DE10084864T1 - Verfahren und Struktur zum Fertigen von gehäusten Halbleiterbauelementen mit verbesserter Ausbeute - Google Patents

Verfahren und Struktur zum Fertigen von gehäusten Halbleiterbauelementen mit verbesserter Ausbeute

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Publication number
DE10084864T1
DE10084864T1 DE10084864T DE10084864T DE10084864T1 DE 10084864 T1 DE10084864 T1 DE 10084864T1 DE 10084864 T DE10084864 T DE 10084864T DE 10084864 T DE10084864 T DE 10084864T DE 10084864 T1 DE10084864 T1 DE 10084864T1
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Germany
Prior art keywords
semiconductor devices
packaged semiconductor
improved yield
manufacturing packaged
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10084864T
Other languages
English (en)
Inventor
Tongbi Jiang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micron Technology Inc
Original Assignee
Micron Technology Inc
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Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Publication of DE10084864T1 publication Critical patent/DE10084864T1/de
Ceased legal-status Critical Current

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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
DE10084864T 1999-07-30 2000-07-28 Verfahren und Struktur zum Fertigen von gehäusten Halbleiterbauelementen mit verbesserter Ausbeute Ceased DE10084864T1 (de)

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US09/365,356 US6774480B1 (en) 1999-07-30 1999-07-30 Method and structure for manufacturing improved yield semiconductor packaged devices
PCT/US2000/020583 WO2001009939A1 (en) 1999-07-30 2000-07-28 Method and structure for manufacturing improved yield semiconductor packaged devices

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Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6774480B1 (en) * 1999-07-30 2004-08-10 Micron Technology, Inc. Method and structure for manufacturing improved yield semiconductor packaged devices
DE10145468C1 (de) * 2001-09-14 2003-01-16 Infineon Technologies Ag Verfahren und Vorrichtung zum Befestigen von Halbleitereinrichtungen auf einer Schalteinrichtung
JP3645511B2 (ja) * 2001-10-09 2005-05-11 株式会社ルネサステクノロジ 半導体装置の製造方法
US6906425B2 (en) * 2002-03-05 2005-06-14 Resolution Performance Products Llc Attachment of surface mount devices to printed circuit boards using a thermoplastic adhesive
US20050042851A1 (en) * 2003-08-19 2005-02-24 Speed Tech Corp. Connector terminal device and its fabrication method
DE102004003275B4 (de) * 2004-01-21 2007-04-19 Infineon Technologies Ag Halbleiterbauteil mit Verbindungselementen auf Halbleiterchips und Verfahren zur Herstellung derselben
DE102005015036B4 (de) * 2004-07-19 2008-08-28 Qimonda Ag Verfahren zur Montage eines Chips auf einer Unterlage
DE102004037610B3 (de) * 2004-08-03 2006-03-16 Infineon Technologies Ag Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung
DE102006043215A1 (de) * 2006-09-11 2008-03-27 Qimonda Ag Verfahren zur koplanaren Montage eines Chips auf einer Unterlage und nach diesem Verfahren hergestellte Anordnung
SG148056A1 (en) * 2007-05-17 2008-12-31 Micron Technology Inc Integrated circuit packages, methods of forming integrated circuit packages, and methods of assembling intgrated circuit packages
JP5911264B2 (ja) * 2011-11-01 2016-04-27 キヤノン株式会社 液体吐出ヘッドの製造方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4796078A (en) 1987-06-15 1989-01-03 International Business Machines Corporation Peripheral/area wire bonding technique
JP2607605B2 (ja) 1988-03-26 1997-05-07 シチズン時計株式会社 樹脂封止型半導体装置
US5277972B1 (en) 1988-09-29 1996-11-05 Tomoegawa Paper Co Ltd Adhesive tapes
KR930009213B1 (ko) * 1988-09-29 1993-09-24 이노우에 다카오 접착 테이프
JP2668995B2 (ja) 1988-10-13 1997-10-27 日本電気株式会社 半導体装置
US5019535A (en) 1989-03-28 1991-05-28 General Electric Company Die attachment method using nonconductive adhesive for use in high density interconnected assemblies
US5122858A (en) 1990-09-10 1992-06-16 Olin Corporation Lead frame having polymer coated surface portions
US5086558A (en) * 1990-09-13 1992-02-11 International Business Machines Corporation Direct attachment of semiconductor chips to a substrate with a substrate with a thermoplastic interposer
US5852326A (en) * 1990-09-24 1998-12-22 Tessera, Inc. Face-up semiconductor chip assembly
US5866951A (en) * 1990-10-12 1999-02-02 Robert Bosch Gmbh Hybrid circuit with an electrically conductive adhesive
US5177032A (en) 1990-10-24 1993-01-05 Micron Technology, Inc. Method for attaching a semiconductor die to a leadframe using a thermoplastic covered carrier tape
JPH04199723A (ja) 1990-11-29 1992-07-20 Matsushita Electric Ind Co Ltd 半導体装置及び半導体装置の製造方法
JP3539742B2 (ja) 1992-08-03 2004-07-07 ソニーケミカル株式会社 粘着剤
JPH077121A (ja) * 1992-09-18 1995-01-10 Texas Instr Inc <Ti> 多層リードフレームアセンブリを有する半導体デバイスおよびそのパッケージ方法
US6169328B1 (en) * 1994-09-20 2001-01-02 Tessera, Inc Semiconductor chip assembly
US5915170A (en) * 1994-09-20 1999-06-22 Tessera, Inc. Multiple part compliant interface for packaging of a semiconductor chip and method therefor
US5548160A (en) 1994-11-14 1996-08-20 Micron Technology, Inc. Method and structure for attaching a semiconductor die to a lead frame
US6002167A (en) 1995-09-22 1999-12-14 Hitachi Cable, Ltd. Semiconductor device having lead on chip structure
JP3467611B2 (ja) * 1995-09-29 2003-11-17 日本テキサス・インスツルメンツ株式会社 半導体装置の製造方法
JP3176542B2 (ja) 1995-10-25 2001-06-18 シャープ株式会社 半導体装置及びその製造方法
EP0778616A3 (de) * 1995-12-05 1999-03-31 Lucent Technologies Inc. Verfahren zum Verpacken von Anordnungen mit einem Gel, begrenzt durch ein Randelement
US5714800A (en) * 1996-03-21 1998-02-03 Motorola, Inc. Integrated circuit assembly having a stepped interposer and method
US6022761A (en) * 1996-05-28 2000-02-08 Motorola, Inc. Method for coupling substrates and structure
US5943557A (en) 1996-09-25 1999-08-24 Micron Technology, Inc. Method and structure for attaching a semiconductor die to a lead frame
US5773113A (en) 1996-11-21 1998-06-30 Brady Precision Tape Co. Adhesive compositions for electronic applications
US5866949A (en) 1996-12-02 1999-02-02 Minnesota Mining And Manufacturing Company Chip scale ball grid array for integrated circuit packaging
US6294040B1 (en) * 1996-12-13 2001-09-25 Tessera, Inc. Transferable resilient element for packaging of a semiconductor chip and method therefor
US5840598A (en) 1997-08-14 1998-11-24 Micron Technology, Inc. LOC semiconductor assembled with room temperature adhesive
JP3638771B2 (ja) 1997-12-22 2005-04-13 沖電気工業株式会社 半導体装置
US6359334B1 (en) * 1999-06-08 2002-03-19 Micron Technology, Inc. Thermally conductive adhesive tape for semiconductor devices and method using the same
US6774480B1 (en) * 1999-07-30 2004-08-10 Micron Technology, Inc. Method and structure for manufacturing improved yield semiconductor packaged devices

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US6774480B1 (en) 2004-08-10
KR20020030087A (ko) 2002-04-22
US20050285279A1 (en) 2005-12-29
US6902956B2 (en) 2005-06-07
US20020013014A1 (en) 2002-01-31
KR100614431B1 (ko) 2006-08-23
EP1212791A4 (de) 2008-05-28
WO2001009939A1 (en) 2001-02-08
US6586277B2 (en) 2003-07-01
AU6387900A (en) 2001-02-19
JP2003506868A (ja) 2003-02-18
US7199463B2 (en) 2007-04-03
EP1212791A1 (de) 2002-06-12
US20020058358A1 (en) 2002-05-16

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