A1 (fr) |
GB (1) | GB1537703A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0195724A2 (fr) * | 1985-03-20 | 1986-09-24 | Fujitsu Limited | Masque de modulation spatiale de phase, procédé de fabrication et procédé pour la formation de réseaux de diffraction diphasés |
EP0230728A2 (fr) * | 1985-11-21 | 1987-08-05 | Plasmon Data Systems, Inc. | Photolithographie |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1589766A (en) * | 1976-10-26 | 1981-05-20 | Rca Corp | Fineline diffractive subtractive colour filters |
DE2657246C2 (de) * | 1976-12-17 | 1978-09-28 | Hoechst Ag, 6000 Frankfurt | Original eines Informationsträgers, Verfahren zum Herstellen des Originals, Verfahren zum Herstellen einer Matrize zum Prägen des Originals sowie Informa tionsträger, der mit der Matrize hergestellt ist |
DE2734580C2 (de) * | 1977-08-01 | 1979-02-15 | Hoechst Ag, 6000 Frankfurt | Verfahren zum Herstellen eines Originals eines Informationsträgers |
DE2734581C2 (de) * | 1977-08-01 | 1979-02-15 | Hoechst Ag, 6000 Frankfurt | Original eines Informationsträgers und Verfahren zum Herstellen des Originals |
US4372649A (en) * | 1978-05-22 | 1983-02-08 | Minnesota Mining And Manufacturing Company | Extended area diffractive subtractive color filters |
DE2826380A1 (de) * | 1978-06-16 | 1980-01-03 | Hoechst Ag | Farbauszugstransparent und verfahren zu seiner herstellung |
US4239790A (en) * | 1979-09-12 | 1980-12-16 | Rca Corporation | Method of defining a photoresist layer |
US4308337A (en) * | 1980-03-10 | 1981-12-29 | Rca Corporation | Uniform light exposure of positive photoresist for replicating spiral groove in plastic substrate |
JPS5855752U (ja) * | 1981-10-09 | 1983-04-15 | 松下電器産業株式会社 | 電気掃除機のキヤスタ−取付装置 |
JPS6242102A (ja) * | 1985-08-20 | 1987-02-24 | Pioneer Electronic Corp | マイクロフレネルレンズの製造方法 |
US4828356A (en) * | 1987-12-22 | 1989-05-09 | Hughes Aircraft Company | Method for fabrication of low efficiency diffraction gratings and product obtained thereby |
US6030851A (en) * | 1995-06-07 | 2000-02-29 | Grandmont; Paul E. | Method for overpressure protected pressure sensor |
JP3407477B2 (ja) * | 1995-06-08 | 2003-05-19 | 松下電器産業株式会社 | 位相格子とその作製方法並びに光学式エンコーダ |
JP3437517B2 (ja) * | 1999-02-16 | 2003-08-18 | キヤノン株式会社 | 二次元位相型光学素子の作製方法 |
US6972853B1 (en) * | 2002-09-27 | 2005-12-06 | Advanced Micro Devices, Inc. | Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same |
US7648641B2 (en) * | 2005-06-17 | 2010-01-19 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for creating a topographically patterned substrate |
US20080264553A1 (en) * | 2007-04-27 | 2008-10-30 | Hewlett-Packard Development Company Lp | Embossing |
US20100003605A1 (en) | 2008-07-07 | 2010-01-07 | International Business Machines Corporation | system and method for projection lithography with immersed image-aligned diffractive element |
PT2414131E (pt) * | 2009-03-30 | 2015-09-04 | Boegli Gravures Sa | Método e dispositivo para a estruturação de uma superfície de um corpo sólido com um revestimento duro com o auxílio de um laser utilizando máscara e diafragma |
BRPI1009990B1 (pt) | 2009-03-30 | 2019-09-03 | Boegli Gravures Sa | "método e dispositivo para estruturação da superfície de um corpo sólido revestido de material rígido por meio de um laser" |
JP5330205B2 (ja) * | 2009-11-26 | 2013-10-30 | 株式会社東芝 | 露光方法 |
US11085754B2 (en) * | 2017-12-12 | 2021-08-10 | Kla Corporation | Enhancing metrology target information content |
TWI831898B (zh) * | 2019-01-15 | 2024-02-11 | 德商卡爾蔡司Smt有限公司 | 藉由破壞性干涉抑制至少一目標波長的光學繞射元件 |
EP4025829A1 (fr) * | 2019-09-06 | 2022-07-13 | BAE SYSTEMS plc | Guide d'ondes et procédé de fabrication d'un outil de réseau maître de guide d'ondes |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB941809A (en) * | 1961-07-06 | 1963-11-13 | Russel John Searle | Elevatable roof for a vehicle |
US3212813A (en) * | 1964-07-27 | 1965-10-19 | Freeway Travelers Inc | Vehicle with extensible top |
GB1108432A (en) * | 1963-11-22 | 1968-04-03 | Auto Sleepers Ltd | Improvements in or relating to roofs for vans or the like |
GB1108433A (en) * | 1963-11-29 | 1968-04-03 | Auto Sleepers Ltd | Improvements in or relating to roof structures |
FR1594113A (fr) * | 1967-12-07 | 1970-06-01 | ||
FR2202794A1 (fr) * | 1972-10-17 | 1974-05-10 | Ci Autohomes Ltd |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1206401A (en) * | 1966-12-05 | 1970-09-23 | Pavelle Ltd | Improvements in or relating to colour correction filters in or for photographic colour printing or enlarging apparatus |
DE1623803B2 (de) * | 1967-02-11 | 1971-11-11 | Rudolph, Dietbert, Dipl.-Phys., 3401 Menger shausen; Schmahl, Günter, Dipl.-Phys. Dr., 3400 Göttingen | Verfahren zur herstellung von reflexions und transmissions gittern |
US3669673A (en) * | 1970-10-23 | 1972-06-13 | Rca Corp | Recording of a continuous tone focused image on a diffraction grating |
US3697178A (en) * | 1971-11-01 | 1972-10-10 | Rca Corp | Method of projection printing photoresist masking layers, including elimination of spurious diffraction-associated patterns from the print |
JPS5425380B2 (fr) * | 1972-02-15 | 1979-08-28 | ||
US3891300A (en) * | 1972-09-09 | 1975-06-24 | Hitachi Ltd | Apparatus for making hologram |
US3936301A (en) * | 1974-04-01 | 1976-02-03 | Bell Telephone Laboratories, Incorporated | Process for contact photolithography utilizing a photomask having indented channels |
US3945825A (en) * | 1974-05-22 | 1976-03-23 | Rca Corporation | Method for producing width-modulated surface relief patterns |
JPS5742849B2 (fr) * | 1974-06-05 | 1982-09-10 | ||
US3957354A (en) * | 1975-02-03 | 1976-05-18 | Rca Corporation | Diffractive subtractive color filtering technique |
-
1976
- 1976-01-27 GB GB3085/76A patent/GB1537703A/en not_active Expired
- 1976-06-09 US US05/694,374 patent/US4082453A/en not_active Expired - Lifetime
-
1977
- 1977-01-26 DE DE2703160A patent/DE2703160C3/de not_active Expired
- 1977-01-26 JP JP819077A patent/JPS5293357A/ja active Granted
- 1977-01-26 BE BE174405A patent/BE850780A/fr not_active IP Right Cessation
- 1977-01-27 FR FR7702336A patent/FR2339883A1/fr active Granted
- 1977-01-27 CA CA270,577A patent/CA1080009A/fr not_active Expired
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB941809A (en) * | 1961-07-06 | 1963-11-13 | Russel John Searle | Elevatable roof for a vehicle |
GB1108432A (en) * | 1963-11-22 | 1968-04-03 | Auto Sleepers Ltd | Improvements in or relating to roofs for vans or the like |
GB1108433A (en) * | 1963-11-29 | 1968-04-03 | Auto Sleepers Ltd | Improvements in or relating to roof structures |
US3212813A (en) * | 1964-07-27 | 1965-10-19 | Freeway Travelers Inc | Vehicle with extensible top |
FR1594113A (fr) * | 1967-12-07 | 1970-06-01 | ||
FR2202794A1 (fr) * | 1972-10-17 | 1974-05-10 | Ci Autohomes Ltd |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0195724A2 (fr) * | 1985-03-20 | 1986-09-24 | Fujitsu Limited | Masque de modulation spatiale de phase, procédé de fabrication et procédé pour la formation de réseaux de diffraction diphasés |
EP0195724A3 (en) * | 1985-03-20 | 1990-05-16 | Fujitsu Limited | Spatial phase modulating masks and production processes thereof, and processes for the formation of phase-shifted diffraction gratings |
EP0230728A2 (fr) * | 1985-11-21 | 1987-08-05 | Plasmon Data Systems, Inc. | Photolithographie |
EP0230728A3 (en) * | 1985-11-21 | 1989-05-24 | Plasmon Data Systems, Inc. | Photolithography |
Also Published As
Publication number | Publication date |
---|---|
FR2339883B1 (fr) | 1982-02-26 |
JPS5530608B2 (fr) | 1980-08-12 |
DE2703160B2 (de) | 1979-10-04 |
BE850780A (fr) | 1977-07-26 |
DE2703160C3 (de) | 1980-06-26 |
CA1080009A (fr) | 1980-06-24 |
GB1537703A (en) | 1979-01-04 |
DE2703160A1 (de) | 1977-07-28 |
US4082453A (en) | 1978-04-04 |
JPS5293357A (en) | 1977-08-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |