DE68928852T2 - Aluminium-vakuumverdämpfungsfilm und verfahren zur herstellung - Google Patents

Aluminium-vakuumverdämpfungsfilm und verfahren zur herstellung

Info

Publication number
DE68928852T2
DE68928852T2 DE1989628852 DE68928852T DE68928852T2 DE 68928852 T2 DE68928852 T2 DE 68928852T2 DE 1989628852 DE1989628852 DE 1989628852 DE 68928852 T DE68928852 T DE 68928852T DE 68928852 T2 DE68928852 T2 DE 68928852T2
Authority
DE
Germany
Prior art keywords
producing
same
damping film
aluminum vacuum
vacuum damping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1989628852
Other languages
English (en)
Other versions
DE68928852D1 (de
Inventor
Motoyuki Suzuki
Yukichi Deguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Application granted granted Critical
Publication of DE68928852D1 publication Critical patent/DE68928852D1/de
Publication of DE68928852T2 publication Critical patent/DE68928852T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/14—Organic dielectrics
    • H01G4/18—Organic dielectrics of synthetic material, e.g. derivatives of cellulose
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31786—Of polyester [e.g., alkyd, etc.]
DE1989628852 1988-09-28 1989-09-28 Aluminium-vakuumverdämpfungsfilm und verfahren zur herstellung Expired - Fee Related DE68928852T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP24343388 1988-09-28
JP24525888 1988-09-29
JP9836789 1989-04-18
PCT/JP1989/000985 WO1990003266A1 (en) 1988-09-28 1989-09-28 Aluminium vacuum evaporation film and its production method

Publications (2)

Publication Number Publication Date
DE68928852D1 DE68928852D1 (de) 1998-12-24
DE68928852T2 true DE68928852T2 (de) 1999-05-20

Family

ID=27308647

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1989628852 Expired - Fee Related DE68928852T2 (de) 1988-09-28 1989-09-28 Aluminium-vakuumverdämpfungsfilm und verfahren zur herstellung

Country Status (5)

Country Link
US (1) US5147726A (de)
EP (1) EP0394475B1 (de)
KR (1) KR940004756B1 (de)
DE (1) DE68928852T2 (de)
WO (1) WO1990003266A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2065833C (en) * 1991-04-12 1997-12-30 Shigeo Matsumaru Process for forming metal film, on surface of synthetic resin substrate
CA2071254A1 (en) * 1991-06-17 1992-12-18 Masatsugi Murakami Metallized wrapping film
US5305178A (en) * 1991-08-12 1994-04-19 The United States Of America As Represented By The Secretary Of The Army Capacitor with increased electrical breakdown strength and method of forming the same
US5405663A (en) * 1991-11-12 1995-04-11 Hunt-Wesson, Inc. Microwave package laminate with extrusion bonded susceptor
JP3114364B2 (ja) * 1992-07-03 2000-12-04 三菱化学ポリエステルフィルム株式会社 金属蒸着ポリエステルフィルムコンデンサ
EP0650174A3 (de) * 1993-10-21 1995-08-02 Philips Electronics Nv Mehrfach-Metallfilmkondensator mit verbesserter Oxidationsbeständigkeit.
US6171714B1 (en) * 1996-04-18 2001-01-09 Gould Electronics Inc. Adhesiveless flexible laminate and process for making adhesiveless flexible laminate
US6287673B1 (en) 1998-03-03 2001-09-11 Acktar Ltd. Method for producing high surface area foil electrodes
JP2008115417A (ja) * 2006-11-02 2008-05-22 Toray Ind Inc 金属化フィルムの製造方法、及び金属化フィルム
WO2009076458A1 (en) * 2007-12-10 2009-06-18 Toray Plastics (America) , Inc. Biaxially oriented polylactic acid film with high barrier
US9314999B2 (en) 2008-08-15 2016-04-19 Toray Plastics (America), Inc. Biaxially oriented polylactic acid film with high barrier
US9150004B2 (en) 2009-06-19 2015-10-06 Toray Plastics (America), Inc. Biaxially oriented polylactic acid film with improved heat seal properties
EP2480710B1 (de) 2009-09-25 2018-01-24 Toray Plastics (America) , Inc. Mehrschichtige polymilchsäurefolie mit hoher feuchtigkeitsbarriere sowie verfahren zu deren herstellung
US9221213B2 (en) 2009-09-25 2015-12-29 Toray Plastics (America), Inc. Multi-layer high moisture barrier polylactic acid film
US9492962B2 (en) 2010-03-31 2016-11-15 Toray Plastics (America), Inc. Biaxially oriented polylactic acid film with reduced noise level and improved moisture barrier
US9238324B2 (en) 2010-03-31 2016-01-19 Toray Plastics (Amercia), Inc. Biaxially oriented polylactic acid film with reduced noise level
JP2013142161A (ja) * 2012-01-10 2013-07-22 Toray Advanced Film Co Ltd 蒸着フィルムの製造方法および積層包装材料
JP2013204123A (ja) * 2012-03-29 2013-10-07 Toppan Printing Co Ltd ガスバリア性フィルムとその製造方法
WO2020003946A1 (ja) * 2018-06-25 2020-01-02 尾池工業株式会社 蒸着フィルムおよび蒸着フィルムの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1092269B (de) * 1952-07-31 1960-11-03 Du Pont Verfahren zum Metallisieren von Folien aus Polyaethylenterephthalat durch Vakuumbedampfen
JPS5255200A (en) * 1975-10-29 1977-05-06 Fuji Heavy Ind Ltd Cooling-air controlling apparatus for use in air-craft engines
JPS5488641A (en) * 1977-12-23 1979-07-13 Matsushita Electric Ind Co Ltd Heat source system
JPS54139978A (en) * 1978-04-24 1979-10-30 Toray Ind Inc Composite organic high polymer material
DE3172124D1 (en) * 1980-06-10 1985-10-10 Matsushita Electric Ind Co Ltd A method of vacuum depositing a layer on a plastics film substrate
JPS57200945A (en) * 1981-06-03 1982-12-09 Tdk Corp Magnetic recording medium
JPS5816415A (ja) * 1981-07-23 1983-01-31 本州製紙株式会社 電気用延伸ポリプロピレンフイルム
NL8204783A (nl) * 1982-12-10 1984-07-02 Philips Nv Werkwijze voor het aanbrengen van een metaallaag op een substraat.
US4568413A (en) * 1983-07-25 1986-02-04 James J. Toth Metallized and plated laminates
GB2168911B (en) * 1984-12-29 1989-06-07 Tdk Corp Magnetic recording medium
JPH01211908A (ja) * 1988-02-18 1989-08-25 Toray Ind Inc コンデンサ

Also Published As

Publication number Publication date
US5147726A (en) 1992-09-15
KR940004756B1 (ko) 1994-05-28
EP0394475B1 (de) 1998-11-18
KR900701528A (ko) 1990-12-03
EP0394475A1 (de) 1990-10-31
WO1990003266A1 (en) 1990-04-05
EP0394475A4 (en) 1992-04-08
DE68928852D1 (de) 1998-12-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee