CN1270354C - 半导体元件的接触孔的形成方法 - Google Patents
半导体元件的接触孔的形成方法 Download PDFInfo
- Publication number
- CN1270354C CN1270354C CNB031001599A CN03100159A CN1270354C CN 1270354 C CN1270354 C CN 1270354C CN B031001599 A CNB031001599 A CN B031001599A CN 03100159 A CN03100159 A CN 03100159A CN 1270354 C CN1270354 C CN 1270354C
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- Prior art keywords
- silicon nitride
- etching
- nitride layer
- layer
- gas
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- 238000000034 method Methods 0.000 title claims abstract description 55
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 80
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 80
- 238000005530 etching Methods 0.000 claims description 63
- 239000007789 gas Substances 0.000 claims description 42
- 239000011248 coating agent Substances 0.000 claims description 32
- 238000000576 coating method Methods 0.000 claims description 32
- 230000003647 oxidation Effects 0.000 claims description 31
- 238000007254 oxidation reaction Methods 0.000 claims description 31
- 230000015572 biosynthetic process Effects 0.000 claims description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 26
- 239000010703 silicon Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 22
- 238000001020 plasma etching Methods 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 238000011049 filling Methods 0.000 claims description 5
- 208000027418 Wounds and injury Diseases 0.000 claims description 2
- 208000014674 injury Diseases 0.000 claims description 2
- 239000003595 mist Substances 0.000 claims description 2
- 238000002955 isolation Methods 0.000 abstract description 29
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- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 108
- 230000009471 action Effects 0.000 description 24
- 238000005755 formation reaction Methods 0.000 description 18
- 238000000151 deposition Methods 0.000 description 17
- 230000008021 deposition Effects 0.000 description 17
- 230000014509 gene expression Effects 0.000 description 12
- 239000000126 substance Substances 0.000 description 9
- 230000003213 activating effect Effects 0.000 description 8
- 229910021332 silicide Inorganic materials 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
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- 238000005468 ion implantation Methods 0.000 description 1
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- 238000009401 outcrossing Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823475—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type interconnection or wiring or contact manufacturing related aspects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823481—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
Abstract
Description
Claims (8)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0025030A KR100451513B1 (ko) | 2002-05-07 | 2002-05-07 | 반도체 소자의 콘택홀 형성 방법 |
KR25030/02 | 2002-05-07 | ||
KR25030/2002 | 2002-05-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1457087A CN1457087A (zh) | 2003-11-19 |
CN1270354C true CN1270354C (zh) | 2006-08-16 |
Family
ID=29398472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031001599A Expired - Lifetime CN1270354C (zh) | 2002-05-07 | 2003-01-03 | 半导体元件的接触孔的形成方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6653194B1 (zh) |
KR (1) | KR100451513B1 (zh) |
CN (1) | CN1270354C (zh) |
TW (1) | TWI255526B (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100651603B1 (ko) * | 2005-12-13 | 2006-11-30 | 동부일렉트로닉스 주식회사 | 반도체 소자의 제조 방법 |
US7586147B2 (en) * | 2006-04-17 | 2009-09-08 | Taiwan Semiconductor Manufacturing Co. Ltd. | Butted source contact and well strap |
KR100763680B1 (ko) * | 2006-08-23 | 2007-10-04 | 동부일렉트로닉스 주식회사 | 이미지 센서 소자의 콘택 구조 및 그 제조 방법 |
KR100898440B1 (ko) * | 2007-06-27 | 2009-05-21 | 주식회사 동부하이텍 | 플래시 메모리 소자의 제조 방법 |
KR20110120695A (ko) * | 2010-04-29 | 2011-11-04 | 삼성전자주식회사 | 반도체 소자 |
DE102011004922B4 (de) * | 2011-03-01 | 2016-12-15 | Globalfoundries Dresden Module One Llc & Co. Kg | Verfahren zur Herstellung von Transistoren mit Metallgatestapeln mit erhöhter Integrität |
US20120292735A1 (en) | 2011-05-20 | 2012-11-22 | GLOBALFOUNDRIES Singapore Pte.Ltd. | Corner transistor suppression |
US8692353B2 (en) * | 2011-09-02 | 2014-04-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and method |
US8877614B2 (en) | 2011-10-13 | 2014-11-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Spacer for semiconductor structure contact |
CN103165507A (zh) * | 2011-12-09 | 2013-06-19 | 上海华虹Nec电子有限公司 | 防止浅沟槽隔离边缘漏电的方法 |
US8629008B2 (en) * | 2012-01-11 | 2014-01-14 | International Business Machines Corporation | Electrical isolation structures for ultra-thin semiconductor-on-insulator devices |
US8664050B2 (en) * | 2012-03-20 | 2014-03-04 | International Business Machines Corporation | Structure and method to improve ETSOI MOSFETS with back gate |
CN103594417A (zh) * | 2012-08-13 | 2014-02-19 | 中芯国际集成电路制造(上海)有限公司 | 互连结构的制作方法 |
CN104143530B (zh) * | 2013-05-09 | 2017-12-01 | 中芯国际集成电路制造(上海)有限公司 | 晶体管及其制作方法 |
CN107093577A (zh) * | 2017-04-17 | 2017-08-25 | 上海华虹宏力半导体制造有限公司 | 接触孔的制造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH098135A (ja) * | 1995-06-26 | 1997-01-10 | Toshiba Corp | 半導体装置の製造方法 |
US6133105A (en) | 1999-04-27 | 2000-10-17 | United Microelectronics Corp. | Method of manufacturing borderless contact hole including a silicide layer on source/drain and sidewall of trench isolation structure |
KR100325600B1 (ko) * | 1999-05-11 | 2002-02-25 | 황인길 | 반도체 소자의 접촉구 형성 방법 |
US6204185B1 (en) * | 1999-05-24 | 2001-03-20 | United Microelectronics Corp. | Method for forming self-align stop layer for borderless contact process |
KR100293052B1 (ko) * | 1999-06-08 | 2001-06-15 | 황인길 | 반도체 소자 제조 방법 |
US6297126B1 (en) | 1999-07-12 | 2001-10-02 | Chartered Semiconductor Manufacturing Ltd. | Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts |
KR20020010795A (ko) * | 2000-07-31 | 2002-02-06 | 박종섭 | 반도체소자의 제조방법 |
-
2002
- 2002-05-07 KR KR10-2002-0025030A patent/KR100451513B1/ko active IP Right Grant
- 2002-12-27 US US10/330,913 patent/US6653194B1/en not_active Expired - Lifetime
- 2002-12-27 TW TW091137747A patent/TWI255526B/zh not_active IP Right Cessation
-
2003
- 2003-01-03 CN CNB031001599A patent/CN1270354C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TW200306643A (en) | 2003-11-16 |
US6653194B1 (en) | 2003-11-25 |
KR100451513B1 (ko) | 2004-10-06 |
US20030211730A1 (en) | 2003-11-13 |
TWI255526B (en) | 2006-05-21 |
CN1457087A (zh) | 2003-11-19 |
KR20030086837A (ko) | 2003-11-12 |
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Legal Events
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C06 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MAGNACHIP CO., LTD. Free format text: FORMER OWNER: HYNIX SEMICONDUCTOR INC. Effective date: 20070518 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20070518 Address after: North Chungcheong Province Patentee after: Magnachip Semiconductor, Ltd. Address before: Gyeonggi Do, South Korea Patentee before: HYNIX SEMICONDUCTOR Inc. |
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TR01 | Transfer of patent right |
Effective date of registration: 20201021 Address after: Han Guozhongqingbeidao Patentee after: Key Foundry Co.,Ltd. Address before: Han Guozhongqingbeidao Patentee before: Magnachip Semiconductor, Ltd. |
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Granted publication date: 20060816 |
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