KR100931764B1 - 자외선 조사 장치 - Google Patents
자외선 조사 장치 Download PDFInfo
- Publication number
- KR100931764B1 KR100931764B1 KR1020050110701A KR20050110701A KR100931764B1 KR 100931764 B1 KR100931764 B1 KR 100931764B1 KR 1020050110701 A KR1020050110701 A KR 1020050110701A KR 20050110701 A KR20050110701 A KR 20050110701A KR 100931764 B1 KR100931764 B1 KR 100931764B1
- Authority
- KR
- South Korea
- Prior art keywords
- excimer lamp
- light
- ultraviolet irradiation
- irradiation device
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/26—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC
- H05B41/28—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC using static converters
- H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from DC by means of a converter, e.g. by high-voltage DC using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/36—Controlling
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2005-00013232 | 2005-01-20 | ||
| JP2005013232A JP4595556B2 (ja) | 2005-01-20 | 2005-01-20 | 紫外線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20060084782A KR20060084782A (ko) | 2006-07-25 |
| KR100931764B1 true KR100931764B1 (ko) | 2009-12-14 |
Family
ID=36840497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020050110701A Expired - Lifetime KR100931764B1 (ko) | 2005-01-20 | 2005-11-18 | 자외선 조사 장치 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4595556B2 (enExample) |
| KR (1) | KR100931764B1 (enExample) |
| CN (1) | CN1808686B (enExample) |
| TW (1) | TW200627505A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104919566B (zh) * | 2013-01-30 | 2016-12-28 | 优志旺电机株式会社 | 准分子灯 |
| KR20200124488A (ko) * | 2019-04-24 | 2020-11-03 | 주식회사 원익큐엔씨 | 임플란트 표면개질 처리용 자외선 램프 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2071161B1 (en) | 2006-07-25 | 2011-12-28 | Yamaha Hatsudoki Kabushiki Kaisha | Four-cycle internal combustion engine |
| TWI441236B (zh) | 2007-08-09 | 2014-06-11 | Harison Toshiba Lighting Corp | Ultraviolet radiation device |
| JP5045945B2 (ja) * | 2008-10-01 | 2012-10-10 | ウシオ電機株式会社 | エキシマランプ装置 |
| JP5424616B2 (ja) * | 2008-11-11 | 2014-02-26 | タツモ株式会社 | エキシマ照射装置 |
| JP5471514B2 (ja) * | 2010-01-28 | 2014-04-16 | ウシオ電機株式会社 | 光処理装置 |
| JP5898891B2 (ja) * | 2011-09-13 | 2016-04-06 | 浜松ホトニクス株式会社 | 発光装置 |
| CN111744026B (zh) * | 2019-03-29 | 2023-08-18 | 东芝照明技术株式会社 | 紫外线放射装置以及照明装置 |
| JP7462524B2 (ja) * | 2020-09-17 | 2024-04-05 | 株式会社オーク製作所 | エキシマランプ、紫外線照射装置およびオゾン発生装置 |
| KR102657557B1 (ko) * | 2021-09-23 | 2024-04-15 | (주)선재하이테크 | 엑시머 램프를 이용한 정전기 제거장치 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010066924A (ko) * | 1999-12-28 | 2001-07-11 | 나카무라 마사루 | 엑시머 조사 장치 |
| KR20040100998A (ko) * | 2003-05-19 | 2004-12-02 | 우시오덴키 가부시키가이샤 | 엑시머 램프 발광 장치 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3127750B2 (ja) * | 1994-10-25 | 2001-01-29 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
| JP2001084966A (ja) * | 1999-09-14 | 2001-03-30 | Toshiba Lighting & Technology Corp | 誘電体バリヤ放電ランプ,誘電体バリヤ放電ランプ点灯装置および紫外線照射装置 |
| JP3683461B2 (ja) * | 2000-02-16 | 2005-08-17 | Hoya Candeo Optronics株式会社 | キセノンエキシマランプの光強度測定装置 |
| JP2005005258A (ja) * | 2003-05-19 | 2005-01-06 | Ushio Inc | エキシマランプ発光装置 |
-
2005
- 2005-01-20 JP JP2005013232A patent/JP4595556B2/ja not_active Expired - Lifetime
- 2005-10-18 TW TW094136348A patent/TW200627505A/zh unknown
- 2005-11-18 KR KR1020050110701A patent/KR100931764B1/ko not_active Expired - Lifetime
-
2006
- 2006-01-20 CN CN2006100064333A patent/CN1808686B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010066924A (ko) * | 1999-12-28 | 2001-07-11 | 나카무라 마사루 | 엑시머 조사 장치 |
| KR20040100998A (ko) * | 2003-05-19 | 2004-12-02 | 우시오덴키 가부시키가이샤 | 엑시머 램프 발광 장치 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104919566B (zh) * | 2013-01-30 | 2016-12-28 | 优志旺电机株式会社 | 准分子灯 |
| KR20200124488A (ko) * | 2019-04-24 | 2020-11-03 | 주식회사 원익큐엔씨 | 임플란트 표면개질 처리용 자외선 램프 |
| KR102207676B1 (ko) | 2019-04-24 | 2021-01-26 | 주식회사 원익큐엔씨 | 임플란트 표면개질 처리용 자외선 램프 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI377594B (enExample) | 2012-11-21 |
| JP2006202614A (ja) | 2006-08-03 |
| CN1808686A (zh) | 2006-07-26 |
| TW200627505A (en) | 2006-08-01 |
| CN1808686B (zh) | 2011-04-27 |
| JP4595556B2 (ja) | 2010-12-08 |
| KR20060084782A (ko) | 2006-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100931764B1 (ko) | 자외선 조사 장치 | |
| JP5591305B2 (ja) | 紫外線発光モジュール及び紫外線照射装置 | |
| JP5307029B2 (ja) | 放電ランプ | |
| JP5126035B2 (ja) | ランプユニットおよび光センサ | |
| KR20060049169A (ko) | 엑시머 램프 기구 | |
| TWI423298B (zh) | An excimer lamp and a method for manufacturing the excimer lamp | |
| KR100945970B1 (ko) | 플라즈마 발생 장치 및 이를 이용한 소재 처리 장치 | |
| KR20100045970A (ko) | 형광등 호환형 led 조명 장치 | |
| JP5408499B2 (ja) | 光照射装置 | |
| JP4311266B2 (ja) | エキシマランプおよび紫外線照射装置 | |
| JP2004097986A (ja) | 紫外線照射装置 | |
| KR100891243B1 (ko) | 엑시머 램프 장치 | |
| JP4647566B2 (ja) | プラズマ発生装置およびそれを用いるワーク処理装置 | |
| JP4811135B2 (ja) | 紫外光放射装置 | |
| JP2009252546A (ja) | 紫外線用放電ランプおよびこれを備えたランプユニット | |
| JP2005243797A (ja) | 光エネルギー照射装置 | |
| KR100822489B1 (ko) | 유전체 배리어 방전 램프 및 자외선 조사장치 | |
| KR100717704B1 (ko) | 유전체 배리어 방전 램프 | |
| JP3127750B2 (ja) | 誘電体バリア放電ランプ装置 | |
| JP4066693B2 (ja) | 真空紫外光照射装置 | |
| KR101216315B1 (ko) | 엑시머 램프 | |
| JP2017173167A (ja) | 紫外線照射装置及び紫外線検出方法 | |
| JP5093176B2 (ja) | エキシマランプ装置 | |
| JP2005285349A (ja) | マイクロ波無電極放電ランプ装置 | |
| JP2000111156A (ja) | 流体加熱装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
St.27 status event code: A-0-1-A10-A12-nap-PA0109 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| AMND | Amendment | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
St.27 status event code: N-2-6-B10-B15-exm-PE0601 |
|
| T11-X000 | Administrative time limit extension requested |
St.27 status event code: U-3-3-T10-T11-oth-X000 |
|
| AMND | Amendment | ||
| J201 | Request for trial against refusal decision | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PJ0201 | Trial against decision of rejection |
St.27 status event code: A-3-3-V10-V11-apl-PJ0201 |
|
| PB0901 | Examination by re-examination before a trial |
St.27 status event code: A-6-3-E10-E12-rex-PB0901 |
|
| B701 | Decision to grant | ||
| PB0701 | Decision of registration after re-examination before a trial |
St.27 status event code: A-3-4-F10-F13-rex-PB0701 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U11-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| PN2301 | Change of applicant |
St.27 status event code: A-5-5-R10-R13-asn-PN2301 St.27 status event code: A-5-5-R10-R11-asn-PN2301 |
|
| FPAY | Annual fee payment |
Payment date: 20121121 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4 |
|
| FPAY | Annual fee payment |
Payment date: 20131118 Year of fee payment: 5 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 5 |
|
| FPAY | Annual fee payment |
Payment date: 20141120 Year of fee payment: 6 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 6 |
|
| FPAY | Annual fee payment |
Payment date: 20151118 Year of fee payment: 7 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 7 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |
|
| FPAY | Annual fee payment |
Payment date: 20161123 Year of fee payment: 8 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 8 |
|
| FPAY | Annual fee payment |
Payment date: 20171117 Year of fee payment: 9 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 9 |
|
| FPAY | Annual fee payment |
Payment date: 20181115 Year of fee payment: 10 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 10 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 11 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 12 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 13 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 14 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 15 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 16 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |