CN1610843A - 双凸固体浸入式镜头 - Google Patents
双凸固体浸入式镜头 Download PDFInfo
- Publication number
- CN1610843A CN1610843A CNA028227859A CN02822785A CN1610843A CN 1610843 A CN1610843 A CN 1610843A CN A028227859 A CNA028227859 A CN A028227859A CN 02822785 A CN02822785 A CN 02822785A CN 1610843 A CN1610843 A CN 1610843A
- Authority
- CN
- China
- Prior art keywords
- immersion lens
- lens
- radius
- curvature
- immersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007654 immersion Methods 0.000 title claims abstract description 87
- 239000007787 solid Substances 0.000 title abstract description 28
- 239000010410 layer Substances 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000006117 anti-reflective coating Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 34
- 230000008878 coupling Effects 0.000 abstract description 13
- 238000010168 coupling process Methods 0.000 abstract description 13
- 238000005859 coupling reaction Methods 0.000 abstract description 13
- 239000004065 semiconductor Substances 0.000 abstract description 7
- 241000219739 Lens Species 0.000 description 108
- 239000000523 sample Substances 0.000 description 19
- 239000007788 liquid Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- 238000012360 testing method Methods 0.000 description 15
- 238000012545 processing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000004075 alteration Effects 0.000 description 7
- 230000008901 benefit Effects 0.000 description 7
- 230000001965 increasing effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000012530 fluid Substances 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000012634 optical imaging Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 206010010071 Coma Diseases 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000006059 cover glass Substances 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000010399 physical interaction Effects 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 241000287127 Passeridae Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1378—Separate aberration correction lenses; Cylindrical lenses to generate astigmatism; Beam expanders
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/052,011 US6594086B1 (en) | 2002-01-16 | 2002-01-16 | Bi-convex solid immersion lens |
| US10/052,011 | 2002-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1610843A true CN1610843A (zh) | 2005-04-27 |
Family
ID=21974831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA028227859A Pending CN1610843A (zh) | 2002-01-16 | 2002-12-11 | 双凸固体浸入式镜头 |
Country Status (9)
| Country | Link |
|---|---|
| US (4) | US6594086B1 (enExample) |
| EP (1) | EP1466194B1 (enExample) |
| JP (1) | JP4195921B2 (enExample) |
| KR (3) | KR100870214B1 (enExample) |
| CN (1) | CN1610843A (enExample) |
| AT (1) | ATE358826T1 (enExample) |
| DE (1) | DE60219360T2 (enExample) |
| TW (1) | TWI249622B (enExample) |
| WO (1) | WO2003062864A2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540408A (zh) * | 2011-12-26 | 2012-07-04 | 吉林大学 | 超半球型电光固浸透镜 |
| CN106471412A (zh) * | 2014-03-11 | 2017-03-01 | Dcg系统有限公司 | 自校准的悬浮固体浸没透镜端部 |
| CN113892042A (zh) * | 2019-01-14 | 2022-01-04 | 华盛顿大学 | 用于固体浸没弯月形透镜的设备、系统及方法 |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6594086B1 (en) * | 2002-01-16 | 2003-07-15 | Optonics, Inc. (A Credence Company) | Bi-convex solid immersion lens |
| US7426171B2 (en) * | 2002-11-18 | 2008-09-16 | Sony Corporation | Optical lens, condenser lens, optical pickup, and optical recording/reproducing apparatus |
| TWI269886B (en) * | 2003-03-20 | 2007-01-01 | Hamamatsu Photonics Kk | Microscope and specimen observation method |
| WO2004088386A1 (ja) * | 2003-03-20 | 2004-10-14 | Hamamatsu Photonics K.K. | 固浸レンズ、及びそれを用いた試料観察方法 |
| US7423816B2 (en) * | 2003-03-20 | 2008-09-09 | Hamamatsu Photonics K.K. | Solid immersion lens and microscope |
| EP1607786B1 (en) * | 2003-03-20 | 2012-09-05 | Hamamatsu Photonics K.K. | Microscope and sample observing method |
| DE10343722A1 (de) * | 2003-09-17 | 2005-04-14 | Carl Zeiss Jena Gmbh | Festkörper-Immersionslinsen-Spektroskopie und -Mikroskopie |
| US6961186B2 (en) * | 2003-09-26 | 2005-11-01 | Takumi Technology Corp. | Contact printing using a magnified mask image |
| US7042647B2 (en) * | 2003-10-02 | 2006-05-09 | Credence Systems Corporation | Scanning optical system |
| US7046418B2 (en) * | 2003-10-08 | 2006-05-16 | Gentex Corporation | Reversible electrodeposition devices and associated electrochemical media |
| US20050094258A1 (en) * | 2003-10-31 | 2005-05-05 | Hamamatsu Photonics K.K. | Solid immersion lens moving device and microscope using the same |
| US7576928B2 (en) * | 2003-10-31 | 2009-08-18 | Hamamatsu Photonics K.K. | Solid immersion lens holder |
| KR101110468B1 (ko) | 2003-10-31 | 2012-01-31 | 하마마츠 포토닉스 가부시키가이샤 | 시료 관찰 방법 및 현미경, 및 이것에 이용하는 고침 렌즈및 광학 밀착액 |
| JP4643994B2 (ja) * | 2005-01-19 | 2011-03-02 | 浜松ホトニクス株式会社 | 固浸レンズホルダ |
| US7312921B2 (en) * | 2004-02-27 | 2007-12-25 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| US7110172B2 (en) * | 2004-02-27 | 2006-09-19 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| JP4577023B2 (ja) * | 2004-03-15 | 2010-11-10 | ソニー株式会社 | ソリッドイマージョンレンズ、集光レンズ、光学ピックアップ装置、光記録再生装置及びソリッドイマージョンレンズの形成方法 |
| JP2006114196A (ja) * | 2004-09-14 | 2006-04-27 | Sony Corp | ソリッドイマージョンレンズとこれを用いた集光レンズ、光学ピックアップ装置、光記録再生装置及びソリッドイマージョンレンズの形成方法 |
| CN100359578C (zh) * | 2004-09-14 | 2008-01-02 | 索尼株式会社 | 固体浸没透镜以及制造该固体浸没透镜的方法 |
| JP2006112808A (ja) * | 2004-10-12 | 2006-04-27 | Fujikura Ltd | 表面プラズモンセンサー |
| US7314767B2 (en) * | 2005-05-27 | 2008-01-01 | Credence Systems Corporation | Method for local wafer thinning and reinforcement |
| US7659981B2 (en) * | 2005-08-26 | 2010-02-09 | Dcg Systems, Inc. | Apparatus and method for probing integrated circuits using polarization difference probing |
| US7616312B2 (en) | 2005-06-29 | 2009-11-10 | Dcg Systems, Inc. | Apparatus and method for probing integrated circuits using laser illumination |
| US7450245B2 (en) | 2005-06-29 | 2008-11-11 | Dcg Systems, Inc. | Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system |
| US7733100B2 (en) | 2005-08-26 | 2010-06-08 | Dcg Systems, Inc. | System and method for modulation mapping |
| JP5045148B2 (ja) * | 2006-04-27 | 2012-10-10 | セイコーエプソン株式会社 | プラスチック偏光レンズ |
| FR2902226B1 (fr) | 2006-06-12 | 2010-01-29 | Commissariat Energie Atomique | Composant optique fonctionnant en transmission en champ proche |
| US20070291361A1 (en) * | 2006-06-19 | 2007-12-20 | Credence Systems Corporation | Lens housing with integrated thermal management |
| CN101126491B (zh) * | 2006-08-18 | 2011-03-23 | 鸿富锦精密工业(深圳)有限公司 | 发光二极管模组 |
| US7660054B2 (en) * | 2007-06-29 | 2010-02-09 | Intel Corporation | Thermally controlled sold immersion lens fixture |
| US8424594B2 (en) * | 2007-12-10 | 2013-04-23 | Presto Engineering, Inc. | Apparatus for thermal control in the analysis of electronic devices |
| US8553322B2 (en) * | 2008-11-04 | 2013-10-08 | Dcg Systems, Inc. | Variable magnification optics with spray cooling |
| SG10201401887YA (en) | 2009-05-01 | 2014-06-27 | Dcg Systems Inc | Systems and method for laser voltage imaging state mapping |
| US8072699B2 (en) * | 2009-06-17 | 2011-12-06 | Semicaps Pte Ltd | Solid immersion lens optics assembly |
| US8767199B2 (en) * | 2010-10-15 | 2014-07-01 | Infrared Laboratories, Inc. | Inspection system utilizing solid immersion lenses |
| KR102102007B1 (ko) * | 2012-06-26 | 2020-04-20 | 케이엘에이 코포레이션 | 근접장 계측 |
| TWI512867B (zh) * | 2012-12-14 | 2015-12-11 | Yayatech Co Ltd | 晶圓切割道之檢測方法及其檢測治具 |
| US8873032B1 (en) | 2013-05-07 | 2014-10-28 | CheckPoint Technologies, LLC. | Optical probing system having reliable temperature control |
| US9030658B1 (en) | 2013-05-07 | 2015-05-12 | Checkpoint Technologies, Llc | Multi-resolution optical probing system having reliable temperature control and mechanical isolation |
| US9182580B1 (en) | 2013-08-30 | 2015-11-10 | Checkpoint Technologies, Llc | Optical probe system having accurate positional and orientational adjustments for multiple optical objectives |
| US9217855B1 (en) | 2013-08-30 | 2015-12-22 | Checkpoint Technologies, Llc | Multi-magnification high sensitivity optical system for probing electronic devices |
| KR102400976B1 (ko) * | 2014-09-26 | 2022-05-24 | 하마마츠 포토닉스 가부시키가이샤 | 고침 렌즈 홀더 및 화상 취득 장치 |
| US9417281B1 (en) | 2014-09-30 | 2016-08-16 | Checkpoint Technologies Llc | Adjustable split-beam optical probing (ASOP) |
| KR20170011708A (ko) * | 2015-07-24 | 2017-02-02 | 엘지전자 주식회사 | 광학 렌즈 및 이를 포함하는 백라이트 유닛과 디스플레이 디바이스 |
| KR102133320B1 (ko) * | 2015-10-09 | 2020-07-14 | 에이에스엠엘 네델란즈 비.브이. | 검사 및 계측을 위한 방법 및 장치 |
| GB201710324D0 (en) * | 2017-06-28 | 2017-08-09 | Lig Tech Ltd | Microsphere lens assembly |
| CN112384839B (zh) * | 2018-07-06 | 2022-10-28 | 奥林巴斯株式会社 | 物镜光学系统和内窥镜 |
| US11329722B2 (en) | 2020-03-27 | 2022-05-10 | Relative Dynamics Incorporated | Optical terminals |
| JP2022108161A (ja) * | 2021-01-12 | 2022-07-25 | 浜松ホトニクス株式会社 | 光学装置及び固浸レンズ |
| GB202301375D0 (en) * | 2023-01-31 | 2023-03-15 | Refeyn Ltd | Improvements in or relating to a flow device |
| CN119104882B (zh) * | 2024-11-08 | 2025-02-18 | 杭州芯海半导体技术有限公司 | 环境温度的调节方法、装置、电子设备及存储介质 |
Family Cites Families (62)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1002407A (en) * | 1911-01-30 | 1911-09-05 | Carl Kleinschmidt | Heating and ventilating system. |
| CH437995A (de) | 1963-11-01 | 1967-06-15 | Hoffmann La Roche | Verfahren zur Gewinnung von lipophile Substanzen enthaltenden Präparaten |
| DE1472167A1 (de) | 1965-11-26 | 1969-01-09 | Leitz Ernst Gmbh | Mikroskop-Immersionsobjektiv |
| US3436159A (en) | 1966-02-04 | 1969-04-01 | Bausch & Lomb | Internal reflection element for spectroscopy with film optical cavity to enhance absorption |
| DE1572072C3 (de) * | 1966-03-19 | 1974-02-28 | Kalle Ag, 6202 Wiesbaden-Biebrich | Wärmeentwicke lbares Diazotypiematerial |
| US3524691A (en) | 1968-03-18 | 1970-08-18 | Watson Mfg Co | File drawer |
| GB1281611A (en) | 1970-02-10 | 1972-07-12 | Vickers Ltd | Apochromatic microscope objectives |
| JPS5141355B2 (enExample) | 1973-02-08 | 1976-11-09 | ||
| US4002107A (en) | 1973-12-17 | 1977-01-11 | Caterpillar Tractor Co. | Disposable fluid actuator |
| JPS5410497B2 (enExample) | 1974-12-06 | 1979-05-07 | ||
| DE2848590A1 (de) | 1978-11-09 | 1980-05-22 | Leitz Ernst Gmbh | Optische anordnung zur reflexionsmikroskopischen untersuchung biologischer gewebe und organoberflaechen |
| DE3276485D1 (en) * | 1982-01-12 | 1987-07-09 | Asahi Chemical Ind | Process for producing higher dibasic acid dimethyl ester |
| FR2543075B1 (fr) * | 1983-03-23 | 1987-04-24 | Saint Gobain Vitrage | Vitrage pour toit panoramique |
| DD215640A1 (de) | 1983-05-02 | 1984-11-14 | Zeiss Jena Veb Carl | Frontlinsengruppe fuer immersionsmikroskopobjektiv in hd-ausfuehrung mit hoher apertur |
| US4625111A (en) * | 1985-02-04 | 1986-11-25 | Halliburton Company | Method and apparatus for pulsed neutron capture measurement of borehole conditions and formation hydrogen index |
| US4625114A (en) | 1985-07-15 | 1986-11-25 | At&T Technologies, Inc. | Method and apparatus for nondestructively determining the characteristics of a multilayer thin film structure |
| US5004307A (en) | 1990-04-12 | 1991-04-02 | The Board Of Trustees Of The Leland Stanford Junior University | Near field and solid immersion optical microscope |
| AU8633491A (en) * | 1990-08-23 | 1992-03-17 | Blue Water Holding Company, Inc. | Improvements to locking wrenches |
| US5208648A (en) | 1991-03-11 | 1993-05-04 | International Business Machines Corporation | Apparatus and a method for high numerical aperture microscopic examination of materials |
| US5220403A (en) | 1991-03-11 | 1993-06-15 | International Business Machines Corporation | Apparatus and a method for high numerical aperture microscopic examination of materials |
| US5125750A (en) * | 1991-03-14 | 1992-06-30 | The Board Of Trustees Of The Leland Stanford Junior University | Optical recording system employing a solid immersion lens |
| US5247392A (en) | 1991-05-21 | 1993-09-21 | Siemens Aktiengesellschaft | Objective lens for producing a radiation focus in the inside of a specimen |
| US5282088A (en) | 1992-10-19 | 1994-01-25 | Mark Davidson | Aplanatic microlens and method for making same |
| US5217392A (en) * | 1992-11-13 | 1993-06-08 | The Whitaker Corporation | Coaxial cable-to-cable splice connector |
| DE4244268A1 (de) * | 1992-12-28 | 1994-07-07 | Max Planck Gesellschaft | Hochauflösendes optisches System mit einer Tastspitze |
| US5475316A (en) | 1993-12-27 | 1995-12-12 | Hypervision, Inc. | Transportable image emission microscope |
| US5497359A (en) | 1994-08-30 | 1996-03-05 | National Business Machines Corporation | Optical disk data storage system with radiation-transparent air-bearing slider |
| US5948972A (en) | 1994-12-22 | 1999-09-07 | Kla-Tencor Corporation | Dual stage instrument for scanning a specimen |
| JPH08315404A (ja) | 1995-05-18 | 1996-11-29 | Sony Corp | 光学ピックアップ装置 |
| NZ500843A (en) | 1995-06-07 | 2002-03-28 | Invitrogen Corp | A method of DNA recombination which is selectable to select for cells containing a product and against cells only harbouring the insert donor |
| US5729393A (en) * | 1996-04-03 | 1998-03-17 | Digital Papyrus Corporation | Optical flying head with solid immersion lens having raised central surface facing medium |
| US6270696B1 (en) * | 1996-06-03 | 2001-08-07 | Terastor Corporation | Method of fabricating and integrating an optical assembly into a flying head |
| US5940545A (en) | 1996-07-18 | 1999-08-17 | International Business Machines Corporation | Noninvasive optical method for measuring internal switching and other dynamic parameters of CMOS circuits |
| US6591121B1 (en) | 1996-09-10 | 2003-07-08 | Xoetronics Llc | Measurement, data acquisition, and signal processing |
| US5910940A (en) | 1996-10-08 | 1999-06-08 | Polaroid Corporation | Storage medium having a layer of micro-optical lenses each lens generating an evanescent field |
| US5852232A (en) | 1997-01-02 | 1998-12-22 | Kla-Tencor Corporation | Acoustic sensor as proximity detector |
| JPH113534A (ja) | 1997-04-14 | 1999-01-06 | Toray Ind Inc | 光記録装置および光記録媒体 |
| EP0977192A4 (en) * | 1997-04-14 | 2000-11-15 | Toray Industries | OPTICAL RECORDING DEVICE AND OPTICAL RECORDING MEDIUM |
| US5939709A (en) * | 1997-06-19 | 1999-08-17 | Ghislain; Lucien P. | Scanning probe optical microscope using a solid immersion lens |
| WO1999018466A1 (en) * | 1997-10-06 | 1999-04-15 | Koninklijke Philips Electronics N.V. | Spherical-aberration detection system and optical device using the same |
| JPH11273132A (ja) * | 1998-03-25 | 1999-10-08 | Hitachi Ltd | 光ヘッド |
| US6441359B1 (en) * | 1998-10-20 | 2002-08-27 | The Board Of Trustees Of The Leland Stanford Junior University | Near field optical scanning system employing microfabricated solid immersion lens |
| JP2000171611A (ja) | 1998-12-04 | 2000-06-23 | Minolta Co Ltd | 固浸レンズ及び光ヘッド |
| US6252412B1 (en) | 1999-01-08 | 2001-06-26 | Schlumberger Technologies, Inc. | Method of detecting defects in patterned substrates |
| AU6952700A (en) | 1999-06-21 | 2001-01-09 | Trustees Of Boston University | Numerical aperture increasing lens (nail) techniques for high-resolution sub-surface imaging |
| JP2001034998A (ja) | 1999-07-26 | 2001-02-09 | Minolta Co Ltd | 光ヘッド及びその製造方法 |
| TW504582B (en) * | 1999-09-01 | 2002-10-01 | Konishiroku Photo Ind | Objective lens for pickup and light pickup apparatus |
| US6507433B2 (en) | 1999-10-08 | 2003-01-14 | Westover Scientific, Inc. | Method and apparatus for preventing application of excessive force between microscope objective and stage |
| US6462814B1 (en) | 2000-03-15 | 2002-10-08 | Schlumberger Technologies, Inc. | Beam delivery and imaging for optical probing of a device operating under electrical test |
| JP3887139B2 (ja) * | 2000-04-21 | 2007-02-28 | 株式会社日立製作所 | 対物レンズ、これを用いた光ヘッド |
| US6301055B1 (en) | 2000-08-16 | 2001-10-09 | California Institute Of Technology | Solid immersion lens structures and methods for producing solid immersion lens structures |
| HUP0303190A2 (hu) * | 2000-10-16 | 2003-12-29 | Konica Corporation | Tárgylencse, kapcsoló lencse, fénykonvergáló optikai rendszer és optikai felvevő-lejátszó eszköz |
| US6818907B2 (en) | 2000-10-17 | 2004-11-16 | The President And Fellows Of Harvard College | Surface plasmon enhanced illumination system |
| US6381081B1 (en) * | 2001-01-19 | 2002-04-30 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Flexure-ring for centering a concave lens in a bore of a housing for an optical system |
| JP2002236087A (ja) | 2001-02-08 | 2002-08-23 | Minolta Co Ltd | 光学系調整方法、並びにその光学系調整方法を利用した光記録再生装置、顕微鏡装置及び加工装置 |
| JP3712628B2 (ja) * | 2001-04-06 | 2005-11-02 | シャープ株式会社 | 対物レンズおよびその製造誤差の補正方法並びに該対物レンズを用いた光ピックアップ装置 |
| US6621275B2 (en) * | 2001-11-28 | 2003-09-16 | Optonics Inc. | Time resolved non-invasive diagnostics system |
| US6594086B1 (en) * | 2002-01-16 | 2003-07-15 | Optonics, Inc. (A Credence Company) | Bi-convex solid immersion lens |
| US6822800B2 (en) * | 2002-06-10 | 2004-11-23 | Pentax Corporation | Objective lens for optical pickup |
| US6683724B2 (en) | 2002-06-13 | 2004-01-27 | Eastman Kodak Company | Solid immersion lens array and methods for producing a solid immersion lens array |
| JP2004327773A (ja) * | 2003-04-25 | 2004-11-18 | Renesas Technology Corp | 故障解析装置 |
| US7576928B2 (en) | 2003-10-31 | 2009-08-18 | Hamamatsu Photonics K.K. | Solid immersion lens holder |
-
2002
- 2002-01-16 US US10/052,011 patent/US6594086B1/en not_active Expired - Lifetime
- 2002-12-11 WO PCT/US2002/039538 patent/WO2003062864A2/en not_active Ceased
- 2002-12-11 KR KR1020047007230A patent/KR100870214B1/ko not_active Expired - Fee Related
- 2002-12-11 KR KR1020077015713A patent/KR100872751B1/ko not_active Expired - Fee Related
- 2002-12-11 DE DE60219360T patent/DE60219360T2/de not_active Expired - Lifetime
- 2002-12-11 JP JP2003562674A patent/JP4195921B2/ja not_active Expired - Fee Related
- 2002-12-11 EP EP02806615A patent/EP1466194B1/en not_active Expired - Lifetime
- 2002-12-11 CN CNA028227859A patent/CN1610843A/zh active Pending
- 2002-12-11 AT AT02806615T patent/ATE358826T1/de not_active IP Right Cessation
- 2002-12-11 KR KR1020087015284A patent/KR20080064912A/ko not_active Ceased
- 2002-12-25 TW TW091137365A patent/TWI249622B/zh not_active IP Right Cessation
