DE1521401A1 - Weichloetverfahren an einer Nickeloberflaeche und Koerper mit einer durch dieses Verfahren erhaltenen Loetverbindung - Google Patents

Weichloetverfahren an einer Nickeloberflaeche und Koerper mit einer durch dieses Verfahren erhaltenen Loetverbindung

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Publication number
DE1521401A1
DE1521401A1 DE19631521401 DE1521401A DE1521401A1 DE 1521401 A1 DE1521401 A1 DE 1521401A1 DE 19631521401 DE19631521401 DE 19631521401 DE 1521401 A DE1521401 A DE 1521401A DE 1521401 A1 DE1521401 A1 DE 1521401A1
Authority
DE
Germany
Prior art keywords
soldering
nickel
gold
ait
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19631521401
Other languages
English (en)
Other versions
DE1521401C3 (de
DE1521401B2 (de
Inventor
Wijburg Matheus Adri Theresias
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE1521401A1 publication Critical patent/DE1521401A1/de
Publication of DE1521401B2 publication Critical patent/DE1521401B2/de
Application granted granted Critical
Publication of DE1521401C3 publication Critical patent/DE1521401C3/de
Expired legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001Interlayers, transition pieces for metallurgical bonding of workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001Interlayers, transition pieces for metallurgical bonding of workpieces
    • B23K35/004Interlayers, transition pieces for metallurgical bonding of workpieces at least one of the workpieces being of a metal of the iron group
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
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    • B23K35/262Sn as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60KARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
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    • B60K17/10Arrangement or mounting of transmissions in vehicles characterised by arrangement, location, or kind of gearing of fluid gearing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60KARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
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    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
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Description

Patentanwalt
Anmelder: N. V. PHILIPS'QLOEIUMfENFABRIEKEN '
Anmeldung vom: 2. August 1 963 ·'
"teiohlötverfahren an einer Kiekeloberfliehe und Körper ait einer duroh dieses Verfahren erhaltenen LStverbindung."
Sie Erfindung betrifft ein Verfahren sma Aufbringen einer Schicht aus Weiohlöt auf einen Körper ait einer Oberfliohe, dl· .in wesentlichen aus Nickel besteht, aittels eines Lötaetalles wie Pb, Sn, In, einer Zinnlegierung oder einer Indiualegierung, im welehea Zweok vor dem Aufbringen des LÖtaetallea die Äiokelfllohe «it einea Goldüberxug versehen wird.'
Zur Verbesserung der sohleohten Lötbarkeit vor Ober« flicken aus Niokel oder Nickellegierungen w£rd bei eine« bekannte» · Verfahren eine solche Oberfliohe sunlohst ait eine« Qoldftbersttg «it einer Stärke von 1 bis 2,5 μ tibersogen, worauf das Lötaetall angebraoht wird. Lötmetalle aus Zinnbasis benetsen SoldoberfHohen erkeblieh besser als Niokel oder Nickellegierungen, aber die Lötbarkeit ist nota nicht ganz zufriedenstellend« Wenn auf eine Yiakelowerflleet «in· bestiaate Meng· Lötaetall gebraoht wird, flieest letztere· aloht kln* reichend über die Oberfliohe aus» Site bringt »it sieh, das· «int Menge Lötaetall auf gebraoht werden «use and ein flmss«ittel, ist. Dies ist bei vielen Anwendungen unsmllssig, :..-·' <: -.* ' ' ;!' - Sie· gilt mater andere« ffe in
·Λ
leitervorriohtung aa Montagebodea el»er letalutll· sejfejitigt w»rien ■oll. In Hinbliok auf die Teaperatur, dU nle#t sm keeÄ* wird au diese« Zweok oft Fb, Sn, eine tlaalegierieig»': Indiualegierung ait OaIIiUB eier A^ualn^u« beAmtst· besteht aus vernickelte« lieen-fiekeV'-ÖoaeVt oder am«
' 909850/03tS
152U01
gut« Wirkungew·!·· der Halbleitervorrichtung ist ·· erfordern·*, d«f· di· Löteohioht einen niedrigen thermischen und einen niedrig» «ltktriaoh«n Üebergangewideretand attfweist, d.h. da·· si· a6*gliohet dflna •ein au·β.
Die Irfindung aohafft ein erheblich beeaere« Yerfanren •um Durchführen eine· LBtvorgang·· cn eine« KSrper, des««n Oberfliehe in wesentlichen au· Nickel besteht, wobei da· LStmetali «it niedrigea Sohaelspunkt ein erheblieh besser·· Flieseverhalten al· auf einer Gold· oberfliohe seigt» so da·· tMaerat dünne Löteohichtet» erhalten werden kflnnen. Das erfindungsgralaee Verfahren hat daa Merkaalf da·· vor dea Anbringen des LStmetall·· ein Ooldüberiug ai' einer Stlrke von 0,01 ble 0,2 μ auf der Hiokeloberfllohe angebracht und der K8rper darauf auf eine'Temperatur ιwischen 300 und 43O0C erwirmt wird.
Infolge dieser Erwärmung diffundiert die Ooldsohioht in da· Nickel, so das· an der Oberflieh· eine Nickel-Goldlegierung entsteht, welche die beschriebene ror3Ügliche Benetzbarkeit aufweist· Die Ir« wlraung auf «in· Temperatur innerhalb d·· angegebenen Bereich· i»t •ine unumgängliche Forderung ua das gewünschte Resultat in erhalten» Brfelft die Erwlrmung auf ein· Temperatur unterhalb 9009C, to dlfftmditrt da· Gold nioht hinreichend in die Micke1sohlent «im and ti· Benetzbarkeit übersteigt die einer öoldoberfHohe nieht mat stark. Ist di· trhitiungsteaperatur s.l. 9000C, so diffundiert dae Gold su tief in d*s liokel hineia, so daee die Oberfliehe atwh ein· geringere Beaetsbarkeit aufweist. .
ils ame· ftr di· IStvarkeit wurde der Durchmesser, gar «aalt, auf die ein· beetimmte Gewiohtsmtnge Sinnlot ausflieset.
, . ' 909850/0315
BAD ORSG»NAL · i
152U01
- 3 - ΡΗ.17.β66
Yerauehewelee wurden Iiokelplattsn ait einer Goldaohicht rtxa et«·. 0»1 a tbersogen. Sin· Platt· wurd· nicht erwirat und di· anderen wurittt während 30 Minuten auf Temperaturen τοη 100, 800« 230, 300, 350, 400, 450 und 5000C gehalten. Zwieohen 300 und 4000C «er«· «in
,'. f lieae>Durohaeeaer de· ausgeflossenen Zinn· geaeseen, der etwa dreimal
f
grSsscr als der einer vergoldeten nicht erwäraten Platt· «ar· Bei.auf
t ffftap«ratur«n unterhalb 30O0O er#lrmtei> Platten war dieser Surehaaaeer » kau« grisevr und oberhalb 45O0C wurde e» proportional »ur
Vunahae kleiner als bei einer vergoldeten, aieat erwiraten Platt··
Di· Ooldsohicht kann auf rereohiedene Vei·· auf ]fiokelob«rflSoh· aufgebracht werden, s.B..galvanieoh öder auch aittttla villa·· A«etau80headee ohne Anwendung einer lueeeren StroaqiMll·· Xn fiiniioht auf di· Cltiohaleeigkeit d«r Ooldsohioht und inebeaooUre, wwna- dar LStrorgang an kleinen Gegenständen erfolgen «oll, wird la ■ Hinbliek auf. die Einfachheit der Behandlung da« Auatauachbad »«Tortugt. Di·*·-AuataueohbSder sind an aioh bekannt! ein solche· Bad «nthllt ·*!· K*Oeld»ojranid und W«iaalure und hat einen pB-Vert τοη. «twa i·
Da» «rfindungegwal··· Terfahren erfordert kein FlUMaittel tua Löten. Auaeerd·« eignet eich dieses Terfahren Torsfiglica aaa draeklosen. L8ten.
Si· durch da· Terfahrea nach der Brfiadang angeVraohte litttahieht kann nioht nur sua Ltiten, »ondern auch als Xorraaiaaetahmlt benutet werden, der erheblieh günstiger iet als Ate Iblleha« Aatikorrosionssohiohten. Bs i»t bekannt, au dieaea Sweek «Ina Beaieat eines weniger edlen Metall·· ala daa der unterlage aaiubriagaa· Bann entsteht in einer feuchten ataosphlre nach Beschädigung ein karage-
909850/0315
- 4 -' PH.17.866
sohloesenee galvanisches Element, wobei das da· unterliegende Material auf KoBten der unedleren, in Lotung gehenden Sohioht kathoditoh gtschützt wird» Nach lingerer Ztit geht der Bohiitz vtrloren, wtnn tint su grosse Menge der unedlen Sohioht gtlSst wird.
Bei der erfindungsgemfee angebrachten Sohioht Lötmetalltt gibt ta tint Grtnsschicht eines Edelmetallea zwisohtn der unedlen LStmetallsohioht, z.B. dem Zinn, und dem Baeiametall, z.B. Jfiokel, vernickeltem Eisen oder vernickeltem Eisen-Nickel-Kobalt* Sofern dittt Bdtlmetalltohioht nioht zu stark besohfidigt wird, schafft bei Btschfidigung dtr unedlen Aussensohioht diese Anordnung tintn erheblich dauerhafteren Schutz als die vorstehend beschriebene, bekannte Anordnung*
Eine Traneistorhülle fur tint Halbleitervorrichtung z.B. wird als Ganzes vernlokeltt darauf wird ein Goldübtreug nitdergeaohlagtn, trwfrat und s«B» galvanisoh versinnt· Dite ergibt eine Halbleittrvorriohtung mit tiner Hüllt, dtrtn Ansohlussdra'hte vorsüglioh IStbar sind, während das Ganz« erheblich korrosionsfester alt bisherigt Hüllen
£a wtrdtn nachstehend beispielsweise drti Ffllt btsehr leben, in denen das' erfindungsgtmJiese Terfahrtn angewandt witd. Itiapitl 1.
Auf tiner Anzahl eietrnert MontagebSdtft fflr tin UkIbltittndts aiteentisit einea Durehattstr ^On 8 Km, zwti Qlftsduroh· ffihrungtn uad einen Anathlussdraht, dtr tu Montagtboden angtsohwtisst war, wurde vor dem Sohmelcen duroh galvanisches Vernickeln tint Nickel»· eohicht «it tiner Starke von 5 μ angebracht. Zu diesem Zwtok wurde tin
909850/0315 BAD oRIG'NAU
auf 6O0C erhitztes Wattsohes Vernickelungsbad mit folgender Zusammen·* Setzung pro Liter benutzti
■ 20 g HiOl0.6H9O
200 g HiSO .7H2O und
25 g H5BO3.
Darauf wurden die MontagebSden überzogen mittel· eine· bekannten Austauschbades mit 0*1 μ Gold*
Die MontagebSden wurden darauf 30 Minuten lang IRDTf
einer Temperatur von 55O0C gehalten. Nach Abkühlung wurde auf der Seite des Montagebodene. an der das Halbleiterelement angebracht werden solltef eine Folie au· LStmetall mit der Zusammensetzung 70 # Sn und 30 $ Pb angebracht und darauf ein Hiokelstreifen mit einem daran befestigten tfalbleiterkristall gelegt. Das Qanze wurde zum Schmelzen der Folie einige-Standen lang in einem heiaaen Misohgaaatrom aus Stickstoff mit . 5 Volumenprozent Wasserstoff alt einer Temperatur Ton 300 0 erwlrmt. Die Folien flössen unmittelbar aus und lieferten eine glelehaiseige Bedeckung der Oberfllohe de· Montagebodens* Das Halbleiterelement bestand aus einer {Jermaniumkristallplatte, die mit einer In-Ga-Legierung auf einem HiokeIstretfen festgelötet war. Darauf wurde dft» Ganze in einem kalte/i Luftstrom auf Zimmertemperatur abgekühlt. Bs wurde ·1η· το*« zügliohe Haftung de· Kristall·· an dem Montageboden eriitVt. Beiapiel 2. · . ■ ' * . '' . . " .
Sin au· Kupfer bestehander Montagefcodih für ein« Hoch· Ieistung·diode, in dem eine kreiefSrmige Hut angebracht w»»t wuyie mittel· de· vorstehend beschriebenen Bad·· mit einer 1 μ' etftrkin Hiok#X· sohioht und diese mittel· eines Austaueohbades mit elftem 0,1 ψ starkes
909850/0315 ' \
-152U01
Oxidüberzug versehen und darauf der Kupferboden 30 Minuten lang auf eine Temperatur von 33O0C erwiret. line zylindrische, einseitig geschlossene Kappe» deren untere Seite Kit eine« gewissen Spiel in die kreisförmig· Nut des Montagebodens passtet wurde auf gleiohe Weise verniokelt« vergoldet und erwärmt. Auf den Montageboden wurde «ine Folie Blei-Zinnlot gelegt und darauf der Krieta.ll angebracht· Dann wurde die Kappe Bit der unteren Seite in die* Nut geführt. Bs wurden einige Perlohen Blei-Zinnlot an der Nut gegen die Kappe gelegt und das Gänse auf eine temperatur von etwa 3OQ0C erwärmt« Maoh Abkf luag war das Lot • swisohen die Nut und den Kappenrand geflossen, und es hatte sich eine voraügliohe Haftung gebildet» Ks haste sich sine* gut aussehende! glatte Lotnaht gesildet. Gleichseitig war der Kristai1 fest si* dem Montageboden rerietet.
Beispiel 3.
Auf einen Kupferboden für eine Halbleitervorrichtung wurde' Kittels des Vernlekelungsbades nach Beispiel 1 eine Nickeleohiöht Kit einer Stärke von 1 μ aufgebracht die Kittels eines Auetauaohbades Kit eineK Goldüberzug Kit einer Starke von 0,1 μ versehen wurde, vorauf das Gänse 30 Minuten lang auf 33O°C erwärmt wurde. Die .Heibleitervorriohtung bestand aus einer GerKaniumkristallplatte, in die beiderseits
ein· IadiUKkugel durch XrwIrKuag teilweise eindiffundiert war. Auf der Kollektorseite war die IndiuKkugel flaoh abgeschliffen» Der Halbleiter-'ikitper wurde Kit dieser Seit« auf die vergoldete Oberfläche gelegt und la·'Qanse einige Hinuten lang auf ein· Temperatur von 160°0 in einer
AlposphaVt aus Stickstoff und 9 Toluaenproaent Wasserstoff erwfcrKt. SiKt
dfiftde Oterfllohensohicht des IadiuKS floss über die vergoldete lodenfllohe am und ergab so «ine vorsügliohe Haftung des Halbleiterkristalles
909850/0315 BAD obig>nAU

Claims (1)

152U01 - 7 - PH.17.866
1. Verfahren sub Aufbringen einer Schiaht aus Weichlot auf
•inen Körper "ait ainar OberflEehe, die ia wesentlichen aus Nickel besteht, aittele einea LStaetalles wie Fb, Sn1 In, einer Zinnlegierung oder einer Indiualegierung, »u welchem Zweck vor da« Aufbringen dea LStaetalles
die Xiokelfliohe ait eine'a Qolduberzug veraahen wird, dadurch gekenn- * leiohnet, dass der Ooldübersug in einer Stfirke tob 0,01 bia 0,2 μ aufgebracht und der Körper darauf auf eine Teaperatur swiaoken 3OQ0C und 45O0O erwfrat wird.
2· KSrper, insbesondere Metallhülle fur «ine Halbleitervorrichtung, an welchea Körper aindestens eine duroh Aas Terfahrtn naoh Anspruoh 1 hergestellte LStverbindung vorgesehen ist» 3· Körper, insbesondere Metallhülle fur «in« Halbleitervorrichtung, welcher Körper durch das Verfahren naeh Anspruch 1 ait •iner Bohioht LSteetall fibersogen ist·
909850/0315
DE1521401A 1962-08-08 1963-08-03 Verfahren zum Verbessern der Lötbarkeit einer im wesentlichen aus Nickel bestehenden Oberfläche eines Körpers Expired DE1521401C3 (de)

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US3516075A (en) * 1965-10-04 1970-06-02 Ncr Co Bistable magnetic thin film rod having a conductive overcoating
US3451030A (en) * 1966-07-01 1969-06-17 Gen Electric Solder-bonded semiconductor strain gauges
US3634048A (en) * 1968-02-14 1972-01-11 Mallory & Co Inc P R Solderable stainless steel
US3675310A (en) * 1971-04-20 1972-07-11 Us Interior Soldering method
US3963455A (en) * 1973-01-12 1976-06-15 Lea-Ronal, Inc. Electrodeposited gold plating
US3878065A (en) * 1974-01-30 1975-04-15 Buckbee Mears Co Process for forming solderable coating on alloys
US4361470A (en) * 1974-09-03 1982-11-30 Micro-Plate, Inc. Connector contact point
DE2742922C2 (de) * 1977-09-23 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Verfahren zum mittelbaren Verbinden zweier Teile
DE2742921C2 (de) * 1977-09-23 1985-07-11 Siemens AG, 1000 Berlin und 8000 München Verfahren zum mittelbaren Verbinden zweier Teile durch Verschweißung zweier Metallauflagen
US4300959A (en) * 1979-08-22 1981-11-17 United Technologies Corporation Impermeable electroform for hot isostatic pressing
US4411965A (en) * 1980-10-31 1983-10-25 Occidental Chemical Corporation Process for high speed nickel and gold electroplate system and article having improved corrosion resistance
US4418857A (en) * 1980-12-31 1983-12-06 International Business Machines Corp. High melting point process for Au:Sn:80:20 brazing alloy for chip carriers
US4397086A (en) * 1981-01-26 1983-08-09 The Bendix Corporation Method of fabricating a socket type electrical contact
US4331258A (en) * 1981-03-05 1982-05-25 Raychem Corporation Sealing cover for an hermetically sealed container
US4505060A (en) * 1983-06-13 1985-03-19 Inco Limited Process for obtaining a composite material and composite material obtained by said process
US4551184A (en) * 1983-06-13 1985-11-05 Inco Limited Process for obtaining a composite material and composite material obtained by said process
US4666796A (en) * 1984-09-26 1987-05-19 Allied Corporation Plated parts and their production
US4601958A (en) * 1984-09-26 1986-07-22 Allied Corporation Plated parts and their production
US4737418A (en) * 1986-12-22 1988-04-12 Advanced Materials Technology Corp. Nickel clad corrosion resistant lid for semiconductor package
US4895291A (en) * 1989-05-04 1990-01-23 Eastman Kodak Company Method of making a hermetic seal in a solid-state device
US5466540A (en) * 1994-02-14 1995-11-14 Ceridian Corporation Mark of an electronic component lid
CA2370770A1 (en) 1999-04-16 2000-10-26 Edison Welding Institute Soldering alloy
US20070039826A1 (en) * 2005-08-18 2007-02-22 Chia-Hua Chang Thickening method of an electroforming shim
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DE1521401C3 (de) 1975-05-15
NL281894A (de)
US3364064A (en) 1968-01-16
GB1031436A (en) 1966-06-02
DE1521401B2 (de) 1972-03-02

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