CN1282037C - 印刷电路板的制造法及用于其中的感光性树脂组合物 - Google Patents

印刷电路板的制造法及用于其中的感光性树脂组合物 Download PDF

Info

Publication number
CN1282037C
CN1282037C CNB028076621A CN02807662A CN1282037C CN 1282037 C CN1282037 C CN 1282037C CN B028076621 A CNB028076621 A CN B028076621A CN 02807662 A CN02807662 A CN 02807662A CN 1282037 C CN1282037 C CN 1282037C
Authority
CN
China
Prior art keywords
resin composition
photosensitive resin
photosensitive polymer
polymer combination
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB028076621A
Other languages
English (en)
Chinese (zh)
Other versions
CN1500232A (zh
Inventor
赤堀聪彦
沢边贤
名取美智子
青木知明
梶原卓哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of CN1500232A publication Critical patent/CN1500232A/zh
Application granted granted Critical
Publication of CN1282037C publication Critical patent/CN1282037C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing of the conductive pattern
    • H05K3/243Reinforcing of the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0571Dual purpose resist, e.g. etch resist used as solder resist, solder resist used as plating resist
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0574Stacked resist layers used for different processes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0588Second resist used as pattern over first resist
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/072Electroless plating, e.g. finish plating or initial plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
CNB028076621A 2001-03-29 2002-03-29 印刷电路板的制造法及用于其中的感光性树脂组合物 Expired - Lifetime CN1282037C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001096367 2001-03-29
JP96367/2001 2001-03-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2005101286613A Division CN1828411B (zh) 2001-03-29 2002-03-29 感光性树脂组合物

Publications (2)

Publication Number Publication Date
CN1500232A CN1500232A (zh) 2004-05-26
CN1282037C true CN1282037C (zh) 2006-10-25

Family

ID=18950286

Family Applications (2)

Application Number Title Priority Date Filing Date
CNB028076621A Expired - Lifetime CN1282037C (zh) 2001-03-29 2002-03-29 印刷电路板的制造法及用于其中的感光性树脂组合物
CN2005101286613A Expired - Lifetime CN1828411B (zh) 2001-03-29 2002-03-29 感光性树脂组合物

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2005101286613A Expired - Lifetime CN1828411B (zh) 2001-03-29 2002-03-29 感光性树脂组合物

Country Status (6)

Country Link
US (1) US7338751B2 (https=)
JP (1) JP4200761B2 (https=)
KR (2) KR100884438B1 (https=)
CN (2) CN1282037C (https=)
TW (1) TWI296738B (https=)
WO (1) WO2002079877A1 (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2417127A (en) * 2004-08-12 2006-02-15 Vetco Gray Controls Ltd Surface metallization of contact pads
JP4815771B2 (ja) * 2004-09-01 2011-11-16 住友電気工業株式会社 電気部品の製造方法
JP4804001B2 (ja) * 2004-12-28 2011-10-26 イビデン株式会社 プリント配線板の製造方法
KR100934046B1 (ko) * 2005-05-23 2009-12-24 히다치 가세고교 가부시끼가이샤 감광성 수지 조성물, 감광성 엘리먼트, 레지스트 패턴의 형성방법 및 프린트 배선판의 제조방법
JP2007012735A (ja) * 2005-06-29 2007-01-18 Cmk Corp プリント配線板の表面処理方法
JP4747770B2 (ja) * 2005-10-04 2011-08-17 日立化成工業株式会社 プリント配線板の製造方法、及び半導体チップ搭載基板の製造方法
JP4730071B2 (ja) * 2005-11-29 2011-07-20 凸版印刷株式会社 回路基板の製造方法
JP4919921B2 (ja) * 2007-10-02 2012-04-18 東洋アルミニウム株式会社 Icカード・タグ用アンテナ回路構成体とその製造方法
MY152017A (en) * 2008-06-18 2014-08-15 Hitachi Chemical Co Ltd Photosensitive resin composition, photosensitive element wherein same is used, method for forming a resist-pattern, and method for producing a printed wiring board
JP2010217903A (ja) * 2010-04-19 2010-09-30 Hitachi Chem Co Ltd 感光性樹脂組成物及びプリント配線板の製造方法
JP5697461B2 (ja) 2011-01-17 2015-04-08 ユニチカ株式会社 ポリエステルフィルム、および感光性樹脂構造体
CN102413629A (zh) * 2011-07-27 2012-04-11 大唐移动通信设备有限公司 一种印制电路板及其制造方法
KR102025036B1 (ko) * 2011-12-05 2019-09-24 히타치가세이가부시끼가이샤 터치패널용 전극의 보호막의 형성 방법, 감광성 수지 조성물 및 감광성 엘리먼트, 및, 터치패널의 제조 방법
WO2013084283A1 (ja) 2011-12-05 2013-06-13 日立化成株式会社 タッチパネル用電極の保護膜の形成方法、感光性樹脂組成物及び感光性エレメント
WO2013084282A1 (ja) 2011-12-05 2013-06-13 日立化成株式会社 樹脂硬化膜パターンの形成方法、感光性樹脂組成物及び感光性エレメント
JP5787239B2 (ja) * 2012-06-29 2015-09-30 荒川化学工業株式会社 印刷レジスト用活性エネルギー線硬化性樹脂組成物、これを用いたレジストパターンの形成方法、印刷レジスト積層体およびプリント配線基板
KR20140018016A (ko) * 2012-08-03 2014-02-12 삼성전기주식회사 인쇄회로기판의 제조방법
CN104883808B (zh) * 2015-05-05 2017-12-01 华为技术有限公司 一种印刷电路板及印刷电路板的制造方法
WO2017057584A1 (ja) * 2015-09-30 2017-04-06 富士フイルム株式会社 静電容量型入力装置の電極保護膜用の組成物、静電容量型入力装置の電極保護膜、転写フィルム、積層体、静電容量型入力装置および画像表示装置。
JP6421161B2 (ja) * 2015-11-27 2018-11-07 株式会社タムラ製作所 感光性樹脂組成物
CN108490737B (zh) * 2018-03-14 2021-11-02 杭州福斯特电子材料有限公司 一种感光性树脂组合物及其用途
CN114127205B (zh) * 2019-06-26 2022-10-25 三菱瓦斯化学株式会社 树脂片、覆金属箔层叠板和印刷电路板
CN116745697A (zh) * 2021-01-29 2023-09-12 富士胶片株式会社 感光性转印材料、树脂图案的制造方法、电路配线的制造方法及触摸面板的制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0131824B1 (en) * 1983-07-01 1990-05-09 Fuji Photo Film Co., Ltd. Photopolymerizable composition
US6703181B1 (en) * 1993-03-12 2004-03-09 Kabushiki Kaisha Toshiba Photosensitive composition having uniform concentration distribution of components and pattern formation method using the same
JPH06282069A (ja) * 1993-03-25 1994-10-07 Asahi Chem Ind Co Ltd 厚膜回路用感光性樹脂組成物
JP3115449B2 (ja) * 1993-05-07 2000-12-04 イビデン株式会社 配線板用めっきレジスト組成物およびプリント配線板
DE69614050T2 (de) * 1995-02-14 2002-03-21 Toray Industries, Inc. Flachdruckplatte
KR0150344B1 (ko) * 1995-12-21 1998-10-01 이웅열 감광성 수지 조성물
JPH09265188A (ja) * 1996-03-28 1997-10-07 Hitachi Chem Co Ltd 感光性樹脂組成物及びこれを用いた感光性エレメント
JP3055499B2 (ja) 1996-07-30 2000-06-26 日立化成工業株式会社 積層フィルム及びプリント配線板の製造法
EP0916480A4 (en) * 1996-07-30 2001-10-10 Hitachi Chemical Co Ltd PRODUCTION OF A ASSOCIATION FILM AND PCB
JPH1051107A (ja) * 1996-08-07 1998-02-20 Ibiden Co Ltd プリント配線板の製造方法、感光性組成物、ドライフィルムフォトレジスト
US5922509A (en) 1998-03-18 1999-07-13 Morton International, Inc. Photoimageable compositions having improved stripping properties in aqueous alkaline solutions
JPH11284336A (ja) * 1998-03-31 1999-10-15 Hitachi Chem Co Ltd 多層プリント配線板の製造方法
JP4479023B2 (ja) * 1999-01-21 2010-06-09 日立化成工業株式会社 感光性樹脂組成物、これを用いた感光性エレメント、レジストパターンの製造法及びプリント配線板の製造法
JP2001048982A (ja) * 1999-08-09 2001-02-20 Mitsubishi Gas Chem Co Inc 感光性樹脂。

Also Published As

Publication number Publication date
CN1828411B (zh) 2010-11-24
JP4200761B2 (ja) 2008-12-24
US7338751B2 (en) 2008-03-04
WO2002079877A1 (en) 2002-10-10
CN1828411A (zh) 2006-09-06
KR100884438B1 (ko) 2009-02-19
JPWO2002079877A1 (ja) 2004-07-22
KR20080052681A (ko) 2008-06-11
KR20040030544A (ko) 2004-04-09
TWI296738B (https=) 2008-05-11
US20040086801A1 (en) 2004-05-06
CN1500232A (zh) 2004-05-26
KR100866180B1 (ko) 2008-10-30

Similar Documents

Publication Publication Date Title
CN1282037C (zh) 印刷电路板的制造法及用于其中的感光性树脂组合物
CN103282829B (zh) 感光性树脂组合物
CN1842742A (zh) 感光性树脂组合物、使用该组合物的感光性元件、抗蚀剂图案的形成方法及印刷电路板的制造方法以及光固化物的去除方法
JP2007310380A (ja) 感光性樹脂組成物、並びにこれを用いた感光性フィルム及び感光性永久レジスト
CN1228688C (zh) 感光性树脂组合物、感光性元件、保护层图形的制造方法和印刷电路布线板的制造方法
KR101811091B1 (ko) 감광성 수지 조성물, 이를 이용한 포토레지스트 필름, 레지스터 패턴의 형성 방법 및 도체 패턴의 형성 방법
JP5397681B2 (ja) 感光性樹脂組成物、感光性エレメント、及びプリント配線板の製造方法
JP7078065B2 (ja) 感光性樹脂組成物
CN1280674C (zh) 电路形成用感光性膜及印刷配线板的制造方法
CN1273867C (zh) 感光性树脂组合物及其用途
CN1258696C (zh) 抗蚀图、其制造方法及其应用
CN1310088C (zh) 感光性树脂组合物及其用途
JP2005031583A (ja) 感光性樹脂組成物及びプリント配線板の製造方法
JP4752840B2 (ja) 感光性樹脂組成物、感光性エレメント、及びプリント配線板の製造方法
JP2007286477A (ja) 感光性樹脂組成物、これを用いた感光性エレメント及びプリント配線板の製造方法
JP2011221084A (ja) 感光性樹脂組成物、感光性エレメント、及びプリント配線板の製造方法
JP2010217903A (ja) 感光性樹脂組成物及びプリント配線板の製造方法
JP4428399B2 (ja) プリント配線板の製造に用いる感光性樹脂組成物
JP5294008B2 (ja) 感光性樹脂組成物を用いたプリント配線板の製造方法
CN1902547A (zh) 感光性树脂组合物、使用其的感光性元件、抗蚀图的制造方法及印刷电路板的制造方法
CN101278235A (zh) 感光性树脂组合物、感光性元件及印刷电路板的制造方法
JP2009180796A (ja) 感光性樹脂組成物、感光性エレメント、及びプリント配線板の製造方法
JP4561560B2 (ja) 感光性樹脂組成物、これを用いた感光性エレメント及びプリント配線板の製造方法
JP2009223277A (ja) 感光性樹脂組成物、これを用いた感光性エレメント、レジストパターンの形成方法、リードフレームの製造方法及びプリント配線板の製造方法
JP2006330193A (ja) 感光性樹脂組成物、感光性エレメント及びこれらを用いたプリント配線板の製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20061025

CX01 Expiry of patent term