GB1490243A - Vacuum pumping - Google Patents

Vacuum pumping

Info

Publication number
GB1490243A
GB1490243A GB383/75A GB38375A GB1490243A GB 1490243 A GB1490243 A GB 1490243A GB 383/75 A GB383/75 A GB 383/75A GB 38375 A GB38375 A GB 38375A GB 1490243 A GB1490243 A GB 1490243A
Authority
GB
United Kingdom
Prior art keywords
sections
sorptive material
lined
jan
network
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB383/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of GB1490243A publication Critical patent/GB1490243A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB383/75A 1974-01-07 1975-01-06 Vacuum pumping Expired GB1490243A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT19143/74A IT1006761B (it) 1974-01-07 1974-01-07 Impianto e procedimento per l otte nimento di alti vuoti

Publications (1)

Publication Number Publication Date
GB1490243A true GB1490243A (en) 1977-10-26

Family

ID=11155208

Family Applications (1)

Application Number Title Priority Date Filing Date
GB383/75A Expired GB1490243A (en) 1974-01-07 1975-01-06 Vacuum pumping

Country Status (7)

Country Link
US (1) US4088456A (en, 2012)
JP (1) JPS50117011A (en, 2012)
DE (1) DE2500338A1 (en, 2012)
FR (1) FR2257027B3 (en, 2012)
GB (1) GB1490243A (en, 2012)
IT (1) IT1006761B (en, 2012)
NL (1) NL7500163A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2231120A (en) * 1989-04-15 1990-11-07 Btr Plc Resilient bush

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE8006128L (sv) * 1980-09-02 1982-03-03 Bertil Frostenson Forfarande for komprimering av gasformigt medium samt anordning for utforande av forfarandet
IT1201945B (it) * 1982-05-20 1989-02-02 Getters Spa Tubazione per il trasporto di fluidi isolata a vuoto e metodo per la sua produzione
DE3316454A1 (de) * 1983-05-05 1984-11-22 kabelmetal electro GmbH, 3000 Hannover Aus zwei oder mehreren konzentrischen rohren bestehendes rohrsystem
US6784033B1 (en) 1984-02-15 2004-08-31 Semiconductor Energy Laboratory Co., Ltd. Method for the manufacture of an insulated gate field effect semiconductor device
JPS60198394A (ja) * 1984-03-21 1985-10-07 Anelva Corp 真空処理装置の排気装置
DE3426641A1 (de) * 1984-07-19 1986-01-23 kabelmetal electro GmbH, 3000 Hannover Verfahren zum nachevakuieren von vakuumisolierten konzentrischen rohrleitungen
JPH0752718B2 (ja) * 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法
US6786997B1 (en) * 1984-11-26 2004-09-07 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus
US6113701A (en) 1985-02-14 2000-09-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method, and system
US6673722B1 (en) 1985-10-14 2004-01-06 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
US6230650B1 (en) 1985-10-14 2001-05-15 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5917140A (en) * 1996-05-21 1999-06-29 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means
US6347925B1 (en) * 2000-06-29 2002-02-19 Beacon Power Corporation Flywheel system with parallel pumping arrangement
ATE419024T1 (de) * 2000-10-12 2009-01-15 Renal Solutions Inc Vorrichtung für die kontrolle des flusses von körperflüssigkeiten bei extrakorporalen flüssigkeitsbehandlungen
US7033498B2 (en) * 2000-11-28 2006-04-25 Renal Solutions, Inc. Cartridges useful in cleaning dialysis solutions
US6627164B1 (en) * 2000-11-28 2003-09-30 Renal Solutions, Inc. Sodium zirconium carbonate and zirconium basic carbonate and methods of making the same
US6878283B2 (en) * 2001-11-28 2005-04-12 Renal Solutions, Inc. Filter cartridge assemblies and methods for filtering fluids
US7998101B2 (en) * 2003-07-28 2011-08-16 Renal Solutions, Inc. Devices and methods for body fluid flow control in extracorporeal fluid treatment
RU2286449C2 (ru) * 2004-02-03 2006-10-27 "Центр Разработки Нефтедобывающего Оборудования" ("Црно") Газосепаратор погружного центробежного насоса
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3077712A (en) * 1961-07-14 1963-02-19 Milleron Norman Vacuum trap and valve combination
US3469375A (en) * 1967-10-16 1969-09-30 Nasa Sorption vacuum trap
DE1764092C3 (de) * 1968-04-01 1974-01-03 Siemens Ag, 1000 Berlin U. 8000 Muenchen Gettervorrichtung zum Einbau in elektrische Entladungsgefäße

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2231120A (en) * 1989-04-15 1990-11-07 Btr Plc Resilient bush

Also Published As

Publication number Publication date
IT1006761B (it) 1976-10-20
NL7500163A (nl) 1975-07-09
JPS50117011A (en, 2012) 1975-09-12
FR2257027A1 (en, 2012) 1975-08-01
US4088456A (en) 1978-05-09
DE2500338A1 (de) 1975-07-31
FR2257027B3 (en, 2012) 1977-09-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee