DE2532570C3 - Verfahren zum Herstellen von supraleitfähigen Nb3 Sn-Schichten auf Nioboberflächen für Hochfrequenzanwendungen sowie Vorrichtung zur Durchführung dieses Verfahrens - Google Patents
Verfahren zum Herstellen von supraleitfähigen Nb3 Sn-Schichten auf Nioboberflächen für Hochfrequenzanwendungen sowie Vorrichtung zur Durchführung dieses VerfahrensInfo
- Publication number
- DE2532570C3 DE2532570C3 DE2532570A DE2532570A DE2532570C3 DE 2532570 C3 DE2532570 C3 DE 2532570C3 DE 2532570 A DE2532570 A DE 2532570A DE 2532570 A DE2532570 A DE 2532570A DE 2532570 C3 DE2532570 C3 DE 2532570C3
- Authority
- DE
- Germany
- Prior art keywords
- niobium
- tin
- reaction area
- reaction
- resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010955 niobium Substances 0.000 title claims description 74
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 title claims description 73
- 229910052758 niobium Inorganic materials 0.000 title claims description 68
- 238000000034 method Methods 0.000 title claims description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 230000008569 process Effects 0.000 title claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 87
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 71
- 239000010453 quartz Substances 0.000 claims description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- 239000007789 gas Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 14
- 229910000657 niobium-tin Inorganic materials 0.000 claims description 10
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 55
- 239000003708 ampul Substances 0.000 description 23
- 230000004907 flux Effects 0.000 description 16
- 230000005291 magnetic effect Effects 0.000 description 16
- 238000001704 evaporation Methods 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000005672 electromagnetic field Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- 239000002887 superconductor Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- 239000012494 Quartz wool Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical group [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- RZWWGOCLMSGROE-UHFFFAOYSA-N n-(2,6-dichlorophenyl)-5,7-dimethyl-[1,2,4]triazolo[1,5-a]pyrimidine-2-sulfonamide Chemical compound N1=C2N=C(C)C=C(C)N2N=C1S(=O)(=O)NC1=C(Cl)C=CC=C1Cl RZWWGOCLMSGROE-UHFFFAOYSA-N 0.000 description 1
- KJSMVPYGGLPWOE-UHFFFAOYSA-N niobium tin Chemical compound [Nb].[Sn] KJSMVPYGGLPWOE-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000000256 polyoxyethylene sorbitan monolaurate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
- C23C10/08—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases only one element being diffused
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/80—Material per se process of making same
- Y10S505/815—Process of making per se
- Y10S505/818—Coating
- Y10S505/819—Vapor deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49014—Superconductor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2532570A DE2532570C3 (de) | 1975-07-21 | 1975-07-21 | Verfahren zum Herstellen von supraleitfähigen Nb3 Sn-Schichten auf Nioboberflächen für Hochfrequenzanwendungen sowie Vorrichtung zur Durchführung dieses Verfahrens |
| CH750576A CH603813A5 (enExample) | 1975-07-21 | 1976-06-14 | |
| NL7606636A NL7606636A (nl) | 1975-07-21 | 1976-06-18 | Werkwijze voor het vervaardigen van suprageleiden- de nb3sn-lagen op niobiumoppervlakken voor hoog- frequent toepassingen. |
| US05/705,418 US4081573A (en) | 1975-07-21 | 1976-07-15 | Method for preparing superconductive Nb3 Sn layers on niobium surfaces for high-frequency applications |
| FR7621960A FR2319202A1 (fr) | 1975-07-21 | 1976-07-19 | Procede pour la realisation de couches nb3sn supraconductrices sur des surfaces de niobium destinees a des applications a haute frequence |
| GB30252/76A GB1551922A (en) | 1975-07-21 | 1976-07-20 | Production of nb sn layers |
| JP51087104A JPS5214397A (en) | 1975-07-21 | 1976-07-21 | Method of forming superconductive nb3sn layer on hf niobium surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2532570A DE2532570C3 (de) | 1975-07-21 | 1975-07-21 | Verfahren zum Herstellen von supraleitfähigen Nb3 Sn-Schichten auf Nioboberflächen für Hochfrequenzanwendungen sowie Vorrichtung zur Durchführung dieses Verfahrens |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2532570A1 DE2532570A1 (de) | 1977-05-18 |
| DE2532570B2 DE2532570B2 (de) | 1978-02-09 |
| DE2532570C3 true DE2532570C3 (de) | 1978-10-05 |
Family
ID=5952061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2532570A Expired DE2532570C3 (de) | 1975-07-21 | 1975-07-21 | Verfahren zum Herstellen von supraleitfähigen Nb3 Sn-Schichten auf Nioboberflächen für Hochfrequenzanwendungen sowie Vorrichtung zur Durchführung dieses Verfahrens |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4081573A (enExample) |
| JP (1) | JPS5214397A (enExample) |
| CH (1) | CH603813A5 (enExample) |
| DE (1) | DE2532570C3 (enExample) |
| FR (1) | FR2319202A1 (enExample) |
| GB (1) | GB1551922A (enExample) |
| NL (1) | NL7606636A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3811695A1 (de) * | 1988-04-07 | 1989-10-19 | Interatom | Verfahren zum herstellen von supraleitfaehigen nb(pfeil abwaerts)3(pfeil abwaerts)sn-schichten auf nioboberflaechen sowie vorrichtung zur durchfuehrung dieses verfahrens |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3413142C1 (de) * | 1984-04-07 | 1985-11-28 | Dornier System Gmbh, 7990 Friedrichshafen | Verfahren zur Herstellung eines supraleitenden Hohlraumresonators |
| EP0357507B1 (en) * | 1988-08-31 | 1996-03-06 | Superconductor Technologies Inc. | Superconducting article containing thallium |
| US20060272145A1 (en) * | 2005-03-11 | 2006-12-07 | Alabama Cryogenic Engineering, Inc. | Method of producing superconducting wire and articles produced thereby |
| US20210181088A1 (en) * | 2018-04-28 | 2021-06-17 | Guangdong Poctman Life Technology Co., Ltd. | Reaction vessel for testing |
| CN111074208B (zh) * | 2019-12-19 | 2021-04-06 | 中国科学院高能物理研究所 | 一种纯铌腔内表面镀铌三锡薄膜的方法及真空炉 |
| CN113597081B (zh) * | 2021-09-16 | 2023-07-25 | 中国科学院近代物理研究所 | 一种在超导腔内部对锡源进行局部加热的方法 |
| CN113811065B (zh) * | 2021-09-16 | 2023-07-25 | 中国科学院近代物理研究所 | 一种在超导腔内部对锡源进行局部加热的双电极直流结构 |
| IT202300018780A1 (it) * | 2023-09-13 | 2025-03-13 | Lpe Spa | Reattore per deposizione epitassiale di materiale semiconduttore su substrati con slitta scorrevole per camera di reazione |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3213825A (en) * | 1959-12-31 | 1965-10-26 | Trw Inc | Vacuum deposition apparatus |
| US3085913A (en) * | 1960-10-03 | 1963-04-16 | Ibm | Vacuum evaporation method |
| US3332800A (en) * | 1962-10-29 | 1967-07-25 | Nat Res Corp | Method for producing a superconductor comprising a niobium-tin alloy coating |
| US3346467A (en) * | 1964-05-01 | 1967-10-10 | Nat Res Corp | Method of making long length superconductors |
| US3533919A (en) * | 1965-02-24 | 1970-10-13 | Nat Res Dev | Manufacture of superconductors |
| DE1284096B (de) * | 1965-05-10 | 1968-11-28 | Siemens Ag | Verfahren zur Herstellung von supraleitenden Baendern |
| US3493809A (en) * | 1967-12-21 | 1970-02-03 | Varian Associates | Ultra high q superconductive cavity resonator made of niobium having a limited number of crystal grains |
| GB1254542A (en) * | 1968-02-20 | 1971-11-24 | Plessey Co Ltd | Improvements in or relating to superconducting electrical conductors |
| US3576670A (en) * | 1969-02-19 | 1971-04-27 | Gulf Energy & Environ Systems | Method for making a superconducting material |
-
1975
- 1975-07-21 DE DE2532570A patent/DE2532570C3/de not_active Expired
-
1976
- 1976-06-14 CH CH750576A patent/CH603813A5/xx not_active IP Right Cessation
- 1976-06-18 NL NL7606636A patent/NL7606636A/xx not_active Application Discontinuation
- 1976-07-15 US US05/705,418 patent/US4081573A/en not_active Expired - Lifetime
- 1976-07-19 FR FR7621960A patent/FR2319202A1/fr active Granted
- 1976-07-20 GB GB30252/76A patent/GB1551922A/en not_active Expired
- 1976-07-21 JP JP51087104A patent/JPS5214397A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3811695A1 (de) * | 1988-04-07 | 1989-10-19 | Interatom | Verfahren zum herstellen von supraleitfaehigen nb(pfeil abwaerts)3(pfeil abwaerts)sn-schichten auf nioboberflaechen sowie vorrichtung zur durchfuehrung dieses verfahrens |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5214397A (en) | 1977-02-03 |
| DE2532570B2 (de) | 1978-02-09 |
| DE2532570A1 (de) | 1977-05-18 |
| NL7606636A (nl) | 1977-01-25 |
| FR2319202B1 (enExample) | 1979-03-02 |
| FR2319202A1 (fr) | 1977-02-18 |
| CH603813A5 (enExample) | 1978-08-31 |
| GB1551922A (en) | 1979-09-05 |
| US4081573A (en) | 1978-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |