CN1682353A - 去除材料的系统和方法 - Google Patents

去除材料的系统和方法 Download PDF

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Publication number
CN1682353A
CN1682353A CN03822166.7A CN03822166A CN1682353A CN 1682353 A CN1682353 A CN 1682353A CN 03822166 A CN03822166 A CN 03822166A CN 1682353 A CN1682353 A CN 1682353A
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CN
China
Prior art keywords
plasma
oxygen
residue
photoresist
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN03822166.7A
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English (en)
Chinese (zh)
Inventor
勒内·乔治
约翰·扎贾克
丹尼尔·J·迪瓦恩
克雷格·兰夫特
安德烈亚斯·卡达瓦尼克
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Mattson Technology Inc
Original Assignee
Mattson Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mattson Technology Inc filed Critical Mattson Technology Inc
Publication of CN1682353A publication Critical patent/CN1682353A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means
    • H01L21/31138—Etching organic layers by chemical means by dry-etching

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN03822166.7A 2002-09-18 2003-09-16 去除材料的系统和方法 Pending CN1682353A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41206702P 2002-09-18 2002-09-18
US60/412,067 2002-09-18

Publications (1)

Publication Number Publication Date
CN1682353A true CN1682353A (zh) 2005-10-12

Family

ID=32030795

Family Applications (1)

Application Number Title Priority Date Filing Date
CN03822166.7A Pending CN1682353A (zh) 2002-09-18 2003-09-16 去除材料的系统和方法

Country Status (8)

Country Link
US (1) US20040084150A1 (enExample)
JP (1) JP2006507667A (enExample)
KR (1) KR20050044806A (enExample)
CN (1) CN1682353A (enExample)
AU (1) AU2003270735A1 (enExample)
DE (1) DE10393277T5 (enExample)
TW (1) TW200414279A (enExample)
WO (1) WO2004027826A2 (enExample)

Cited By (4)

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CN101101457B (zh) * 2006-07-04 2010-09-08 海力士半导体有限公司 移除光刻胶的方法
US8283242B2 (en) 2006-07-04 2012-10-09 Hynix Semiconductor Inc. Method of removing photoresist
CN104576309A (zh) * 2013-10-11 2015-04-29 中芯国际集成电路制造(上海)有限公司 从多芯片封装结构中获取底层芯片的方法
CN109698126A (zh) * 2018-12-24 2019-04-30 上海华力集成电路制造有限公司 改善硅针孔缺陷的方法

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US7083903B2 (en) * 2003-06-17 2006-08-01 Lam Research Corporation Methods of etching photoresist on substrates
US20060051965A1 (en) * 2004-09-07 2006-03-09 Lam Research Corporation Methods of etching photoresist on substrates
JP2006222156A (ja) 2005-02-08 2006-08-24 Toshiba Corp 有機膜加工方法
US7605063B2 (en) 2006-05-10 2009-10-20 Lam Research Corporation Photoresist stripping chamber and methods of etching photoresist on substrates
US20080102644A1 (en) * 2006-10-31 2008-05-01 Novellus Systems, Inc. Methods for removing photoresist from a semiconductor substrate
US8093157B2 (en) * 2007-07-03 2012-01-10 Mattson Technology, Inc. Advanced processing technique and system for preserving tungsten in a device structure
US7723240B2 (en) * 2008-05-15 2010-05-25 Macronix International Co., Ltd. Methods of low temperature oxidation
WO2011047179A2 (en) * 2009-10-14 2011-04-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Plasma ashing compounds and methods of use
JP5558200B2 (ja) * 2010-05-13 2014-07-23 シャープ株式会社 プラズマアッシング方法及びプラズマアッシング装置
KR20130141550A (ko) * 2010-10-27 2013-12-26 어플라이드 머티어리얼스, 인코포레이티드 포토레지스트 선폭 거칠기를 조절하기 위한 방법들 및 장치
US9805912B2 (en) * 2010-11-17 2017-10-31 Axcelis Technologies, Inc. Hydrogen COGas for carbon implant
US20130288469A1 (en) * 2012-04-27 2013-10-31 Applied Materials, Inc. Methods and apparatus for implanting a dopant material
US10256079B2 (en) * 2013-02-08 2019-04-09 Applied Materials, Inc. Semiconductor processing systems having multiple plasma configurations
US9017934B2 (en) 2013-03-08 2015-04-28 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist defect reduction system and method
US8932799B2 (en) 2013-03-12 2015-01-13 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist system and method
US9502231B2 (en) 2013-03-12 2016-11-22 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist layer and method
US9175173B2 (en) 2013-03-12 2015-11-03 Taiwan Semiconductor Manufacturing Company, Ltd. Unlocking layer and method
US9110376B2 (en) 2013-03-12 2015-08-18 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist system and method
US9256128B2 (en) 2013-03-12 2016-02-09 Taiwan Semiconductor Manufacturing Company, Ltd. Method for manufacturing semiconductor device
US9354521B2 (en) 2013-03-12 2016-05-31 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist system and method
US9245751B2 (en) 2013-03-12 2016-01-26 Taiwan Semiconductor Manufacturing Company, Ltd. Anti-reflective layer and method
US9543147B2 (en) 2013-03-12 2017-01-10 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist and method of manufacture
US9117881B2 (en) 2013-03-15 2015-08-25 Taiwan Semiconductor Manufacturing Company, Ltd. Conductive line system and process
US9341945B2 (en) 2013-08-22 2016-05-17 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist and method of formation and use
US10036953B2 (en) 2013-11-08 2018-07-31 Taiwan Semiconductor Manufacturing Company Photoresist system and method
US10095113B2 (en) 2013-12-06 2018-10-09 Taiwan Semiconductor Manufacturing Company Photoresist and method
US9761449B2 (en) 2013-12-30 2017-09-12 Taiwan Semiconductor Manufacturing Company, Ltd. Gap filling materials and methods
US9599896B2 (en) 2014-03-14 2017-03-21 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist system and method
US9581908B2 (en) 2014-05-16 2017-02-28 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist and method
US20150357203A1 (en) * 2014-06-05 2015-12-10 Macronix International Co., Ltd. Patterning method and patterning apparatus
US20160225652A1 (en) 2015-02-03 2016-08-04 Applied Materials, Inc. Low temperature chuck for plasma processing systems
US10599039B2 (en) 2016-09-14 2020-03-24 Mattson Technology, Inc. Strip process for high aspect ratio structure
US10403492B1 (en) * 2018-12-11 2019-09-03 Mattson Technology, Inc. Integration of materials removal and surface treatment in semiconductor device fabrication

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JPH0770524B2 (ja) * 1987-08-19 1995-07-31 富士通株式会社 半導体装置の製造方法
JPH0626201B2 (ja) * 1987-10-15 1994-04-06 富士通株式会社 半導体装置の製造方法
JP2541851B2 (ja) * 1989-03-10 1996-10-09 富士通株式会社 有機物の剥離方法
EP0809283A3 (en) * 1989-08-28 1998-02-25 Hitachi, Ltd. Method of treating wafers
WO1991010341A1 (en) * 1990-01-04 1991-07-11 Savas Stephen E A low frequency inductive rf plasma reactor
DE69130909T2 (de) * 1990-06-26 1999-06-24 Fujitsu Ltd., Kawasaki, Kanagawa Plasmabehandlungsverfahren eines Resists unter Verwendung von Wasserstoffgas
JP3391410B2 (ja) * 1993-09-17 2003-03-31 富士通株式会社 レジストマスクの除去方法
JPH08306668A (ja) * 1995-05-09 1996-11-22 Sony Corp アッシング方法
WO1999026277A1 (en) * 1997-11-17 1999-05-27 Mattson Technology, Inc. Systems and methods for plasma enhanced processing of semiconductor wafers
US6251771B1 (en) * 1998-02-23 2001-06-26 Texas Instruments Incorporated Hydrogen passivation of chemical-mechanically polished copper-containing layers
EP0940846A1 (en) * 1998-03-06 1999-09-08 Interuniversitair Micro-Elektronica Centrum Vzw Method for stripping ion implanted photoresist layer
US6277733B1 (en) * 1998-10-05 2001-08-21 Texas Instruments Incorporated Oxygen-free, dry plasma process for polymer removal
US6342446B1 (en) * 1998-10-06 2002-01-29 Texas Instruments Incorporated Plasma process for organic residue removal from copper
US6805139B1 (en) * 1999-10-20 2004-10-19 Mattson Technology, Inc. Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing
US6265320B1 (en) * 1999-12-21 2001-07-24 Novellus Systems, Inc. Method of minimizing reactive ion etch damage of organic insulating layers in semiconductor fabrication
US6426304B1 (en) * 2000-06-30 2002-07-30 Lam Research Corporation Post etch photoresist strip with hydrogen for organosilicate glass low-κ etch applications
US6524936B2 (en) * 2000-12-22 2003-02-25 Axcelis Technologies, Inc. Process for removal of photoresist after post ion implantation
US6620733B2 (en) * 2001-02-12 2003-09-16 Lam Research Corporation Use of hydrocarbon addition for the elimination of micromasking during etching of organic low-k dielectrics

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101101457B (zh) * 2006-07-04 2010-09-08 海力士半导体有限公司 移除光刻胶的方法
US8283242B2 (en) 2006-07-04 2012-10-09 Hynix Semiconductor Inc. Method of removing photoresist
CN104576309A (zh) * 2013-10-11 2015-04-29 中芯国际集成电路制造(上海)有限公司 从多芯片封装结构中获取底层芯片的方法
CN104576309B (zh) * 2013-10-11 2018-02-27 中芯国际集成电路制造(上海)有限公司 从多芯片封装结构中获取底层芯片的方法
CN109698126A (zh) * 2018-12-24 2019-04-30 上海华力集成电路制造有限公司 改善硅针孔缺陷的方法

Also Published As

Publication number Publication date
AU2003270735A1 (en) 2004-04-08
TW200414279A (en) 2004-08-01
US20040084150A1 (en) 2004-05-06
AU2003270735A8 (en) 2004-04-08
WO2004027826A2 (en) 2004-04-01
WO2004027826A3 (en) 2005-01-20
KR20050044806A (ko) 2005-05-12
JP2006507667A (ja) 2006-03-02
DE10393277T5 (de) 2005-09-01

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