CN1808686B - 紫外线照射装置 - Google Patents

紫外线照射装置 Download PDF

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Publication number
CN1808686B
CN1808686B CN2006100064333A CN200610006433A CN1808686B CN 1808686 B CN1808686 B CN 1808686B CN 2006100064333 A CN2006100064333 A CN 2006100064333A CN 200610006433 A CN200610006433 A CN 200610006433A CN 1808686 B CN1808686 B CN 1808686B
Authority
CN
China
Prior art keywords
light
excimer lamp
ultraviolet irradiation
electrode
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2006100064333A
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English (en)
Chinese (zh)
Other versions
CN1808686A (zh
Inventor
广濑贤一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of CN1808686A publication Critical patent/CN1808686A/zh
Application granted granted Critical
Publication of CN1808686B publication Critical patent/CN1808686B/zh
Active legal-status Critical Current
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/26—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC
    • H05B41/28—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC using static converters
    • H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/36—Controlling

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
CN2006100064333A 2005-01-20 2006-01-20 紫外线照射装置 Active CN1808686B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP013232/2005 2005-01-20
JP2005013232A JP4595556B2 (ja) 2005-01-20 2005-01-20 紫外線照射装置

Publications (2)

Publication Number Publication Date
CN1808686A CN1808686A (zh) 2006-07-26
CN1808686B true CN1808686B (zh) 2011-04-27

Family

ID=36840497

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006100064333A Active CN1808686B (zh) 2005-01-20 2006-01-20 紫外线照射装置

Country Status (4)

Country Link
JP (1) JP4595556B2 (enExample)
KR (1) KR100931764B1 (enExample)
CN (1) CN1808686B (enExample)
TW (1) TW200627505A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2071161B1 (en) 2006-07-25 2011-12-28 Yamaha Hatsudoki Kabushiki Kaisha Four-cycle internal combustion engine
TWI441236B (zh) 2007-08-09 2014-06-11 Harison Toshiba Lighting Corp Ultraviolet radiation device
JP5045945B2 (ja) * 2008-10-01 2012-10-10 ウシオ電機株式会社 エキシマランプ装置
JP5424616B2 (ja) * 2008-11-11 2014-02-26 タツモ株式会社 エキシマ照射装置
JP5471514B2 (ja) * 2010-01-28 2014-04-16 ウシオ電機株式会社 光処理装置
JP5898891B2 (ja) * 2011-09-13 2016-04-06 浜松ホトニクス株式会社 発光装置
JP5741603B2 (ja) * 2013-01-30 2015-07-01 ウシオ電機株式会社 エキシマランプ
CN111744026B (zh) * 2019-03-29 2023-08-18 东芝照明技术株式会社 紫外线放射装置以及照明装置
KR102207676B1 (ko) * 2019-04-24 2021-01-26 주식회사 원익큐엔씨 임플란트 표면개질 처리용 자외선 램프
JP7462524B2 (ja) * 2020-09-17 2024-04-05 株式会社オーク製作所 エキシマランプ、紫外線照射装置およびオゾン発生装置
KR102657557B1 (ko) * 2021-09-23 2024-04-15 (주)선재하이테크 엑시머 램프를 이용한 정전기 제거장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6657384B1 (en) * 2000-02-16 2003-12-02 Hoya-Schott Corporation Apparatus for measuring light intensity of excimer lamp

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3127750B2 (ja) * 1994-10-25 2001-01-29 ウシオ電機株式会社 誘電体バリア放電ランプ装置
JP2001185089A (ja) * 1999-12-28 2001-07-06 Quark Systems Co Ltd エキシマ照射装置
JP2001084966A (ja) * 1999-09-14 2001-03-30 Toshiba Lighting & Technology Corp 誘電体バリヤ放電ランプ，誘電体バリヤ放電ランプ点灯装置および紫外線照射装置
TW200501194A (en) * 2003-05-19 2005-01-01 Ushio Electric Inc Excimer lamp lighting device
JP2005005258A (ja) * 2003-05-19 2005-01-06 Ushio Inc エキシマランプ発光装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6657384B1 (en) * 2000-02-16 2003-12-02 Hoya-Schott Corporation Apparatus for measuring light intensity of excimer lamp

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
JP 特开2005-5258 A,说明书第二页10段、第三页11段，附图1－3.
JP特开2000-193799A 2000.07.14
JP特开2001-84966A 2001.03.30
JP特许2854255B9 1998.11.20

Also Published As

Publication number Publication date
TWI377594B (enExample) 2012-11-21
JP2006202614A (ja) 2006-08-03
CN1808686A (zh) 2006-07-26
TW200627505A (en) 2006-08-01
KR100931764B1 (ko) 2009-12-14
JP4595556B2 (ja) 2010-12-08
KR20060084782A (ko) 2006-07-25

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