AU2001239801A1 - Multi-beam multi-column electron beam inspection system - Google Patents

Multi-beam multi-column electron beam inspection system

Info

Publication number
AU2001239801A1
AU2001239801A1 AU2001239801A AU3980101A AU2001239801A1 AU 2001239801 A1 AU2001239801 A1 AU 2001239801A1 AU 2001239801 A AU2001239801 A AU 2001239801A AU 3980101 A AU3980101 A AU 3980101A AU 2001239801 A1 AU2001239801 A1 AU 2001239801A1
Authority
AU
Australia
Prior art keywords
inspection system
column electron
electron beam
beam inspection
column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001239801A
Inventor
Alan D. Brodie
N. William Parker
Frank Ching-Feng Tsai
Edward M. Yin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Diagnostics Inc
Original Assignee
Ion Diagnostics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Diagnostics Inc filed Critical Ion Diagnostics Inc
Publication of AU2001239801A1 publication Critical patent/AU2001239801A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection
AU2001239801A 2000-02-19 2001-02-19 Multi-beam multi-column electron beam inspection system Abandoned AU2001239801A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US18372400P 2000-02-19 2000-02-19
US60183724 2000-02-19
PCT/US2001/005338 WO2001060456A1 (en) 2000-02-19 2001-02-19 Multi-beam multi-column electron beam inspection system

Publications (1)

Publication Number Publication Date
AU2001239801A1 true AU2001239801A1 (en) 2001-08-27

Family

ID=22674054

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001239801A Abandoned AU2001239801A1 (en) 2000-02-19 2001-02-19 Multi-beam multi-column electron beam inspection system

Country Status (3)

Country Link
US (2) US6977375B2 (en)
AU (1) AU2001239801A1 (en)
WO (1) WO2001060456A1 (en)

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Also Published As

Publication number Publication date
US6977375B2 (en) 2005-12-20
WO2001060456A1 (en) 2001-08-23
US20020015143A1 (en) 2002-02-07
US6844550B1 (en) 2005-01-18

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