CN1685488A - 包含薄膜晶体管的电子器件的制造方法 - Google Patents
包含薄膜晶体管的电子器件的制造方法 Download PDFInfo
- Publication number
- CN1685488A CN1685488A CNA038229331A CN03822933A CN1685488A CN 1685488 A CN1685488 A CN 1685488A CN A038229331 A CNA038229331 A CN A038229331A CN 03822933 A CN03822933 A CN 03822933A CN 1685488 A CN1685488 A CN 1685488A
- Authority
- CN
- China
- Prior art keywords
- layer
- semiconductor layer
- electrode
- semiconductor
- hydrogeneous
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000010409 thin film Substances 0.000 title claims abstract description 10
- 239000004065 semiconductor Substances 0.000 claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 38
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 28
- 239000001257 hydrogen Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 27
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 27
- 238000009413 insulation Methods 0.000 claims description 21
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 16
- 230000004888 barrier function Effects 0.000 claims description 3
- 238000005984 hydrogenation reaction Methods 0.000 abstract description 27
- 229920000307 polymer substrate Polymers 0.000 abstract description 12
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 238000002425 crystallisation Methods 0.000 abstract description 2
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 25
- 229920005591 polysilicon Polymers 0.000 description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 239000004020 conductor Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 11
- 239000011159 matrix material Substances 0.000 description 11
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78675—Polycrystalline or microcrystalline silicon transistor with normal-type structure, e.g. with top gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78678—Polycrystalline or microcrystalline silicon transistor with inverted-type structure, e.g. with bottom gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0222450.9 | 2002-09-27 | ||
GBGB0222450.9A GB0222450D0 (en) | 2002-09-27 | 2002-09-27 | Method of manufacturing an electronic device comprising a thin film transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1685488A true CN1685488A (zh) | 2005-10-19 |
CN100350576C CN100350576C (zh) | 2007-11-21 |
Family
ID=9944867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038229331A Expired - Fee Related CN100350576C (zh) | 2002-09-27 | 2003-09-12 | 包含薄膜晶体管的电子器件的制造方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7368751B2 (zh) |
EP (1) | EP1547140A1 (zh) |
JP (1) | JP4634147B2 (zh) |
KR (1) | KR101024192B1 (zh) |
CN (1) | CN100350576C (zh) |
AU (1) | AU2003259510A1 (zh) |
GB (1) | GB0222450D0 (zh) |
TW (1) | TW200419676A (zh) |
WO (1) | WO2004030074A1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101960571B (zh) * | 2008-03-06 | 2012-07-25 | 佳能株式会社 | 半导体元件的处理方法 |
CN103985637A (zh) * | 2014-04-30 | 2014-08-13 | 京东方科技集团股份有限公司 | 低温多晶硅薄膜晶体管及其制作方法和显示装置 |
WO2017124686A1 (zh) * | 2016-01-21 | 2017-07-27 | 武汉华星光电技术有限公司 | Tft阵列基板结构及其制作方法 |
CN107195636A (zh) * | 2017-05-12 | 2017-09-22 | 惠科股份有限公司 | 显示面板、显示面板的制程和显示装置 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100601950B1 (ko) * | 2004-04-08 | 2006-07-14 | 삼성전자주식회사 | 전자소자 및 그 제조방법 |
TWI246199B (en) | 2004-07-09 | 2005-12-21 | Au Optronics Corp | Semiconductor device and LTPS-TFT within and method of making the semiconductor device |
CN100350629C (zh) * | 2004-07-14 | 2007-11-21 | 友达光电股份有限公司 | 半导体元件与其中的多晶硅薄膜晶体管及其制造方法 |
TWI312545B (en) * | 2004-10-22 | 2009-07-21 | Ind Tech Res Inst | Method of enhancing laser crystallization for poly-silicon fabrication |
KR100646937B1 (ko) * | 2005-08-22 | 2006-11-23 | 삼성에스디아이 주식회사 | 다결정 실리콘 박막트랜지스터 및 그 제조방법 |
KR20070071968A (ko) * | 2005-12-30 | 2007-07-04 | 삼성전자주식회사 | 다결정 실리콘 필름 제조방법 및 이를 적용한 박막트랜지스터의 제조방법 |
US9048180B2 (en) * | 2006-05-16 | 2015-06-02 | Texas Instruments Incorporated | Low stress sacrificial cap layer |
CN101681928B (zh) * | 2007-05-31 | 2012-08-29 | 佳能株式会社 | 使用氧化物半导体的薄膜晶体管的制造方法 |
US8586189B2 (en) * | 2007-09-19 | 2013-11-19 | Fujifilm Corporation | Gas-barrier film and organic device comprising same |
KR101406889B1 (ko) | 2007-12-24 | 2014-06-13 | 삼성디스플레이 주식회사 | 박막트랜지스터 및 그의 제조 방법 |
WO2011052413A1 (en) * | 2009-10-30 | 2011-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Non-linear element, display device, and electronic device |
TWI422035B (zh) * | 2009-12-22 | 2014-01-01 | Au Optronics Corp | 半導體元件結構及其製造方法 |
JP6537341B2 (ja) * | 2014-05-07 | 2019-07-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US644507A (en) * | 1899-12-05 | 1900-02-27 | Bernhardt Eba | Bone-black retort. |
US5753542A (en) * | 1985-08-02 | 1998-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for crystallizing semiconductor material without exposing it to air |
US4692344A (en) * | 1986-02-28 | 1987-09-08 | Rca Corporation | Method of forming a dielectric film and semiconductor device including said film |
JPH03293719A (ja) * | 1990-04-11 | 1991-12-25 | Seiko Epson Corp | 結晶性半導体薄膜の製造方法 |
WO1992014268A1 (en) * | 1991-01-30 | 1992-08-20 | Minnesota Mining And Manufacturing Company | Polysilicon thin film transistor |
US5946561A (en) * | 1991-03-18 | 1999-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for forming the same |
JPH0555521A (ja) * | 1991-08-26 | 1993-03-05 | Sony Corp | 半導体装置の製法 |
JP3019885B2 (ja) * | 1991-11-25 | 2000-03-13 | カシオ計算機株式会社 | 電界効果型薄膜トランジスタの製造方法 |
US5250444A (en) * | 1992-02-21 | 1993-10-05 | North American Philips Corporation | Rapid plasma hydrogenation process for polysilicon MOSFETs |
JPH0645604A (ja) * | 1992-07-24 | 1994-02-18 | Fuji Xerox Co Ltd | 薄膜トランジスタ及びその製造方法 |
US5288645A (en) * | 1992-09-04 | 1994-02-22 | Mtm Engineering, Inc. | Hydrogen evolution analyzer |
JP2536426B2 (ja) * | 1993-09-21 | 1996-09-18 | 日本電気株式会社 | 半導体装置の製造方法 |
US5529951A (en) * | 1993-11-02 | 1996-06-25 | Sony Corporation | Method of forming polycrystalline silicon layer on substrate by large area excimer laser irradiation |
JP3254072B2 (ja) | 1994-02-15 | 2002-02-04 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US5620906A (en) * | 1994-02-28 | 1997-04-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing semiconductor device by introducing hydrogen ions |
JP3348531B2 (ja) * | 1994-07-08 | 2002-11-20 | ソニー株式会社 | 薄膜トランジスタの水素化方法および薄膜トランジスタの形成方法 |
JP3897826B2 (ja) * | 1994-08-19 | 2007-03-28 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型の表示装置 |
JP3478012B2 (ja) * | 1995-09-29 | 2003-12-10 | ソニー株式会社 | 薄膜半導体装置の製造方法 |
US6124154A (en) * | 1996-10-22 | 2000-09-26 | Seiko Epson Corporation | Fabrication process for thin film transistors in a display or electronic device |
US6444507B1 (en) * | 1996-10-22 | 2002-09-03 | Seiko Epson Corporation | Fabrication process for thin film transistors in a display or electronic device |
JP4174862B2 (ja) * | 1998-08-04 | 2008-11-05 | ソニー株式会社 | 薄膜トランジスタの製造方法および半導体装置の製造方法 |
JP2001093853A (ja) * | 1999-09-20 | 2001-04-06 | Sanyo Electric Co Ltd | 半導体装置および半導体装置の製造方法 |
-
2002
- 2002-09-27 GB GBGB0222450.9A patent/GB0222450D0/en not_active Ceased
-
2003
- 2003-09-12 CN CNB038229331A patent/CN100350576C/zh not_active Expired - Fee Related
- 2003-09-12 US US10/529,117 patent/US7368751B2/en not_active Expired - Fee Related
- 2003-09-12 KR KR1020057005165A patent/KR101024192B1/ko not_active IP Right Cessation
- 2003-09-12 WO PCT/IB2003/003986 patent/WO2004030074A1/en active Application Filing
- 2003-09-12 JP JP2004539297A patent/JP4634147B2/ja not_active Expired - Fee Related
- 2003-09-12 EP EP03798277A patent/EP1547140A1/en not_active Withdrawn
- 2003-09-12 AU AU2003259510A patent/AU2003259510A1/en not_active Abandoned
- 2003-09-24 TW TW092126330A patent/TW200419676A/zh unknown
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101960571B (zh) * | 2008-03-06 | 2012-07-25 | 佳能株式会社 | 半导体元件的处理方法 |
CN103985637A (zh) * | 2014-04-30 | 2014-08-13 | 京东方科技集团股份有限公司 | 低温多晶硅薄膜晶体管及其制作方法和显示装置 |
WO2015165164A1 (zh) * | 2014-04-30 | 2015-11-05 | 京东方科技集团股份有限公司 | 低温多晶硅薄膜晶体管及其制作方法、阵列基板和显示装置 |
CN103985637B (zh) * | 2014-04-30 | 2017-02-01 | 京东方科技集团股份有限公司 | 低温多晶硅薄膜晶体管及其制作方法和显示装置 |
US9882057B2 (en) | 2014-04-30 | 2018-01-30 | Boe Technology Group Co., Ltd. | Low temperature poly-silicon thin film transistor and manufacturing method thereof, array substrate and display device |
WO2017124686A1 (zh) * | 2016-01-21 | 2017-07-27 | 武汉华星光电技术有限公司 | Tft阵列基板结构及其制作方法 |
CN107195636A (zh) * | 2017-05-12 | 2017-09-22 | 惠科股份有限公司 | 显示面板、显示面板的制程和显示装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2004030074A1 (en) | 2004-04-08 |
US7368751B2 (en) | 2008-05-06 |
JP4634147B2 (ja) | 2011-02-16 |
CN100350576C (zh) | 2007-11-21 |
AU2003259510A1 (en) | 2004-04-19 |
TW200419676A (en) | 2004-10-01 |
GB0222450D0 (en) | 2002-11-06 |
US20050282316A1 (en) | 2005-12-22 |
JP2006500779A (ja) | 2006-01-05 |
EP1547140A1 (en) | 2005-06-29 |
KR101024192B1 (ko) | 2011-03-22 |
KR20050056217A (ko) | 2005-06-14 |
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