TWI249622B - Bi-convex solid immersion lens - Google Patents

Bi-convex solid immersion lens Download PDF

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Publication number
TWI249622B
TWI249622B TW091137365A TW91137365A TWI249622B TW I249622 B TWI249622 B TW I249622B TW 091137365 A TW091137365 A TW 091137365A TW 91137365 A TW91137365 A TW 91137365A TW I249622 B TWI249622 B TW I249622B
Authority
TW
Taiwan
Prior art keywords
lens
immersion lens
solid immersion
disclosed
inspected
Prior art date
Application number
TW091137365A
Other languages
English (en)
Other versions
TW200302354A (en
Inventor
Nader Pakdaman
James S Vickers
Original Assignee
Optonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21974831&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI249622(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Optonics Inc filed Critical Optonics Inc
Publication of TW200302354A publication Critical patent/TW200302354A/zh
Application granted granted Critical
Publication of TWI249622B publication Critical patent/TWI249622B/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1378—Separate aberration correction lenses; Cylindrical lenses to generate astigmatism; Beam expanders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

1249622 850 管道 870操縱器 903 絕緣基材層 907其他裝置層 915 凹穴 922 底部表面 945 流道 8 60 x-y-z 臺架 9 0 0 覆晶 905 第一主動層 909 待測面 920 浸入式鏡頭 942 底部表面 950 管道
TW091137365A 2002-01-16 2002-12-25 Bi-convex solid immersion lens TWI249622B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/052,011 US6594086B1 (en) 2002-01-16 2002-01-16 Bi-convex solid immersion lens

Publications (2)

Publication Number Publication Date
TW200302354A TW200302354A (en) 2003-08-01
TWI249622B true TWI249622B (en) 2006-02-21

Family

ID=21974831

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091137365A TWI249622B (en) 2002-01-16 2002-12-25 Bi-convex solid immersion lens

Country Status (9)

Country Link
US (4) US6594086B1 (zh)
EP (1) EP1466194B1 (zh)
JP (1) JP4195921B2 (zh)
KR (3) KR100872751B1 (zh)
CN (1) CN1610843A (zh)
AT (1) ATE358826T1 (zh)
DE (1) DE60219360T2 (zh)
TW (1) TWI249622B (zh)
WO (1) WO2003062864A2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401468B (zh) * 2007-06-29 2013-07-11 Intel Corp 熱控制型固體浸沒透鏡裝置
US10133051B2 (en) 2014-03-11 2018-11-20 Fei Efa, Inc. Self correcting floating SIL tip

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US7576928B2 (en) * 2003-10-31 2009-08-18 Hamamatsu Photonics K.K. Solid immersion lens holder
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401468B (zh) * 2007-06-29 2013-07-11 Intel Corp 熱控制型固體浸沒透鏡裝置
US10133051B2 (en) 2014-03-11 2018-11-20 Fei Efa, Inc. Self correcting floating SIL tip
US10718933B2 (en) 2014-03-11 2020-07-21 Fei Efa, Inc. Self correcting floating SIL tip

Also Published As

Publication number Publication date
EP1466194A2 (en) 2004-10-13
KR20080064912A (ko) 2008-07-09
US7492529B2 (en) 2009-02-17
DE60219360T2 (de) 2007-12-13
US7227702B2 (en) 2007-06-05
US20040240074A1 (en) 2004-12-02
WO2003062864A2 (en) 2003-07-31
KR100870214B1 (ko) 2008-11-27
US6594086B1 (en) 2003-07-15
US20030202255A1 (en) 2003-10-30
KR20070087002A (ko) 2007-08-27
US20070205795A1 (en) 2007-09-06
TW200302354A (en) 2003-08-01
JP2005515514A (ja) 2005-05-26
JP4195921B2 (ja) 2008-12-17
KR100872751B1 (ko) 2008-12-08
US6778327B2 (en) 2004-08-17
CN1610843A (zh) 2005-04-27
DE60219360D1 (de) 2007-05-16
ATE358826T1 (de) 2007-04-15
KR20040075862A (ko) 2004-08-30
WO2003062864A3 (en) 2003-10-16
EP1466194B1 (en) 2007-04-04

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