DE06014164T1 - Vorrichtung und Verfahren zur Kompensation und Bereitstellung eines nachgiebigen Bereichs für einen Prüfkopf - Google Patents

Vorrichtung und Verfahren zur Kompensation und Bereitstellung eines nachgiebigen Bereichs für einen Prüfkopf Download PDF

Info

Publication number
DE06014164T1
DE06014164T1 DE06014164T DE06014164T DE06014164T1 DE 06014164 T1 DE06014164 T1 DE 06014164T1 DE 06014164 T DE06014164 T DE 06014164T DE 06014164 T DE06014164 T DE 06014164T DE 06014164 T1 DE06014164 T1 DE 06014164T1
Authority
DE
Germany
Prior art keywords
load
force
lock
latch
following step
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE06014164T
Other languages
German (de)
English (en)
Inventor
Henri M. Akouka
Alyn R. Holt
Nil O. Ny
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InTest Corp
Original Assignee
InTest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InTest Corp filed Critical InTest Corp
Publication of DE06014164T1 publication Critical patent/DE06014164T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manipulator (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Cable Accessories (AREA)
DE06014164T 2000-09-22 2001-09-20 Vorrichtung und Verfahren zur Kompensation und Bereitstellung eines nachgiebigen Bereichs für einen Prüfkopf Pending DE06014164T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US23459800P 2000-09-22 2000-09-22
US234598P 2000-09-22
US30122801P 2001-06-27 2001-06-27
US301228P 2001-06-27

Publications (1)

Publication Number Publication Date
DE06014164T1 true DE06014164T1 (de) 2007-06-06

Family

ID=26928107

Family Applications (2)

Application Number Title Priority Date Filing Date
DE06014164T Pending DE06014164T1 (de) 2000-09-22 2001-09-20 Vorrichtung und Verfahren zur Kompensation und Bereitstellung eines nachgiebigen Bereichs für einen Prüfkopf
DE60122911T Expired - Lifetime DE60122911T2 (de) 2000-09-22 2001-09-20 Manipulator für einen testkopf mit aktiver nachgiebigkeit

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60122911T Expired - Lifetime DE60122911T2 (de) 2000-09-22 2001-09-20 Manipulator für einen testkopf mit aktiver nachgiebigkeit

Country Status (12)

Country Link
US (2) US7084358B2 (fr)
EP (1) EP1322965B1 (fr)
JP (1) JP2004523729A (fr)
KR (1) KR20030043966A (fr)
CN (2) CN101788643A (fr)
AT (1) ATE338952T1 (fr)
AU (1) AU2001291171A1 (fr)
DE (2) DE06014164T1 (fr)
HK (1) HK1095884A1 (fr)
MY (2) MY127154A (fr)
TW (1) TW515893B (fr)
WO (1) WO2002025292A2 (fr)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100383534C (zh) * 2002-10-02 2008-04-23 因泰斯特Ip公司 测试头定位装置
US7235964B2 (en) 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
EP1947466B1 (fr) * 2003-08-06 2012-07-04 inTEST Corporation Système de positionnement de la tête de test
SG137846A1 (en) * 2003-08-06 2007-12-28 Intest Corp Test head positioning system
DE102004018474A1 (de) * 2004-04-16 2005-11-10 Esmo Ag Manipulator
US7913971B2 (en) * 2005-04-29 2011-03-29 Cameron International Corporation Hydraulic override
US20070099555A1 (en) * 2005-11-03 2007-05-03 Beauchamp Dale A Pneumatic animal confinement house air inlet actuation system and method
DE102005057508B4 (de) * 2005-12-01 2011-11-17 Multitest Elektronische Systeme Gmbh Dockingvorrichtung zum Kuppeln einer Handhabungsvorrichtung mit einem Testkopf für elektronische Bauelemente
US7598725B2 (en) * 2005-12-30 2009-10-06 Teradyne, Inc. Alignment receptacle of a sensor adapted to interact with a pin to generate position data along at least two transverse axes for docking a test head
TWI490513B (zh) * 2006-12-29 2015-07-01 Intest Corp 用於使負載沿平移軸線平移之負載定位系統以及使負載達到平衡之方法
WO2008085463A1 (fr) * 2006-12-29 2008-07-17 In Test Corporation Système et procédé de positionnement de tête d'essai
US9889239B2 (en) 2007-03-23 2018-02-13 Allegiance Corporation Fluid collection and disposal system and related methods
CN101765465A (zh) 2007-03-23 2010-06-30 忠诚股份有限公司 流体收集和处理系统及相关方法
US8460256B2 (en) * 2009-07-15 2013-06-11 Allegiance Corporation Collapsible fluid collection and disposal system and related methods
JP5427343B2 (ja) * 2007-04-20 2014-02-26 任天堂株式会社 ゲームコントローラ
EP2150823A4 (fr) * 2007-05-07 2016-12-21 Intest Corp Arceau et système de manipulation de câble pour un manipulateur de tête d'essai
US7602562B2 (en) 2007-05-21 2009-10-13 Electro Scientific Industries, Inc. Fluid counterbalance for a laser lens used to scribe an electronic component substrate
FR2931451B1 (fr) * 2008-05-22 2010-12-17 Fmc Technologies Sa Dispositif de commande pour systeme de chargement et/ou dechargement de fluides
CN101987448B (zh) * 2009-08-07 2012-09-05 坤霖精密有限公司 自动送料机的改进型输送臂超负荷机构
US8408082B2 (en) * 2009-11-18 2013-04-02 General Electric Company Apparatus to measure fluids in a conduit
EP2732298A1 (fr) 2011-07-12 2014-05-21 Intest Corporation Procédé et appareil pour connecter une tête d'essai à un périphérique
JP5221719B2 (ja) * 2011-08-18 2013-06-26 ファナック株式会社 エアバランスを利用して退避動作を行う位置決め装置
DE102014207457A1 (de) 2014-04-08 2015-10-08 Siemens Aktiengesellschaft Anordnung, Prüfstand und Verfahren zur Prüfung eines Weichenantriebs
US9454911B2 (en) * 2014-07-30 2016-09-27 The Boeing Company Flight control test simulator system and method
US9506961B2 (en) 2014-12-04 2016-11-29 Chicony Power Technology Co., Ltd. Power supply detection apparatus and detecting method thereof
US10094854B2 (en) * 2015-10-23 2018-10-09 Teradyne, Inc. Manipulator in automatic test equipment
JP7199374B2 (ja) * 2017-04-19 2023-01-05 レニショウ パブリック リミテッド カンパニー 位置決め装置
CN108226647B (zh) * 2018-04-13 2024-05-24 南方电网科学研究院有限责任公司 一种对电力线接入点阻抗的测量装置
CN108548685B (zh) * 2018-04-26 2024-08-06 广东产品质量监督检验研究院（国家质量技术监督局广州电气安全检验所、广东省试验认证研究院、华安实验室） 基于机器人静态柔顺性测试装置的三轴六向测试加载方法
FR3080880B1 (fr) * 2018-05-04 2020-09-04 Safran Landing Systems Dispositif de verrouillage a verrou rotatif a commande impulsionnelle
KR102202035B1 (ko) * 2020-09-03 2021-01-12 주식회사 프로이천 오토 프로브장치
TWI737558B (zh) * 2020-12-25 2021-08-21 致茂電子股份有限公司 可自主補償測試頭與待測件間接觸界面平整度之電子元件檢測設備
US11498207B2 (en) 2021-01-08 2022-11-15 Teradyne, Inc. Test head manipulator configured to address uncontrolled test head rotation
CN114325325B (zh) * 2021-12-29 2023-12-01 日月新半导体(昆山)有限公司 用于测试集成电路产品的装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5149029A (en) * 1982-08-25 1992-09-22 Intest Corporation Electronic test head positioner for test systems
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
JPS61197079A (ja) * 1985-02-28 1986-09-01 Toyota Motor Corp 耐チツピング性塗膜及びその形成方法
US4696197A (en) 1986-04-11 1987-09-29 Lockheed Corporation System for counterbalancing tool mount loads in a machine tool
JP2578084B2 (ja) * 1986-11-25 1997-02-05 東京エレクトロン株式会社 ウエハプローバ
JP2514820B2 (ja) * 1986-11-25 1996-07-10 東京エレクトロン 株式会社 ウエハプロ−バ
US4893047A (en) * 1988-09-20 1990-01-09 Honda Electronic Co., Ltd. Ultrasonic driving device
JPH0785921B2 (ja) * 1991-07-15 1995-09-20 徳寿工業株式会社 被覆用断熱シート
JP2967798B2 (ja) * 1993-12-16 1999-10-25 株式会社東京精密 ウエハプローバ
US5606262A (en) * 1995-06-07 1997-02-25 Teradyne, Inc. Manipulator for automatic test equipment test head
CN2279238Y (zh) * 1996-10-17 1998-04-22 华南理工大学 封闭电流式开放功率型齿轮传动实验台
US6006616A (en) * 1997-07-11 1999-12-28 Credence Systems Corporation Semiconductor tester with power assist for vertical test head movement
US6271657B1 (en) * 1997-07-25 2001-08-07 Advantest Corporation Test head positioner for semiconductor device testing apparatus
US5949002A (en) 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance
MY144519A (en) * 2000-03-01 2011-09-30 Intest Corp Vertical counter balanced test head manipulator
CN100383534C (zh) * 2002-10-02 2008-04-23 因泰斯特Ip公司 测试头定位装置

