GB1372850A - Acidic copper electrolytes - Google Patents
Acidic copper electrolytesInfo
- Publication number
- GB1372850A GB1372850A GB4938671A GB4938671A GB1372850A GB 1372850 A GB1372850 A GB 1372850A GB 4938671 A GB4938671 A GB 4938671A GB 4938671 A GB4938671 A GB 4938671A GB 1372850 A GB1372850 A GB 1372850A
- Authority
- GB
- United Kingdom
- Prior art keywords
- copper
- acid
- compound
- oct
- listed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 4
- 239000010949 copper Substances 0.000 title abstract 4
- 229910052802 copper Inorganic materials 0.000 title abstract 4
- 239000003792 electrolyte Substances 0.000 title abstract 3
- 230000002378 acidificating effect Effects 0.000 title abstract 2
- 239000002253 acid Substances 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- BDHFUVZGWQCTTF-UHFFFAOYSA-N sulfonic acid Chemical group OS(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-N 0.000 abstract 2
- 229920002134 Carboxymethyl cellulose Polymers 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 abstract 1
- 239000004372 Polyvinyl alcohol Substances 0.000 abstract 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000001768 carboxy methyl cellulose Substances 0.000 abstract 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 abstract 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 abstract 1
- 229940105329 carboxymethylcellulose Drugs 0.000 abstract 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 abstract 1
- 125000000623 heterocyclic group Chemical group 0.000 abstract 1
- 125000001183 hydrocarbyl group Chemical group 0.000 abstract 1
- 150000002605 large molecules Chemical class 0.000 abstract 1
- 125000000962 organic group Chemical group 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 238000007747 plating Methods 0.000 abstract 1
- 229920002451 polyvinyl alcohol Polymers 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 229940065287 selenium compound Drugs 0.000 abstract 1
- 150000003343 selenium compounds Chemical class 0.000 abstract 1
- 235000011149 sulphuric acid Nutrition 0.000 abstract 1
- 239000001117 sulphuric acid Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Conductive Materials (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2053860A DE2053860C3 (de) | 1970-10-29 | 1970-10-29 | Saures wäßriges Bad zur galvanischen Abscheidung glänzender Kupferüberzüge |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1372850A true GB1372850A (en) | 1974-11-06 |
Family
ID=5786940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4938671A Expired GB1372850A (en) | 1970-10-29 | 1971-10-25 | Acidic copper electrolytes |
Country Status (18)
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4417956A (en) * | 1980-07-17 | 1983-11-29 | Electrochemical Products, Inc. | Alkaline plating baths and electroplating process |
US4540473A (en) * | 1983-11-22 | 1985-09-10 | International Business Machines Corporation | Copper plating bath having increased plating rate, and method |
US6024857A (en) * | 1997-10-08 | 2000-02-15 | Novellus Systems, Inc. | Electroplating additive for filling sub-micron features |
KR100659544B1 (ko) * | 1999-11-12 | 2006-12-19 | 에바라 유지라이토 코포레이션 리미티드 | 비아 필링 방법 |
US6676823B1 (en) * | 2002-03-18 | 2004-01-13 | Taskem, Inc. | High speed acid copper plating |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE322956B (enrdf_load_stackoverflow) * | 1966-08-20 | 1970-04-20 | Schering Ag | |
US3492135A (en) * | 1967-02-01 | 1970-01-27 | Schering Ag | Stabilized bath for deposition of copper by chemical reduction |
BE759316A (fr) * | 1969-12-30 | 1971-04-30 | Parker Ste Continentale | Composition et procede pour former un depot de cuivre sur des surfaces de metaux ferreux |
-
1970
- 1970-10-29 DE DE2053860A patent/DE2053860C3/de not_active Expired
-
1971
- 1971-10-04 US US00186548A patent/US3767539A/en not_active Expired - Lifetime
- 1971-10-04 YU YU2509/71A patent/YU34721B/xx unknown
- 1971-10-05 ES ES71395741A patent/ES395741A1/es not_active Expired
- 1971-10-11 SU SU1704167A patent/SU452107A3/ru active
- 1971-10-14 ZA ZA716879A patent/ZA716879B/xx unknown
- 1971-10-18 CH CH1519671A patent/CH563466A5/xx not_active IP Right Cessation
- 1971-10-19 AU AU34734/71A patent/AU450638B2/en not_active Expired
- 1971-10-21 AT AT912871A patent/AT307844B/de not_active IP Right Cessation
- 1971-10-21 SE SE13374/71A patent/SE364737B/xx unknown
- 1971-10-25 BR BR7116/71A patent/BR7107116D0/pt unknown
- 1971-10-25 GB GB4938671A patent/GB1372850A/en not_active Expired
- 1971-10-26 IE IE1352/71A patent/IE35774B1/xx unknown
- 1971-10-29 NL NLAANVRAGE7114979,A patent/NL169353C/xx not_active IP Right Cessation
- 1971-10-29 FR FR7138993A patent/FR2111926B1/fr not_active Expired
- 1971-10-29 CA CA126,465A patent/CA967110A/en not_active Expired
- 1971-10-29 BE BE774697A patent/BE774697A/xx unknown
- 1971-10-29 JP JP46086144A patent/JPS5126893B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
NL7114979A (enrdf_load_stackoverflow) | 1972-05-03 |
BE774697A (fr) | 1972-05-02 |
AU3473471A (en) | 1973-05-03 |
NL169353C (nl) | 1982-07-01 |
AT307844B (de) | 1973-06-12 |
YU250971A (en) | 1979-04-30 |
CH563466A5 (enrdf_load_stackoverflow) | 1975-06-30 |
BR7107116D0 (pt) | 1973-03-29 |
AU450638B2 (en) | 1974-07-18 |
ZA716879B (en) | 1972-06-28 |
DE2053860A1 (de) | 1972-06-08 |
IE35774L (en) | 1972-04-29 |
IE35774B1 (en) | 1976-05-12 |
NL169353B (nl) | 1982-02-01 |
DE2053860B2 (de) | 1980-03-13 |
SU452107A3 (ru) | 1974-11-30 |
ES395741A1 (es) | 1974-09-16 |
JPS5126893B1 (enrdf_load_stackoverflow) | 1976-08-09 |
DE2053860C3 (de) | 1980-11-06 |
YU34721B (en) | 1979-12-31 |
CA967110A (en) | 1975-05-06 |
FR2111926A1 (enrdf_load_stackoverflow) | 1972-06-09 |
FR2111926B1 (enrdf_load_stackoverflow) | 1974-10-11 |
SE364737B (enrdf_load_stackoverflow) | 1974-03-04 |
US3767539A (en) | 1973-10-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |