DE2053860C3 - Saures wäßriges Bad zur galvanischen Abscheidung glänzender Kupferüberzüge - Google Patents
Saures wäßriges Bad zur galvanischen Abscheidung glänzender KupferüberzügeInfo
- Publication number
- DE2053860C3 DE2053860C3 DE2053860A DE2053860A DE2053860C3 DE 2053860 C3 DE2053860 C3 DE 2053860C3 DE 2053860 A DE2053860 A DE 2053860A DE 2053860 A DE2053860 A DE 2053860A DE 2053860 C3 DE2053860 C3 DE 2053860C3
- Authority
- DE
- Germany
- Prior art keywords
- liter
- sulfophenyl
- potassium
- acid
- compounds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 14
- 239000010949 copper Substances 0.000 title claims description 13
- 229910052802 copper Inorganic materials 0.000 title claims description 12
- 238000000576 coating method Methods 0.000 title claims description 10
- 239000002253 acid Substances 0.000 title claims description 9
- 230000008021 deposition Effects 0.000 title description 6
- -1 carboxyphenyl Chemical group 0.000 claims description 61
- 239000011669 selenium Substances 0.000 claims description 23
- 150000001875 compounds Chemical class 0.000 claims description 19
- 125000000542 sulfonic acid group Chemical group 0.000 claims description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 8
- 125000004964 sulfoalkyl group Chemical group 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 150000003839 salts Chemical class 0.000 claims description 6
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 5
- 150000002605 large molecules Chemical class 0.000 claims description 5
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- 125000003118 aryl group Chemical group 0.000 claims description 3
- 125000004429 atom Chemical group 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 239000004215 Carbon black (E152) Substances 0.000 claims description 2
- 125000001931 aliphatic group Chemical group 0.000 claims description 2
- 125000005036 alkoxyphenyl group Chemical group 0.000 claims description 2
- 125000005037 alkyl phenyl group Chemical group 0.000 claims description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- 125000004181 carboxyalkyl group Chemical group 0.000 claims description 2
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 125000002541 furyl group Chemical group 0.000 claims description 2
- 229930195733 hydrocarbon Natural products 0.000 claims description 2
- 125000006501 nitrophenyl group Chemical group 0.000 claims description 2
- 150000002894 organic compounds Chemical class 0.000 claims description 2
- 125000005359 phenoxyalkyl group Chemical group 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 229940065287 selenium compound Drugs 0.000 claims 1
- 150000003343 selenium compounds Chemical class 0.000 claims 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 39
- 239000011734 sodium Substances 0.000 description 36
- 229910052700 potassium Inorganic materials 0.000 description 31
- 239000011591 potassium Substances 0.000 description 31
- 229910052708 sodium Inorganic materials 0.000 description 28
- 229910000365 copper sulfate Inorganic materials 0.000 description 21
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 20
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 18
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 16
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 12
- XIMIGUBYDJDCKI-UHFFFAOYSA-N diselenium Chemical compound [Se]=[Se] XIMIGUBYDJDCKI-UHFFFAOYSA-N 0.000 description 12
- 230000002378 acidificating effect Effects 0.000 description 10
- 229920000151 polyglycol Polymers 0.000 description 9
- 239000010695 polyglycol Substances 0.000 description 9
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 8
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 description 8
- 125000001824 selenocyanato group Chemical group *[Se]C#N 0.000 description 7
- 239000003792 electrolyte Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 239000002202 Polyethylene glycol Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 229920001223 polyethylene glycol Polymers 0.000 description 5
- BDHFUVZGWQCTTF-UHFFFAOYSA-N sulfonic acid Chemical compound OS(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-N 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 description 4
- 229920001451 polypropylene glycol Polymers 0.000 description 4
- 150000003346 selenoethers Chemical class 0.000 description 4
- RILZRCJGXSFXNE-UHFFFAOYSA-N 2-[4-(trifluoromethoxy)phenyl]ethanol Chemical compound OCCC1=CC=C(OC(F)(F)F)C=C1 RILZRCJGXSFXNE-UHFFFAOYSA-N 0.000 description 3
- IGFHQQFPSIBGKE-UHFFFAOYSA-N Nonylphenol Natural products CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- SNQQPOLDUKLAAF-UHFFFAOYSA-N nonylphenol Chemical compound CCCCCCCCCC1=CC=CC=C1O SNQQPOLDUKLAAF-UHFFFAOYSA-N 0.000 description 3
- 229920001522 polyglycol ester Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 3
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 2
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 2
- JJFSOYCVVILLEH-UHFFFAOYSA-N 3-(3-sulfopropyldiselanyl)propane-1-sulfonic acid Chemical compound S(=O)(=O)(O)CCC[Se][Se]CCCS(=O)(=O)O JJFSOYCVVILLEH-UHFFFAOYSA-N 0.000 description 2
- KYARBIJYVGJZLB-UHFFFAOYSA-N 7-amino-4-hydroxy-2-naphthalenesulfonic acid Chemical compound OC1=CC(S(O)(=O)=O)=CC2=CC(N)=CC=C21 KYARBIJYVGJZLB-UHFFFAOYSA-N 0.000 description 2
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 2
- 239000005642 Oleic acid Substances 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000001768 carboxy methyl cellulose Substances 0.000 description 2
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 2
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 description 2
- LKUCSBHCLHXINO-UHFFFAOYSA-N cyanatoselanyl cyanate Chemical class N#CO[Se]OC#N LKUCSBHCLHXINO-UHFFFAOYSA-N 0.000 description 2
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 2
- KCXFHTAICRTXLI-UHFFFAOYSA-N propane-1-sulfonic acid Chemical compound CCCS(O)(=O)=O KCXFHTAICRTXLI-UHFFFAOYSA-N 0.000 description 2
- CRDYSYOERSZTHZ-UHFFFAOYSA-M selenocyanate Chemical compound [Se-]C#N CRDYSYOERSZTHZ-UHFFFAOYSA-M 0.000 description 2
- 239000008117 stearic acid Substances 0.000 description 2
- VEPOHXYIFQMVHW-XOZOLZJESA-N 2,3-dihydroxybutanedioic acid (2S,3S)-3,4-dimethyl-2-phenylmorpholine Chemical compound OC(C(O)C(O)=O)C(O)=O.C[C@H]1[C@@H](OCCN1C)c1ccccc1 VEPOHXYIFQMVHW-XOZOLZJESA-N 0.000 description 1
- SCVJRXQHFJXZFZ-KVQBGUIXSA-N 2-amino-9-[(2r,4s,5r)-4-hydroxy-5-(hydroxymethyl)oxolan-2-yl]-3h-purine-6-thione Chemical class C1=2NC(N)=NC(=S)C=2N=CN1[C@H]1C[C@H](O)[C@@H](CO)O1 SCVJRXQHFJXZFZ-KVQBGUIXSA-N 0.000 description 1
- LEGVEQCCLFFODV-UHFFFAOYSA-N 2-selenocyanatobenzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1[Se]C#N LEGVEQCCLFFODV-UHFFFAOYSA-N 0.000 description 1
- QLKHRFCMTVUTFI-UHFFFAOYSA-N 3-selenocyanatopropane-1-sulfonic acid Chemical compound OS(=O)(=O)CCC[Se]C#N QLKHRFCMTVUTFI-UHFFFAOYSA-N 0.000 description 1
- FBKDUNMEHCJKBX-UHFFFAOYSA-N N#CO.C(CCCCCCCC)C1=C(C=CC=C1)O Chemical compound N#CO.C(CCCCCCCC)C1=C(C=CC=C1)O FBKDUNMEHCJKBX-UHFFFAOYSA-N 0.000 description 1
- GJLZJHJCGVBUGA-UHFFFAOYSA-N N#C[Se]CCS(O)(=O)=O Chemical compound N#C[Se]CCS(O)(=O)=O GJLZJHJCGVBUGA-UHFFFAOYSA-N 0.000 description 1
- OHUHAKQCZVMIOF-UHFFFAOYSA-N OS(O)(=O)=O.[SeH2] Chemical class OS(O)(=O)=O.[SeH2] OHUHAKQCZVMIOF-UHFFFAOYSA-N 0.000 description 1
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- ABNNCXYUWNGOCC-UHFFFAOYSA-N S(=O)(=O)(O)CCCC[Se]C#N Chemical compound S(=O)(=O)(O)CCCC[Se]C#N ABNNCXYUWNGOCC-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical class CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 1
- OURRXQUGYQRVML-AREMUKBSSA-N [4-[(2s)-3-amino-1-(isoquinolin-6-ylamino)-1-oxopropan-2-yl]phenyl]methyl 2,4-dimethylbenzoate Chemical compound CC1=CC(C)=CC=C1C(=O)OCC1=CC=C([C@@H](CN)C(=O)NC=2C=C3C=CN=CC3=CC=2)C=C1 OURRXQUGYQRVML-AREMUKBSSA-N 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 150000001350 alkyl halides Chemical class 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 description 1
- UGWKCNDTYUOTQZ-UHFFFAOYSA-N copper;sulfuric acid Chemical compound [Cu].OS(O)(=O)=O UGWKCNDTYUOTQZ-UHFFFAOYSA-N 0.000 description 1
- BQJTUDIVKSVBDU-UHFFFAOYSA-L copper;sulfuric acid;sulfate Chemical compound [Cu+2].OS(O)(=O)=O.[O-]S([O-])(=O)=O BQJTUDIVKSVBDU-UHFFFAOYSA-L 0.000 description 1
- 239000012954 diazonium Substances 0.000 description 1
- 150000001989 diazonium salts Chemical class 0.000 description 1
- 150000003959 diselenides Chemical class 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- NODWRXQVQYOJGN-UHFFFAOYSA-N phenyl selenocyanate Chemical compound N#C[Se]C1=CC=CC=C1 NODWRXQVQYOJGN-UHFFFAOYSA-N 0.000 description 1
- 150000003017 phosphorus Chemical class 0.000 description 1
- 229920002006 poly(N-vinylimidazole) polymer Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- ZQUDHVGNIZTEDK-UHFFFAOYSA-M potassium;propane-1-sulfonate Chemical compound [K+].CCCS([O-])(=O)=O ZQUDHVGNIZTEDK-UHFFFAOYSA-M 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- CRDYSYOERSZTHZ-UHFFFAOYSA-N selenocyanic acid Chemical class [SeH]C#N CRDYSYOERSZTHZ-UHFFFAOYSA-N 0.000 description 1
- PANBYUAFMMOFOV-UHFFFAOYSA-N sodium;sulfuric acid Chemical compound [Na].OS(O)(=O)=O PANBYUAFMMOFOV-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Conductive Materials (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Priority Applications (18)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2053860A DE2053860C3 (de) | 1970-10-29 | 1970-10-29 | Saures wäßriges Bad zur galvanischen Abscheidung glänzender Kupferüberzüge |
| YU2509/71A YU34721B (en) | 1970-10-29 | 1971-10-04 | Process for low-voltage electroplating of bright, ductile copper coatings on metal surfaces |
| US00186548A US3767539A (en) | 1970-10-29 | 1971-10-04 | Acid galvanic copper bath |
| ES71395741A ES395741A1 (es) | 1970-10-29 | 1971-10-05 | Procedimiento para la preparacion de un electrolito acuoso acido para la deposicion de revestimientos de cobre. |
| SU1704167A SU452107A3 (ru) | 1970-10-29 | 1971-10-11 | Блескообразующа добавка |
| ZA716879A ZA716879B (en) | 1970-10-29 | 1971-10-14 | Acidic copper electrolytes |
| CH1519671A CH563466A5 (enrdf_load_stackoverflow) | 1970-10-29 | 1971-10-18 | |
| AU34734/71A AU450638B2 (en) | 1970-10-29 | 1971-10-19 | Acidic copper electrolytes |
| SE13374/71A SE364737B (enrdf_load_stackoverflow) | 1970-10-29 | 1971-10-21 | |
| AT912871A AT307844B (de) | 1970-10-29 | 1971-10-21 | Saures galvanisches Kupferbad |
| BR7116/71A BR7107116D0 (pt) | 1970-10-29 | 1971-10-25 | Composicao eletrolitica aquosa acida para precipitacao de revestimentos de cobre |
| GB4938671A GB1372850A (en) | 1970-10-29 | 1971-10-25 | Acidic copper electrolytes |
| IE1352/71A IE35774B1 (en) | 1970-10-29 | 1971-10-26 | Acidic copper electrolytes |
| FR7138993A FR2111926B1 (enrdf_load_stackoverflow) | 1970-10-29 | 1971-10-29 | |
| NLAANVRAGE7114979,A NL169353C (nl) | 1970-10-29 | 1971-10-29 | Werkwijze voor het elektrolytisch verkoperen. |
| CA126,465A CA967110A (en) | 1970-10-29 | 1971-10-29 | Acidic copper electrolytes including selenium compound with sulphonic acid group |
| BE774697A BE774697A (fr) | 1970-10-29 | 1971-10-29 | Bain de cuivre acide, galvanique |
| JP46086144A JPS5126893B1 (enrdf_load_stackoverflow) | 1970-10-29 | 1971-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2053860A DE2053860C3 (de) | 1970-10-29 | 1970-10-29 | Saures wäßriges Bad zur galvanischen Abscheidung glänzender Kupferüberzüge |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2053860A1 DE2053860A1 (de) | 1972-06-08 |
| DE2053860B2 DE2053860B2 (de) | 1980-03-13 |
| DE2053860C3 true DE2053860C3 (de) | 1980-11-06 |
Family
ID=5786940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2053860A Expired DE2053860C3 (de) | 1970-10-29 | 1970-10-29 | Saures wäßriges Bad zur galvanischen Abscheidung glänzender Kupferüberzüge |
Country Status (18)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4417956A (en) * | 1980-07-17 | 1983-11-29 | Electrochemical Products, Inc. | Alkaline plating baths and electroplating process |
| US4540473A (en) * | 1983-11-22 | 1985-09-10 | International Business Machines Corporation | Copper plating bath having increased plating rate, and method |
| US6024857A (en) | 1997-10-08 | 2000-02-15 | Novellus Systems, Inc. | Electroplating additive for filling sub-micron features |
| KR100659544B1 (ko) * | 1999-11-12 | 2006-12-19 | 에바라 유지라이토 코포레이션 리미티드 | 비아 필링 방법 |
| US6676823B1 (en) * | 2002-03-18 | 2004-01-13 | Taskem, Inc. | High speed acid copper plating |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE322956B (enrdf_load_stackoverflow) * | 1966-08-20 | 1970-04-20 | Schering Ag | |
| US3492135A (en) * | 1967-02-01 | 1970-01-27 | Schering Ag | Stabilized bath for deposition of copper by chemical reduction |
| BE759316A (fr) * | 1969-12-30 | 1971-04-30 | Parker Ste Continentale | Composition et procede pour former un depot de cuivre sur des surfaces de metaux ferreux |
-
1970
- 1970-10-29 DE DE2053860A patent/DE2053860C3/de not_active Expired
-
1971
- 1971-10-04 US US00186548A patent/US3767539A/en not_active Expired - Lifetime
- 1971-10-04 YU YU2509/71A patent/YU34721B/xx unknown
- 1971-10-05 ES ES71395741A patent/ES395741A1/es not_active Expired
- 1971-10-11 SU SU1704167A patent/SU452107A3/ru active
- 1971-10-14 ZA ZA716879A patent/ZA716879B/xx unknown
- 1971-10-18 CH CH1519671A patent/CH563466A5/xx not_active IP Right Cessation
- 1971-10-19 AU AU34734/71A patent/AU450638B2/en not_active Expired
- 1971-10-21 SE SE13374/71A patent/SE364737B/xx unknown
- 1971-10-21 AT AT912871A patent/AT307844B/de not_active IP Right Cessation
- 1971-10-25 GB GB4938671A patent/GB1372850A/en not_active Expired
- 1971-10-25 BR BR7116/71A patent/BR7107116D0/pt unknown
- 1971-10-26 IE IE1352/71A patent/IE35774B1/xx unknown
- 1971-10-29 JP JP46086144A patent/JPS5126893B1/ja active Pending
- 1971-10-29 BE BE774697A patent/BE774697A/xx unknown
- 1971-10-29 NL NLAANVRAGE7114979,A patent/NL169353C/xx not_active IP Right Cessation
- 1971-10-29 CA CA126,465A patent/CA967110A/en not_active Expired
- 1971-10-29 FR FR7138993A patent/FR2111926B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| ES395741A1 (es) | 1974-09-16 |
| CA967110A (en) | 1975-05-06 |
| JPS5126893B1 (enrdf_load_stackoverflow) | 1976-08-09 |
| NL169353B (nl) | 1982-02-01 |
| NL169353C (nl) | 1982-07-01 |
| DE2053860B2 (de) | 1980-03-13 |
| IE35774L (en) | 1972-04-29 |
| SE364737B (enrdf_load_stackoverflow) | 1974-03-04 |
| GB1372850A (en) | 1974-11-06 |
| FR2111926A1 (enrdf_load_stackoverflow) | 1972-06-09 |
| AU450638B2 (en) | 1974-07-18 |
| AU3473471A (en) | 1973-05-03 |
| FR2111926B1 (enrdf_load_stackoverflow) | 1974-10-11 |
| ZA716879B (en) | 1972-06-28 |
| CH563466A5 (enrdf_load_stackoverflow) | 1975-06-30 |
| US3767539A (en) | 1973-10-23 |
| BR7107116D0 (pt) | 1973-03-29 |
| YU34721B (en) | 1979-12-31 |
| SU452107A3 (ru) | 1974-11-30 |
| DE2053860A1 (de) | 1972-06-08 |
| IE35774B1 (en) | 1976-05-12 |
| BE774697A (fr) | 1972-05-02 |
| YU250971A (en) | 1979-04-30 |
| NL7114979A (enrdf_load_stackoverflow) | 1972-05-03 |
| AT307844B (de) | 1973-06-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69404496T2 (de) | Cyanidfreie Plattierungslösung für monovalente Metalle | |
| DE3836521C2 (de) | Wäßriges saures Bad zur galvanischen Abscheidung von glänzenden und rißfreien Kupferüberzügen und Verwendung des Bades | |
| DE1521062B2 (de) | Waessriges saures galvanisches kupferbad zur abscheidung von duktilem glaenzendem kupfer | |
| EP0598763B1 (de) | Saures bad zur galvanischen abscheidung von kupfer und dessen verwendung | |
| DE2255584C2 (de) | Saures Kupfergalvanisierbad | |
| DE2028803C3 (de) | Polymere Phenazoniumverbindungen | |
| DE69714446T2 (de) | Alkoxylierte merkaptane als kupfer additive | |
| DE2204326C3 (de) | Wäßriges saures Bad zur galvanischen Abscheidung von glänzenden und duktilen Kupferüberzügen | |
| DE2610705C3 (de) | Saure galvanische Kupferbäder | |
| DE10025552C1 (de) | Saures galvanisches Nickelbad und Verfahren zum Abscheiden eines satinglänzenden Nickel- oder Nickellegierungsüberzuges | |
| DE2053860C3 (de) | Saures wäßriges Bad zur galvanischen Abscheidung glänzender Kupferüberzüge | |
| DE2630980C2 (enrdf_load_stackoverflow) | ||
| DE1017000B (de) | Bad und Verfahren fuer die elektrolytische Abscheidung von Kupferueberzuegen | |
| DE1246347B (de) | Saures galvanisches Kupferbad | |
| DE3420999C2 (enrdf_load_stackoverflow) | ||
| DE1009880B (de) | Saures Bad zur galvanischen Abscheidung glatter Zinnschichten | |
| DE2333069C2 (de) | Saures, wäßriges Bad zur galvanischen Abscheidung eines glänzenden Nickel-Eisen-Überzuges | |
| DE2445537A1 (de) | Bad zur galvanischen abscheidung von gold | |
| DE2251285C3 (de) | Alkalisches Bad für die galvanische Abscheidung von Goldlegierungen | |
| DE2032867B2 (de) | Galvanisches Goldbad und Verfahren zur Abscheidung gleichmäßiger, dicker Goldüberzüge | |
| DE3421017A1 (de) | Verfahren zur galvanischen abscheidung eines technischen kupferueberzugs | |
| EP0785297A2 (de) | Wässriges saures Bad zur galvanischen Abscheidung von glänzenden und rissfreien Kupferüberzügen und Verwendung dieses Bades | |
| DE2333096A1 (de) | Elektroplattierung aus nickel und eisen | |
| DE1696082A1 (de) | Verfahren zur elektrolytischen Abscheidung von halbglaenzenden Nickelniederschlaegen | |
| DE1086508B (de) | Saures galvanisches Kupferbad |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) |