DE10296644B4 - Absolute Positionsmessung - Google Patents

Absolute Positionsmessung Download PDF

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Publication number
DE10296644B4
DE10296644B4 DE10296644.3T DE10296644T DE10296644B4 DE 10296644 B4 DE10296644 B4 DE 10296644B4 DE 10296644 T DE10296644 T DE 10296644T DE 10296644 B4 DE10296644 B4 DE 10296644B4
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DE
Germany
Prior art keywords
scale
absolute
data
absolute position
incremental
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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DE10296644.3T
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German (de)
English (en)
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DE10296644T5 (de
Inventor
Iain Robert Gordon-Ingram
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Renishaw PLC
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Renishaw PLC
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Publication of DE10296644T5 publication Critical patent/DE10296644T5/de
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Publication of DE10296644B4 publication Critical patent/DE10296644B4/de
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE10296644.3T 2001-04-11 2002-04-11 Absolute Positionsmessung Expired - Lifetime DE10296644B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0109057.0A GB0109057D0 (en) 2001-04-11 2001-04-11 Absolute postition measurement
GB0109057.0 2001-04-11
PCT/GB2002/001629 WO2002084223A1 (en) 2001-04-11 2002-04-11 Absolute position measurement

Publications (2)

Publication Number Publication Date
DE10296644T5 DE10296644T5 (de) 2004-04-22
DE10296644B4 true DE10296644B4 (de) 2019-05-09

Family

ID=9912667

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10296644.3T Expired - Lifetime DE10296644B4 (de) 2001-04-11 2002-04-11 Absolute Positionsmessung

Country Status (6)

Country Link
US (1) US7499827B2 (https=)
JP (1) JP4008356B2 (https=)
CN (1) CN1260551C (https=)
DE (1) DE10296644B4 (https=)
GB (2) GB0109057D0 (https=)
WO (1) WO2002084223A1 (https=)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10217726A1 (de) 2002-04-17 2003-11-27 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
DE10317736A1 (de) * 2003-04-11 2004-10-28 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung
DE10323088A1 (de) * 2003-05-16 2004-12-02 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
WO2004102123A1 (de) * 2003-05-17 2004-11-25 Thyssenkrupp Presta Ag Sensor zur messung einer länge oder eines winkels
DE10327680A1 (de) * 2003-05-17 2004-12-09 Thyssenkrupp Automotive Ag Sensor zur Messung einer Länge oder eines Winkels
DE602005002287T2 (de) * 2004-03-17 2008-05-29 Canon K.K. Optischer Encoder
GB0413710D0 (en) 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
GB0413827D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
US7432497B2 (en) * 2005-09-29 2008-10-07 Mitutoyo Corporation Absolute linear encoder
US8011112B2 (en) * 2006-12-07 2011-09-06 Leica Geosystems Ag Method and apparatus for determining positions
JP2010515943A (ja) 2007-01-11 2010-05-13 レニショウ パブリック リミテッド カンパニー サンプル位置決め装置
JP4828612B2 (ja) 2007-06-01 2011-11-30 株式会社ミツトヨ 反射型エンコーダ、そのスケール、及び、スケールの製造方法
JP5286584B2 (ja) 2007-06-19 2013-09-11 株式会社ミツトヨ 絶対位置測長型エンコーダ
EP2072133A1 (en) * 2007-12-20 2009-06-24 Koninklijke Philips Electronics N.V. Multi-compartment device with magnetic particles
JP5203024B2 (ja) * 2008-04-15 2013-06-05 株式会社ミツトヨ 絶対位置測長型エンコーダ
GB0807242D0 (en) 2008-04-21 2008-05-28 Renishaw Plc Metrological scale
DE102008022027A1 (de) 2008-05-02 2009-11-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
GB0811076D0 (en) * 2008-06-17 2008-07-23 Renishaw Plc Scale track
US9618369B2 (en) 2008-08-26 2017-04-11 The University Court Of The University Of Glasgow Uses of electromagnetic interference patterns
GB0819767D0 (en) 2008-10-28 2008-12-03 Renishaw Plc Absolute encoder setup indication
US8878526B2 (en) 2009-01-27 2014-11-04 Renishaw Plc Magnetic encoder apparatus
GB0903535D0 (en) * 2009-03-02 2009-04-08 Rls Merilna Tehnika D O O Encoder readhead
GB0906257D0 (en) * 2009-04-08 2009-05-20 Renishaw Plc Position encoder apparatus
GB0906258D0 (en) * 2009-04-08 2009-05-20 Renishaw Plc Position encoder apparatus
GB0909724D0 (en) 2009-06-05 2009-07-22 Renishaw Plc Position measurement encoder and method of operation
JP5077717B2 (ja) 2010-04-12 2012-11-21 村田機械株式会社 磁極検出システム
JP5379761B2 (ja) 2010-08-06 2013-12-25 キヤノン株式会社 アブソリュートエンコーダ
JP5787513B2 (ja) 2010-12-15 2015-09-30 キヤノン株式会社 アブソリュートロータリーエンコーダ
JP5832088B2 (ja) 2010-12-15 2015-12-16 キヤノン株式会社 ロータリーエンコーダ
EP2533018B1 (de) * 2011-06-10 2014-05-07 Schneeberger Holding AG Lineares Wegmesssystem
JP2014526140A (ja) 2011-07-06 2014-10-02 レニショウ パブリック リミテッド カンパニー 製造方法および製造装置
JP5882619B2 (ja) 2011-07-26 2016-03-09 キヤノン株式会社 スケール及びその製造方法並びにアブソリュートエンコーダ
US20130204574A1 (en) * 2012-02-07 2013-08-08 Amit Agrawal Method for Estimating Positions Using Absolute Encoders
US20150377654A1 (en) * 2012-02-07 2015-12-31 Mitsubishi Electric Research Laboratories, Inc. Method and System for Estimating Positions Using Absolute Encoders
US9423281B2 (en) 2012-02-07 2016-08-23 Mitsubishi Electric Research Laboratories, Inc. Self-calibrating single track absolute rotary encoder
GB201204066D0 (en) 2012-03-08 2012-04-18 Renishaw Plc Magnetic encoder apparatus
CN102607418B (zh) * 2012-03-30 2014-06-11 中国科学院长春光学精密机械与物理研究所 绝对位置测量装置
CN102645167A (zh) * 2012-05-04 2012-08-22 中国科学院长春光学精密机械与物理研究所 绝对位移测量装置
JP6023561B2 (ja) 2012-11-15 2016-11-09 キヤノン株式会社 計測装置、計測方法、及び、アブソリュートエンコーダ
JP6434422B2 (ja) * 2013-01-15 2018-12-05 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 周期的偏光ナノ構造によって表されるデータを読み取る方法
WO2014111697A1 (en) 2013-01-15 2014-07-24 Renishaw Plc Measurement scale
EP2951677A4 (en) 2013-01-31 2016-08-03 Hewlett Packard Entpr Dev Lp UPDATING A VALIDATION LIST FOR INDICATING DATA TO WRITE TO A REFERENTIAL OF VARIABLES OF A MICROLOGICAL INTERFACE
CN105814408B (zh) 2013-10-01 2018-06-12 瑞尼斯豪公司 编码器设备和编码器读头
CN106030251B (zh) 2013-10-01 2019-02-01 瑞尼斯豪公司 读头和制造测量装置的方法
JP6497848B2 (ja) * 2014-04-14 2019-04-10 キヤノン株式会社 アブソリュートエンコーダ、処理方法、プログラム、駆動装置、および産業機械
US9435663B2 (en) * 2014-08-22 2016-09-06 Mitutoyo Corporation Absolute position encoder scale having layers in a stacked configuration
US9933284B2 (en) 2015-08-26 2018-04-03 Novanta Corporation Multi-track absolute encoder
JP6705649B2 (ja) 2015-12-22 2020-06-03 株式会社ミツトヨ エンコーダ
JP6651371B2 (ja) 2016-02-05 2020-02-19 株式会社ミツトヨ 光電式エンコーダ
JP7085851B2 (ja) * 2018-02-07 2022-06-17 日本電産サンキョー株式会社 位置検出装置および位置検出方法
US10502593B1 (en) * 2018-06-07 2019-12-10 Philip M. Johnson Linear and rotary multitrack absolute position encoder and methods using the same
US10775203B2 (en) * 2018-08-17 2020-09-15 Aeolus Robotics Corporation Limited Optical encoder and method of operating the same for converting image of a portion of a pattern of codes into waveforms
JP7258515B2 (ja) 2018-10-26 2023-04-17 Dmg森精機株式会社 位置検出装置および搬送装置
DE102019203211A1 (de) * 2019-03-08 2020-09-10 Zf Friedrichshafen Ag Sensoreinrichtung, Verfahren und Computer-Programm-Produkt zur sensorbasierten Positionsbestimmung eines Bauteils für ein Fahrzeug
GB201916662D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus
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US20240085219A1 (en) 2021-02-09 2024-03-14 Renishaw Plc Rotary encoder
KR20240042465A (ko) 2021-08-12 2024-04-02 레니쇼우 피엘씨 위치 인코더 장치
EP4134633A1 (en) 2021-08-12 2023-02-15 Renishaw PLC Position encoder apparatus
CN113847934A (zh) * 2021-09-24 2021-12-28 深圳市灵犀自动化技术有限公司 混合编码器的位置确定方法及装置
EP4336149A1 (en) 2022-09-08 2024-03-13 Renishaw PLC Position encoding apparatus and method
JP2025542355A (ja) 2022-12-20 2025-12-25 レニショウ パブリック リミテッド カンパニー エンコーダ装置
EP4390325A1 (en) 2022-12-20 2024-06-26 Renishaw PLC Encoder apparatus
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EP4484898A1 (en) 2023-06-29 2025-01-01 Renishaw PLC Encoder apparatus
DE102023134625B3 (de) 2023-12-11 2025-03-20 Sick Ag Vorrichtung und verfahren zur positions-, längen- oder winkelbestimmung sowie verfahren zur bildung einer entsprechenden codierung
WO2025262400A1 (en) 2024-06-19 2025-12-26 Renishaw Plc Absolute position measurement scale and apparatus therefor
EP4667878A1 (en) 2024-06-19 2025-12-24 Renishaw plc Method of making absolute position measurement scale structure
CN118730180B (zh) * 2024-09-03 2024-10-29 吉林大学 一种绝对式编码器

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3035012A1 (de) 1980-09-17 1982-04-01 Fa. Carl Zeiss, 7920 Heidenheim Stellungsgeber
EP0207121A1 (en) 1984-12-22 1987-01-07 Renishaw Plc OPTO-ELECTRONIC SCALE READING APPARATUS.
EP0503716A1 (en) 1991-03-12 1992-09-16 Koninklijke Philips Electronics N.V. Measuring device for determining an absolute position of a movable element and scale graduation element suitable for use in such a measuring device
DE4436784A1 (de) 1993-10-26 1995-04-27 Zeiss Carl Fa Absolutes Positionsmeßsystem
US6147342A (en) * 1998-06-02 2000-11-14 Caterpillar Inc. Encoding system for determining the position of a cylinder rod along a path of movement
DE10028136A1 (de) 1999-06-04 2000-12-07 Heidenhain Gmbh Dr Johannes Positionsmeßsystem
DE19939643A1 (de) 1999-08-18 2001-03-22 Zeiss Carl Jena Gmbh Einrichtung und Verfahren zur Positionsbestimmung zwischen zwei relativ zueinander beweglichen Teilen
CA2427788A1 (en) 2000-06-23 2002-01-03 Bishop Innovation Limited Position encoder using statistically biased pseudorandom sequence

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60120217A (ja) * 1983-12-02 1985-06-27 Mitsutoyo Mfg Co Ltd 光電式変位検出装置
US4633224A (en) * 1985-05-06 1986-12-30 Caterpillar Inc. Absolute and incremental optical encoder
JPS6371611A (ja) 1986-09-16 1988-04-01 Mitsutoyo Corp 測長装置
US4947166A (en) * 1988-02-22 1990-08-07 Dynamics Research Corporation Single track absolute encoder
DE3818044A1 (de) * 1988-05-27 1989-11-30 Christoph Dipl Phys Kuehne Praezisions-messeinrichtung fuer grosse verschiebungen
ATE83314T1 (de) 1989-10-06 1992-12-15 Heidenhain Gmbh Dr Johannes Lichtelektrische positionsmesseinrichtung.
CH683798A5 (fr) * 1990-12-10 1994-05-13 Tesa Sa Capteur de position pour un appareil de mesure de grandeurs linéaires ou angulaires.
US5294793A (en) 1991-08-23 1994-03-15 Rsf-Elektronik Gesellschaft M.B.H. System for measuring lengths or angles with a high-velocity movable scanning unit
AT404300B (de) * 1992-02-20 1998-10-27 Rsf Elektronik Gmbh Drehgeber
FI91325C (fi) * 1992-04-07 1994-06-10 Partek Cargotec Oy Paikka-asteikko ja optinen lukuanturi tämän paikka-asteikon lukemiseksi
US5841274A (en) * 1997-01-29 1998-11-24 Mitutoyo Corporation Induced current absolute position transducer using a code-track-type scale and read head
US5929789A (en) 1997-04-09 1999-07-27 Hewlett-Packrd Company Single channel incremental position encorder with incorporated reference mark
DE59806597D1 (de) 1997-08-07 2003-01-23 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
US6271661B2 (en) * 1999-03-16 2001-08-07 Mitutoyo Corporation Absolute position transducer having a non-binary code-track-type scale
GB9926574D0 (en) * 1999-11-11 2000-01-12 Renishaw Plc Absolute position measurement

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3035012A1 (de) 1980-09-17 1982-04-01 Fa. Carl Zeiss, 7920 Heidenheim Stellungsgeber
EP0207121A1 (en) 1984-12-22 1987-01-07 Renishaw Plc OPTO-ELECTRONIC SCALE READING APPARATUS.
EP0503716A1 (en) 1991-03-12 1992-09-16 Koninklijke Philips Electronics N.V. Measuring device for determining an absolute position of a movable element and scale graduation element suitable for use in such a measuring device
DE4436784A1 (de) 1993-10-26 1995-04-27 Zeiss Carl Fa Absolutes Positionsmeßsystem
US6147342A (en) * 1998-06-02 2000-11-14 Caterpillar Inc. Encoding system for determining the position of a cylinder rod along a path of movement
DE10028136A1 (de) 1999-06-04 2000-12-07 Heidenhain Gmbh Dr Johannes Positionsmeßsystem
DE19939643A1 (de) 1999-08-18 2001-03-22 Zeiss Carl Jena Gmbh Einrichtung und Verfahren zur Positionsbestimmung zwischen zwei relativ zueinander beweglichen Teilen
CA2427788A1 (en) 2000-06-23 2002-01-03 Bishop Innovation Limited Position encoder using statistically biased pseudorandom sequence

Also Published As

Publication number Publication date
CN1461404A (zh) 2003-12-10
GB2395005B (en) 2005-05-18
US20040118758A1 (en) 2004-06-24
GB2395005A (en) 2004-05-12
GB0109057D0 (en) 2001-05-30
WO2002084223A1 (en) 2002-10-24
GB0323528D0 (en) 2003-11-12
JP4008356B2 (ja) 2007-11-14
DE10296644T5 (de) 2004-04-22
US7499827B2 (en) 2009-03-03
CN1260551C (zh) 2006-06-21
WO2002084223A9 (en) 2004-04-01
JP2004529344A (ja) 2004-09-24

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