DE19981067T1 - Mehrsäulen-Elektronenstrahl-Lithographie-System - Google Patents
Mehrsäulen-Elektronenstrahl-Lithographie-SystemInfo
- Publication number
- DE19981067T1 DE19981067T1 DE19981067T DE19981067T DE19981067T1 DE 19981067 T1 DE19981067 T1 DE 19981067T1 DE 19981067 T DE19981067 T DE 19981067T DE 19981067 T DE19981067 T DE 19981067T DE 19981067 T1 DE19981067 T1 DE 19981067T1
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- lithography system
- beam lithography
- column electron
- column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000609 electron-beam lithography Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/304—Controlling tubes
- H01J2237/30433—System calibration
- H01J2237/3045—Deflection calibration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
- H01J2237/31774—Multi-beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10127737A JPH11329322A (ja) | 1998-05-11 | 1998-05-11 | 電子ビーム露光方法及び電子ビーム露光装置 |
PCT/JP1999/002431 WO1999059183A1 (fr) | 1998-05-11 | 1999-05-11 | Procede et appareil d'exposition a un faisceau electronique |
Publications (1)
Publication Number | Publication Date |
---|---|
DE19981067T1 true DE19981067T1 (de) | 2000-08-03 |
Family
ID=14967443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19981067T Withdrawn DE19981067T1 (de) | 1998-05-11 | 1999-05-11 | Mehrsäulen-Elektronenstrahl-Lithographie-System |
Country Status (6)
Country | Link |
---|---|
US (1) | US6218060B1 (de) |
JP (1) | JPH11329322A (de) |
KR (1) | KR100327009B1 (de) |
DE (1) | DE19981067T1 (de) |
TW (1) | TW459164B (de) |
WO (1) | WO1999059183A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3982913B2 (ja) * | 1998-07-17 | 2007-09-26 | 株式会社アドバンテスト | 荷電粒子ビーム露光装置 |
EP1171901B1 (de) * | 2000-02-09 | 2008-10-08 | Fei Company | Mehrfachsäulen für fokussierte ionenstrahlen (fib) zur anwendung in der herstellung von nanostrukturen |
JP4434440B2 (ja) * | 2000-06-19 | 2010-03-17 | Necエレクトロニクス株式会社 | 電子線露光用マスクの検査方法および電子線露光方法 |
US6555874B1 (en) * | 2000-08-28 | 2003-04-29 | Sharp Laboratories Of America, Inc. | Method of fabricating high performance SiGe heterojunction bipolar transistor BiCMOS on a silicon-on-insulator substrate |
JP4601146B2 (ja) * | 2000-10-03 | 2010-12-22 | 株式会社アドバンテスト | 電子ビーム露光装置 |
US6797953B2 (en) * | 2001-02-23 | 2004-09-28 | Fei Company | Electron beam system using multiple electron beams |
JP3940310B2 (ja) | 2002-04-04 | 2007-07-04 | 株式会社日立ハイテクノロジーズ | 電子ビーム描画方法及び描画装置、並びにこれを用いた半導体製造方法 |
JP4421836B2 (ja) * | 2003-03-28 | 2010-02-24 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
DE602005016256D1 (de) * | 2004-05-17 | 2009-10-08 | Mapper Lithography Ip Bv | Belichtungssystem mit einem geladenen teilchenstrahl |
JPWO2006104139A1 (ja) * | 2005-03-29 | 2008-09-11 | 株式会社アドバンテスト | マルチコラム型電子ビーム露光装置 |
JP5368086B2 (ja) | 2007-03-26 | 2013-12-18 | 株式会社アドバンテスト | マルチコラム電子ビーム露光装置及びマルチコラム電子ビーム露光方法 |
JP5020745B2 (ja) | 2007-08-29 | 2012-09-05 | 株式会社ニューフレアテクノロジー | 描画データの作成方法及び荷電粒子ビーム描画装置 |
JP4856250B2 (ja) | 2007-11-20 | 2012-01-18 | 株式会社アドバンテスト | D/a変換器及び電子ビーム露光装置 |
JP5386544B2 (ja) * | 2011-06-07 | 2014-01-15 | 株式会社アドバンテスト | 電子ビーム露光装置及び電子ビーム露光方法 |
JP6230295B2 (ja) | 2013-06-26 | 2017-11-15 | キヤノン株式会社 | 描画装置及び物品の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764932A (en) * | 1980-10-07 | 1982-04-20 | Mitsubishi Electric Corp | Electron bean exposure device |
JPS60262419A (ja) * | 1984-06-08 | 1985-12-25 | Matsushita Electric Ind Co Ltd | パタ−ン形成装置およびそれを用いた半導体装置の製造方法 |
JPS62147725A (ja) * | 1985-12-23 | 1987-07-01 | Nippon Telegr & Teleph Corp <Ntt> | 荷電ビ−ム露光装置 |
JP2512184B2 (ja) * | 1990-01-31 | 1996-07-03 | 株式会社日立製作所 | 荷電粒子線描画装置及び描画方法 |
JPH05206017A (ja) * | 1991-08-09 | 1993-08-13 | Internatl Business Mach Corp <Ibm> | リソグラフイ露光システム及びその方法 |
JP3121098B2 (ja) * | 1992-03-17 | 2000-12-25 | 富士通株式会社 | 荷電粒子ビーム露光の方法と装置 |
JPH07263301A (ja) * | 1994-03-17 | 1995-10-13 | Fujitsu Ltd | ブランキングアパーチャアレイ方式電子ビーム露光装置 |
JP3372356B2 (ja) * | 1994-07-29 | 2003-02-04 | 株式会社日立製作所 | 電子ビーム偏向方法及び電子ビーム描画装置 |
JP3298347B2 (ja) | 1995-01-11 | 2002-07-02 | 株式会社日立製作所 | 電子線描画装置 |
JP2871627B2 (ja) * | 1996-10-17 | 1999-03-17 | 日本電気株式会社 | 電子線露光方法及びその装置 |
-
1998
- 1998-05-11 JP JP10127737A patent/JPH11329322A/ja not_active Withdrawn
-
1999
- 1999-05-11 WO PCT/JP1999/002431 patent/WO1999059183A1/ja active IP Right Grant
- 1999-05-11 TW TW088107615A patent/TW459164B/zh not_active IP Right Cessation
- 1999-05-11 KR KR1019997012592A patent/KR100327009B1/ko not_active IP Right Cessation
- 1999-05-11 US US09/462,545 patent/US6218060B1/en not_active Expired - Fee Related
- 1999-05-11 DE DE19981067T patent/DE19981067T1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR20010014411A (ko) | 2001-02-26 |
KR100327009B1 (ko) | 2002-03-06 |
US6218060B1 (en) | 2001-04-17 |
WO1999059183A1 (fr) | 1999-11-18 |
TW459164B (en) | 2001-10-11 |
JPH11329322A (ja) | 1999-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8607 | Notification of search results after publication | ||
8139 | Disposal/non-payment of the annual fee |