JP4828612B2 - 反射型エンコーダ、そのスケール、及び、スケールの製造方法 - Google Patents
反射型エンコーダ、そのスケール、及び、スケールの製造方法 Download PDFInfo
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- JP4828612B2 JP4828612B2 JP2008549697A JP2008549697A JP4828612B2 JP 4828612 B2 JP4828612 B2 JP 4828612B2 JP 2008549697 A JP2008549697 A JP 2008549697A JP 2008549697 A JP2008549697 A JP 2008549697A JP 4828612 B2 JP4828612 B2 JP 4828612B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000002238 attenuated effect Effects 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 55
- 238000000034 method Methods 0.000 description 15
- 238000001514 detection method Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 9
- 239000011521 glass Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Description
nr=n1/no=sinθ0/sinθ1 …(1)
LAC=2htanθ1 …(3)
LAD=LACsinθ0=2hsinθ0tanθ1 …(4)
=2h{(n1/cosθ1)−n0sinθ0tanθ1} …(7)
Claims (10)
- 光源と、
該光源から光が照射される複数のパターンが形成されたスケールと、
前記複数のパターンによりそれぞれ反射された光を、それぞれ受光する受光素子とを有し、
単一のスケールから複数の受光信号を得るようにした反射型エンコーダにおいて、
前記スケールの単一トラック上に、誘電体を用いて、厚みの異なる複数のパターンを形成すると共に、
前記光源から、誘電体厚みの差に応じて明暗が異なる複数の波長の光を照射して、
誘電体厚み毎の受光信号を得るようにしたことを特徴とする反射型エンコーダ。 - 第1の厚みの誘電体層で反射光が減衰する第1の光波長で第1のパターンを検出し、且つ、第2の厚みの誘電体層で反射光が減衰する第2の光波長で第2のパターンを検出するようにされていることを特徴とする請求項1に記載の反射型エンコーダ。
- 前記第1の光波長では誘電体層からの光量が最低で、且つ、第2の光波長では誘電体層からの光量が最大になる誘電体層高さに設定されていることを特徴とする請求項2に記載の反射型エンコーダ。
- 前記複数のパターンが、インクリメンタルパターンとABSパターンであることを特徴とする請求項1乃至3のいずれかに記載の反射型エンコーダ。
- 前記誘電体が、酸化シリコンであることを特徴とする請求項1乃至4のいずれかに記載の反射型エンコーダ。
- 前記誘電体の厚みが、430nm及び330nmとされ、前記光源の波長が880nm及び660nmとされていることを特徴とする請求項5に記載の反射型エンコーダ。
- 前記インクリメンタルパターンを検出する前記受光素子の検出中心軸と、前記ABSパターンを検出する前記受光素子の検出中心軸が、測定軸上で一致していることを特徴とする請求項1乃至6のいずれかに記載の反射型エンコーダ。
- スケールの単一トラック上に、誘電体を用いて、厚みの異なる複数のパターンが形成されていることを特徴とする反射型エンコーダのスケール。
- スケールの単一トラック上に、誘電体を用いて、厚みの異なる複数のパターンを形成するに際して、
スケール基板上に光反射層を成膜し、
その上に第1の高さで誘電体層を成膜し、
その上に第1のレジストパターンを成膜してパターニングし、
該第1のレジストパターン開口部の誘電体層を第2の高さ迄エッチングし、
その上に第2のレジストパターンを成膜してパターニングし、
該第2のレジストパターン開口部の誘電体層をエッチングし、
該第2のレジストパターンを除去することを特徴とするスケールの製造方法。 - スケールの単一トラック上に、誘電体を用いて、厚みの異なる複数のパターンを形成するに際して、
スケール基板上に光反射層を成膜し、
その上に第1のレジストパターンを成膜してパターニングし、
該第1のレジストパターンの開口部に第2の高さの誘電体層をリフトオフし、
該第1のレジストパターンを除去し、
その上に第2のレジストパターンを成膜してパターニングし、
該第2のレジストパターンの開口部に第1の高さの誘電体層をリフトオフし、
該第2のレジストパターンを除去することを特徴とするスケールの製造方法。
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PCT/JP2007/061222 WO2008146409A1 (ja) | 2007-06-01 | 2007-06-01 | 反射型エンコーダ、そのスケール、及び、スケールの製造方法 |
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JPWO2008146409A1 JPWO2008146409A1 (ja) | 2010-08-19 |
JP4828612B2 true JP4828612B2 (ja) | 2011-11-30 |
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JP2008549697A Expired - Fee Related JP4828612B2 (ja) | 2007-06-01 | 2007-06-01 | 反射型エンコーダ、そのスケール、及び、スケールの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8127993B2 (ja) |
EP (1) | EP2051047B1 (ja) |
JP (1) | JP4828612B2 (ja) |
CN (1) | CN101484780B (ja) |
WO (1) | WO2008146409A1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5472986B2 (ja) * | 2009-12-29 | 2014-04-16 | 株式会社リガク | 測角器、測角器の製造方法及びx線分析装置 |
JP5379761B2 (ja) * | 2010-08-06 | 2013-12-25 | キヤノン株式会社 | アブソリュートエンコーダ |
JP5695478B2 (ja) | 2011-04-15 | 2015-04-08 | Dmg森精機株式会社 | 光学式変位測定装置 |
JP5882619B2 (ja) * | 2011-07-26 | 2016-03-09 | キヤノン株式会社 | スケール及びその製造方法並びにアブソリュートエンコーダ |
CN104094087B (zh) * | 2011-12-28 | 2016-07-20 | 株式会社尼康 | 编码器、编码器用标尺制造方法、编码器制造方法及驱动装置 |
EP2592392B1 (de) * | 2012-03-09 | 2013-09-04 | Hexagon Technology Center GmbH | Optoelektronische Lagemessvorrichtung |
JP6557148B2 (ja) * | 2013-01-15 | 2019-08-07 | レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company | 測定スケール |
EP2884239B1 (en) * | 2013-12-13 | 2016-09-28 | The Swatch Group Research and Development Ltd. | Angular and axial position sensor arrangement |
JP6366274B2 (ja) * | 2014-01-07 | 2018-08-01 | キヤノン株式会社 | スケール、測定装置、画像形成装置、スケールの加工装置、および、スケールの加工方法 |
JP6472166B2 (ja) * | 2014-01-20 | 2019-02-20 | キヤノン株式会社 | 位置制御装置および方法 |
WO2015147756A1 (en) * | 2014-03-27 | 2015-10-01 | Heptagon Micro Optics Pte. Ltd. | Optical encoder system |
TWI512272B (zh) * | 2014-10-17 | 2015-12-11 | China Steel Corp | Reflective coding system and its encoding method |
DE102015201230A1 (de) | 2015-01-26 | 2016-07-28 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP5925365B1 (ja) * | 2015-05-13 | 2016-05-25 | 株式会社メルテック | 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法 |
DE102016204313A1 (de) * | 2016-03-16 | 2017-09-21 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Optischer Abstandssensor und Positionsmesseinrichtung mit einem derartigen Abstandssensor |
JP6932983B2 (ja) * | 2017-05-01 | 2021-09-08 | セイコーエプソン株式会社 | エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボットおよびプリンター |
JP7391527B2 (ja) * | 2019-04-03 | 2023-12-05 | 株式会社ミツトヨ | 光電式エンコーダ |
JP7248504B2 (ja) * | 2019-05-30 | 2023-03-29 | 株式会社ミツトヨ | 光学式エンコーダ |
CN110686712A (zh) * | 2019-11-22 | 2020-01-14 | 中国科学院长春光学精密机械与物理研究所 | 一种反射式图像光电编码器 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61161616A (ja) * | 1985-01-10 | 1986-07-22 | 株式会社東芝 | ブツシングの取外し装置 |
JPS6367521A (ja) * | 1985-09-06 | 1988-03-26 | ザ ユニバ−シテイ− オブ リバプ−ル | 変位を測定する装置及び方法 |
JPH03102214A (ja) * | 1989-04-28 | 1991-04-26 | Renishaw Plc | 光学式度量衡スケールの製造方法および該スケール |
JPH04221713A (ja) * | 1990-03-13 | 1992-08-12 | Dr Johannes Heidenhain Gmbh | 光学装置 |
JP2003194586A (ja) * | 2001-12-28 | 2003-07-09 | Fuji Xerox Co Ltd | 光学式エンコーダ及びエンコーダ用スケール |
JP2003279381A (ja) * | 2002-01-21 | 2003-10-02 | Mitsubishi Electric Corp | エンコーダ用コード板、エンコーダ、エンコーダ用コード板のための金型製造方法、および、エンコーダ用コード板の製造方法 |
JP2004037341A (ja) * | 2002-07-05 | 2004-02-05 | Mitsutoyo Corp | 光電式エンコーダ及びスケールの製造方法 |
JP2008292487A (ja) * | 2007-05-24 | 2008-12-04 | Dr Johannes Heidenhain Gmbh | 光学位置測定装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4286871A (en) * | 1980-08-11 | 1981-09-01 | Keuffel & Esser Company | Photogrammetric measuring system |
DE3147985C2 (de) * | 1981-12-04 | 1986-03-13 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verfahren zur Herstellung eines Aufzeichnungsträgers mit einer mehrfarbigen Feinstruktur |
JPS61161616U (ja) * | 1985-03-28 | 1986-10-07 | ||
JPH05118876A (ja) * | 1991-10-28 | 1993-05-14 | Tamagawa Seiki Co Ltd | 光フアイバエンコーダ |
US5838653A (en) * | 1995-10-04 | 1998-11-17 | Reveo, Inc. | Multiple layer optical recording media and method and system for recording and reproducing information using the same |
DE19941318A1 (de) | 1999-08-31 | 2001-03-15 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
DE10011872A1 (de) * | 2000-03-10 | 2001-09-27 | Heidenhain Gmbh Dr Johannes | Reflexions-Messteilung und Verfahren zur Herstellung derselben |
GB0109057D0 (en) | 2001-04-11 | 2001-05-30 | Renishaw Plc | Absolute postition measurement |
JP2002318137A (ja) * | 2001-04-20 | 2002-10-31 | Mitsutoyo Corp | 変位測定装置のスケール |
JP4332514B2 (ja) | 2002-01-21 | 2009-09-16 | 三菱電機株式会社 | エンコーダ用コード板、エンコーダ、エンコーダ用コード板のための金型製造方法、エンコーダ用コード板のための金型、及びエンコーダ用コード板の製造方法 |
CN100397045C (zh) * | 2004-01-26 | 2008-06-25 | 三丰株式会社 | 标尺的制造方法和光电式编码器 |
US7256938B2 (en) * | 2004-03-17 | 2007-08-14 | General Atomics | Method for making large scale multilayer dielectric diffraction gratings on thick substrates using reactive ion etching |
-
2007
- 2007-06-01 CN CN2007800248626A patent/CN101484780B/zh not_active Expired - Fee Related
- 2007-06-01 WO PCT/JP2007/061222 patent/WO2008146409A1/ja active Application Filing
- 2007-06-01 EP EP07744609.4A patent/EP2051047B1/en active Active
- 2007-06-01 US US12/227,431 patent/US8127993B2/en not_active Expired - Fee Related
- 2007-06-01 JP JP2008549697A patent/JP4828612B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61161616A (ja) * | 1985-01-10 | 1986-07-22 | 株式会社東芝 | ブツシングの取外し装置 |
JPS6367521A (ja) * | 1985-09-06 | 1988-03-26 | ザ ユニバ−シテイ− オブ リバプ−ル | 変位を測定する装置及び方法 |
JPH03102214A (ja) * | 1989-04-28 | 1991-04-26 | Renishaw Plc | 光学式度量衡スケールの製造方法および該スケール |
JPH04221713A (ja) * | 1990-03-13 | 1992-08-12 | Dr Johannes Heidenhain Gmbh | 光学装置 |
JP2003194586A (ja) * | 2001-12-28 | 2003-07-09 | Fuji Xerox Co Ltd | 光学式エンコーダ及びエンコーダ用スケール |
JP2003279381A (ja) * | 2002-01-21 | 2003-10-02 | Mitsubishi Electric Corp | エンコーダ用コード板、エンコーダ、エンコーダ用コード板のための金型製造方法、および、エンコーダ用コード板の製造方法 |
JP2004037341A (ja) * | 2002-07-05 | 2004-02-05 | Mitsutoyo Corp | 光電式エンコーダ及びスケールの製造方法 |
JP2008292487A (ja) * | 2007-05-24 | 2008-12-04 | Dr Johannes Heidenhain Gmbh | 光学位置測定装置 |
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US20090316155A1 (en) | 2009-12-24 |
EP2051047A4 (en) | 2017-04-19 |
JPWO2008146409A1 (ja) | 2010-08-19 |
US8127993B2 (en) | 2012-03-06 |
WO2008146409A1 (ja) | 2008-12-04 |
EP2051047A1 (en) | 2009-04-22 |
EP2051047B1 (en) | 2019-12-25 |
CN101484780A (zh) | 2009-07-15 |
CN101484780B (zh) | 2011-07-06 |
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