DE2500338A1 - Anschlussvorrichtung fuer vakuumpumpen - Google Patents
Anschlussvorrichtung fuer vakuumpumpenInfo
- Publication number
- DE2500338A1 DE2500338A1 DE19752500338 DE2500338A DE2500338A1 DE 2500338 A1 DE2500338 A1 DE 2500338A1 DE 19752500338 DE19752500338 DE 19752500338 DE 2500338 A DE2500338 A DE 2500338A DE 2500338 A1 DE2500338 A1 DE 2500338A1
- Authority
- DE
- Germany
- Prior art keywords
- wall
- chamber
- gas
- pump
- evacuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 230000035699 permeability Effects 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 37
- 239000000463 material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 7
- 238000005086 pumping Methods 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 7
- 239000012876 carrier material Substances 0.000 description 6
- 239000002594 sorbent Substances 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 5
- 229930195733 hydrocarbon Natural products 0.000 description 5
- 150000002430 hydrocarbons Chemical class 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 229910001093 Zr alloy Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000011005 laboratory method Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT19143/74A IT1006761B (it) | 1974-01-07 | 1974-01-07 | Impianto e procedimento per l otte nimento di alti vuoti |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2500338A1 true DE2500338A1 (de) | 1975-07-31 |
Family
ID=11155208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752500338 Withdrawn DE2500338A1 (de) | 1974-01-07 | 1975-01-07 | Anschlussvorrichtung fuer vakuumpumpen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4088456A (en, 2012) |
| JP (1) | JPS50117011A (en, 2012) |
| DE (1) | DE2500338A1 (en, 2012) |
| FR (1) | FR2257027B3 (en, 2012) |
| GB (1) | GB1490243A (en, 2012) |
| IT (1) | IT1006761B (en, 2012) |
| NL (1) | NL7500163A (en, 2012) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE8006128L (sv) * | 1980-09-02 | 1982-03-03 | Bertil Frostenson | Forfarande for komprimering av gasformigt medium samt anordning for utforande av forfarandet |
| IT1201945B (it) * | 1982-05-20 | 1989-02-02 | Getters Spa | Tubazione per il trasporto di fluidi isolata a vuoto e metodo per la sua produzione |
| DE3316454A1 (de) * | 1983-05-05 | 1984-11-22 | kabelmetal electro GmbH, 3000 Hannover | Aus zwei oder mehreren konzentrischen rohren bestehendes rohrsystem |
| US6784033B1 (en) | 1984-02-15 | 2004-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for the manufacture of an insulated gate field effect semiconductor device |
| JPS60198394A (ja) * | 1984-03-21 | 1985-10-07 | Anelva Corp | 真空処理装置の排気装置 |
| DE3426641A1 (de) * | 1984-07-19 | 1986-01-23 | kabelmetal electro GmbH, 3000 Hannover | Verfahren zum nachevakuieren von vakuumisolierten konzentrischen rohrleitungen |
| JPH0752718B2 (ja) * | 1984-11-26 | 1995-06-05 | 株式会社半導体エネルギー研究所 | 薄膜形成方法 |
| US6786997B1 (en) * | 1984-11-26 | 2004-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus |
| US6113701A (en) | 1985-02-14 | 2000-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method, and system |
| US6673722B1 (en) | 1985-10-14 | 2004-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
| US6230650B1 (en) | 1985-10-14 | 2001-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
| GB2231120B (en) * | 1989-04-15 | 1993-02-24 | Btr Plc | Resilient bush |
| US5154582A (en) * | 1991-08-20 | 1992-10-13 | Danielson Associates, Inc. | Rough vacuum pump using bulk getter material |
| US5161955A (en) * | 1991-08-20 | 1992-11-10 | Danielson Associates, Inc. | High vacuum pump using bulk getter material |
| US5401298A (en) * | 1993-09-17 | 1995-03-28 | Leybold Inficon, Inc. | Sorption pump |
| US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
| US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
| US5917140A (en) * | 1996-05-21 | 1999-06-29 | Advanced Technology Materials, Inc. | Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means |
| US6347925B1 (en) * | 2000-06-29 | 2002-02-19 | Beacon Power Corporation | Flywheel system with parallel pumping arrangement |
| ATE419024T1 (de) * | 2000-10-12 | 2009-01-15 | Renal Solutions Inc | Vorrichtung für die kontrolle des flusses von körperflüssigkeiten bei extrakorporalen flüssigkeitsbehandlungen |
| US7033498B2 (en) * | 2000-11-28 | 2006-04-25 | Renal Solutions, Inc. | Cartridges useful in cleaning dialysis solutions |
| US6627164B1 (en) * | 2000-11-28 | 2003-09-30 | Renal Solutions, Inc. | Sodium zirconium carbonate and zirconium basic carbonate and methods of making the same |
| US6878283B2 (en) * | 2001-11-28 | 2005-04-12 | Renal Solutions, Inc. | Filter cartridge assemblies and methods for filtering fluids |
| US7998101B2 (en) * | 2003-07-28 | 2011-08-16 | Renal Solutions, Inc. | Devices and methods for body fluid flow control in extracorporeal fluid treatment |
| RU2286449C2 (ru) * | 2004-02-03 | 2006-10-27 | "Центр Разработки Нефтедобывающего Оборудования" ("Црно") | Газосепаратор погружного центробежного насоса |
| US10692692B2 (en) * | 2015-05-27 | 2020-06-23 | Kla-Tencor Corporation | System and method for providing a clean environment in an electron-optical system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3077712A (en) * | 1961-07-14 | 1963-02-19 | Milleron Norman | Vacuum trap and valve combination |
| US3469375A (en) * | 1967-10-16 | 1969-09-30 | Nasa | Sorption vacuum trap |
| DE1764092C3 (de) * | 1968-04-01 | 1974-01-03 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Gettervorrichtung zum Einbau in elektrische Entladungsgefäße |
-
1974
- 1974-01-07 IT IT19143/74A patent/IT1006761B/it active
-
1975
- 1975-01-06 GB GB383/75A patent/GB1490243A/en not_active Expired
- 1975-01-06 FR FR7500256A patent/FR2257027B3/fr not_active Expired
- 1975-01-07 DE DE19752500338 patent/DE2500338A1/de not_active Withdrawn
- 1975-01-07 US US05/539,103 patent/US4088456A/en not_active Expired - Lifetime
- 1975-01-07 JP JP50004322A patent/JPS50117011A/ja active Pending
- 1975-01-07 NL NL7500163A patent/NL7500163A/xx not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| IT1006761B (it) | 1976-10-20 |
| NL7500163A (nl) | 1975-07-09 |
| GB1490243A (en) | 1977-10-26 |
| JPS50117011A (en, 2012) | 1975-09-12 |
| FR2257027A1 (en, 2012) | 1975-08-01 |
| US4088456A (en) | 1978-05-09 |
| FR2257027B3 (en, 2012) | 1977-09-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8141 | Disposal/no request for examination |