Also Published As

Publication number Publication date
AU2001291171A1 (en) 2002-04-02
CN1484767A (zh) 2004-03-24
EP1322965B1 (fr) 2006-09-06
WO2002025292A2 (fr) 2002-03-28
EP1322965A2 (fr) 2003-07-02
US7084358B2 (en) 2006-08-01
US20050020402A1 (en) 2005-01-27
CN101788643A (zh) 2010-07-28
DE60122911T2 (de) 2007-02-22
ATE338952T1 (de) 2006-09-15
CN1306277C (zh) 2007-03-21
US20060156836A1 (en) 2006-07-20
WO2002025292A3 (fr) 2002-10-03
MY127154A (en) 2006-11-30
US7340972B2 (en) 2008-03-11
WO2002025292B1 (fr) 2003-02-20
MY147595A (en) 2012-12-31
JP2004523729A (ja) 2004-08-05
TW515893B (en) 2003-01-01
DE60122911D1 (de) 2006-10-19
HK1095884A1 (en) 2007-05-18
KR20030043966A (ko) 2003-06-02

Similar Documents

Publication Publication Date Title
DE06014164T1 (de) Vorrichtung und Verfahren zur Kompensation und Bereitstellung eines nachgiebigen Bereichs für einen Prüfkopf
DE4207661C2 (de) Meßvorrichtung für die Form oder die Position eines Objekts
EP0655617B1 (fr) Banc d'essai pour véhicules avec un capteur de couple dans un rouleau
DE102013101375B4 (de) Gelenkwellen-Auswuchtmaschine und Auswuchtverfahren
DE60110387T2 (de) Rollenprüfstand und verfahren zum prüfen von fahrzeugen
DE2248967A1 (de) Dreiachsige pruefeinrichtung
DE102009025481A1 (de) Verfahren und Vorrichtung zur quantitativen Ermittlung des Unwuchtzustandes sowie Verfahren zur Ermittlung des Einspannzustandes von Werkstücken
CN208744876U (zh) 机器人轨迹测试机构
CN107036963A (zh) 工程机械液压缸及导轨的摩擦特性测试装置及测试方法
DE4400520C1 (de) Prüfstand zur Durchführung von Wechselbiegeversuchen an flexiblen Versorgungsleitungen
Acosta et al. A robotic manipulator for the characterization of two-dimensional dynamic stiffness using stochastic displacement perturbations
WO2020200717A1 (fr) Détermination d'un paramètre d'une force agissant sur un robot
CN100582786C (zh) 用于具有主动柔顺性的测试头的操纵器
EP3335024B1 (fr) Systeme et procede de surveillance de la charge sur les paliers de ligne d'arbre d'un bateau et bateau
CN106767255A (zh) 一种汽车底盘综合检具装置及其作业方法
CN206269703U (zh) 一种汽车底盘综合检具装置
DE69737587T2 (de) Drehmomentmessvorrichtung für Flügelrad
CN110455513B (zh) 转台试验装置及系统
DE19939549A1 (de) Prufstand zum Messen der Beulsteifigkeit von Bauteilen
DE102005028915A1 (de) Verfahren zum Schätzen des Schneidwiderstands eines Bearbeitungswerkzeugs einer Parallelkinematikvorrichtung
DE102004004300B4 (de) Bildgebendes Tomographie-Gerät mit Auswuchtvorrichtung
EP1231457B1 (fr) Procédé et dispositif de calibrage d'un dispositif de mesure de balourd
DE4305914C1 (de) Brems- und/oder Treibdynamometer mit Erfassung der Querkraft
DE10056956A1 (de) Verfahren zum Beurteilen einer exzentrischen Stellung eines Beschleunigungssensors und Beschleunigungserzeugungsvorrichtung mit einer Exzentrizitätseinstelleinrichtung
DE102020206568A1 (de) Programmiersystem zum handgeführten Programmieren einer Bewegung eines Industrieroboters, Industrieroboter mit einem solchen Programmiersystem und Verfahren zum handgeführten Programmieren einer Bewegung eines Industrieroboters