DE2646694A1 - Verfahren zur herstellung von metallnitridsinterkoerpern und danach erhaltene siliciumnitrid- und aluminiumnitridsinterkoerper - Google Patents
Verfahren zur herstellung von metallnitridsinterkoerpern und danach erhaltene siliciumnitrid- und aluminiumnitridsinterkoerperInfo
- Publication number
- DE2646694A1 DE2646694A1 DE19762646694 DE2646694A DE2646694A1 DE 2646694 A1 DE2646694 A1 DE 2646694A1 DE 19762646694 DE19762646694 DE 19762646694 DE 2646694 A DE2646694 A DE 2646694A DE 2646694 A1 DE2646694 A1 DE 2646694A1
- Authority
- DE
- Germany
- Prior art keywords
- compounds
- metal nitride
- sintered body
- bond
- sintered bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 48
- 150000004767 nitrides Chemical class 0.000 title claims description 48
- 229910052751 metal Inorganic materials 0.000 title claims description 47
- 239000002184 metal Substances 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title description 5
- 229910052581 Si3N4 Inorganic materials 0.000 title description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title description 2
- 150000003961 organosilicon compounds Chemical class 0.000 claims description 59
- 150000001875 compounds Chemical class 0.000 claims description 38
- 229910052710 silicon Inorganic materials 0.000 claims description 31
- 239000011230 binding agent Substances 0.000 claims description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 27
- 238000005245 sintering Methods 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 24
- 239000000843 powder Substances 0.000 claims description 24
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 24
- 239000000203 mixture Substances 0.000 claims description 23
- 229910052799 carbon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 16
- 238000000465 moulding Methods 0.000 claims description 12
- 238000006068 polycondensation reaction Methods 0.000 claims description 11
- 238000011282 treatment Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 238000005470 impregnation Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 7
- 229910008051 Si-OH Inorganic materials 0.000 claims description 6
- 229910006358 Si—OH Inorganic materials 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 5
- 229910007991 Si-N Inorganic materials 0.000 claims description 4
- 229910008045 Si-Si Inorganic materials 0.000 claims description 4
- 229910006294 Si—N Inorganic materials 0.000 claims description 4
- 229910006411 Si—Si Inorganic materials 0.000 claims description 4
- 150000002148 esters Chemical class 0.000 claims description 4
- 229910018540 Si C Inorganic materials 0.000 claims description 3
- 229910002808 Si–O–Si Inorganic materials 0.000 claims description 3
- 239000012298 atmosphere Substances 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 125000004104 aryloxy group Chemical group 0.000 claims description 2
- 210000000056 organ Anatomy 0.000 claims 1
- 150000002908 osmium compounds Chemical class 0.000 claims 1
- 229910017083 AlN Inorganic materials 0.000 description 21
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 16
- 229910052757 nitrogen Inorganic materials 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229920003257 polycarbosilane Polymers 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 13
- 238000010304 firing Methods 0.000 description 12
- 238000007731 hot pressing Methods 0.000 description 10
- 238000007254 oxidation reaction Methods 0.000 description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 239000012300 argon atmosphere Substances 0.000 description 9
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 8
- -1 Al 2 O 1 Chemical compound 0.000 description 7
- 230000035939 shock Effects 0.000 description 7
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 230000006698 induction Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 150000003384 small molecules Chemical class 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 3
- 238000005194 fractionation Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 150000002605 large molecules Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 239000003208 petroleum Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- RTCLHEHPUHREBC-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6-dodecamethylhexasilinane Chemical compound C[Si]1(C)[Si](C)(C)[Si](C)(C)[Si](C)(C)[Si](C)(C)[Si]1(C)C RTCLHEHPUHREBC-UHFFFAOYSA-N 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 2
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 2
- 238000000748 compression moulding Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical compound [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 150000002978 peroxides Chemical class 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- CKBPNLOEETXYEX-UHFFFAOYSA-N 2-methylprop-1-enyl-[4-(2-methylprop-1-enylsilyl)phenyl]silane Chemical compound CC(=C[SiH2]C1=CC=C(C=C1)[SiH2]C=C(C)C)C CKBPNLOEETXYEX-UHFFFAOYSA-N 0.000 description 1
- 101000737090 Agrotis ipsilon Neuropeptide CCHamide-2 Proteins 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 238000005481 NMR spectroscopy Methods 0.000 description 1
- 229910003691 SiBr Inorganic materials 0.000 description 1
- 229910020175 SiOH Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- IFVTZJHWGZSXFD-UHFFFAOYSA-N biphenylene Chemical group C1=CC=C2C3=CC=CC=C3C2=C1 IFVTZJHWGZSXFD-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- KTQYJQFGNYHXMB-UHFFFAOYSA-N dichloro(methyl)silicon Chemical compound C[Si](Cl)Cl KTQYJQFGNYHXMB-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- DNRIKWQBXKHSJB-UHFFFAOYSA-N diphenyl-bis(triphenylsilyl)silane Chemical compound C1=CC=CC=C1[Si]([Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 DNRIKWQBXKHSJB-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229920006158 high molecular weight polymer Polymers 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229940050176 methyl chloride Drugs 0.000 description 1
- 239000005055 methyl trichlorosilane Substances 0.000 description 1
- 239000005048 methyldichlorosilane Substances 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- 150000001283 organosilanols Chemical class 0.000 description 1
- 125000005375 organosiloxane group Chemical group 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004153 renaturation Methods 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical class [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 150000004819 silanols Chemical class 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000005051 trimethylchlorosilane Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/6303—Inorganic additives
- C04B35/6316—Binders based on silicon compounds
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/46—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with organic materials
- C04B41/49—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes
- C04B41/4905—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes containing silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/82—Coating or impregnation with organic materials
- C04B41/84—Compounds having one or more carbon-to-metal of carbon-to-silicon linkages
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50124878A JPS5830264B2 (ja) | 1975-10-18 | 1975-10-18 | キンゾクチツカブツシヨウケツセイケイタイノセイゾウホウホウ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2646694A1 true DE2646694A1 (de) | 1977-04-28 |
Family
ID=14896317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19762646694 Withdrawn DE2646694A1 (de) | 1975-10-18 | 1976-10-15 | Verfahren zur herstellung von metallnitridsinterkoerpern und danach erhaltene siliciumnitrid- und aluminiumnitridsinterkoerper |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4164528A (enExample) |
| JP (1) | JPS5830264B2 (enExample) |
| CA (1) | CA1078879A (enExample) |
| DE (1) | DE2646694A1 (enExample) |
| FR (1) | FR2327836A1 (enExample) |
| GB (1) | GB1568063A (enExample) |
| IT (1) | IT1069052B (enExample) |
| SE (1) | SE7611457L (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3007384A1 (de) * | 1979-02-28 | 1980-09-04 | Ngk Insulators Ltd | Verfahren zur herstellung von siliziumhaltigen, nicht- oxidischen, waermebestaendigen keramikartikeln |
| DE3220559A1 (de) * | 1981-06-01 | 1982-12-16 | Nippon Carbon Co., Ltd., Tokyo | Formkoerper vom siliciumnitrid-typ und verfahren zu ihrer herstellung |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4177230A (en) * | 1978-06-02 | 1979-12-04 | The United States Of America As Represented By The Secretary Of The Air Force | Process for producing reaction sintered silicon nitride of increased density |
| JPS55108939A (en) * | 1979-02-15 | 1980-08-21 | Sharp Corp | Access unit of focus servo system |
| DE2910943A1 (de) * | 1979-03-20 | 1980-09-25 | Motoren Turbinen Union | Verfahren zur herstellung von keramikformteilen aus siliziumnitrid |
| JPS6031799B2 (ja) * | 1979-11-30 | 1985-07-24 | 黒崎窯業株式会社 | ＳｉＣ−Ｓｉ↓３Ｎ↓４系複合耐熱セラミツクス材料及びその製造方法 |
| US4376742A (en) * | 1981-02-23 | 1983-03-15 | Systems Research Laboratories, Inc. | Fugitive liquid phase densification of silicon nitride |
| US4395460A (en) * | 1981-09-21 | 1983-07-26 | Dow Corning Corporation | Preparation of polysilazane polymers and the polymers therefrom |
| DE3142058A1 (de) * | 1981-10-23 | 1983-05-05 | Elektroschmelzwerk Kempten GmbH, 8000 München | Praktisch porenfreie formkoerper aus polykristallinem siliciumnitrid und siliciumcarbid und verfahren zu ihrer herstellung durch isostatisches heisspressen |
| US4832888A (en) * | 1984-03-03 | 1989-05-23 | Kurosaki Refractories Co., Ltd. | Method for producing high-density silicon nitride sintered product |
| JPS6112915A (ja) * | 1984-06-25 | 1986-01-21 | Tokushu Muki Zairyo Kenkyusho | 実質的にＳｉ，Ｎ及びＯからなる連続無機繊維とその製造法 |
| GB2177421B (en) * | 1985-05-20 | 1989-07-19 | Toshiba Ceramics Co | Sintered body of silicon carbide and method for manufacturing the same |
| US4690790A (en) * | 1985-07-23 | 1987-09-01 | Stemcor Corporation | Silicon nitride/silicon carbide composition and articles thereof |
| EP0276148A3 (en) * | 1987-01-20 | 1989-07-26 | Keramont Advanced Ceramic Products Corporation | Process for removing carbon or carbon compounds comprised in binders from non-oxide ceramics, and sintered bodies obtained therefrom |
| US5167887A (en) * | 1987-08-31 | 1992-12-01 | Gte Laboratories Incorporated | SI3 N4 process using polysilane as a binder |
| US5187129A (en) * | 1987-12-21 | 1993-02-16 | Eaton Corporation | Process for making silicon nitride and powders and articles made therefrom |
| US5079198A (en) * | 1990-07-24 | 1992-01-07 | Eaton Corporation | Ceramic phase in sintered silicon nitride containing cerium, aluminum, and iron |
| US5156830A (en) * | 1990-07-24 | 1992-10-20 | Eaton Corporation | Process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase material |
| US5252248A (en) * | 1990-07-24 | 1993-10-12 | Eaton Corporation | Process for preparing a base nitridable silicon-containing material |
| US5085582A (en) * | 1990-07-24 | 1992-02-04 | Eaton Corporation | Silicon nitride containers for the sintering of silicon nitride ceramics |
| US5160719A (en) * | 1990-07-24 | 1992-11-03 | Eaton Corporation | Process for nitriding silicon containing materials |
| US5213729A (en) * | 1990-07-24 | 1993-05-25 | Eaton Corporation | Process for preparing a densified beta-phase silicon nitride material having at least one densification aid, and the material resulting therefrom |
| US5055432A (en) * | 1990-07-24 | 1991-10-08 | Eaton Corporation | Process for preparing a nitridable silicon-containing material having at least one densification aid including alumina, and the material resulting therefrom |
| US6007789A (en) * | 1992-11-03 | 1999-12-28 | Eaton Corporation | Method of nitriding silicon |
| US6515846B1 (en) * | 1999-02-08 | 2003-02-04 | H.C. Starck, Inc. | Capacitor substrates made of refractory metal nitrides |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA724702A (en) * | 1965-12-28 | Union Carbide Corporation | Refractory ramming mix | |
| GB1054631A (enExample) * | 1963-01-31 | 1967-01-11 | ||
| DE1646700B1 (de) * | 1965-04-22 | 1970-12-17 | Montedison Spa | Verfahren zur Herstellung von Formkoerpern aus Siliziumnitrid oder dessen Gemischen mit Siliziumcarbid |
| US3749591A (en) * | 1965-10-23 | 1973-07-31 | Owens Illinois Inc | Method for forming a polysiloxane impregnated porous sheet and article thereof |
| US3485904A (en) * | 1966-07-18 | 1969-12-23 | Dow Corning | Method utilizing an organopolysiloxane binder to make ceramic article |
| US3819786A (en) * | 1969-09-29 | 1974-06-25 | Nat Res Dev | Production of silicon nitride material components |
| DE2236078A1 (de) * | 1972-07-22 | 1974-03-21 | Bayer Ag | Formkoerper aus siliciumcarbid und verfahren zu ihrer herstellung |
-
1975
- 1975-10-18 JP JP50124878A patent/JPS5830264B2/ja not_active Expired
-
1976
- 1976-10-08 US US05/730,881 patent/US4164528A/en not_active Expired - Lifetime
- 1976-10-13 GB GB42437/76A patent/GB1568063A/en not_active Expired
- 1976-10-13 CA CA263,252A patent/CA1078879A/en not_active Expired
- 1976-10-15 DE DE19762646694 patent/DE2646694A1/de not_active Withdrawn
- 1976-10-15 FR FR7631160A patent/FR2327836A1/fr active Granted
- 1976-10-15 SE SE7611457A patent/SE7611457L/xx unknown
- 1976-10-18 IT IT7651776A patent/IT1069052B/it active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3007384A1 (de) * | 1979-02-28 | 1980-09-04 | Ngk Insulators Ltd | Verfahren zur herstellung von siliziumhaltigen, nicht- oxidischen, waermebestaendigen keramikartikeln |
| DE3220559A1 (de) * | 1981-06-01 | 1982-12-16 | Nippon Carbon Co., Ltd., Tokyo | Formkoerper vom siliciumnitrid-typ und verfahren zu ihrer herstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5259612A (en) | 1977-05-17 |
| GB1568063A (en) | 1980-05-21 |
| CA1078879A (en) | 1980-06-03 |
| JPS5830264B2 (ja) | 1983-06-28 |
| US4164528A (en) | 1979-08-14 |
| SE7611457L (sv) | 1977-04-19 |
| IT1069052B (it) | 1985-03-25 |
| FR2327836A1 (fr) | 1977-05-13 |
| FR2327836B1 (enExample) | 1981-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8136 | Disposal/non-payment of the fee for publication/grant |