DE2514213A1 - Verfahren zur herstellung von photoschablonen - Google Patents

Verfahren zur herstellung von photoschablonen

Info

Publication number
DE2514213A1
DE2514213A1 DE19752514213 DE2514213A DE2514213A1 DE 2514213 A1 DE2514213 A1 DE 2514213A1 DE 19752514213 DE19752514213 DE 19752514213 DE 2514213 A DE2514213 A DE 2514213A DE 2514213 A1 DE2514213 A1 DE 2514213A1
Authority
DE
Germany
Prior art keywords
emulsion
pore former
layer
photo
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19752514213
Other languages
German (de)
English (en)
Inventor
Rainer Thorand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALBERT ROSE ZWEIGNIEDERLASSUNG
Original Assignee
ALBERT ROSE ZWEIGNIEDERLASSUNG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALBERT ROSE ZWEIGNIEDERLASSUNG filed Critical ALBERT ROSE ZWEIGNIEDERLASSUNG
Publication of DE2514213A1 publication Critical patent/DE2514213A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/12Production of screen printing forms or similar printing forms, e.g. stencils
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
DE19752514213 1974-04-03 1975-04-01 Verfahren zur herstellung von photoschablonen Withdrawn DE2514213A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH463074A CH584917A5 (enrdf_load_stackoverflow) 1974-04-03 1974-04-03

Publications (1)

Publication Number Publication Date
DE2514213A1 true DE2514213A1 (de) 1975-10-16

Family

ID=4279717

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752514213 Withdrawn DE2514213A1 (de) 1974-04-03 1975-04-01 Verfahren zur herstellung von photoschablonen

Country Status (4)

Country Link
CH (1) CH584917A5 (enrdf_load_stackoverflow)
DE (1) DE2514213A1 (enrdf_load_stackoverflow)
ES (1) ES434873A1 (enrdf_load_stackoverflow)
NL (1) NL7503998A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371602A (en) 1978-03-13 1983-02-01 Hidenori Iwasaki Photosensitive printing plate
EP0353470A3 (en) * 1988-08-01 1990-09-12 International Business Machines Corporation Method and composition for improving silylation of resists

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371602A (en) 1978-03-13 1983-02-01 Hidenori Iwasaki Photosensitive printing plate
EP0011648B1 (en) * 1978-03-13 1984-05-16 Tokyo Ohka Kogyo Co., Ltd. Process for reducing the contact time between a photosensitive printing plate and an original
EP0353470A3 (en) * 1988-08-01 1990-09-12 International Business Machines Corporation Method and composition for improving silylation of resists

Also Published As

Publication number Publication date
CH584917A5 (enrdf_load_stackoverflow) 1977-02-15
ES434873A1 (es) 1976-12-16
NL7503998A (nl) 1975-10-07

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination