NL7500163A - Vacuum pompsysteem. - Google Patents

Vacuum pompsysteem.

Info

Publication number
NL7500163A
NL7500163A NL7500163A NL7500163A NL7500163A NL 7500163 A NL7500163 A NL 7500163A NL 7500163 A NL7500163 A NL 7500163A NL 7500163 A NL7500163 A NL 7500163A NL 7500163 A NL7500163 A NL 7500163A
Authority
NL
Netherlands
Prior art keywords
vacuum pump
pump system
vacuum
pump
Prior art date
Application number
NL7500163A
Other languages
English (en)
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Publication of NL7500163A publication Critical patent/NL7500163A/nl

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
NL7500163A 1974-01-07 1975-01-07 Vacuum pompsysteem. NL7500163A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT19143/74A IT1006761B (it) 1974-01-07 1974-01-07 Impianto e procedimento per l otte nimento di alti vuoti

Publications (1)

Publication Number Publication Date
NL7500163A true NL7500163A (nl) 1975-07-09

Family

ID=11155208

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7500163A NL7500163A (nl) 1974-01-07 1975-01-07 Vacuum pompsysteem.

Country Status (7)

Country Link
US (1) US4088456A (nl)
JP (1) JPS50117011A (nl)
DE (1) DE2500338A1 (nl)
FR (1) FR2257027B3 (nl)
GB (1) GB1490243A (nl)
IT (1) IT1006761B (nl)
NL (1) NL7500163A (nl)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE8006128L (sv) * 1980-09-02 1982-03-03 Bertil Frostenson Forfarande for komprimering av gasformigt medium samt anordning for utforande av forfarandet
IT1201945B (it) * 1982-05-20 1989-02-02 Getters Spa Tubazione per il trasporto di fluidi isolata a vuoto e metodo per la sua produzione
DE3316454A1 (de) * 1983-05-05 1984-11-22 kabelmetal electro GmbH, 3000 Hannover Aus zwei oder mehreren konzentrischen rohren bestehendes rohrsystem
US6784033B1 (en) 1984-02-15 2004-08-31 Semiconductor Energy Laboratory Co., Ltd. Method for the manufacture of an insulated gate field effect semiconductor device
US5780313A (en) 1985-02-14 1998-07-14 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating semiconductor device
JPS60198394A (ja) * 1984-03-21 1985-10-07 Anelva Corp 真空処理装置の排気装置
DE3426641A1 (de) * 1984-07-19 1986-01-23 kabelmetal electro GmbH, 3000 Hannover Verfahren zum nachevakuieren von vakuumisolierten konzentrischen rohrleitungen
US6786997B1 (en) * 1984-11-26 2004-09-07 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus
JPH0752718B2 (ja) 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法
US6673722B1 (en) 1985-10-14 2004-01-06 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
US6230650B1 (en) 1985-10-14 2001-05-15 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
GB2231120B (en) * 1989-04-15 1993-02-24 Btr Plc Resilient bush
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5917140A (en) * 1996-05-21 1999-06-29 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement
EP1331964B1 (en) * 2000-10-12 2008-12-31 Renal Solutions, Inc. Device for body fluid flow control in extracorporeal fluid treatments
US7033498B2 (en) * 2000-11-28 2006-04-25 Renal Solutions, Inc. Cartridges useful in cleaning dialysis solutions
US6627164B1 (en) * 2000-11-28 2003-09-30 Renal Solutions, Inc. Sodium zirconium carbonate and zirconium basic carbonate and methods of making the same
US6878283B2 (en) * 2001-11-28 2005-04-12 Renal Solutions, Inc. Filter cartridge assemblies and methods for filtering fluids
US7998101B2 (en) * 2003-07-28 2011-08-16 Renal Solutions, Inc. Devices and methods for body fluid flow control in extracorporeal fluid treatment
US10692692B2 (en) 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3077712A (en) * 1961-07-14 1963-02-19 Milleron Norman Vacuum trap and valve combination
US3469375A (en) * 1967-10-16 1969-09-30 Nasa Sorption vacuum trap
DE1764092C3 (de) * 1968-04-01 1974-01-03 Siemens Ag, 1000 Berlin U. 8000 Muenchen Gettervorrichtung zum Einbau in elektrische Entladungsgefäße

Also Published As

Publication number Publication date
FR2257027A1 (nl) 1975-08-01
US4088456A (en) 1978-05-09
IT1006761B (it) 1976-10-20
DE2500338A1 (de) 1975-07-31
JPS50117011A (nl) 1975-09-12
GB1490243A (en) 1977-10-26
FR2257027B3 (nl) 1977-09-30

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Legal Events

Date Code Title Description
BV The patent application has lapsed