CA1080009A - Fabrication of rectangular relief profiles in photoresist - Google Patents
Fabrication of rectangular relief profiles in photoresistInfo
- Publication number
- CA1080009A CA1080009A CA270,577A CA270577A CA1080009A CA 1080009 A CA1080009 A CA 1080009A CA 270577 A CA270577 A CA 270577A CA 1080009 A CA1080009 A CA 1080009A
- Authority
- CA
- Canada
- Prior art keywords
- photoresist
- layer
- diffraction grating
- light
- given
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 70
- 238000004519 manufacturing process Methods 0.000 title abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 11
- 238000004528 spin coating Methods 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 abstract description 9
- 239000003086 colorant Substances 0.000 abstract description 7
- 239000002985 plastic film Substances 0.000 abstract description 4
- 238000004049 embossing Methods 0.000 abstract description 3
- 239000004033 plastic Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 235000019642 color hue Nutrition 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N EtOH Substances CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 235000012745 brilliant blue FCF Nutrition 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000002508 contact lithography Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/001—Phase modulating patterns, e.g. refractive index patterns
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/153—Multiple image producing on single receiver
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3085/76A GB1537703A (en) | 1976-01-27 | 1976-01-27 | Fabrication of rectangular relief profiles in photoresist |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1080009A true CA1080009A (en) | 1980-06-24 |
Family
ID=9751685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA270,577A Expired CA1080009A (en) | 1976-01-27 | 1977-01-27 | Fabrication of rectangular relief profiles in photoresist |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4082453A (enExample) |
| JP (1) | JPS5293357A (enExample) |
| BE (1) | BE850780A (enExample) |
| CA (1) | CA1080009A (enExample) |
| DE (1) | DE2703160C3 (enExample) |
| FR (1) | FR2339883A1 (enExample) |
| GB (1) | GB1537703A (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1589766A (en) * | 1976-10-26 | 1981-05-20 | Rca Corp | Fineline diffractive subtractive colour filters |
| DE2657246C2 (de) * | 1976-12-17 | 1978-09-28 | Hoechst Ag, 6000 Frankfurt | Original eines Informationsträgers, Verfahren zum Herstellen des Originals, Verfahren zum Herstellen einer Matrize zum Prägen des Originals sowie Informa tionsträger, der mit der Matrize hergestellt ist |
| DE2734580C2 (de) * | 1977-08-01 | 1979-02-15 | Hoechst Ag, 6000 Frankfurt | Verfahren zum Herstellen eines Originals eines Informationsträgers |
| DE2734581C2 (de) * | 1977-08-01 | 1979-02-15 | Hoechst Ag, 6000 Frankfurt | Original eines Informationsträgers und Verfahren zum Herstellen des Originals |
| US4372649A (en) * | 1978-05-22 | 1983-02-08 | Minnesota Mining And Manufacturing Company | Extended area diffractive subtractive color filters |
| DE2826380A1 (de) * | 1978-06-16 | 1980-01-03 | Hoechst Ag | Farbauszugstransparent und verfahren zu seiner herstellung |
| US4239790A (en) * | 1979-09-12 | 1980-12-16 | Rca Corporation | Method of defining a photoresist layer |
| US4308337A (en) * | 1980-03-10 | 1981-12-29 | Rca Corporation | Uniform light exposure of positive photoresist for replicating spiral groove in plastic substrate |
| JPS5855752U (ja) * | 1981-10-09 | 1983-04-15 | 松下電器産業株式会社 | 電気掃除機のキヤスタ−取付装置 |
| CA1270934A (en) * | 1985-03-20 | 1990-06-26 | Masataka Shirasaki | Spatial phase modulating masks and production processes thereof, and processes for the formation of phase-shifted diffraction gratings |
| JPS6242102A (ja) * | 1985-08-20 | 1987-02-24 | Pioneer Electronic Corp | マイクロフレネルレンズの製造方法 |
| GB8528698D0 (en) * | 1985-11-21 | 1985-12-24 | Plasmon Data Systems Nv | Photolithography |
| US4828356A (en) * | 1987-12-22 | 1989-05-09 | Hughes Aircraft Company | Method for fabrication of low efficiency diffraction gratings and product obtained thereby |
| US6030851A (en) * | 1995-06-07 | 2000-02-29 | Grandmont; Paul E. | Method for overpressure protected pressure sensor |
| JP3407477B2 (ja) * | 1995-06-08 | 2003-05-19 | 松下電器産業株式会社 | 位相格子とその作製方法並びに光学式エンコーダ |
| JP3437517B2 (ja) * | 1999-02-16 | 2003-08-18 | キヤノン株式会社 | 二次元位相型光学素子の作製方法 |
| US6972853B1 (en) * | 2002-09-27 | 2005-12-06 | Advanced Micro Devices, Inc. | Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same |
| US7648641B2 (en) * | 2005-06-17 | 2010-01-19 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for creating a topographically patterned substrate |
| US20080264553A1 (en) * | 2007-04-27 | 2008-10-30 | Hewlett-Packard Development Company Lp | Embossing |
| US20100003605A1 (en) | 2008-07-07 | 2010-01-07 | International Business Machines Corporation | system and method for projection lithography with immersed image-aligned diffractive element |
| WO2010111799A1 (en) * | 2009-03-30 | 2010-10-07 | Boegli-Gravures S.A. | Method and device for structuring a solid body surface with a hard coating with a laser using mask and diaphragm |
| ES2534982T5 (es) | 2009-03-30 | 2019-12-12 | Boegli Gravures Sa | Procedimiento y dispositivo para estructurar una superficie de cuerpo sólido con un revestimiento duro con un primer láser con pulsos en el campo de nanosegundos y un segundo láser con pulsos en el campo de pico- o femtosegundos; lámina de embalaje |
| JP5330205B2 (ja) * | 2009-11-26 | 2013-10-30 | 株式会社東芝 | 露光方法 |
| US11085754B2 (en) * | 2017-12-12 | 2021-08-10 | Kla Corporation | Enhancing metrology target information content |
| TWI831898B (zh) * | 2019-01-15 | 2024-02-11 | 德商卡爾蔡司Ｓｍｔ有限公司 | 藉由破壞性干涉抑制至少一目標波長的光學繞射元件 |
| KR20220056235A (ko) * | 2019-09-06 | 2022-05-04 | 배 시스템즈 피엘시 | 도파로 및 도파로 마스터 격자 툴 제조 방법 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB941809A (en) * | 1961-07-06 | 1963-11-13 | Russel John Searle | Elevatable roof for a vehicle |
| GB1108432A (en) * | 1963-11-22 | 1968-04-03 | Auto Sleepers Ltd | Improvements in or relating to roofs for vans or the like |
| GB1108433A (en) * | 1963-11-29 | 1968-04-03 | Auto Sleepers Ltd | Improvements in or relating to roof structures |
| US3212813A (en) * | 1964-07-27 | 1965-10-19 | Freeway Travelers Inc | Vehicle with extensible top |
| GB1206401A (en) * | 1966-12-05 | 1970-09-23 | Pavelle Ltd | Improvements in or relating to colour correction filters in or for photographic colour printing or enlarging apparatus |
| DE1623803B2 (de) * | 1967-02-11 | 1971-11-11 | Rudolph, Dietbert, Dipl.-Phys., 3401 Menger shausen; Schmahl, Günter, Dipl.-Phys. Dr., 3400 Göttingen | Verfahren zur herstellung von reflexions und transmissions gittern |
| BE723202A (enExample) * | 1967-12-07 | 1969-04-01 | ||
| US3669673A (en) * | 1970-10-23 | 1972-06-13 | Rca Corp | Recording of a continuous tone focused image on a diffraction grating |
| US3697178A (en) * | 1971-11-01 | 1972-10-10 | Rca Corp | Method of projection printing photoresist masking layers, including elimination of spurious diffraction-associated patterns from the print |
| JPS5425380B2 (enExample) * | 1972-02-15 | 1979-08-28 | ||
| US3891300A (en) * | 1972-09-09 | 1975-06-24 | Hitachi Ltd | Apparatus for making hologram |
| GB1385118A (en) * | 1972-10-17 | 1975-02-26 | Ci Autohomes Ltd | Elevating roof |
| US3936301A (en) * | 1974-04-01 | 1976-02-03 | Bell Telephone Laboratories, Incorporated | Process for contact photolithography utilizing a photomask having indented channels |
| US3945825A (en) * | 1974-05-22 | 1976-03-23 | Rca Corporation | Method for producing width-modulated surface relief patterns |
| JPS5742849B2 (enExample) * | 1974-06-05 | 1982-09-10 | ||
| US3957354A (en) * | 1975-02-03 | 1976-05-18 | Rca Corporation | Diffractive subtractive color filtering technique |
-
1976
- 1976-01-27 GB GB3085/76A patent/GB1537703A/en not_active Expired
- 1976-06-09 US US05/694,374 patent/US4082453A/en not_active Expired - Lifetime
-
1977
- 1977-01-26 JP JP819077A patent/JPS5293357A/ja active Granted
- 1977-01-26 DE DE2703160A patent/DE2703160C3/de not_active Expired
- 1977-01-26 BE BE174405A patent/BE850780A/xx not_active IP Right Cessation
- 1977-01-27 CA CA270,577A patent/CA1080009A/en not_active Expired
- 1977-01-27 FR FR7702336A patent/FR2339883A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2703160B2 (de) | 1979-10-04 |
| JPS5293357A (en) | 1977-08-05 |
| DE2703160C3 (de) | 1980-06-26 |
| GB1537703A (en) | 1979-01-04 |
| BE850780A (fr) | 1977-07-26 |
| US4082453A (en) | 1978-04-04 |
| JPS5530608B2 (enExample) | 1980-08-12 |
| DE2703160A1 (de) | 1977-07-28 |
| FR2339883B1 (enExample) | 1982-02-26 |
| FR2339883A1 (fr) | 1977-08-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1080009A (en) | Fabrication of rectangular relief profiles in photoresist | |
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| US4737448A (en) | Color images formed by multiple diffraction gratings | |
| CA1049303A (en) | Spatial frequency carrier and process of preparing same | |
| US4155627A (en) | Color diffractive subtractive filter master recording comprising a plurality of superposed two-level relief patterns on the surface of a substrate | |
| EP0138459B1 (en) | Liquid crystal display device having color filter | |
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| CA2028851A1 (en) | Preparation and reproduction of filters and preparation of filter photographic materials | |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |