DE2641232C2 - Schichtaufbau und Verfahren zu seiner Herstellung - Google Patents

Schichtaufbau und Verfahren zu seiner Herstellung

Info

Publication number
DE2641232C2
DE2641232C2 DE2641232A DE2641232A DE2641232C2 DE 2641232 C2 DE2641232 C2 DE 2641232C2 DE 2641232 A DE2641232 A DE 2641232A DE 2641232 A DE2641232 A DE 2641232A DE 2641232 C2 DE2641232 C2 DE 2641232C2
Authority
DE
Germany
Prior art keywords
layer structure
metal
structure according
layer
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2641232A
Other languages
German (de)
English (en)
Other versions
DE2641232A1 (de
Inventor
Dieter 7000 Stuttgart Bayer
Herbert Dipl.-Phys. 7064 Remshalden Förster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE2641232A priority Critical patent/DE2641232C2/de
Priority to GB35765/77A priority patent/GB1574064A/en
Priority to FR7726257A priority patent/FR2364534A1/fr
Priority to IT27328/77A priority patent/IT1084223B/it
Publication of DE2641232A1 publication Critical patent/DE2641232A1/de
Priority to US06/022,375 priority patent/US4229476A/en
Application granted granted Critical
Publication of DE2641232C2 publication Critical patent/DE2641232C2/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/80—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors
    • H10D86/85—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors characterised by only passive components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24851—Intermediate layer is discontinuous or differential
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24934—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including paper layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Physical Vapour Deposition (AREA)
DE2641232A 1976-09-14 1976-09-14 Schichtaufbau und Verfahren zu seiner Herstellung Expired DE2641232C2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE2641232A DE2641232C2 (de) 1976-09-14 1976-09-14 Schichtaufbau und Verfahren zu seiner Herstellung
GB35765/77A GB1574064A (en) 1976-09-14 1977-08-25 Electrical capacitor elements or recording elements
FR7726257A FR2364534A1 (fr) 1976-09-14 1977-08-29 Combinaison de couche mince complexe, notamment pour condensateur, et procede pour sa fabrication
IT27328/77A IT1084223B (it) 1976-09-14 1977-09-07 Combinazione a strati sottili e procedimento per la sua fabbricazione.
US06/022,375 US4229476A (en) 1976-09-14 1979-03-20 Thin film structure on a ribbon substrate for electric components and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2641232A DE2641232C2 (de) 1976-09-14 1976-09-14 Schichtaufbau und Verfahren zu seiner Herstellung

Publications (2)

Publication Number Publication Date
DE2641232A1 DE2641232A1 (de) 1978-03-16
DE2641232C2 true DE2641232C2 (de) 1982-10-21

Family

ID=5987826

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2641232A Expired DE2641232C2 (de) 1976-09-14 1976-09-14 Schichtaufbau und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (1) US4229476A (OSRAM)
DE (1) DE2641232C2 (OSRAM)
FR (1) FR2364534A1 (OSRAM)
GB (1) GB1574064A (OSRAM)
IT (1) IT1084223B (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3820803C1 (OSRAM) * 1988-06-20 1990-02-15 Papierfabrik Schoeller & Hoesch Gmbh, 7562 Gernsbach, De

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2902195C2 (de) * 1979-01-20 1984-09-06 Robert Bosch Gmbh, 7000 Stuttgart Selbstheilender elektrischer Kondensator
ATE23001T1 (de) * 1982-03-06 1986-11-15 Steiner Kg Selbstheilender elektrischer kondensator.
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
US5018048A (en) * 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US5125138A (en) * 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same
DE3925283A1 (de) * 1989-05-22 1990-11-29 Leybold Ag Verfahren und vorrichtung zum gleichmaessigen beschichten groesserer flaechen
US5411600A (en) * 1992-06-03 1995-05-02 Eastman Kodak Company Ultrathin film thermocouples and method of manufacture
DE4223568C1 (de) * 1992-07-17 1993-11-18 Leybold Ag Verfahren zum Herstellen einer eine Al-Zn-Schicht aufweisenden Folienbahn, Vorrichtung zu seiner Durchführung und Folienbahn

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB599694A (en) * 1944-11-30 1948-03-18 Paul Alexander Improvements in or relating to thermal evaporation of metals in a vacuum
FR842019A (fr) * 1937-08-12 1939-06-05 Fides Procédé de métallisation de matières isolantes par vaporisage ou pulvérisage avec du métal pour servir de condensateurs
US2482054A (en) * 1944-06-24 1949-09-13 Libbey Owens Ford Glass Co Mirror structure having a metal to glass adherence increasing interlayer
DE918099C (de) * 1948-10-02 1954-09-20 Siemens Ag Einrichtung mit auf Traegerunterlagen aufgebrachten duennen, sich ihnen gegenueber neutral verhaltenden Metallschichten, insbesondere bei elektrischen Kondensatoren mit auf dem Dielektrikum aufgedampften Belegungen
US2702760A (en) * 1951-04-25 1955-02-22 Western Electric Co Method of applying metallic stripes to a web of paper
DE960564C (de) * 1952-11-26 1957-03-21 Standard Elek K Ag Elektrischer Kondensator mit ausbrennfaehigen Belegungen
US2748031A (en) * 1952-12-31 1956-05-29 Kafig Emanuel Reproduction of printed patterns by vacuum evaporation
DE1056276B (de) * 1953-12-05 1959-04-30 Siemens Ag Einlagiger elektrischer Kondensator mit regenerierfaehigen Metallbelegungen
US3053698A (en) * 1958-04-11 1962-09-11 Libbey Owens Ford Glass Co Electrically conductive multilayer transparent article and method for making the same
US3152035A (en) * 1958-08-11 1964-10-06 Kirschner Leon Composite roofing
DE1140649B (de) * 1958-12-23 1962-12-06 Siemens Ag Verfahren zur Erzeugung aufgedampfter Metallschichten auf Traegerunterlagen fuer elektrische Kondensatoren
DE1100815B (de) * 1959-05-04 1961-03-02 Siemens Ag Verfahren zum Herstellen von Kondensatoren mit wenigstens einer auf einen Traeger aus Papier od. dgl. aufgedampften Zinkschicht
AT215159B (de) * 1959-06-23 1961-05-25 Balzers Hochvakuum Verfahren zur Herstellung einer haftfesten Verbindung zwischen Werkstücken aus Polyhalogenolefinen u. a. Werkstoffen
US3076727A (en) * 1959-12-24 1963-02-05 Libbey Owens Ford Glass Co Article having electrically conductive coating and process of making
DE1245679B (de) * 1960-05-23 1967-07-27 Siemens Ag Verfahren zum Vakuumbedampfen von Unterlagen mit Metallen mit niedriger Kondensationstemperatur
US3454999A (en) * 1965-05-17 1969-07-15 Nippon Electric Co Capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3820803C1 (OSRAM) * 1988-06-20 1990-02-15 Papierfabrik Schoeller & Hoesch Gmbh, 7562 Gernsbach, De

Also Published As

Publication number Publication date
GB1574064A (en) 1980-09-03
FR2364534A1 (fr) 1978-04-07
DE2641232A1 (de) 1978-03-16
US4229476A (en) 1980-10-21
FR2364534B1 (OSRAM) 1983-04-08
IT1084223B (it) 1985-05-25

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Legal Events

Date Code Title Description
OAP Request for examination filed
OD Request for examination
D2 Grant after examination
8363 Opposition against the patent
8325 Change of the main classification

Ipc: H01G 1/015

8320 Willingness to grant licences declared (paragraph 23)
8331 Complete revocation