CN1602652B - 基板清洁装置 - Google Patents

基板清洁装置 Download PDF

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Publication number
CN1602652B
CN1602652B CN02824823.6A CN02824823A CN1602652B CN 1602652 B CN1602652 B CN 1602652B CN 02824823 A CN02824823 A CN 02824823A CN 1602652 B CN1602652 B CN 1602652B
Authority
CN
China
Prior art keywords
substrate
adsorption roller
aforementioned
base plate
aforesaid base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN02824823.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN1602652A (zh
Inventor
甲贺裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNITECH CORP
Original Assignee
UNITECH CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UNITECH CORP filed Critical UNITECH CORP
Publication of CN1602652A publication Critical patent/CN1602652A/zh
Application granted granted Critical
Publication of CN1602652B publication Critical patent/CN1602652B/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0143—Using a roller; Specific shape thereof; Providing locally adhesive portions thereon
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0191—Using tape or non-metallic foil in a process, e.g. during filling of a hole with conductive paste
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/082—Suction, e.g. for holding solder balls or components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1509—Horizontally held PCB

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning In General (AREA)
CN02824823.6A 2002-10-11 2002-10-11 基板清洁装置 Expired - Lifetime CN1602652B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2002/010612 WO2004034757A1 (ja) 2002-10-11 2002-10-11 基板クリーニング装置

Publications (2)

Publication Number Publication Date
CN1602652A CN1602652A (zh) 2005-03-30
CN1602652B true CN1602652B (zh) 2010-06-09

Family

ID=32089056

Family Applications (1)

Application Number Title Priority Date Filing Date
CN02824823.6A Expired - Lifetime CN1602652B (zh) 2002-10-11 2002-10-11 基板清洁装置

Country Status (4)

Country Link
JP (1) JP4326472B2 (ja)
CN (1) CN1602652B (ja)
AU (1) AU2002338178A1 (ja)
WO (1) WO2004034757A1 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100542700C (zh) * 2004-12-24 2009-09-23 鸿富锦精密工业（深圳）有限公司 玻璃基板清洗用载具
US8079105B2 (en) 2005-11-10 2011-12-20 Datacard Corporation Card cleaning mechanism
KR20080051961A (ko) 2006-12-07 2008-06-11 한국전자통신연구원 플렉시블 기판의 세정 방법
JP4406652B2 (ja) * 2007-05-22 2010-02-03 株式会社松栄工機 搬送装置
JP2009157247A (ja) * 2007-12-27 2009-07-16 Orc Mfg Co Ltd 露光装置
JP5253481B2 (ja) * 2010-11-04 2013-07-31 ユニテク株式会社 基板クリーニング装置
KR20160011201A (ko) * 2013-06-18 2016-01-29 애플 인크. 적층 시스템을 위한 압력-감지 롤러
JP6382622B2 (ja) * 2014-02-25 2018-08-29 バンドー化学株式会社 クリーニング装置、粘着ローラユニット及び粘着ローラ
CN110813930A (zh) * 2019-11-23 2020-02-21 湖南东神自动化设备有限公司 一种电路板表面清洁装置
CN112140633A (zh) * 2020-09-21 2020-12-29 昆山市天丰印刷包装有限公司 全自动水性印刷开槽模切机
CN114364153B (zh) * 2021-12-15 2023-12-08 上海羽默电子科技有限公司 一种电路板印刷工艺

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1344131A (zh) * 2000-09-18 2002-04-10 华通电脑股份有限公司 印刷电路板暨基板的激光钻孔方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614860Y2 (ja) * 1990-04-04 1994-04-20 住友金属工業株式会社 帯状極低張力シートの異物除去装置
JPH0763685B2 (ja) * 1991-09-10 1995-07-12 都ローラー工業株式会社 除塵用ローラーとそれを用いた除塵装置
JP2002153825A (ja) * 2000-11-17 2002-05-28 Taiyo Kogyo Kk ゴミ取り粘着ローラ
JP3078286U (ja) * 2000-12-12 2001-06-29 榮華 葉 回路基板用清掃機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1344131A (zh) * 2000-09-18 2002-04-10 华通电脑股份有限公司 印刷电路板暨基板的激光钻孔方法

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP平3-78286U 1991.08.07
JP特开平6-14860A 1994.01.25
JP特开平6-91236A 1994.04.05

Also Published As

Publication number Publication date
JPWO2004034757A1 (ja) 2006-02-16
WO2004034757A1 (ja) 2004-04-22
CN1602652A (zh) 2005-03-30
AU2002338178A1 (en) 2004-05-04
JP4326472B2 (ja) 2009-09-09

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Granted publication date: 20100609