-
2003
- 2003-05-19 US US10/440,866 patent/US6778327B2/en not_active Expired - Lifetime
-
2004
- 2004-07-01 US US10/883,542 patent/US7227702B2/en not_active Expired - Lifetime
-
2007
- 2007-05-08 US US11/746,036 patent/US7492529B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540408A (zh) * | 2011-12-26 | 2012-07-04 | 吉林大学 | 超半球型电光固浸透镜 |
| CN106471412A (zh) * | 2014-03-11 | 2017-03-01 | Dcg系统有限公司 | 自校准的悬浮固体浸没透镜端部 |
| US10133051B2 (en) | 2014-03-11 | 2018-11-20 | Fei Efa, Inc. | Self correcting floating SIL tip |
| US10718933B2 (en) | 2014-03-11 | 2020-07-21 | Fei Efa, Inc. | Self correcting floating SIL tip |
| CN113892042A (zh) * | 2019-01-14 | 2022-01-04 | 华盛顿大学 | 用于固体浸没弯月形透镜的设备、系统及方法 |
| US12386167B2 (en) | 2019-01-14 | 2025-08-12 | University Of Washington | Apparatuses, systems and methods for solid immersion meniscus lenses |
Also Published As
| Publication number | Publication date |
|---|---|
| US6778327B2 (en) | 2004-08-17 |
| DE60219360T2 (de) | 2007-12-13 |
| TW200302354A (en) | 2003-08-01 |
| US20070205795A1 (en) | 2007-09-06 |
| KR20040075862A (ko) | 2004-08-30 |
| US7492529B2 (en) | 2009-02-17 |
| KR20080064912A (ko) | 2008-07-09 |
| DE60219360D1 (de) | 2007-05-16 |
| US20030202255A1 (en) | 2003-10-30 |
| KR100870214B1 (ko) | 2008-11-27 |
| EP1466194A2 (en) | 2004-10-13 |
| ATE358826T1 (de) | 2007-04-15 |
| WO2003062864A2 (en) | 2003-07-31 |
| KR20070087002A (ko) | 2007-08-27 |
| EP1466194B1 (en) | 2007-04-04 |
| WO2003062864A3 (en) | 2003-10-16 |
| JP4195921B2 (ja) | 2008-12-17 |
| US7227702B2 (en) | 2007-06-05 |
| TWI249622B (en) | 2006-02-21 |
| US20040240074A1 (en) | 2004-12-02 |
| JP2005515514A (ja) | 2005-05-26 |
| US6594086B1 (en) | 2003-07-15 |
| KR100872751B1 (ko) | 2008-12-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1610843A (zh) | 双凸固体浸入式镜头 | |
| JP6674909B2 (ja) | インライン型のウェハエッジ検査、ウェハプレアラインメント、及びウェハ洗浄 | |
| US6563586B1 (en) | Wafer metrology apparatus and method | |
| JP2002512697A (ja) | 固体界浸レンズを用いた走査プローブ光学顕微鏡 | |
| US11204330B1 (en) | Systems and methods for inspection of a specimen | |
| JP3602465B2 (ja) | 半導体装置、半導体装置の評価解析方法及び半導体装置の加工装置 | |
| CN109786277A (zh) | 对薄膜进行计量分析的装置及方法与获得薄膜性质的方法 | |
| TW493205B (en) | Method and apparatus for wafer metrology | |
| WO2013043818A1 (en) | Microsphere superlens based superresolution imaging platform | |
| CN103268009B (zh) | 垂直照明暗场显微镜 | |
| US6687058B1 (en) | Numerical aperature increasing lens (nail) techniques for high-resolution sub-surface imaging | |
| WO2000079313A9 (en) | Numerical aperture increasing lens (nail) techniques for high-resolution sub-surface imaging | |
| TW202532837A (zh) | 用於偵測封裝中的缺陷的方法及設備 | |
| JP4947889B2 (ja) | 光学系及び光学装置 | |
| CN118838040A (zh) | 一种可适用于手机的基于微透镜的显微成像机构 | |
| KR20030032751A (ko) | 이중접합 에스아이엘(dsil)과 이를 이용한 근접장광학 시스템 | |
| WO2021215438A1 (ja) | 光学顕微鏡及び試料基板ホルダ | |
| CN114556183A (zh) | 固体浸没式透镜单元及半导体检查装置 | |
| CN120970506A (zh) | 一种半导体薄膜量测设备 | |
| Bennett | Dos and don'ts in characterizing and cleaning optical surfaces |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |