DE1816748C3 - Halbleiteranordnung und Verfahren zu ihrer Herstellung - Google Patents

Halbleiteranordnung und Verfahren zu ihrer Herstellung

Info

Publication number
DE1816748C3
DE1816748C3 DE1816748A DE1816748A DE1816748C3 DE 1816748 C3 DE1816748 C3 DE 1816748C3 DE 1816748 A DE1816748 A DE 1816748A DE 1816748 A DE1816748 A DE 1816748A DE 1816748 C3 DE1816748 C3 DE 1816748C3
Authority
DE
Germany
Prior art keywords
film
gold
chromium
alloy
alloy film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1816748A
Other languages
German (de)
English (en)
Other versions
DE1816748B2 (de
DE1816748A1 (de
Inventor
Shohei Takatsuki Fujiwara
Gota Kyoto Kano
Shunsuke Takatsuki Matsuoka
Tsukasa Toyonaka Sawaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Publication of DE1816748A1 publication Critical patent/DE1816748A1/de
Publication of DE1816748B2 publication Critical patent/DE1816748B2/de
Application granted granted Critical
Publication of DE1816748C3 publication Critical patent/DE1816748C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/50—Alloying conductive materials with semiconductor bodies
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/02—Contacts, special

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Die Bonding (AREA)
DE1816748A 1967-12-28 1968-12-23 Halbleiteranordnung und Verfahren zu ihrer Herstellung Expired DE1816748C3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP46867 1967-12-28
JP468 1967-12-28
JP467 1967-12-28

Publications (3)

Publication Number Publication Date
DE1816748A1 DE1816748A1 (de) 1969-07-24
DE1816748B2 DE1816748B2 (de) 1972-01-27
DE1816748C3 true DE1816748C3 (de) 1979-02-22

Family

ID=27274263

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1816748A Expired DE1816748C3 (de) 1967-12-28 1968-12-23 Halbleiteranordnung und Verfahren zu ihrer Herstellung

Country Status (5)

Country Link
US (1) US3591838A (https=)
DE (1) DE1816748C3 (https=)
FR (1) FR1599998A (https=)
GB (1) GB1258580A (https=)
NL (1) NL151845B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3909319A (en) * 1971-02-23 1975-09-30 Shohei Fujiwara Planar structure semiconductor device and method of making the same
JPS5950212B2 (ja) * 1978-07-28 1984-12-07 富士電機株式会社 半導体素子の電極の製造方法
US5422513A (en) * 1992-10-16 1995-06-06 Martin Marietta Corporation Integrated circuit chip placement in a high density interconnect structure
JPH10509025A (ja) * 1994-08-26 1998-09-08 アイジェン， インコーポレイテッド 固体表面に吸着された核酸の電気的に発生した化学ルミネッセンス性検出のためのバイオセンサーおよび方法
WO1997030480A1 (en) * 1996-02-16 1997-08-21 Alliedsignal Inc. Low resistivity thin film conductor for high temperature integrated circuit electronics
US6150262A (en) * 1996-03-27 2000-11-21 Texas Instruments Incorporated Silver-gold wire for wire bonding
US6873020B2 (en) * 2002-02-22 2005-03-29 North Carolina State University High/low work function metal alloys for integrated circuit electrodes
JP7271166B2 (ja) * 2018-12-21 2023-05-11 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE637621A (https=) * 1962-05-25 1900-01-01
NL297607A (https=) * 1962-09-07
US3432913A (en) * 1962-12-26 1969-03-18 Philips Corp Method of joining a semi-conductor to a base
US3324357A (en) * 1964-01-29 1967-06-06 Int Standard Electric Corp Multi-terminal semiconductor device having active element directly mounted on terminal leads

Also Published As

Publication number Publication date
US3591838A (en) 1971-07-06
DE1816748B2 (de) 1972-01-27
NL151845B (nl) 1976-12-15
FR1599998A (https=) 1970-07-20
GB1258580A (https=) 1971-12-30
NL6818715A (https=) 1969-07-01
DE1816748A1 (de) 1969-07-24

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Legal Events

Date Code Title Description
SH Request for examination between 03.10.1968 and 22.04.1971
C3 Grant after two publication steps (3rd publication)