CN1669665A - 细缝喷嘴和基板处理装置 - Google Patents
细缝喷嘴和基板处理装置 Download PDFInfo
- Publication number
- CN1669665A CN1669665A CNA2005100551715A CN200510055171A CN1669665A CN 1669665 A CN1669665 A CN 1669665A CN A2005100551715 A CNA2005100551715 A CN A2005100551715A CN 200510055171 A CN200510055171 A CN 200510055171A CN 1669665 A CN1669665 A CN 1669665A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- main part
- jet nozzle
- slit jet
- adjusting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims description 82
- 239000007788 liquid Substances 0.000 claims description 38
- 230000007246 mechanism Effects 0.000 claims description 30
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- 239000007921 spray Substances 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 description 10
- 230000003028 elevating effect Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
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- 238000012545 processing Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 108010022579 ATP dependent 26S protease Proteins 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- BGOFCVIGEYGEOF-UJPOAAIJSA-N helicin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC=CC=C1C=O BGOFCVIGEYGEOF-UJPOAAIJSA-N 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
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- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03D—WIND MOTORS
- F03D3/00—Wind motors with rotation axis substantially perpendicular to the air flow entering the rotor
- F03D3/04—Wind motors with rotation axis substantially perpendicular to the air flow entering the rotor having stationary wind-guiding means, e.g. with shrouds or channels
- F03D3/0436—Wind motors with rotation axis substantially perpendicular to the air flow entering the rotor having stationary wind-guiding means, e.g. with shrouds or channels for shielding one side of the rotor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03D—WIND MOTORS
- F03D3/00—Wind motors with rotation axis substantially perpendicular to the air flow entering the rotor
- F03D3/06—Rotors
- F03D3/062—Rotors characterised by their construction elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/20—Rotors
- F05B2240/21—Rotors for wind turbines
- F05B2240/211—Rotors for wind turbines with vertical axis
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/70—Wind energy
- Y02E10/74—Wind turbines with rotation axis perpendicular to the wind direction
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Materials For Photolithography (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004078145A JP4522726B2 (ja) | 2004-03-18 | 2004-03-18 | スリットノズルおよび基板処理装置 |
JP2004078145 | 2004-03-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1669665A true CN1669665A (zh) | 2005-09-21 |
CN100400180C CN100400180C (zh) | 2008-07-09 |
Family
ID=35041225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100551715A Active CN100400180C (zh) | 2004-03-18 | 2005-03-18 | 细缝喷嘴和基板处理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4522726B2 (zh) |
KR (1) | KR100676243B1 (zh) |
CN (1) | CN100400180C (zh) |
TW (1) | TWI259109B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105629530A (zh) * | 2016-01-19 | 2016-06-01 | 京东方科技集团股份有限公司 | 清洗装置及其使用方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4720096B2 (ja) * | 2004-04-02 | 2011-07-13 | コニカミノルタオプト株式会社 | スロットダイ、スロットダイのスロット間隙の調整方法及び光学フィルムの製造方法 |
JP5109689B2 (ja) * | 2008-01-30 | 2012-12-26 | 大日本印刷株式会社 | ヘッド検査洗浄装置、ヘッド検査洗浄方法 |
KR100969358B1 (ko) | 2008-06-30 | 2010-07-09 | 주식회사 디엠에스 | 슬릿 노즐 |
KR101066370B1 (ko) * | 2009-02-18 | 2011-09-20 | 김형섭 | 점성 액체 분사 장치 |
JP5154510B2 (ja) * | 2009-06-05 | 2013-02-27 | 東京エレクトロン株式会社 | プライミング処理方法及びプライミング処理装置 |
JP5803217B2 (ja) * | 2011-03-31 | 2015-11-04 | 大日本印刷株式会社 | ダイヘッドおよびダイヘッドのスリットの隙間の大きさの調整方法 |
JP5983477B2 (ja) * | 2013-03-18 | 2016-08-31 | 三菱マテリアル株式会社 | 塗布工具 |
JP6697645B1 (ja) * | 2020-03-19 | 2020-05-20 | 日東電工株式会社 | 押出方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07106332B2 (ja) * | 1988-08-23 | 1995-11-15 | 富士写真フイルム株式会社 | 塗布装置 |
JPH0725255Y2 (ja) * | 1989-10-16 | 1995-06-07 | 石川島播磨重工業株式会社 | カーテンコータ |
JP2961027B2 (ja) * | 1992-11-11 | 1999-10-12 | 三菱重工業株式会社 | 塗工液ノズル |
JP2512698B2 (ja) * | 1993-12-29 | 1996-07-03 | 中外炉工業株式会社 | 多層ダイコ―タ |
JP3386656B2 (ja) * | 1996-04-25 | 2003-03-17 | 大日本スクリーン製造株式会社 | 塗布液の乾燥防止方法及びその装置 |
JP3629358B2 (ja) * | 1997-11-28 | 2005-03-16 | 大日本スクリーン製造株式会社 | 処理液塗布装置 |
JPH11188301A (ja) * | 1997-12-26 | 1999-07-13 | Hirata Corp | 流体塗布装置 |
JP2002239436A (ja) * | 2001-02-15 | 2002-08-27 | Toray Ind Inc | 塗布装置 |
JP4315796B2 (ja) * | 2003-12-26 | 2009-08-19 | 大日本スクリーン製造株式会社 | スリットノズルおよび基板処理装置 |
-
2004
- 2004-03-18 JP JP2004078145A patent/JP4522726B2/ja not_active Expired - Lifetime
-
2005
- 2005-03-18 CN CNB2005100551715A patent/CN100400180C/zh active Active
- 2005-03-18 KR KR1020050022508A patent/KR100676243B1/ko active IP Right Grant
- 2005-03-18 TW TW094108423A patent/TWI259109B/zh active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105629530A (zh) * | 2016-01-19 | 2016-06-01 | 京东方科技集团股份有限公司 | 清洗装置及其使用方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100676243B1 (ko) | 2007-01-30 |
CN100400180C (zh) | 2008-07-09 |
KR20060044374A (ko) | 2006-05-16 |
JP4522726B2 (ja) | 2010-08-11 |
TW200602129A (en) | 2006-01-16 |
JP2005262084A (ja) | 2005-09-29 |
TWI259109B (en) | 2006-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kyoto City, Kyoto, Japan Patentee after: Skilling Group Address before: Kyoto City, Kyoto, Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto City, Kyoto, Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto City, Kyoto, Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |