CA967110A - Acidic copper electrolytes including selenium compound with sulphonic acid group - Google Patents
Acidic copper electrolytes including selenium compound with sulphonic acid groupInfo
- Publication number
- CA967110A CA967110A CA126,465A CA126465A CA967110A CA 967110 A CA967110 A CA 967110A CA 126465 A CA126465 A CA 126465A CA 967110 A CA967110 A CA 967110A
- Authority
- CA
- Canada
- Prior art keywords
- acid group
- sulphonic acid
- selenium compound
- acidic copper
- electrolytes including
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 230000002378 acidificating effect Effects 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000003792 electrolyte Substances 0.000 title 1
- 229940065287 selenium compound Drugs 0.000 title 1
- 150000003343 selenium compounds Chemical class 0.000 title 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-N sulfonic acid Chemical group OS(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Conductive Materials (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2053860A DE2053860C3 (de) | 1970-10-29 | 1970-10-29 | Saures wäßriges Bad zur galvanischen Abscheidung glänzender Kupferüberzüge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA967110A true CA967110A (en) | 1975-05-06 |
Family
ID=5786940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA126,465A Expired CA967110A (en) | 1970-10-29 | 1971-10-29 | Acidic copper electrolytes including selenium compound with sulphonic acid group |
Country Status (18)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4417956A (en) * | 1980-07-17 | 1983-11-29 | Electrochemical Products, Inc. | Alkaline plating baths and electroplating process |
| US4540473A (en) * | 1983-11-22 | 1985-09-10 | International Business Machines Corporation | Copper plating bath having increased plating rate, and method |
| US6024857A (en) * | 1997-10-08 | 2000-02-15 | Novellus Systems, Inc. | Electroplating additive for filling sub-micron features |
| KR100659544B1 (ko) * | 1999-11-12 | 2006-12-19 | 에바라 유지라이토 코포레이션 리미티드 | 비아 필링 방법 |
| US6676823B1 (en) * | 2002-03-18 | 2004-01-13 | Taskem, Inc. | High speed acid copper plating |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE322956B (enrdf_load_stackoverflow) * | 1966-08-20 | 1970-04-20 | Schering Ag | |
| US3492135A (en) * | 1967-02-01 | 1970-01-27 | Schering Ag | Stabilized bath for deposition of copper by chemical reduction |
| BE759316A (fr) * | 1969-12-30 | 1971-04-30 | Parker Ste Continentale | Composition et procede pour former un depot de cuivre sur des surfaces de metaux ferreux |
-
1970
- 1970-10-29 DE DE2053860A patent/DE2053860C3/de not_active Expired
-
1971
- 1971-10-04 US US00186548A patent/US3767539A/en not_active Expired - Lifetime
- 1971-10-04 YU YU2509/71A patent/YU34721B/xx unknown
- 1971-10-05 ES ES71395741A patent/ES395741A1/es not_active Expired
- 1971-10-11 SU SU1704167A patent/SU452107A3/ru active
- 1971-10-14 ZA ZA716879A patent/ZA716879B/xx unknown
- 1971-10-18 CH CH1519671A patent/CH563466A5/xx not_active IP Right Cessation
- 1971-10-19 AU AU34734/71A patent/AU450638B2/en not_active Expired
- 1971-10-21 SE SE13374/71A patent/SE364737B/xx unknown
- 1971-10-21 AT AT912871A patent/AT307844B/de not_active IP Right Cessation
- 1971-10-25 BR BR7116/71A patent/BR7107116D0/pt unknown
- 1971-10-25 GB GB4938671A patent/GB1372850A/en not_active Expired
- 1971-10-26 IE IE1352/71A patent/IE35774B1/xx unknown
- 1971-10-29 JP JP46086144A patent/JPS5126893B1/ja active Pending
- 1971-10-29 NL NLAANVRAGE7114979,A patent/NL169353C/xx not_active IP Right Cessation
- 1971-10-29 CA CA126,465A patent/CA967110A/en not_active Expired
- 1971-10-29 FR FR7138993A patent/FR2111926B1/fr not_active Expired
- 1971-10-29 BE BE774697A patent/BE774697A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL169353B (nl) | 1982-02-01 |
| SU452107A3 (ru) | 1974-11-30 |
| YU250971A (en) | 1979-04-30 |
| NL169353C (nl) | 1982-07-01 |
| ES395741A1 (es) | 1974-09-16 |
| NL7114979A (enrdf_load_stackoverflow) | 1972-05-03 |
| CH563466A5 (enrdf_load_stackoverflow) | 1975-06-30 |
| US3767539A (en) | 1973-10-23 |
| BR7107116D0 (pt) | 1973-03-29 |
| AU3473471A (en) | 1973-05-03 |
| AT307844B (de) | 1973-06-12 |
| JPS5126893B1 (enrdf_load_stackoverflow) | 1976-08-09 |
| IE35774B1 (en) | 1976-05-12 |
| BE774697A (fr) | 1972-05-02 |
| DE2053860A1 (de) | 1972-06-08 |
| GB1372850A (en) | 1974-11-06 |
| DE2053860C3 (de) | 1980-11-06 |
| IE35774L (en) | 1972-04-29 |
| DE2053860B2 (de) | 1980-03-13 |
| FR2111926A1 (enrdf_load_stackoverflow) | 1972-06-09 |
| AU450638B2 (en) | 1974-07-18 |
| ZA716879B (en) | 1972-06-28 |
| FR2111926B1 (enrdf_load_stackoverflow) | 1974-10-11 |
| YU34721B (en) | 1979-12-31 |
| SE364737B (enrdf_load_stackoverflow) | 1974-03-04 |
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