GB1479613A - Getter pump - Google Patents

Getter pump

Info

Publication number
GB1479613A
GB1479613A GB42461/74A GB4246174A GB1479613A GB 1479613 A GB1479613 A GB 1479613A GB 42461/74 A GB42461/74 A GB 42461/74A GB 4246174 A GB4246174 A GB 4246174A GB 1479613 A GB1479613 A GB 1479613A
Authority
GB
United Kingdom
Prior art keywords
getter
temperature part
heater
high temperature
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB42461/74A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of GB1479613A publication Critical patent/GB1479613A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

1479613 Getter pumps SAES GETTERS SpA 30 Sept 1974 [1 Oct 1973] 42461/74 Heading H1D The getter pump comprises a metal layer with particles embedded therein of a non-evaporable metal getter having a given hydrogen equilibrium pressure, and a second getter element including a cohesive mass of a getter metal having a lower hydrogen equilibrium pressure. As shown in Fig. 1, the getter pump 10 consists of a high temperature part 11 and a low temperature part 12, and uses particulate Zr, Ti, Ta and Ni or alloys thereof, preferably an alloy of 84% Zr and 16% Al. In the high temperature part 11, getter particles which pass through a 100 mesh per inch screen are embedded in a ribbon 16 folded into the shape 18 shown in Fig. 5. A heater 14 comprises a wire wound on a ceramic former 19, and a current in the wire maintains the temperature of part 11 to at least 700‹ C. and preferably 1200‹ C. The low temperature part 12 is made in similar segments 24, 24<SP>1</SP>, 24<SP>11</SP> which as shown in Fig. 2 have annular channels 25 filled with getter particles and having apertures filled with getter particles connecting one channel to the next. A heater 14 consists of a winding 37 on a ceramic former 36. In operation, the pump is placed in a closed vessel containing methane, which is pumped out until the pressure falls below 10<SP>-2</SP> Torr. The high temperature part 11 is then heated to 900‹ C. and the low temperature part 12 is heated to 750‹ C., these temperatures being maintained for 15 mins. Thereafter the parts 11, 12 are maintained at 200‹ and 400‹ C. respectively. The heater 13 itself has a temperature of 1500‹ C. and will crack methane. In a modification, there is a single internal heater and the low-temperature part extends radially outwards from the heater and the high temperature part.
GB42461/74A 1973-10-01 1974-09-30 Getter pump Expired GB1479613A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT29588/73A IT998681B (en) 1973-10-01 1973-10-01 GETTER PUMP

Publications (1)

Publication Number Publication Date
GB1479613A true GB1479613A (en) 1977-07-13

Family

ID=11228039

Family Applications (1)

Application Number Title Priority Date Filing Date
GB42461/74A Expired GB1479613A (en) 1973-10-01 1974-09-30 Getter pump

Country Status (7)

Country Link
US (1) US3961897A (en)
JP (1) JPS5730989B2 (en)
DE (1) DE2446833C2 (en)
FR (1) FR2246752B3 (en)
GB (1) GB1479613A (en)
IT (1) IT998681B (en)
NL (1) NL182599C (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
JPS53131511A (en) * 1977-04-22 1978-11-16 Hitachi Ltd Non-evaporation type cetter pump
IT1115156B (en) * 1979-04-06 1986-02-03 Getters Spa ZR-FE ALLOYS FOR HYDROGEN ABSORPTION AT LOW TEMPERATURES
NL8201750A (en) * 1982-04-28 1983-11-16 Philips Nv APPARATUS PROVIDED WITH AN EVACUATED VESSEL WITH A GETTER AND A GETTER TOOL.
US4492110A (en) * 1983-06-01 1985-01-08 Martin Marietta Corporation Ultra sensitive noble gas leak detector
US4515528A (en) * 1983-07-05 1985-05-07 General Electric Company Hydrocarbon getter pump
IT1228392B (en) * 1989-01-24 1991-06-14 Getters Spa GETTER MATERIALS FOR VACUUM INSULATION OF STORAGE CONTAINERS OR LIQUID HYDROGEN TRANSPORT LINES.
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
IT1255438B (en) * 1992-07-17 1995-10-31 Getters Spa NON-EVAPORABLE GETTER PUMP
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
IT237018Y1 (en) * 1995-07-10 2000-08-31 Getters Spa GETTER PUMP REFINED IN PARTICULAR FOR A PORTABLE CHEMICAL ANALYSIS INSTRUMENT
AU6595096A (en) * 1995-07-21 1997-02-18 Ultrapure Systems, Inc. Single gas purifier vessel and heat exchanger
AU2001283301A1 (en) * 2000-08-10 2002-02-25 Indigo Energy, Inc. Long-life vacuum system for energy storage flywheels
JP4349964B2 (en) * 2003-09-10 2009-10-21 株式会社日立ハイテクノロジーズ Small electron gun
JP6133821B2 (en) * 2014-08-08 2017-05-24 有限会社真空実験室 Non-evaporable getter and non-evaporable getter pump

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3133224A (en) * 1960-11-25 1964-05-12 Gen Electric Electric discharge device
NL278453A (en) * 1961-05-15
US3167678A (en) * 1961-06-19 1965-01-26 Gen Electric Getter operating at various temperatures to occlude various gases
DE1614505C3 (en) * 1966-04-28 1975-09-04 S.A.E.S. Getters S.P.A., Mailand (Italien) Device for an exothermic getter for picture tubes
NL163054C (en) * 1968-08-10 1980-07-15 Getters Spa NON-EVAPORATING GETTERING DEVICE.
US3603704A (en) * 1968-10-28 1971-09-07 Getters Spa Radiant heat reflection in devices such as getter pumps
DE1947413A1 (en) * 1968-10-28 1970-04-30 Getters Spa Getter pump for creating and maintaining a vacuum in closed vessels
GB1274909A (en) * 1968-11-20 1972-05-17 Getters Spa Improvements in or relating to getter pumps
DE2034633C3 (en) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Cartridge for a getter pump
BE758028A (en) * 1969-10-31 1971-04-01 North American Rockwell HAND AND / OR FOOT ACTUATION FOR CONTROL DEVICE
US3672789A (en) * 1970-09-21 1972-06-27 Gen Electric Hydrocarbon responsive getter ion pump

Also Published As

Publication number Publication date
JPS5730989B2 (en) 1982-07-01
US3961897A (en) 1976-06-08
FR2246752B3 (en) 1977-07-08
NL7412719A (en) 1975-04-03
NL182599B (en) 1987-11-02
NL182599C (en) 1988-04-05
JPS5060813A (en) 1975-05-26
FR2246752A1 (en) 1975-05-02
DE2446833C2 (en) 1984-11-29
IT998681B (en) 1976-02-20
DE2446833A1 (en) 1975-04-10

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee