DE2536516C3 - Verfahren zur stromlosen Metallabscheidung auf Molybdän oder Wolfram - Google Patents
Verfahren zur stromlosen Metallabscheidung auf Molybdän oder WolframInfo
- Publication number
- DE2536516C3 DE2536516C3 DE2536516A DE2536516A DE2536516C3 DE 2536516 C3 DE2536516 C3 DE 2536516C3 DE 2536516 A DE2536516 A DE 2536516A DE 2536516 A DE2536516 A DE 2536516A DE 2536516 C3 DE2536516 C3 DE 2536516C3
- Authority
- DE
- Germany
- Prior art keywords
- metal
- deposition
- solution
- molybdenum
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title claims description 41
- 229910052750 molybdenum Inorganic materials 0.000 title claims description 37
- 239000011733 molybdenum Substances 0.000 title claims description 37
- 238000000034 method Methods 0.000 title claims description 24
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 title claims description 10
- 229910052721 tungsten Inorganic materials 0.000 title claims description 10
- 239000010937 tungsten Substances 0.000 title claims description 10
- 230000008569 process Effects 0.000 title claims description 7
- 238000000454 electroless metal deposition Methods 0.000 title claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 58
- 239000002184 metal Substances 0.000 claims description 58
- 239000000243 solution Substances 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 50
- 238000000151 deposition Methods 0.000 claims description 36
- 230000008021 deposition Effects 0.000 claims description 36
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 22
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 18
- 229910021645 metal ion Inorganic materials 0.000 claims description 15
- 230000003647 oxidation Effects 0.000 claims description 15
- 238000007254 oxidation reaction Methods 0.000 claims description 15
- 238000007747 plating Methods 0.000 claims description 15
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 claims description 8
- 230000009467 reduction Effects 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 150000004972 metal peroxides Chemical class 0.000 claims description 5
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 claims description 5
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 claims description 4
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 claims description 4
- 238000001465 metallisation Methods 0.000 claims description 4
- YWFDDXXMOPZFFM-UHFFFAOYSA-H rhodium(3+);trisulfate Chemical compound [Rh+3].[Rh+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O YWFDDXXMOPZFFM-UHFFFAOYSA-H 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 claims description 3
- 230000036571 hydration Effects 0.000 claims description 3
- 238000006703 hydration reaction Methods 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 239000010948 rhodium Substances 0.000 claims description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 3
- 229910000361 cobalt sulfate Inorganic materials 0.000 claims description 2
- 229940044175 cobalt sulfate Drugs 0.000 claims description 2
- 239000000356 contaminant Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims 2
- 238000005275 alloying Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000012266 salt solution Substances 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 39
- 239000011248 coating agent Substances 0.000 description 23
- 238000000576 coating method Methods 0.000 description 23
- 150000002978 peroxides Chemical group 0.000 description 14
- -1 molybdenum peroxide hydrates Chemical class 0.000 description 12
- 239000010410 layer Substances 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 238000006722 reduction reaction Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 150000002739 metals Chemical group 0.000 description 5
- 229910052723 transition metal Inorganic materials 0.000 description 5
- 150000003624 transition metals Chemical class 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000000908 ammonium hydroxide Substances 0.000 description 4
- 230000005012 migration Effects 0.000 description 4
- 238000013508 migration Methods 0.000 description 4
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 4
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical class O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 4
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical class [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- KMPZCBWYGBGUPB-UHFFFAOYSA-N molybdenum;hydrate Chemical class O.[Mo] KMPZCBWYGBGUPB-UHFFFAOYSA-N 0.000 description 3
- 239000007800 oxidant agent Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000011253 protective coating Substances 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- CAPJTKJLPOPDFA-UHFFFAOYSA-J [Cr](=O)(=O)(O)O.S(=O)(=O)([O-])[O-].[Ni+2] Chemical class [Cr](=O)(=O)(O)O.S(=O)(=O)([O-])[O-].[Ni+2] CAPJTKJLPOPDFA-UHFFFAOYSA-J 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- INPLXZPZQSLHBR-UHFFFAOYSA-N cobalt(2+);sulfide Chemical compound [S-2].[Co+2] INPLXZPZQSLHBR-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
Landscapes
- Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/499,077 US3935345A (en) | 1974-08-20 | 1974-08-20 | Electroless plating of peroxide forming metals |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2536516A1 DE2536516A1 (de) | 1976-03-04 |
| DE2536516B2 DE2536516B2 (de) | 1979-07-19 |
| DE2536516C3 true DE2536516C3 (de) | 1980-03-20 |
Family
ID=23983720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2536516A Expired DE2536516C3 (de) | 1974-08-20 | 1975-08-16 | Verfahren zur stromlosen Metallabscheidung auf Molybdän oder Wolfram |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3935345A (https=) |
| JP (1) | JPS5611312B2 (https=) |
| CA (1) | CA1063445A (https=) |
| DE (1) | DE2536516C3 (https=) |
| FR (1) | FR2282482A1 (https=) |
| GB (1) | GB1473763A (https=) |
| SE (1) | SE418306B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4212907A (en) * | 1979-03-22 | 1980-07-15 | The United States Of America As Represented By The United States Department Of Energy | Pre-treatment for molybdenum or molybdenum-rich alloy articles to be plated |
| US4450187A (en) * | 1982-04-09 | 1984-05-22 | Diamond Shamrock Corporation | Immersion deposited cathodes |
| US4695489A (en) * | 1986-07-28 | 1987-09-22 | General Electric Company | Electroless nickel plating composition and method |
| US5750202A (en) * | 1994-07-19 | 1998-05-12 | Santa Barbara Research Center | Preparation of gold-coated molybdenum articles and articles prepared thereby |
| US5843517A (en) * | 1997-04-30 | 1998-12-01 | Macdermid, Incorporated | Composition and method for selective plating |
| US7204871B2 (en) | 2005-05-24 | 2007-04-17 | Wolverine Plating Corp. | Metal plating process |
| US8198712B2 (en) * | 2006-06-07 | 2012-06-12 | International Rectifier Corporation | Hermetically sealed semiconductor device module |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2317205A (en) * | 1943-04-20 | Method of working metals | ||
| US3741735A (en) * | 1964-01-08 | 1973-06-26 | Atomic Energy Commission | Coating molybdenum with pure gold |
| US3386896A (en) * | 1964-11-05 | 1968-06-04 | Bell Telephone Labor Inc | Electroplasting onto molybdenum surfaces |
| US3505095A (en) * | 1967-04-05 | 1970-04-07 | Atomic Energy Commission | Preplating treatment for maraging steels |
-
1974
- 1974-08-20 US US05/499,077 patent/US3935345A/en not_active Expired - Lifetime
-
1975
- 1975-08-15 GB GB3411575A patent/GB1473763A/en not_active Expired
- 1975-08-16 DE DE2536516A patent/DE2536516C3/de not_active Expired
- 1975-08-19 FR FR7525689A patent/FR2282482A1/fr active Granted
- 1975-08-19 CA CA233,740A patent/CA1063445A/en not_active Expired
- 1975-08-19 SE SE7509240A patent/SE418306B/xx not_active IP Right Cessation
- 1975-08-19 JP JP10055875A patent/JPS5611312B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2536516B2 (de) | 1979-07-19 |
| CA1063445A (en) | 1979-10-02 |
| US3935345A (en) | 1976-01-27 |
| DE2536516A1 (de) | 1976-03-04 |
| JPS5146527A (https=) | 1976-04-21 |
| SE418306B (sv) | 1981-05-18 |
| FR2282482A1 (fr) | 1976-03-19 |
| JPS5611312B2 (https=) | 1981-03-13 |
| SE7509240L (sv) | 1976-02-23 |
| FR2282482B1 (https=) | 1979-07-27 |
| GB1473763A (en) | 1977-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| C3 | Grant after two publication steps (3rd publication) | ||
| EF | Willingness to grant licences | ||
| 8339 | Ceased/non-payment of the annual fee |