JPS53131511A - Non-evaporation type cetter pump - Google Patents

Non-evaporation type cetter pump

Info

Publication number
JPS53131511A
JPS53131511A JP4578677A JP4578677A JPS53131511A JP S53131511 A JPS53131511 A JP S53131511A JP 4578677 A JP4578677 A JP 4578677A JP 4578677 A JP4578677 A JP 4578677A JP S53131511 A JPS53131511 A JP S53131511A
Authority
JP
Japan
Prior art keywords
cetter
pump
evaporation type
getter
enaure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4578677A
Other languages
Japanese (ja)
Inventor
Yasushi Nakaizumi
Kiyomichi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4578677A priority Critical patent/JPS53131511A/en
Publication of JPS53131511A publication Critical patent/JPS53131511A/en
Pending legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To enaure small size, by disposing a plurality of pairs created by combining the bottoms of the vessels of a pair of getter element back to back so that the filling surface of each getter agent faces through spacers.
COPYRIGHT: (C)1978,JPO&Japio
JP4578677A 1977-04-22 1977-04-22 Non-evaporation type cetter pump Pending JPS53131511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4578677A JPS53131511A (en) 1977-04-22 1977-04-22 Non-evaporation type cetter pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4578677A JPS53131511A (en) 1977-04-22 1977-04-22 Non-evaporation type cetter pump

Publications (1)

Publication Number Publication Date
JPS53131511A true JPS53131511A (en) 1978-11-16

Family

ID=12728954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4578677A Pending JPS53131511A (en) 1977-04-22 1977-04-22 Non-evaporation type cetter pump

Country Status (1)

Country Link
JP (1) JPS53131511A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571158A (en) * 1983-09-09 1986-02-18 Siemens Aktiengesellschaft Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems
JP2017522481A (en) * 2014-06-26 2017-08-10 サエス・ゲッターズ・エッセ・ピ・ア Getter pump system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5060813A (en) * 1973-10-01 1975-05-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5060813A (en) * 1973-10-01 1975-05-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571158A (en) * 1983-09-09 1986-02-18 Siemens Aktiengesellschaft Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems
JP2017522481A (en) * 2014-06-26 2017-08-10 サエス・ゲッターズ・エッセ・ピ・ア Getter pump system

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